Cleaning equipment

Abstract

The utility model discloses cleaning equipment which is used for cleaning attachments on the surface of a heater of a crystal growing furnace and comprises a rack, a cleaning assembly and a movable driving part. The cleaning assembly comprises a cleaning part with rotational freedom, and the rotating axis of the cleaning part extends in the vertical direction; the movable driving part is fixed to the rack, the movable driving part is in transmission connection with the cleaning assembly, and the movable driving part is configured to be capable of driving the cleaning assembly to move in the horizontal direction so that the cleaning part can have a cleaning position capable of making contact with the heater and an initial position spaced from the cleaning position. According to the cleaning equipment, the attachments on the surface of the heater can be automatically cleaned, the safety of the cleaning operation of the attachments on the surface of the heater is improved, the cleaning efficiency is improved, and the needed labor cost is reduced.

Description

Technical Field

[0001] The present application relates to the technical field of cleaning equipment, and in particular to a cleaning equipment for cleaning attachments on the surface of a heater of a crystal growth furnace. Background Art

[0002] The heater is a core component within a single crystal furnace. It's primarily made of statically pressed graphite in cylindrical shapes. After producing a batch of silicon single crystals, the furnace needs to be dismantled and cleaned to remove any deposits such as silicon carbide, silicon vapor, and yellow oxides adhering to the heater surface.

[0003] In the prior art, the single crystal furnace heater is cleaned of attachments by manual wiping, and the single crystal furnace heater is cleaned of dust by a vacuum cleaner.

[0004] However, the above cleaning method requires high labor intensity and low cleaning efficiency. At the same time, the cleaning operation area is heavily polluted by dust, which is likely to endanger human health. Therefore, the above cleaning method has safety hazards, low cleaning efficiency, and requires high labor costs. Utility Model Content

[0005] In order to address the deficiencies of the prior art, the purpose of the present application is to provide a cleaning device for cleaning adherents on the surface of a heater of a crystal growth furnace, which can improve cleaning efficiency and reduce the required labor costs.

[0006] To achieve the above objectives, this application adopts the following technical solutions:

[0007] The present application provides a cleaning device, which is used to clean attachments on the surface of a heater of a crystal growth furnace. The cleaning device includes: a frame, a cleaning assembly and a movable drive member; the cleaning assembly includes a cleaning member with rotational freedom, and the rotation axis of the cleaning member extends in a vertical direction; the movable drive member is fixed to the frame, and the movable drive member is transmission-connected to the cleaning assembly, and the movable drive member is configured to drive the cleaning assembly to move in a horizontal direction so that the cleaning member has a cleaning position that can contact the heater and an initial position that is spaced apart from the cleaning position.

[0008] As a preferred technical solution, two cleaning parts are provided, the two cleaning parts are arranged facing each other, at least one movable driving part is provided, and at least one of the two cleaning parts is driven by the movable driving part so that the two cleaning parts can move toward each other to the cleaning position or move away from each other to the initial position.

[0009] As a preferred technical solution, the cleaning equipment includes a rotating assembly, which is installed on a frame. The rotating assembly includes a rotating part rotatably connected to the frame, and the rotation axis of the rotating part extends in a vertical direction. The rotating part has a bearing portion for supporting the heater. When the cleaning part is in the cleaning position, the bearing portion is located between the two cleaning parts.

[0010] As a preferred technical solution, the rotating member is annular and has multiple bearing parts, which are arranged around the axis of the rotating member. When the cleaning member is in the cleaning position, the rotation of the rotating member enables the multiple bearing parts to pass between the two cleaning members in sequence.

[0011] As a preferred technical solution, the cleaning assembly includes a support member for supporting the cleaning member, the support member is rotatably connected to the cleaning member, and the support member is connected to the movable driving member.

[0012] As a preferred technical solution, the cleaning component further includes a rotating drive member, which is installed on the support member and can drive the cleaning member to rotate.

[0013] As a preferred technical solution, the frame includes a column extending in the vertical direction, and the movable driving member includes a movable end and a fixed end. The fixed end is installed on the column, and the movable end is at least partially passed through the column and connected to the support member. The movable end has horizontal freedom of movement.

[0014] As a preferred technical solution, the cleaning equipment includes a guide rod, the extension direction of the guide rod is consistent with the moving direction of the movable end, the guide rod is at least partially passed through the column and is slidably connected to the column, and the guide rod is connected to the support member; two guide rods are provided, and the movable drive member is located between the two guide rods in the vertical direction.

[0015] As a preferred technical solution, the cleaning device includes a clamping assembly for clamping the heater, the clamping assembly is mounted on the frame and is at least partially located above the cleaning assembly, and the clamping assembly has freedom of movement in the horizontal direction and freedom of movement in the vertical direction.

[0016] As a preferred technical solution, a movable slide rail is provided on the frame, which extends in the horizontal direction. The clamping assembly includes a sliding member slidably connected to the movable slide rail and a clamping member installed on the sliding member. The clamping member has the freedom of movement in the vertical direction and is used to clamp the heater.

[0017] In the cleaning device, after the cleaning element contacts the heater surface, it rotates about its axis of rotation, thereby removing debris from the heater surface through friction and adsorption, thereby completing the cleaning of the debris from the heater surface. Therefore, the present application utilizes mechanical equipment to automatically clean debris from the heater surface, thereby improving the safety of the cleaning operation, increasing cleaning efficiency, and reducing labor costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A schematic structural diagram of a cleaning device for this application;

[0019] Figure 2 This is a schematic structural diagram of a cleaning device of the present application in which the clamping assembly is omitted;

[0020] Figure 3 This is a front view of a cleaning device of the present application omitting the clamping assembly;

[0021] Figure 4 This is a schematic diagram of the structure of the cleaning component and the rotary component of this application;

[0022] Among them, 100, cleaning equipment; 1, frame; 11, column; 2, cleaning assembly; 21, cleaning part; 22, support part; 23, rotating drive part; 3, mobile drive part; 31, movable end; 32, fixed end; 4, rotating assembly; 41, rotating part; 411, bearing part; 42, rotary motor; 43, small gear; 44, large gear; 5, guide rod; 6, clamping assembly; 61, sliding part; 62, clamping part; 621, clamping part; 622, supporting part; 7, movable slide rail; 200, heater; 201, supporting foot; 202, annular part. DETAILED DESCRIPTION

[0023] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the specific implementation of the present application will be clearly and completely described below in conjunction with the drawings in the implementation of the present application.

[0024] like Figure 1 、 Figure 2 and Figure 3 As shown, the present application provides a cleaning device 100 for cleaning debris attached to the surface of a heater 200 of a crystal growth furnace. The cleaning device 100 comprises a frame 1, a cleaning assembly 2, and a moving drive 3. The frame 1 is used to support and install the cleaning assembly 2 and the moving drive 3.

[0025] The cleaning assembly 2 includes a cleaning member 21 with rotational freedom, with the rotation axis of the cleaning member 21 extending in the vertical direction. In the present application, the cleaning member 21 is a roller brush, etc. After the cleaning member 21 contacts the surface of the heater 200, it rotates about the rotation axis, thereby removing the attached matter from the surface of the heater 200, thereby completing the cleaning of the attached matter from the surface of the heater 200.

[0026] Specifically, the mobile driving member 3 is fixed on the frame 1, and the mobile driving member 3 is connected to the cleaning component 2 by transmission. In the present application, the mobile driving member 3 is a mobile cylinder, etc., and the piston rod of the mobile cylinder is fixedly connected to the cleaning component 21. The mobile driving member 3 is configured to drive the cleaning component 2 to move in the horizontal direction, so that the cleaning component 21 has a cleaning position that can contact with the heater 200 and an initial position that is spaced apart from the cleaning position. When the cleaning component 21 is located at the initial position, the above-mentioned interval makes the cleaning component 21 not in contact with the heater 200 surface, so as to provide the surplus space for the heater 200 to be put in and taken out from the cleaning device 100, thereby avoiding that when the heater 200 is put in and taken out from the cleaning device 100, the heater 200 and the cleaning component 21 and other components collide, thereby avoiding the damage of the heater 200 or the cleaning component 21 and other components.

[0027] Through the above-mentioned setting, the present application realizes the automatic cleaning of the attachments on the surface of the heater 200, improves the safety of the cleaning operation of the attachments on the surface of the heater 200, improves the cleaning efficiency, and reduces the required labor cost.

[0028] As an implementation method, two cleaning members 21 are provided, and the two cleaning members 21 are arranged facing each other, wherein one cleaning member 21 is used to clean the attachments on one side of the surface of the heater 200, and the other cleaning member 21 is used to clean the attachments on the other side of the surface of the heater 200, thereby improving the cleaning efficiency of the cleaning device 100 for the attachments on the surface of the heater 200. At least one movable drive member 3 is provided, and at least one of the two cleaning members 21 is driven by the movable drive member 3 so that the two cleaning members 21 can move toward each other to the cleaning position or move away from each other to the initial position, thereby preventing the heater 200 from colliding with the cleaning member 21 and other components when the heater 200 is placed in and taken out of the cleaning device 100, thereby preventing damage to the heater 200 or other components such as the cleaning member 21.

[0029] It should be noted that when two mobile driving members 3 are provided, the mobile driving member 3 can be a single piston rod mobile cylinder with a piston rod provided at one end, and the two cleaning members 21 are driven by the two mobile driving members 3 respectively to move toward each other to the cleaning position or move away from each other to the initial position.

[0030] like Figure 3 and Figure 4As shown, specifically, the cleaning device 100 includes a rotary assembly 4, which is used to carry and rotate the heater 200, and the rotary assembly 4 is installed on the frame 1. The rotary assembly 4 includes a rotating member 41 rotatably connected to the frame 1, and the rotation axis of the rotating member 41 extends in the vertical direction. The rotating member 41 has a bearing portion 411 for carrying the heater 200, and when the cleaning member 21 is in the cleaning position, the bearing portion 411 is located between the two cleaning members 21. When cleaning the surface attachments of the heater 200, the heater 200 is placed on the bearing portion 411 of the rotating member 41, and the rotational freedom between the heater 200 and the rotating member 41 is constrained. After the two cleaning parts 21 move to the cleaning position, the rotating part 41 rotates around the rotation axis so that the outer circumferential surface of the heater 200 can contact with one cleaning part 21 and be cleaned by the cleaning part 21, and the inner circumferential surface of the heater 200 can contact with the other cleaning part 21 and be cleaned by the cleaning part 21, thereby improving the cleaning efficiency of the cleaning device 100 for the attachments on the surface of the heater 200.

[0031] More specifically, the rotary assembly 4 also includes a rotary motor 42, a pinion 43, and a large gear 44. The rotary motor 42 is fixed to the frame 1. The output shaft of the rotary motor 42 is fixedly connected to the pinion 43. The rotating member 41 is fixedly connected to the large gear 44, and the rotation axes of the rotating member 41 and the large gear 44 coincide. The pinion 43 and the large gear 44 are meshed. The rotary motor 42 drives the pinion 43 to rotate, which in turn drives the large gear 44 to rotate, thereby driving the rotating member 41 to rotate.

[0032] More specifically, the rotating member 41 is annular. A plurality of bearing portions 411 are provided, and the plurality of bearing portions 411 are arranged around the axis of the rotating member 41. The heater 200 has a plurality of support legs 201 and an annular portion 202. The plurality of support legs 201 are distributed on the annular portion 202 axially, with each support leg 201 supported by a bearing portion 411. When the cleaning member 21 is in the cleaning position, the rotating member 41 rotates so that the plurality of bearing portions 411 can sequentially pass between the two cleaning members 21, thereby allowing each support leg 201 of the heater 200 to be cleaned by the two cleaning members 21 in sequence.

[0033] Specifically, the cleaning assembly 2 includes a support member 22 for supporting the cleaning element 21. The support member 22 is rotatably connected to the cleaning element 21 to enable the cleaning element 21 to rotate about a rotation axis. The support member 22 is connected to the mobile drive member 3 so that the mobile drive member 3 drives the cleaning assembly 2 to move horizontally, thereby driving the cleaning element 21 to move to the cleaning position or to the initial position.

[0034] More specifically, the cleaning assembly 2 further includes a rotation driving member 23, which is mounted on the support member 22 and can drive the cleaning member 21 to rotate. In the present application, the rotation driving member 23 is a rotating motor or the like.

[0035] More specifically, the frame 1 includes a vertically extending column 11. The movable drive member 3 includes a movable end 31 and a fixed end 32. The fixed end 32 is mounted on the column 11, and the movable end 31 is connected to the support member 22, thereby driving the cleaning member 21 to the cleaning position or the initial position. When the movable drive member 3 is a movable cylinder, the movable end 31 is the piston rod of the movable cylinder.

[0036] Exemplarily, the movable end 31 has horizontal freedom of movement to enable the movable drive member 3 to drive the cleaning assembly 2 to move horizontally. In this embodiment, the movable end 31 is at least partially inserted into the column 11, so that the movable end 31 can be slidably connected to the column 11, thereby achieving a guiding function of the movable end 31 and making the horizontal movement of the movable end 31 more stable.

[0037] More specifically, the cleaning device 100 includes a guide rod 5, which extends in the same direction as the movement direction of the movable end 31. The guide rod 5 is at least partially inserted into the column 11 and is slidably connected to the column 11. The guide rod 5 is connected to the support member 22, thereby improving the stability of the mobile drive member 3 when driving the cleaning assembly 2 in the horizontal direction. Two guide rods 5 are provided, and the mobile drive member 3 is located between the two guide rods 5 in the vertical direction, thereby further improving the stability of the mobile drive member 3 when driving the cleaning assembly 2 in the horizontal direction.

[0038] like Figure 1 As shown, as an implementation method, the cleaning device 100 includes a clamping assembly 6 for clamping the heater 200, the clamping assembly 6 is mounted on the frame 1 and is at least partially located above the cleaning assembly 2. The clamping assembly 6 has the freedom of movement in the horizontal direction and the freedom of movement in the vertical direction. After the clamping assembly 6 clamps the heater 200, it lifts the heater 200 in the vertical direction, then moves the heater 200 horizontally to above the cleaning assembly 2, and finally lowers the heater 200 in the vertical direction so that the heater 200 is placed on the cleaning assembly 2; after the surface attachments of the heater 200 are cleaned, the clamping assembly 6 clamps the heater 200 and lifts the heater 200 in the vertical direction, then moves the heater 200 horizontally to above the empty heater 200 placement area, and finally lowers the heater 200 in the vertical direction so that the heater 200 is placed in the heater 200 placement area, thereby realizing the heater 200 being placed in and out of the cleaning device 100 through the clamping assembly 6.

[0039] Specifically, the frame 1 is provided with a movable slide 7, which extends in the horizontal direction. The clamping assembly 6 includes a sliding member 61 and a clamping member 62. The sliding member 61 is slidably connected to the movable slide 7 to enable the clamping assembly 6 to move in the horizontal direction. Specifically, a sliding groove is provided on the movable slide 7. The outer contour of the sliding member 61 is consistent with the inner contour of the sliding groove on the movable slide 7, so that the sliding member 61 and the sliding groove cooperate with each other. The clamping member 62 is mounted on the sliding member 61. The clamping member 62 has the freedom of movement in the vertical direction and is used to clamp the heater 200. Specifically, there are two clamping members 62, and the two clamping members 62 can move toward each other and away from each other. It should be noted that the movement of the two clamping members 62 toward each other and away from each other can be achieved by using a double-piston rod moving cylinder, etc. The double-piston rod moving cylinder is mounted on the sliding member 61, and the two piston rods of the double-piston rod moving cylinder are respectively connected to the two clamping members 62.

[0040] More specifically, the clamping member 62 includes a clamping portion 621 and a supporting portion 622. The clamping portion 621 is used to clamp the heater 200, and the supporting portion 622 is used to support the heater 200. When the two clamping members 62 move toward each other, they move closer together, allowing them to extend into the heater 200. When the two clamping members 62 move away from each other, the clamping portions 621 of the two clamping members 62 are in close contact with the inner circumferential surface of the heater 200, and the supporting portion 622 is supported at the bottom end of the heater 200. At this time, the heater 200 is clamped by the two clamping members 62.

[0041] It should be noted that the words "first", "second" and similar terms used in the specification and claims of this application do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one" or "an" do not indicate a quantity limitation, but rather indicate the presence of at least one. "Multiple" or "several" means at least two. Unless otherwise specified, words such as "front", "back", "left", "right", "bottom" and / or "top" are used for ease of description only and are not limited to one position or one spatial orientation. Words such as "include" or "comprising" and similar terms mean that the elements or objects appearing before "include" or "comprising" include the elements or objects listed after "include" or "comprising" and their equivalents, and do not exclude other elements or objects. Words such as "connected" or "connected" and similar terms are not limited to physical or mechanical connections, and may include electrical connections, whether direct or indirect.

[0042] As used in this specification and the appended claims, the singular forms "a," "an," "said," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It should also be understood that the term "and / or" as used herein refers to and encompasses any and all possible combinations of one or more of the associated listed items.

[0043] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all such improvements and changes should fall within the scope of protection of the claims appended to this application.

Claims

1. A cleaning device (100) for cleaning deposits on the surface of a heater (200) of a crystal growth furnace, characterized in that: The cleaning device (100) comprises: Rack (1); A cleaning assembly (2), the cleaning assembly (2) comprising a cleaning member (21) having rotational freedom, the rotation axis of the cleaning member (21) extending in a vertical direction; A movable driving member (3) is fixed on the frame (1), the movable driving member (3) is in transmission connection with the cleaning assembly (2), and the movable driving member (3) is configured to be able to drive the cleaning assembly (2) to move in a horizontal direction so that the cleaning member (21) has a cleaning position capable of contacting the heater (200) and an initial position spaced apart from the cleaning position.

2. The cleaning device (100) according to claim 1, characterized in that Two cleaning members (21) are provided, and the two cleaning members (21) are arranged facing each other. At least one movable driving member (3) is provided, and at least one of the two cleaning members (21) is driven by the movable driving member (3), so that the two cleaning members (21) can move toward each other to the cleaning position or move away from each other to the initial position.

3. The cleaning device (100) according to claim 2, characterized in that The cleaning device (100) comprises a rotary assembly (4), the rotary assembly (4) being mounted on the frame (1), the rotary assembly (4) comprising a rotating member (41) rotatably connected to the frame (1), the rotating axis of the rotating member (41) extending in a vertical direction, the rotating member (41) having a bearing portion (411) for bearing the heater (200), and when the cleaning member (21) is in the cleaning position, the bearing portion (411) is located between the two cleaning members (21).

4. The cleaning device (100) according to claim 3, characterized in that The rotating member (41) is annular, and a plurality of the bearing portions (411) are provided. The plurality of bearing portions (411) are arranged around the axis of the rotating member (41). When the cleaning member (21) is in the cleaning position, the rotating member (41) rotates so that the plurality of bearing portions (411) can pass between two cleaning members (21) in sequence.

5. The cleaning device (100) according to claim 1, characterized in that The cleaning assembly (2) comprises a support member (22) for supporting the cleaning member (21), the support member (22) being rotatably connected to the cleaning member (21), and the support member (22) being connected to the movable driving member (3).

6. The cleaning device (100) according to claim 5, characterized in that The cleaning component (2) further comprises a rotating driving member (23), wherein the rotating driving member (23) is mounted on the supporting member (22) and is capable of driving the cleaning member (21) to rotate.

7. The cleaning device (100) according to claim 5, characterized in that The frame (1) includes a column (11) extending in a vertical direction, the movable driving member (3) includes a movable end (31) and a fixed end (32), the fixed end (32) is mounted on the column (11), the movable end (31) at least partially passes through the column (11) and is connected to the support member (22), and the movable end (31) has a horizontal degree of freedom of movement.

8. The cleaning device (100) according to claim 7, characterized in that The cleaning device (100) comprises a guide rod (5), the extension direction of the guide rod (5) is consistent with the movement direction of the movable end (31), the guide rod (5) is at least partially passed through the column (11) and is slidably connected to the column (11), and the guide rod (5) is connected to the support member (22); Two guide rods (5) are provided, and the moving drive member (3) is located between the two guide rods (5) along the vertical direction.

9. The cleaning device (100) according to claim 1, characterized in that The cleaning device (100) comprises a clamping assembly (6) for clamping the heater (200), wherein the clamping assembly (6) is mounted on the frame (1) and is at least partially located above the cleaning assembly (2), and the clamping assembly (6) has a degree of freedom of movement in a horizontal direction and a degree of freedom of movement in the vertical direction.

10. The cleaning device (100) according to claim 9, characterized in that The frame (1) is provided with a movable slide rail (7), which extends in a horizontal direction. The clamping assembly (6) comprises a sliding member (61) slidably connected to the movable slide rail (7) and a clamping member (62) mounted on the sliding member (61). The clamping member (62) has a degree of freedom of movement in a vertical direction and is used to clamp the heater (200).

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