Detection device and laser repair equipment

Abstract

The utility model discloses a detection device and laser repairing equipment. The detection device comprises a light source assembly, a lens assembly and a first camera. The light source assembly is used for emitting illumination light to a set area of the display panel to form reflected light; the lens assembly comprises an objective lens and an achromatic lens, the objective lens and the achromatic lens are sequentially arranged in the propagation path of the reflected light in the propagation direction of the reflected light, and the achromatic lens is used for eliminating the chromatic aberration of the reflected light; and the first camera is used for receiving the reflected light transmitted by the achromatic lens so as to obtain an image of the set area. The detection device can effectively improve the imaging quality of the first camera.

Description

Technical Field

[0001] The present application relates to the field of laser repair technology, and in particular to a detection device and laser repair equipment. Background Art

[0002] With the rapid development of materials, microelectronics, and semiconductor manufacturing and application technologies, display panels are becoming increasingly widely used. Despite continuous improvements in manufacturing equipment and production processes, product defects, such as bright spots, dark spots, and color variations, are still inevitable. These defects can negatively impact the display quality and reduce product yield.

[0003] Laser repair of defective display panels is a common method. Before laser repair, a first camera takes a picture of the display panel and uses image analysis to identify the defect. The control system then receives the coordinates of the defect and controls the laser repair head to move over the defect and repair it.

[0004] In the related art, the image of the display panel taken by the first camera is not clear enough, which may lead to inaccurate position identification of the defect point and affect the laser repair of the display panel. Utility Model Content

[0005] To this end, the present application proposes a detection device that can effectively improve the imaging quality of the first camera.

[0006] The present application also proposes a laser repair device having the above-mentioned detection device.

[0007] The detection device according to the first embodiment of the present application includes:

[0008] a light source assembly for emitting illumination light toward a set area of ​​the display panel to form reflected light;

[0009] a lens assembly comprising an objective lens and an achromatic lens, wherein the objective lens and the achromatic lens are sequentially arranged in a propagation path of the reflected light along a propagation direction of the reflected light, and the achromatic lens is used to eliminate chromatic aberration of the reflected light;

[0010] The first camera is configured to receive the reflected light transmitted through the achromatic lens to acquire an image of the set area.

[0011] According to the detection device of the embodiment of the present application, there are at least the following beneficial effects: by setting an achromatic lens, it is helpful to eliminate the color of the reflected light, so that the first camera can obtain a clear image of the display panel, and the imaging quality of the first camera is higher, which is helpful to accurately identify the position of the defective point of the display panel.

[0012] According to some embodiments of the present application, along the direction of the optical axis of the first camera, the distance between the first camera and the objective lens is adjustable.

[0013] According to some embodiments of the present application, the lens assembly further includes:

[0014] The first lens barrel is provided with a first through hole, the first camera is used to close an opening of the first through hole, the achromatic lens is located in the first through hole, the achromatic lens is connected to the first lens barrel, and the first inner surface of the first through hole is provided with a first light-absorbing layer, and the color of the first light-absorbing layer is black.

[0015] According to some embodiments of the present application, the light source assembly includes:

[0016] a light source for emitting the illumination light;

[0017] A focusing mirror is used to focus the illumination light on the set area, and the distance between the light source and the focusing mirror is adjustable along the optical axis direction of the light source.

[0018] According to some embodiments of the present application, the light source assembly further includes:

[0019] The second lens barrel is provided with a second through hole, the focusing lens is located in the second through hole, the focusing lens is connected to the second lens barrel, and the second inner surface of the second through hole is provided with a second light absorbing layer, and the color of the second light absorbing layer is black.

[0020] According to some embodiments of the present application, the lens assembly further includes:

[0021] The beam splitter is used to reflect the illumination light emitted by the light source assembly to the set area. The beam splitter is also used to transmit the reflected light transmitted by the objective lens. The achromatic lens is used to receive the reflected light transmitted by the beam splitter.

[0022] According to some embodiments of the present application, the illumination light emitted by the light source assembly can coincide with the optical axis of the camera after being reflected by the beam splitter, reflected by the set area, and refracted by the beam splitter.

[0023] According to some embodiments of the present application, after the illumination light emitted by the light source assembly is reflected by the beam splitter and the set area in sequence, a distance D between the illumination light and the optical axis of the first camera is 0.23 to 0.43 mm.

[0024] A laser repair device according to a second embodiment of the present application includes:

[0025] The above-mentioned detection device;

[0026] The laser device is used to generate laser to perform laser repair on the defect points detected by the detection device.

[0027] The laser repair device according to the embodiment of the present application has at least the following beneficial effects: by using the above-mentioned detection device,

[0028] It is beneficial for the laser device to accurately perform laser repair on defective points, and the quality of laser repair is better.

[0029] According to some embodiments of the present application, the laser device further includes:

[0030] The second camera is used to acquire an image of the set area.

[0031] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become obvious from the description below, or will be learned through practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] The present application is further described below with reference to the accompanying drawings and embodiments, wherein:

[0033] Figure 1 A three-dimensional diagram of a detection device according to an embodiment of the present application;

[0034] Figure 2 for Figure 1 a cross-sectional view of the detection device;

[0035] Figure 3 for Figure 1 Exploded view of the detection device;

[0036] Figure 4 for Figure 2 A partial magnified view of area I;

[0037] Figure 5 for Figure 1 A three-dimensional diagram of the first lens barrel of the detection device;

[0038] Figure 6 This is a schematic diagram of a laser repair device according to an embodiment of the present application.

[0039] Reference numerals: light source assembly 100 , light source 110 , point light source 111 , second lens barrel 120 , third sleeve 121 , second through hole 122 , second light absorbing layer 123 , fourth sleeve 124 , focusing lens 130 ;

[0040] Lens assembly 200, first polarizer 210, second polarizer 220, achromatic lens 230, beam splitter 240, objective lens 250, first lens barrel 260, first through hole 261, first light absorbing layer 262, first outer surface 263, first inner surface 264, square hole 265, connecting block 270, cube 271, circular hole 272, mounting base 280, cylinder 281, first sleeve 291, second sleeve 292;

[0041] First camera 300;

[0042] Base 400, waist-shaped hole 410;

[0043] Display panel 500, setting area 510;

[0044] Laser device 600 , second camera 610 , laser repair head 620 . DETAILED DESCRIPTION

[0045] The following describes in detail embodiments of the present application. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application and are not to be construed as limiting the present application.

[0046] In the description of this application, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on this application.

[0047] In the description of this application, "several" means one or more, "plurality" means two or more, "greater than," "less than," and "exceed" are understood to exclude the number itself, while "above," "below," and "within" are understood to include the number itself. The use of "first" and "second" in the description is solely for the purpose of distinguishing technical features and is not to be construed as indicating or implying relative importance, implicitly specifying the number of the indicated technical features, or implicitly specifying the order of the indicated technical features.

[0048] In the description of this application, unless otherwise clearly defined, terms such as setting, installing, and connecting should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in this application based on the specific content of the technical solution.

[0049] In the description of this application, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of this application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in any appropriate manner in any one or more embodiments or examples.

[0050] Reference Figure 1 and Figure 2 The detection device according to the first embodiment of the present application includes a light source assembly 100, a lens assembly 200, and a first camera 300. The light source assembly 100 is used to emit illumination light to a set area 510 of a display panel 500 to form reflected light. The lens assembly 200 includes an objective lens 250 and an achromatic lens 230. Along the propagation direction of the reflected light, the objective lens 250 and the achromatic lens 230 are sequentially arranged in the propagation path of the reflected light. The achromatic lens 230 is used to eliminate the chromatic aberration of the reflected light. The first camera 300 is used to receive the reflected light transmitted by the achromatic lens 230 to obtain an image of the set area 510.

[0051] The detection device according to the embodiment of the present application has at least the following beneficial effects: by providing the achromatic lens 230, it is helpful to eliminate the color of the reflected light, so that the first camera 300 can obtain a clear image of the display panel 500, and the imaging quality of the first camera 300 is higher, which is helpful to accurately identify the location of the defect point of the display panel 500.

[0052] Specifically, the achromatic lens 230 may be a doublet achromatic lens or a triplet achromatic lens.

[0053] Reference Figure 1 and Figure 2 In some embodiments of the present application, the lens assembly 200 further includes a first polarizer 210 and a second polarizer 220. The reflected light passing through the achromatic lens 230 passes through the second polarizer 220 and the first polarizer 210 in sequence and is captured by the first camera 300. The first polarizer 210 and the second polarizer 220 can both rotate around their axes (refer to Figure 2 , for example, the first polarizer 210 and the second polarizer 220 can both rotate around the axis in the up-down direction), thereby adjusting the angle between the polarization axis of the first polarizer 210 and the polarization axis of the second polarizer 220, and then adjusting the brightness of the reflected light passing through the first polarizer 210 and the second polarizer 220, thereby helping the first camera 300 to obtain reflected light of appropriate brightness.

[0054] Reference Figure 2In some embodiments of the present application, along the direction of the optical axis of the first camera 300 (refer to Figure 1 , for example, the direction of the optical axis of the first camera 300 is the up and down direction), and the distance between the first camera 300 and the objective lens 250 is adjustable.

[0055] By adjusting the distance between the first camera 300 and the objective lens 250 , the focus position of the first camera 300 can be adjusted, thereby obtaining a clearer image.

[0056] Specifically, refer to Figure 3 The lens assembly 200 further includes a first lens barrel 260, a first sleeve 291, and a second sleeve 292. The first lens barrel 260 has a first through hole 261, into which the first sleeve 291 is inserted and secured to the first lens barrel 260 via a set screw. The first sleeve 291 has a first internal thread, and the second sleeve 292 has a first external thread, which mates with the first internal thread. The second sleeve 292 is rotatably connected to the first camera 300.

[0057] Therefore, by rotating the second sleeve 292 , the distance between the first camera 300 and the objective lens 250 can be adjusted along the direction of the optical axis of the first camera 300 .

[0058] In addition, refer to Figure 3 After the first camera 300 is adjusted, to prevent it from loosening, the detection device further includes a base 400 having a waist-shaped hole 410 extending in the vertical direction. The first camera 300 is secured to the base 400 via a fastener inserted through the waist-shaped hole 410. Before adjusting the position of the first camera 300, the fastener inserted through the waist-shaped hole 410 is loosened. Once the adjustment is complete, the fastener inserted through the waist-shaped hole 410 is re-secured. This prevents the first camera 300 from loosening.

[0059] Reference Figure 2 and Figure 5 , it should be noted that, Figure 5 The first inner surface 264 is not provided with the first light absorbing layer 262. In some embodiments of the present application, the lens assembly 200 further includes a first lens barrel 260, the first lens barrel 260 is provided with a first through hole 261, and the first camera 300 is used to close an opening of the first through hole 261 (refer to Figure 1 For example, the first camera 300 is used to close the upper opening of the first through hole 261), the achromatic lens 230 is located in the first through hole 261, the achromatic lens 230 is connected to the first lens barrel 260, and the first inner surface 264 of the first through hole 261 is provided with a first light absorbing layer 262, and the color of the first light absorbing layer 262 is black.

[0060] The first lens barrel 260 reduces interference from external light on the imaging of the first camera 300, facilitating the first camera 300 to capture a clear image of the display panel 500. The first light-absorbing layer 262 absorbs interfering light (e.g., external natural light or illumination from the light source assembly 100) that enters the first through-hole 261 and whose propagation direction is not parallel to the optical axis of the first camera 300. This reduces the amount of interfering light received by the first camera 300, resulting in higher imaging quality.

[0061] Specifically, the first light absorbing layer 262 is black, which means that the first light absorbing layer 262 uses an existing black material, such as black paint, carbon black, graphene, electroplated chromium or nickel, etc. Accordingly, the first light absorbing layer 262 can be formed on the first inner surface 264 of the first through hole 261 by coating or electroplating.

[0062] Reference Figure 2 In some embodiments of the present application, the light source assembly 100 includes a light source 110 and a focusing lens 130. The light source 110 is configured to emit illumination light. The focusing lens 130 is configured to focus the illumination light on a predetermined area 510. The distance between the light source 110 and the focusing lens 130 is adjustable along the optical axis of the light source 110.

[0063] By setting the focusing mirror 130 and adjusting the distance between the light source 110 and the focusing mirror 130 , the illumination light can be focused on the set area 510 , thereby obtaining reflected light with higher brightness in the set area 510 , which is beneficial for the first camera 300 to obtain a clear image of the set area 510 .

[0064] Specifically, the light source assembly 100 also includes a second lens barrel 120, which includes a third sleeve 121 and a fourth sleeve 124. The light source 110 is fixed to one end of the third sleeve 121, and the other end of the third sleeve 121 is inserted into the fourth sleeve 124. The other end of the third sleeve 121 is provided with a second external thread, and the fourth sleeve 124 is provided with a second internal thread, and the second external thread and the second internal thread mate. The focusing lens 130 is located within the fourth sleeve 124 and is fixedly connected to the fourth sleeve 124 (achieved by a pressure ring).

[0065] Therefore, by rotating the third sleeve 121 , the distance between the light source 110 and the focusing lens 130 can be adjusted.

[0066] Specifically, the light source 110 includes a point light source 111 . The illumination light emitted by the point light source 111 may become a collimated light beam after passing through the focusing lens 130 .

[0067] Reference Figure 2In an improved solution of the above embodiment, the light source assembly 100 further includes a second lens barrel 120, the second lens barrel 120 is provided with a second through hole 122, the focusing lens 130 is located in the second through hole 122, the focusing lens 130 is connected to the second lens barrel 120, and the second inner surface of the second through hole 122 is provided with a second light absorbing layer 123, and the color of the second light absorbing layer 123 is black.

[0068] By providing the second lens barrel 120 , the interference of external light on the imaging of the first camera 300 can be reduced, which is beneficial for the first camera 300 to obtain a clear image of the display panel 500 .

[0069] Illumination light that is not parallel to the optical axis of the light source assembly 100 may illuminate outside the designated area 510 of the display panel 500, thereby generating interference light. The second light-absorbing layer 123 absorbs illumination light emitted by the light source assembly 100 that is not parallel to the optical axis of the light source assembly 100. This helps reduce interference light generated outside the designated area 510 of the display panel 500, thereby improving the quality of the image of the designated area 510 captured by the first camera 300.

[0070] Specifically, the second light absorbing layer 123 is black, which means that the second light absorbing layer 123 uses an existing black material, such as black paint, carbon black, graphene, electroplated chromium or nickel, etc. Accordingly, the second light absorbing layer 123 can be formed on the second inner surface of the second through hole 122 by coating or electroplating.

[0071] Reference Figure 2 and Figure 4 In some embodiments of the present application, the lens assembly 200 further includes a beam splitter 240, which is used to reflect the illumination light emitted by the light source assembly 100 to the set area 510. The beam splitter 240 is also used to transmit the reflected light through the objective lens 250, and the achromatic lens 230 is used to receive the reflected light transmitted through the beam splitter 240.

[0072] By providing the beam splitter 240 , the illumination light path of the light source assembly 100 and the imaging light path of the first camera 300 can be partially overlapped, thereby helping to reduce the occupied space and further reduce the volume of the detection device.

[0073] Reference Figure 2 and Figure 4 In the improved solution of the above embodiment, the illumination light emitted by the light source assembly 100 can coincide with the optical axis of the first camera 300 after being reflected by the beam splitter 240, reflected by the set area 510 and refracted by the beam splitter 240 in sequence.

[0074] Before the first camera 300 receives the light, the illumination light coincides with the optical axis of the first camera 300 , thereby facilitating the first camera 300 to obtain a clear image of the set area 510 .

[0075] It should be noted that after the illumination light is refracted by the beam splitter 240, the propagation path of the illumination light will be offset. The offset distance depends on the refractive index of the beam splitter 240, the incident angle of the illumination light into the beam splitter 240, and the wavelength of the illumination light (see Figure 2 For example, after the illumination light is refracted by the beam splitter 240, the propagation path of the illumination light shifts to the right by 0.33 mm).

[0076] The illumination light emitted by the light source assembly 100 is able to coincide with the optical axis of the first camera 300 after being reflected by the beam splitter 240, reflected by the set area 510, and refracted by the beam splitter 240. This requires reasonable arrangement of the positions of the beam splitter 240 and the first camera 300 (see below for details) so that the illumination light refracted by the beam splitter 240 coincides with the optical axis of the first camera 300.

[0077] Reference Figure 2 and Figure 4 In the improved solution of the above embodiment, after the illumination light emitted by the light source assembly 100 is reflected by the beam splitter 240 and the set area 510 in sequence, the distance D between the illumination light and the optical axis of the first camera 300 is 0.23 to 0.43 mm.

[0078] By setting the distance D within the range of 0.23 to 0.43 mm, the illumination light refracted by the beam splitter 240 is advantageously aligned with the optical axis of the first camera 300 .

[0079] Specifically, the value of the distance D may be 0.23, 0.25, 0.27, 0.30, 0.33, 0.35, 0.38, 0.43 or other values.

[0080] Specifically, refer to Figure 3 and Figure 5 , it should be noted that, Figure 5 The first inner surface 264 is shown without the first light absorbing layer 262. The centerline of the first inner surface 264 of the first through hole 261 coincides with the optical axis of the first camera 300. The centerline of the first outer surface 263 of the first through hole 261 coincides with the centerline of the square hole 265. The first inner surface 264 of the first through hole 261 is eccentric to the first outer surface 263 by a distance D.

[0081] The detection device also includes a connecting block 270 and a mounting base 280. A cube 271 is provided at the upper end of the connecting block 270, and a circular hole 272 is provided at the lower end of the connecting block 270. The centerline of the cube 271 coincides with the centerline of the circular hole 272. The dimensions of the cube 271 match those of the square hole 265. When the cube 271 is inserted into the square hole 265, the centerline of the cube 271 coincides with the centerline of the square hole 265.

[0082] A cylindrical body 281 is provided at the upper end of the mounting base 280. The dimensions of the cylindrical body 281 match those of the circular hole 272, and the cylindrical body 281 is used to mount the beam splitter 240 (secured by adhesive). Once the cylindrical body 281 is inserted into the circular hole 272, the centerline of the cylindrical body 281 coincides with the centerline of the circular hole 272, thereby aligning the centerline of the cylindrical body 281 with the centerline of the first outer surface 263 of the first through-hole 261. Furthermore, the beam splitter 240 is mounted at an angle on the upper end of the cylindrical body 281. The cylindrical body 281 can rotate within the circular hole 272 to adjust the orientation of the beam splitter 240.

[0083] Therefore, by setting the eccentric distance between the first inner surface 264 and the first outer surface 263 of the first through hole 261, the distance D between the illumination light emitted by the light source assembly 100 and the optical axis of the first camera 300 can be adjusted after the illumination light is reflected by the beam splitter 240 and reflected by the setting area 510 in sequence. In this way, the illumination light emitted by the light source assembly 100 can coincide with the optical axis of the first camera 300 after the illumination light is reflected by the beam splitter 240, reflected by the setting area 510 and refracted by the beam splitter 240 in sequence.

[0084] Reference Figure 6 The laser repair device according to the second embodiment of the present application includes a detection device and a laser device 600. The laser device 600 is used to generate laser light to perform laser repair on the defective points detected by the detection device.

[0085] The laser repair equipment according to the embodiment of the present application has at least the following beneficial effects: by using the above-mentioned detection device, it is helpful for the laser device 600 to accurately perform laser repair on the defect point, and the laser repair quality is better.

[0086] Reference Figure 6 In an improved solution of the above embodiment, the laser device 600 further includes a second camera 610 , which is used to acquire an image of the set area 510 .

[0087] By simultaneously providing the inspection device and the second camera 610 , the laser device 600 can more efficiently inspect defective points.

[0088] Specifically, the laser device 600 also includes a laser repair head 620. The laser repair head 620 accounts for a significant portion of the cost of laser repair equipment, often accounting for over 30% of the total equipment cost. To reduce the cost of laser repair equipment, laser repair equipment typically includes only one laser repair head 620.

[0089] The second camera 610 is fixedly connected to the laser repair head 620. While the laser repair head 620 is performing laser repair, the second camera 610 cannot detect defects. However, the independent detection device can detect defects during laser repair. This allows the laser repair head 620 to immediately proceed to the next defect after repairing one defect, reducing waiting time for the laser repair head 620 and improving laser repair efficiency.

[0090] The embodiments of the present application have been described in detail above with reference to the accompanying drawings. However, the present application is not limited to the above embodiments. Various modifications can be made within the scope of knowledge possessed by ordinary technicians in the relevant technical field without departing from the purpose of the present application. In addition, the embodiments of the present application and the features of the embodiments can be combined with each other unless there is a conflict.

Claims

1. A detection device, characterized in that include: a light source assembly for emitting illumination light toward a set area of ​​the display panel to form reflected light; a lens assembly comprising an objective lens and an achromatic lens, wherein the objective lens and the achromatic lens are sequentially arranged in a propagation path of the reflected light along a propagation direction of the reflected light, and the achromatic lens is used to eliminate chromatic aberration of the reflected light; The first camera is configured to receive the reflected light transmitted through the achromatic lens to acquire an image of the set area.

2. The detection device according to claim 1, characterized in that Along the direction of the optical axis of the first camera, the distance between the first camera and the objective lens is adjustable.

3. The detection device according to claim 1, characterized in that The lens assembly further comprises: The first lens barrel is provided with a first through hole, the first camera is used to close an opening of the first through hole, the achromatic lens is located in the first through hole, the achromatic lens is connected to the first lens barrel, and the first inner surface of the first through hole is provided with a first light-absorbing layer, and the color of the first light-absorbing layer is black.

4. The detection device according to any one of claims 1 to 3, characterized in that The light source assembly comprises: a light source for emitting the illumination light; A focusing mirror is used to focus the illumination light on the set area, and the distance between the light source and the focusing mirror is adjustable along the optical axis direction of the light source.

5. The detection device according to claim 4, characterized in that The light source assembly further includes: The second lens barrel is provided with a second through hole, the focusing lens is located in the second through hole, the focusing lens is connected to the second lens barrel, and the second inner surface of the second through hole is provided with a second light absorbing layer, and the color of the second light absorbing layer is black.

6. The detection device according to any one of claims 1 to 3, characterized in that: The lens assembly further comprises: The beam splitter is used to reflect the illumination light emitted by the light source assembly to the set area. The beam splitter is also used to transmit the reflected light transmitted by the objective lens. The achromatic lens is used to receive the reflected light transmitted by the beam splitter.

7. The detection device according to claim 6, characterized in that The illumination light emitted by the light source assembly can coincide with the optical axis of the first camera after being reflected by the beam splitter, reflected by the set area, and refracted by the beam splitter in sequence.

8. The detection device according to claim 7, characterized in that After the illumination light emitted by the light source assembly is reflected by the beam splitter and the set area in sequence, a distance D between the illumination light and the optical axis of the first camera is 0.23 to 0.43 mm.

9. Laser repair equipment, characterized in that, include: The detection device according to any one of claims 1 to 8; The laser device is used to generate laser to perform laser repair on the defect points detected by the detection device.

10. The laser repair equipment according to claim 9, characterized in that: The laser device further comprises: The second camera is used to acquire an image of the set area.

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