Precise humidity control device

Abstract

The utility model relates to a precise humidity control device which comprises a containing box provided with a containing cavity and an air inlet hole and an air outlet hole which are communicated with the containing cavity, a heat conduction piece located in the containing cavity and provided with at least one heat conduction face used for making contact with gas, and at least one temperature control assembly located in the containing cavity and provided with at least one heat conduction face used for making contact with gas. Comprising a temperature control part, the temperature control part is in contact with the heat conduction part so as to heat or cool the heat conduction part, in conclusion, according to the precise humidity control device in the embodiment, the temperature control part is in contact with the heat conduction part so as to heat or cool the heat conduction part, the humidity of the gas in the containing cavity can be adjusted, and the precision of gas humidity adjustment is improved.

Description

Technical Field

[0001] The present application relates to the technical field of gas humidity control, and in particular to a precise humidity control device. Background Art

[0002] With the enrichment of industrial products, various industries are paying more and more attention to environmental testing. Environmental testing uses scientific and technological means to simulate the environmental climate so that the environmental reproduction is not disturbed by external factors. In order to improve the stability and reliability of the temperature and humidity of the test environment, the temperature and humidity requirements of environmental testing are constantly increasing.

[0003] In this context, providing stable dry and wet, hot and cold gases for the target environment becomes a key point. For example, in the semiconductor industry, components made of silicon materials are usually exposed to an oxidizing gas environment with a certain humidity. In the field of gas monitoring, in order to reduce the impact of cylinder gas humidity on the output signal of the gas sensor, the cylinder gas detected by the gas sensor is often humidity controlled. In related technologies, the humidity control device has a poor adjustment effect and cannot accurately control the humidity of the gas. Utility Model Content

[0004] Based on this, it is necessary to provide a precise humidity control device to address the problem that the humidity control device has poor adjustment effect and cannot accurately control the humidity of the gas.

[0005] A precision humidity control device comprising:

[0006] The container has a container cavity, and an air inlet and an air outlet connected to the container cavity.

[0007] a heat conducting member located in the accommodating cavity, the heat conducting member having at least one heat conducting surface for contacting the gas;

[0008] At least one temperature control assembly includes a temperature control part, wherein the temperature control part contacts the heat conductive part to heat or cool the heat conductive part.

[0009] In one embodiment, the temperature control assembly includes a controller, and the controller is electrically connected to the temperature control part to control the temperature of the temperature control part.

[0010] In one embodiment, the temperature control unit includes a heating portion, which is in contact with the outer surface of the heat-conducting member or is disposed inside the heat-conducting member to heat the heat-conducting member;

[0011] And / or, the temperature control unit includes a cooling portion, which is in contact with an outer surface of the heat-conducting member or is disposed inside the heat-conducting member to cool the heat-conducting member.

[0012] In one embodiment, the accommodating cavity includes a heat conduction chamber and an air outlet chamber that are communicated with each other, the air inlet is communicated with the heat conduction chamber, the heat conduction member is located in the heat conduction chamber, and the air outlet is communicated with the air outlet chamber.

[0013] In one embodiment, the precision humidity control device comprises:

[0014] The liquid tank is provided with a first liquid outlet;

[0015] a liquid inlet through hole, provided in the containing box, the liquid inlet through hole being in communication with the gas outlet chamber;

[0016] The water pump is provided with a second liquid inlet and a second liquid outlet, wherein the second liquid inlet is communicated with the first liquid outlet, and the second liquid outlet is communicated with the liquid inlet through hole.

[0017] In one embodiment, the accommodating chamber includes a solution chamber, and the gas outlet chamber, the heat conduction chamber, and the solution chamber are sequentially arranged at intervals;

[0018] The second liquid inlet and the first liquid outlet are both communicated with the solution chamber.

[0019] In one embodiment, the precision humidity control device comprises:

[0020] The liquid outlet through hole and the liquid supply through hole are both provided in the containing box and are connected to the solution chamber. The second liquid inlet is connected to the solution chamber through the liquid outlet through hole, and the first liquid outlet is connected to the solution chamber through the liquid supply through hole.

[0021] In one embodiment, the precision humidity control device comprises:

[0022] a liquid drainage through hole, provided in the containing box, the liquid drainage through hole being in communication with the solution chamber;

[0023] The liquid box is provided with a first liquid inlet, and the first liquid inlet is communicated with the solution chamber through the liquid discharge through hole.

[0024] In one embodiment, the precision humidity control device includes a temperature sensor, which is arranged in the accommodating cavity. The temperature sensor is communicatively connected to the controller, and the temperature sensor is used to detect the temperature of the heat conductor, gas or liquid in the accommodating cavity.

[0025] In one embodiment, the precision humidity control device further comprises a heat-insulating layer, and the heat-insulating layer is coated on the outer surface of the holding box;

[0026] The air inlet and the air outlet both pass through the thermal insulation layer.

[0027] In the precision humidity control device of this embodiment, gas enters the receiving chamber through the air inlet and contacts the heat-conducting surface of the heat-conducting member in the receiving chamber. After being heated or cooled by the heat-conducting surface, the gas is discharged from the receiving chamber through the air outlet. During this process, since the temperature control unit contacts the heat-conducting member, the heat-conducting member can be heated or cooled. Therefore, the staff can use the temperature control component to heat or cool the heat-conducting member according to the required gas humidity, so that the temperature of the heat-conducting surface increases or decreases, thereby heating or cooling the gas or liquid entering the receiving chamber, changing the mass of the water vapor contained in the gas in the receiving chamber, adjusting the water vapor content of the gas in the receiving chamber, and ensuring that the water content of the gas in the receiving chamber reaches a relatively stable state. In summary, the precision humidity control device of this embodiment, through the temperature control unit contacting the heat-conducting member, heating or cooling the heat-conducting member, makes the humidity of the gas in the receiving chamber adjustable, thereby improving the accuracy of gas humidity regulation. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the embodiments or exemplary embodiments of the present application, the drawings required for use in the description of the embodiments or exemplary embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0029] Figure 1 Schematic diagram of the structure of a precise humidity control device in one embodiment of the present application.

[0030] Figure 2 for Figure 1 Schematic diagram of the structure of the precision humidity control device shown.

[0031] Reference numerals:

[0032] Precision humidity control device 1000;

[0033] Container 1100, accommodating chamber 1110, heat conduction chamber 1111, gas outlet chamber 1112, solution chamber 1113, gas inlet 1120, gas outlet 1130, liquid inlet through hole 1140, liquid outlet through hole 1150, liquid supply through hole 1160, liquid drain through hole 1170;

[0034] Thermal conductor 1200;

[0035] Temperature control assembly 1300, temperature control unit 1310;

[0036] Temperature sensor 1400;

[0037] Liquid box 1500, first liquid inlet 1510, first liquid outlet 1520;

[0038] Water pump 1600, second liquid inlet 1610, second liquid outlet 1620;

[0039] Insulation layer 1700. DETAILED DESCRIPTION

[0040] To make the above-mentioned objects, features, and advantages of the present application more clearly understood, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways than those described herein, and those skilled in the art can make similar improvements without violating the scope of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0041] In the description of this application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application.

[0042] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of technical features indicated. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include at least one of such features. In the description of this application, if the term "plurality" appears, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0043] In this application, unless otherwise specified or limited, the terms "mounted," "connected," "connected," "fixed," etc., should be interpreted broadly. For example, these terms may refer to fixed connections, removable connections, or integration; mechanical connections or electrical connections; direct connections or indirect connections through an intermediary; and internal communication between two components or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0044] In this application, unless otherwise expressly specified or limited, if a first feature is described as being "above" or "below" a second feature, or similar descriptions, this may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Furthermore, when a first feature is described as being "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is described as being "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0045] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only embodiment.

[0046] See also Figure 1 and Figure 2 , Figure 1 A structural schematic diagram of a precision humidity control device in an embodiment of the present application is shown. An embodiment of the present application provides a precision humidity control device 1000, including: a containing box 1100, a heat conductor 1200 and at least one temperature control component 1300. The containing box 1100 has a containing cavity 1110, and an air inlet 1120 and an air outlet 1130 connected to the containing cavity 1110. The heat conductor 1200 is located in the containing cavity 1110. The heat conductor 1200 has at least one heat-conducting surface (not shown) for contact with gas. The temperature control component 1300 includes a temperature control component 1310. The temperature control component 1310 contacts the heat conductor 1200 to heat or cool the heat conductor 1200.

[0047] In the precision humidity control device 1000 of this embodiment, gas enters the accommodating chamber 1110 through the air inlet 1120 and contacts the heat-conducting surface of the heat-conducting member 1200 in the accommodating chamber 1110. After being heated or cooled by the heat-conducting surface, the gas is discharged from the accommodating chamber 1110 through the air outlet 1130. During this process, since the temperature control unit 1310 contacts the heat-conducting member 1200, the heat-conducting member 1200 can be heated or cooled. Therefore, the staff can use the temperature control component 1300 to heat or cool the heat-conducting member 1200 according to the required gas humidity, so that the temperature of the heat-conducting surface increases or decreases, and then heats or cools the gas or liquid entering the accommodating chamber 1110, changes the mass of the water vapor contained in the gas in the accommodating chamber 1110, adjusts the water vapor content of the gas in the accommodating chamber 1110, and ensures that the water content of the gas in the accommodating chamber 1110 reaches a relatively stable state. In summary, the precision humidity control device 1000 in this embodiment heats or cools the heat conductive member 1200 by contacting the temperature control unit 1310 with the heat conductive member 1200, so that the humidity of the gas in the accommodating chamber 1110 can be adjusted, thereby improving the accuracy of gas humidity regulation.

[0048] In some embodiments, the heat conductor 1200 can be a common component with a large surface area, such as a fin, a serrated plate, a porous plate, a net, a fluffy ball, a corrugated sheet, or a combination of various components with a large surface area, so as to increase the heat conduction surface of the heat conductor 1200 in contact with the gas in the accommodating cavity 1110, improve the heating or cooling ability of the heat conductor 1200 on the gas in the accommodating cavity 1110, and facilitate rapid adjustment of the water content in the gas.

[0049] See also Figure 1 In some embodiments, the temperature control assembly 1300 includes a controller (not shown), which is electrically connected to the temperature control unit 1310 to control the temperature of the temperature control unit 1310 .

[0050] In this embodiment, by controlling the temperature of the temperature control unit 1310 through the controller, the heat conductor 1200 can be precisely heated or cooled, thereby precisely controlling the temperature change of the heat conducting surface, thereby achieving precise heating or cooling of the gas in the accommodating cavity 1110, and improving the accuracy of the precision humidity control device 1000 in regulating the humidity of the gas in the accommodating cavity 1110.

[0051] In some embodiments, the temperature control unit 1310 can be a semiconductor refrigeration plate (not shown), the cooling surface of the semiconductor refrigeration plate contacts the heat conductor 1200 to cool the heat conductor 1200; or the heat dissipation surface of the semiconductor refrigeration plate contacts the heat conductor 1200 to heat the heat conductor 1200.

[0052] In some embodiments, the temperature control unit 1310 can be a combination of other heating and cooling methods, such as heating tubes, heating plates, and other compressor cooling tube methods.

[0053] In some embodiments, the receiving box 1100 has a plurality of air inlet holes 1120 and air outlet holes 1130 , and each of the air inlet holes 1120 and the air outlet holes 1130 is in communication with the receiving cavity 1110 .

[0054] Please continue reading Figure 1 In some embodiments, the temperature control unit 1310 includes a heating portion (not shown), which contacts the outer surface of the heat conductor 1200 or is disposed inside the heat conductor 1200 to heat the heat conductor 1200.

[0055] In this embodiment, by providing a heating part, the precision humidity control device 1000 can heat the heat conductor 1200, so that the temperature of the heat conducting surface rises, and the liquid water molecules on the surface of the heat conducting surface are converted into gaseous water molecules, thereby increasing the mass of water vapor contained in the gas in the accommodating cavity 1110, increasing the water vapor content in the unit volume space of the gas, and ensuring that the water content in the gas in the accommodating cavity 1110 reaches a relatively stable state.

[0056] In some embodiments, the temperature control unit 1310 includes a cooling portion (not shown), which contacts the outer surface of the heat-conducting member 1200 or penetrates the heat-conducting member 1200 to cool the heat-conducting member 1200 .

[0057] In this embodiment, by providing a cooling part, the precision humidity control device 1000 can cool the heat conductor 1200, so that the temperature of the heat conducting surface drops, and the gaseous water molecules in the gas are converted into liquid water, frost or ice, thereby reducing the mass of water vapor contained in the gas in the receiving chamber 1110, reducing the water vapor content in the unit volume space of the gas, and ensuring that the water content of the gas in the receiving chamber 1110 reaches a relatively stable state.

[0058] In some embodiments, the heating portion covers or adheres to the outer surface of the heat conductive member 1200 to heat the heat conductive member 1200 ; the cooling portion covers or adheres to the outer surface of the heat conductive member 1200 to cool the heat conductive member 1200 .

[0059] In other embodiments, the containing box 1100 is thermally connected to the heat conductive member 1200, the heating portion contacts the outer surface of the containing box 1100, and heats the heat conductive member 1200 through the containing box 1100; the cooling portion contacts the outer surface of the containing box 1100, and cools the heat conductive member 1200 through the containing box 1100.

[0060] See also Figure 1 and Figure 2In some embodiments, the accommodating cavity 1110 includes a heat-conducting chamber 1111 and an air outlet chamber 1112 that are interconnected, the air inlet 1120 is connected to the heat-conducting chamber 1111, the heat-conducting member 1200 is located in the heat-conducting chamber 1111, and the air outlet 1130 is connected to the air outlet chamber 1112.

[0061] See also Figure 2 In some embodiments, the precision humidity control device 1000 includes a liquid box 1500, a liquid inlet hole 1140, and a water pump 1600. The liquid box 1500 is provided with a first liquid outlet 1520. The liquid inlet hole 1140 is provided in the containing box 1100. The liquid inlet hole 1140 is connected to the air outlet chamber 1112. The water pump 1600 is provided with a second liquid inlet 1610 and a second liquid outlet 1620. The second liquid inlet 1610 is connected to the first liquid outlet 1520, and the second liquid outlet 1620 is connected to the liquid inlet hole 1140.

[0062] In this embodiment, under the action of the suction force of the water pump 1600, the liquid in the liquid tank 1500 leaves the liquid tank 1500 from the first liquid outlet 1520, enters the water pump 1600 through the second liquid inlet 1610, and then flows out from the second liquid outlet 1620 of the water pump 1600, enters the gas outlet chamber 1112 through the liquid inlet hole 1140, so as to spray the heat conducting member 1200 in the heat conducting chamber 1111, increase the liquid water molecules on the heat conducting surface, and facilitate the heat conducting surface to convert more liquid water molecules into gaseous water molecules, thereby improving the quality of water vapor contained in the gas in the accommodating chamber 1110, ensuring the water content in the gas in the accommodating chamber 1110, and realizing precise control of the humidity of the gas in the accommodating chamber 1110.

[0063] In some embodiments, the precision humidity control device 1000 includes multiple liquid inlet holes 1140 and multiple water pumps 1600, each liquid inlet hole 1140 is connected to the air outlet chamber 1112, and the multiple water pumps 1600 are arranged in a one-to-one correspondence with the multiple liquid inlet holes 1140. The second liquid inlet 1610 on each water pump 1600 is connected to the first liquid outlet 1520 on the liquid tank 1500, and the second liquid outlet 1620 on each water pump 1600 is connected to the corresponding liquid inlet hole 1140. By setting up multiple liquid inlet holes 1140, on the one hand, it is convenient to spray the heat conducting element 1200 in the heat conducting chamber 1111 from multiple positions to ensure that the liquid is evenly sprayed on various areas of the heat conducting element 1200; on the other hand, it can increase the content of liquid water molecules on the heat conducting surface, so that the heat conducting surface can convert more liquid water molecules into gaseous water molecules.

[0064] In some embodiments, a liquid inlet pipe (not shown) is provided between the liquid inlet hole 1140 and the second liquid outlet 1620 , with one end of the liquid inlet pipe communicating with the liquid inlet hole 1140 and the other end communicating with the second liquid outlet 1620 .

[0065] In some embodiments, the precision humidity control device 1000 includes multiple liquid inlet holes 1140, and the water pump 1600 includes multiple second liquid outlets 1620. The multiple liquid inlet holes 1140 and the multiple second liquid outlets 1620 are arranged in a one-to-one correspondence, and each liquid inlet hole 1140 is connected to the corresponding second liquid outlet 1620.

[0066] In some embodiments, the precision humidity control device 1000 includes multiple liquid inlet holes 1140, multiple liquid tanks 1500, and multiple water pumps 1600. The multiple liquid inlet holes 1140 are arranged in a one-to-one correspondence with the multiple water pumps 1600, and the multiple water pumps 1600 are arranged in a one-to-one correspondence with the multiple liquid tanks 1500. Each liquid inlet hole 1140 is connected to the second liquid outlet 1620 on the corresponding water pump 1600, and the second liquid inlet 1610 on each water pump 1600 is connected to the first liquid outlet 1520 on the corresponding liquid tank 1500.

[0067] Please continue reading Figure 2 In some embodiments, the accommodating chamber 1110 includes a solution chamber 1113 , and the air outlet chamber 1112 , the heat conduction chamber 1111 and the solution chamber 1113 are arranged in sequence, and the second liquid inlet 1610 and the first liquid outlet 1520 are both connected to the solution chamber 1113 .

[0068] In this embodiment, by providing the solution chamber 1113, the precise humidity control device 1000 can realize the recycling of liquid in the holding box 1100. The specific working process is as follows: the staff transfers the liquid in the liquid box 1500 from the first liquid outlet 1520 to the solution chamber 1113 as needed. When the volume of the liquid in the solution chamber 1113 reaches a preset value, the first liquid outlet 1520 is closed. When the temperature control unit 1310 heats the heat conducting member 1200, the water pump 1600 sucks the liquid in the solution chamber 1113 to the outlet chamber 1113. 112, the heat conducting element 1200 in the heat conducting chamber 1111 is sprayed, and the volume of the liquid contained in the solution chamber 1113 is reduced; when the temperature control unit 1310 cools the heat conducting element 1200, the gaseous water molecules in the gas in contact with the heat conducting surface are converted into liquid water molecules. The liquid water molecules are separated from the gas under the action of their own gravity and enter the solution chamber 1113 to replenish the liquid pumped by the water pump 1600 when the temperature control unit 1310 heats the heat conducting element 1200, thereby ensuring that the volume of the liquid in the solution chamber 1113 always reaches the preset value.

[0069] In some embodiments, the gas outlet chamber 1112 , the heat conduction chamber 1111 , and the solution chamber 1113 are sequentially arranged at intervals along a first direction, where the first direction is the direction of gravity.

[0070] In some embodiments, the heat transfer chamber 1111 and the solution chamber 1113 are connected to each other.

[0071] Please continue reading Figure 2 In some embodiments, the precision humidity control device 1000 includes a liquid outlet through hole 1150 and a liquid supply through hole 1160. The liquid outlet through hole 1150 and the liquid supply through hole 1160 are both provided in the containing box 1100 and are connected to the solution chamber 1113. The second liquid inlet 1610 is connected to the solution chamber 1113 through the liquid outlet through hole 1150, and the first liquid outlet 1520 is connected to the solution chamber 1113 through the liquid supply through hole 1160.

[0072] In this embodiment, the liquid outlet through hole 1150 is provided to facilitate the disassembly or assembly of the water pump 1600 and the containing box 1100 , and the liquid supply through hole 1160 is provided to facilitate the disassembly or assembly of the liquid box 1500 and the containing box 1100 .

[0073] In some embodiments, a liquid outlet pipe (not shown) is provided between the liquid outlet hole 1150 and the second liquid inlet 1610 , with one end of the liquid outlet pipe communicating with the liquid outlet hole 1150 and the other end communicating with the second liquid inlet 1610 .

[0074] In some embodiments, a liquid supply pipe (not shown) is provided between the first liquid outlet 1520 and the liquid supply through hole 1160 , one end of the liquid supply pipe is connected to the first liquid outlet 1520 , and the other end is connected to the liquid supply through hole 1160 .

[0075] In some embodiments, the precision humidity control device 1000 includes multiple liquid supply holes 1160, each liquid supply hole 1160 is provided in the containing box 1100 and is connected to the solution chamber 1113, and the solution chamber 1113 is connected to the first liquid outlet 1520 on the same or different liquid box 1500 through multiple liquid supply holes 1160.

[0076] In some embodiments, a liquid outlet valve (not shown) is provided between the liquid outlet through-hole 1150 and the second liquid inlet 1610. The liquid inlet of the liquid outlet valve is connected to the liquid outlet through-hole 1150, and the liquid outlet of the liquid outlet valve is connected to the second liquid inlet 1610. The provision of the liquid outlet valve can prevent the liquid in the solution chamber 1113 from flowing out of the holding box 1100 through the liquid outlet through-hole 1150 during replacement of the water pump 1600.

[0077] In some embodiments, a liquid supply valve (not shown) is provided between the liquid supply through-hole 1160 and the first liquid outlet 1520. The liquid inlet of the liquid supply valve is connected to the first liquid outlet 1520, and the liquid outlet of the liquid supply valve is connected to the liquid supply through-hole 1160. The provision of the liquid supply valve can prevent the liquid in the solution chamber 1113 from flowing out of the containing box 1100 through the liquid supply through-hole 1160 during replacement of the liquid tank 1500.

[0078] In some embodiments, a suction pump (not shown) is provided between the liquid supply hole 1160 and the first liquid outlet 1520 , the liquid inlet of the suction pump is connected to the first liquid outlet 1520 , and the liquid outlet of the suction pump is connected to the liquid supply hole 1160 .

[0079] Please continue reading Figure 2 In some embodiments, the precision humidity control device 1000 includes a drainage hole 1170, which is provided in the containing box 1100, and the drainage hole 1170 is connected to the solution chamber 1113. The liquid box 1500 is provided with a first liquid inlet 1510, and the first liquid inlet 1510 is connected to the solution chamber 1113 through the drainage hole 1170.

[0080] In this embodiment, by providing the drainage hole 1170 and the first liquid inlet 1510, it is convenient for the staff to drain the excess liquid from the solution chamber 1113 through the drainage hole 1170 when the volume of the liquid in the solution chamber 1113 exceeds the preset value, and then transfer the excess liquid to the liquid tank 1500 through the first liquid inlet 1510 for next use.

[0081] In some embodiments, a drainage pipe (not shown) is provided between the first liquid inlet 1510 and the drainage hole 1170 , with one end of the drainage pipe communicating with the first liquid inlet 1510 and the other end communicating with the drainage hole 1170 .

[0082] In some embodiments, a suction pump is provided between the first liquid inlet 1510 and the liquid drainage hole 1170 , the liquid inlet of the suction pump is communicated with the liquid drainage hole 1170 , and the liquid outlet of the suction pump is communicated with the first liquid inlet 1510 .

[0083] In some embodiments, the precision humidity control device 1000 includes multiple drainage holes 1170, each drainage hole 1170 is connected to the solution chamber 1113, and the solution chamber 1113 is connected to the first liquid inlet 1510 on the same or different liquid box 1500 through the multiple drainage holes 1170.

[0084] In some embodiments, a drain valve (not shown) is provided between the drain hole 1170 and the first liquid inlet 1510. The drain valve's inlet is connected to the drain hole 1170, and its outlet is connected to the first liquid inlet 1510. The drain valve prevents liquid in the solution chamber 1113 from flowing out of the storage box 1100 through the drain hole 1170 during replacement of the liquid box 1500.

[0085] See also Figure 1 and Figure 2In some embodiments, the precision humidity control device 1000 includes a temperature sensor 1400, which is disposed in the accommodating cavity 1110. The temperature sensor 1400 is communicatively connected to the controller and is used to detect the temperature of the heat-conducting member, gas or liquid in the accommodating cavity 1110.

[0086] In this embodiment, by setting up the temperature sensor 1400, the controller can accurately grasp the actual temperature of the heat conductor 1200 and the actual temperature of the gas or liquid after being heated or cooled by the heat conductor 1200, and determine the heating or cooling of the heat conductor 1200 by the temperature control unit 1310 based on the deviation between the actual temperature and the target temperature, so as to control the temperature control unit 1310 to accurately heat or cool the heat conductor 1200, thereby achieving precise adjustment of the water content in the gas, and accurately and efficiently controlling the humidity of the gas passing through the gas outlet chamber 1112.

[0087] In some embodiments, the temperature sensor 1400 is disposed inside the heat conducting member 1200 or attached to the outer surface of the heat conducting member 1200 to detect the temperature of the heat conducting member 1200 in the heat conducting chamber 1111 .

[0088] In other embodiments, the temperature sensor 1400 is located outside the containing box 1100 to detect the temperature of the gas exhausted from the gas outlet 1130 .

[0089] In some embodiments, the temperature sensor 1400 is disposed in the gas outlet chamber 1112 , and the temperature sensor 1400 is used to detect the temperature of the gas passing through the gas outlet chamber 1112 .

[0090] In some embodiments, multiple temperature sensors 1400 are provided within the outlet chamber 1112, each of which is in communication with the controller. The provision of multiple temperature sensors 1400 facilitates the controller in determining the true temperature of the gas within the outlet chamber 1112 by comparing the detection results of the multiple temperature sensors 1400. Furthermore, the provision of multiple temperature sensors 1400 ensures the proper operation of the precision humidity control device 1000, thereby preventing the precision humidity control device 1000 from malfunctioning due to damage to a particular temperature sensor 1400.

[0091] Please continue reading Figure 2 In some embodiments, the precision humidity control device 1000 further includes a thermal insulation layer 1700 , which is coated on the outer surface of the container 1100 , and the air inlet 1120 and the air outlet 1130 both penetrate the thermal insulation layer 1700 .

[0092] In this embodiment, the heat insulation layer 1700 is provided to isolate the heat conduction between the receiving cavity 1110 in the receiving box 1100 and the outside world.

[0093] In some embodiments, the insulation layer 1700 can be made of common insulation materials such as foam and mineral wool.

[0094] Please continue reading Figure 2 In some embodiments, the precision humidity control device 1000 includes a plurality of temperature control components 1300 , each of which is in contact with the heat conductive member 1200 to heat or cool the heat conductive member 1200 .

[0095] In this embodiment, by setting up multiple temperature control components 1300, on the one hand, it is convenient to quickly heat or cool the heat conductor 1200, so that the temperature of the heat-conducting surface rises or falls rapidly, and thus the gas and liquid entering the accommodating cavity 1110 from the air inlet 1120, the spray liquid entering the accommodating cavity 1110 from the liquid inlet hole 1140, and the contents in the entire accommodating cavity 1110 are quickly heated or cooled; on the other hand, the temperature of the heat conductor 1200 can be heated to a higher value, or the temperature of the heat conductor 1200 can be cooled to a lower value, so that the temperature of the heat-conducting surface rises or falls significantly, and thus the gas and liquid entering the accommodating cavity 1110 from the air inlet hole 1120, the spray liquid entering the accommodating cavity 1110 from the liquid inlet hole 1140, and the contents in the entire accommodating cavity 1110 are heated or cooled to a greater extent.

[0096] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0097] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, and these modifications and improvements fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims.

Claims

1. A precision humidity control device, characterized in that: The precise humidity control device comprises: The container has a container cavity, and an air inlet and an air outlet connected to the container cavity. a heat conducting member located in the accommodating cavity, the heat conducting member having at least one heat conducting surface for contacting the gas; At least one temperature control assembly includes a temperature control part, wherein the temperature control part contacts the heat conductive part to heat or cool the heat conductive part.

2. The precise humidity control device according to claim 1, characterized in that: The temperature control component includes a controller, which is electrically connected to the temperature control component to control the temperature of the temperature control component.

3. The precise humidity control device according to claim 2, characterized in that: The temperature control unit includes a heating portion, which is in contact with the outer surface of the heat-conducting member or is disposed inside the heat-conducting member to heat the heat-conducting member; And / or, the temperature control unit includes a cooling portion, which is in contact with an outer surface of the heat-conducting member or is disposed inside the heat-conducting member to cool the heat-conducting member.

4. The precise humidity control device according to claim 2, characterized in that: The accommodating cavity includes a heat conduction cavity and an air outlet cavity which are communicated with each other, the air inlet is communicated with the heat conduction cavity, the heat conduction member is located in the heat conduction cavity, and the air outlet is communicated with the air outlet cavity.

5. The precise humidity control device according to claim 4, characterized in that: The precise humidity control device comprises: The liquid tank is provided with a first liquid outlet; a liquid inlet through hole, provided in the containing box, the liquid inlet through hole being in communication with the gas outlet chamber; The water pump is provided with a second liquid inlet and a second liquid outlet, wherein the second liquid inlet is communicated with the first liquid outlet, and the second liquid outlet is communicated with the liquid inlet through hole.

6. The precise humidity control device according to claim 5, characterized in that: The accommodating chamber includes a solution chamber, and the gas outlet chamber, the heat conduction chamber and the solution chamber are sequentially arranged along the interval; The second liquid inlet and the first liquid outlet are both communicated with the solution chamber.

7. The precise humidity control device according to claim 6, characterized in that: The precise humidity control device comprises: The liquid outlet through hole and the liquid supply through hole are both provided in the containing box and are connected to the solution chamber. The second liquid inlet is connected to the solution chamber through the liquid outlet through hole, and the first liquid outlet is connected to the solution chamber through the liquid supply through hole.

8. The precise humidity control device according to claim 7, characterized in that: The precise humidity control device comprises: a liquid drainage through hole, provided in the containing box, the liquid drainage through hole being in communication with the solution chamber; The liquid box is provided with a first liquid inlet, and the first liquid inlet is communicated with the solution chamber through the liquid discharge through hole.

9. The precise humidity control device according to any one of claims 2 to 8, characterized in that: The precise humidity control device includes a temperature sensor, which is disposed in the accommodating cavity and is communicatively connected to the controller. The temperature sensor is used to detect the temperature of the heat-conducting member, gas or liquid in the accommodating cavity.

10. The precise humidity control device according to claim 1, characterized in that: The precise humidity control device further comprises a heat-insulating layer, which is coated on the outer surface of the containing box; The air inlet and the air outlet both pass through the thermal insulation layer.

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