Two-dimensional planar cold plasma generating device

Abstract

The utility model relates to the technical field of plasmas, and discloses a two-dimensional planar cold plasma generating device, which comprises a medium pipe, a cold plasma generating device, a cold plasma generating device, a cold plasma generating device, a cold plasma generating device and a cold plasma generating device, and is characterized in that the medium pipe is provided with an air inlet and an air outlet; the first electrode is arranged on the outer side of the dielectric tube and close to the air outlet of the dielectric tube, and the first electrode is connected with a power supply through a first connecting wire; the second electrode is arranged on the outer side of the dielectric tube and is close to the air inlet of the dielectric tube, and the second electrode is connected with the ground through a second connecting wire; wherein an air outlet of the medium pipe is rectangular. The device designed by the utility model can effectively increase the cross-sectional area of jet flow and generate wide-curtain cold plasma jet flow, so that the efficiency of treating biological tissues is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of plasma, in particular to a two-dimensional planar cold plasma generating device. Background Art

[0002] The widespread application of atmospheric pressure cold plasma in various fields has promoted the development of atmospheric pressure cold plasma generation devices. Traditional atmospheric pressure cold plasma generation devices confine the plasma to a narrow space, and the plasma is relatively close to the high-voltage electrode. Application in the biomedical field poses certain safety risks and is difficult to meet actual needs. If a flowing gas is introduced between the electrodes, the gas flow will drive the plasma generated by the discharge to form a plasma jet. The cold plasma jet is far away from the electrodes, and safety is guaranteed. This type of plasma generation device that can produce cold plasma jets has entered production and life. Cold plasma jets carry a large number of active particles, and the gas temperature is close to room temperature. These characteristics make cold plasma jets widely used in thin film deposition, surface treatment and biomedical fields.

[0003] Conventional cold plasma generators produce a narrow, conical jet, with active particles distributed over a limited spatial area. This results in low efficiency in treating biological surfaces, hindering the development of plasma biomedicine. Therefore, a two-dimensional, planar cold plasma generator is urgently needed to achieve a wide-screen, atmospheric-pressure cold plasma jet. Utility Model Content

[0004] The purpose of the utility model is to provide a two-dimensional surface cold plasma generating device to solve the problem that the jet generated by the common cold plasma generating device is in a small conical shape, the spatial area of ​​the active particles distribution is limited, and the efficiency of treating biological surfaces during actual use is very low.

[0005] The utility model provides a two-dimensional planar cold plasma generating device, comprising:

[0006] A medium pipe, wherein the medium pipe is provided with an air inlet and an air outlet, and the air inlet is connected to an air source;

[0007] a first electrode, disposed outside the dielectric tube and close to the gas outlet of the dielectric tube, the first electrode being connected to a power source via a first connection;

[0008] a second electrode disposed outside the dielectric tube and close to an air inlet of the dielectric tube, the second electrode being connected to the ground via a second connection;

[0009] Wherein, the air outlet of the medium pipe is rectangular.

[0010] In some embodiments of the present application, the gas source is a helium gas source.

[0011] In some embodiments of the present application, the first electrode and the second electrode are copper electrodes.

[0012] In some embodiments of the present application, the distance between the first electrode and the gas outlet is extremely high, and the extremely high is 2 mm.

[0013] In some embodiments of the present application, the widths of the first electrode and the second electrode are extremely wide, the extremely wide of the first electrode is the same as the extremely wide of the second electrode, and the extremely wide is 10 mm.

[0014] In some embodiments of the present application, the distance between the first electrode and the second electrode is a pole pitch, and the pole pitch is 10-15 mm.

[0015] In some embodiments of the present application, the specifications of the air outlet are rectangle width×rectangle height, the rectangle width is 10-17 mm, and the rectangle height is 1 mm.

[0016] In some embodiments of the present application, the device further comprises a controller connected to the power source and the gas source;

[0017] The controller is used to control the output voltage of the power supply, and is also used to control the air flow rate of the air source.

[0018] In some embodiments of the present application, the device further includes a temperature sensor, which is connected to the controller and is used to detect the real-time temperature of the first electrode and the second electrode.

[0019] Compared with the prior art, the beneficial effects of the present invention are:

[0020] 1. The utility model is provided with two electrodes outside the dielectric tube, which has a very simple structure and is convenient for batch production. Moreover, the discharge channel does not directly contact the electrodes, thereby achieving a lower temperature of the plasma.

[0021] 2. The utility model sets the gas outlet in a rectangular shape, which can generate a wider atmospheric pressure cold plasma jet, increase the contact area with the treatment object, and improve the treatment efficiency.

[0022] 3. The atmospheric pressure cold plasma jet generated by the utility model is a wide-curtain jet, which helps to achieve a more uniform treatment effect, avoids insufficient local treatment, and can be applied to the surface treatment of objects of different shapes and sizes, with a wide range of applications.

[0023] 4. The utility model designs a two-dimensional planar cold plasma generating device based on two electrodes, which can effectively increase the jet cross-sectional area and generate a wide-curtain cold plasma jet, thereby improving the efficiency of treating biological tissues and making large-scale application of plasma technology possible. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are merely embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0025] Figure 1 It is a structural schematic diagram of a two-dimensional planar cold plasma generating device of the utility model.

[0026] Figure 2 This is a graph showing the relationship between the electrode distance and the visible jet voltage under the conditions of a power frequency of 15 kHz and a helium gas flow rate of 6000 sccm in an embodiment of the present invention;

[0027] Figure 3 This is a relationship diagram between the rectangle width and the jet length under the conditions of 2.5 kV, 15 kHz voltage, and a helium flow rate of 6000 sccm in an embodiment of the present invention.

[0028] Among them, 10, medium tube; 11, air inlet; 12, air outlet; 20, first electrode; 21, first connection; 30, second electrode; 31, second connection. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0030] In the description of this application, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application.

[0031] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature specified as "first" or "second" may explicitly or implicitly include one or more of such features. Throughout this application, unless otherwise specified, "plurality" means two or more.

[0032] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0033] like Figure 1 As shown, the utility model provides a two-dimensional planar cold plasma generating device, comprising:

[0034] The medium pipe 10 is provided with an air inlet 11 and an air outlet 12, and the air inlet 11 is connected to the air source;

[0035] The first electrode 20 is disposed outside the dielectric tube 10 and close to the gas outlet 12 of the dielectric tube 10 . The first electrode 20 is connected to a power source via a first connection 21 .

[0036] The second electrode 30 is disposed outside the dielectric tube 10 and close to the air inlet 11 of the dielectric tube 10 . The second electrode 30 is connected to the ground via a second connection 31 .

[0037] The gas outlet 12 of the medium pipe 10 is rectangular.

[0038] In this embodiment, an air inlet 11 and an air outlet 12 are provided at both ends of the medium tube 10. Helium gas in the gas source can be introduced into the medium tube 10 through the air inlet 11, and the first electrode 20 is connected to a power supply. The introduced helium gas drives the plasma generated by the discharge to form a plasma jet, which is released to the external environment through the air outlet 12.

[0039] If flowing gas is introduced between the electrodes, the gas flow will drive the plasma generated by the discharge to form a plasma jet.

[0040] In some embodiments of the present application, the gas source is a helium gas source.

[0041] In this embodiment, the gas source is a helium source. Helium is an inert gas with very stable chemical properties and is not easy to react with other substances, ensuring the stability of the plasma. Helium is relatively easy to ionize, which is conducive to the generation of plasma. Helium molecules can efficiently transfer energy in an electric field, promoting the formation of plasma. Helium has a low ionization energy and consumes less energy when generating plasma. Compared with other gases, helium has a lower breakdown voltage and is easier to break down, which means that plasma can be generated at a lower voltage.

[0042] In some embodiments of the present application, the first electrode 20 and the second electrode 30 are copper electrodes.

[0043] In this embodiment, copper electrodes are used as electrodes of this device because of the electrical conductivity, thermal conductivity and compatibility of copper electrodes. Copper is a material with extremely high electrical conductivity, which means that copper electrodes can minimize energy loss when current passes through. This is crucial for maintaining the stability of discharge in cold plasma generation devices. And because of the low resistivity of copper, the use of copper electrodes can more efficiently transfer current, thereby improving the discharge efficiency of the entire device. This helps to generate high-density plasma at lower input power. Copper has excellent thermal conductivity, which allows the heat generated during the plasma generation process to be quickly conducted away from the electrode, preventing the electrode from overheating. By quickly dissipating heat, copper electrodes can maintain performance in high-temperature environments, reduce material degradation or damage caused by excessive temperature, and thus extend their service life.

[0044] In some embodiments of the present application, the distance between the first electrode 20 and the gas outlet 12 is extremely high, and the extremely high distance is 2 mm.

[0045] In this embodiment, the first electrode 20 of the two-dimensional planar cold plasma generating device is located 2 mm from the gas outlet 12. A suitable distance helps to form a more ideal plasma distribution, improve the uniformity of the treatment effect, and enable more stable plasma generation and maintenance. When the first electrode 20 is only 2 mm from the gas outlet 12, the electric field is concentrated within the small gap, which helps to achieve gas breakdown and discharge at a lower voltage. The concentration of the electric field not only improves discharge efficiency but also reduces energy consumption. Within a small distance, the frequency of collisions between electrons and neutral particles is high, which easily produces an electron avalanche effect, thereby promoting the generation of more electrons and ions and increasing the density of the plasma. Due to the close distance to the gas outlet 12, the plasma is driven by a stronger airflow, giving the plasma jet better directionality and focus. This directionality is particularly important for precise treatment and localized therapy. Within a short distance, the plasma jet has a smaller degree of diffusion, which can more accurately treat the target area and avoid unnecessary energy loss and side effects.

[0046] In some embodiments of the present application, the widths of the first electrode 20 and the second electrode 30 are extremely wide. The extremely wide width of the first electrode 20 is the same as the extremely wide width of the second electrode 30 , which is 10 mm.

[0047] In this embodiment, the width of both the first electrode 20 and the second electrode 30 is set to 10 mm. This allows the electric field to be distributed over a larger area, which helps achieve gas breakdown and discharge at a lower voltage. This uniform distribution of the electric field improves discharge efficiency and reduces energy consumption. It also helps reduce unevenness in electric field strength, thereby reducing the risk of plasma instability. Furthermore, a more uniform and stable electric field distribution can be achieved, which facilitates the generation of high-quality plasma.

[0048] In some embodiments of the present application, the distance between the first electrode 20 and the second electrode 30 is the pole pitch, and the pole pitch is 10-15 mm.

[0049] In this embodiment, the interpole distance is set to 10-15 mm. For cold plasma generators, increasing the interpole distance increases the required breakdown voltage. The impact of interpole distance on the plasma jet is primarily reflected in the need for a higher breakdown field strength for discharge. When the interpole distance is reduced, the surface is more likely to break through the air, forming an arc. Therefore, it is necessary to select an appropriate interpole distance to achieve a plasma jet.

[0050] Figure 2 Under the conditions of power frequency 15kHz and helium gas flow rate 6000sccm, record the lowest voltage at which the jet can be seen at different electrode distances. Figure 2 As can be seen, increasing the interpole distance increases the required breakdown voltage. The primary effect of interpole distance on the plasma jet is the requirement for a higher breakdown field strength to discharge. Increasing the interpole distance increases the breakdown voltage required to break down helium, which is evident by an increase in the minimum voltage of the jet. In experiments, when the interpole distance is reduced to 7mm, the surface easily breaks down through air, forming an arc. This is because when the interpole distance is small, the breakdown voltage of helium and the surface breakdown voltage of air are not significantly different. When the glass electrode surface is contaminated with conductive dirt or is relatively humid, arcing can easily occur before the helium breaks down, which is extremely unsafe. Taking all factors into consideration, an interpole distance of 10-15mm is more appropriate.

[0051] In some embodiments of the present application, the specifications of the air outlet 12 are rectangular width×rectangular height, the rectangular width is 10-17 mm, and the rectangular height is 1 mm.

[0052] In this embodiment, when the rectangular width of the gas outlet 12 is small, the jet is longer. When the rectangular width is small, on the one hand, the dielectric tube 10 of the two-dimensional planar cold plasma generating device is closer to a cylinder, and the electric field distribution is relatively uniform. On the other hand, at the same gas flow rate, the cross-sectional area through which the gas passes is smaller, the gas flows faster, and the active particles reach the outlet before they are deactivated, resulting in a relatively longer jet length. Therefore, taking into account the impact of treatment efficiency and jet length, the specifications of the gas outlet 12 are set to a rectangular width of 10-17 mm and a rectangular height of 1 mm.

[0053] Figure 3 The jet length is recorded under the conditions of 2.5 kV, 15 kHz, and a helium flow rate of 6000 sccm, while the rectangle width is continuously varied. As can be seen from the figure, when the rectangle width is less than 20 mm, the jet is longer, reaching approximately 30 mm, before rapidly decreasing. When the rectangle width is smaller, on the one hand, the dielectric tube 10 of the cold plasma generator is more cylindrical, resulting in a more uniform electric field distribution; on the other hand, at the same gas flow rate, the cross-sectional area through which the gas passes is smaller, resulting in faster gas flow and reaching the outlet before the active particles are deactivated, resulting in a relatively longer jet length. Taking into account the impact of both treatment efficiency and jet length, the final rectangle dimensions were determined to be 10-17 mm × 1 mm, meaning a width of 10-17 mm and a height of 1 mm.

[0054] In some embodiments of the present application, the device further includes a controller, which is connected to the power supply and the gas source; the controller is used to control the output voltage of the power supply, and the controller is also used to control the airflow rate of the gas source.

[0055] In this embodiment, the output voltage of the power supply and the gas flow rate of the gas source also affect the plasma jet. Therefore, a controller is provided to connect to the power supply and gas source. The controller's main function is to monitor and adjust the output voltage of the power supply to ensure its stability and reliability. At the same time, the controller is also responsible for controlling the gas flow rate of the gas source to ensure that the gas source can provide a constant airflow to meet the operating requirements of the device. Through the intelligent regulation of the controller, the operating efficiency and stability of the device can be effectively improved, ensuring the normal operation of the entire system.

[0056] In some embodiments of the present application, the device further includes a temperature sensor connected to the controller, and the temperature sensor is used to detect the real-time temperature of the first electrode 20 and the second electrode 30 .

[0057] In this embodiment, the device also includes a temperature sensor connected to the control device. This temperature sensor monitors the temperature of the first electrode 20 and the second electrode 30 in real time. This ensures that the electrode temperatures are effectively controlled during operation, preventing excessively high or low temperatures from affecting the normal operation of the device. Furthermore, the controller can adjust operating parameters in a timely manner based on feedback from the temperature sensor, ensuring the safety and stability of the entire device.

[0058] The following is a preferred specific embodiment of the present application.

[0059] Example 1

[0060] The utility model provides a two-dimensional planar cold plasma generating device, comprising: a dielectric tube 10, the dielectric tube 10 being provided with an air inlet 11 and an air outlet 12, the air inlet 11 being connected to a helium source, the air outlet 12 of the dielectric tube 10 being rectangular, with a rectangular width of 15 mm and a rectangular height of 1 mm; a first electrode 20 being provided outside the dielectric tube 10 and close to the air outlet 12 of the dielectric tube 10, the first electrode 20 being connected to a power supply via a first connection 21; a second electrode 30 being provided outside the dielectric tube 10 and close to the air inlet 11 of the dielectric tube 10, the second electrode 30 being connected to the ground via a second connection 31; the interpole distance between the first electrode 20 and the second electrode 30 being 15 mm; the interpole width of the first electrode 20 and the interpole width of the second electrode 30 being 10 mm; and the interpole height between the first electrode 20 and the air outlet 12 being 2 mm.

[0061] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that they can still modify or replace the technical solution of the present invention with equivalents, and these modifications or equivalent replacements cannot cause the modified technical solution to deviate from the spirit and scope of the technical solution of the present invention.

Claims

1. A two-dimensional planar cold plasma generating device, characterized in that: include: A medium pipe, wherein the medium pipe is provided with an air inlet and an air outlet, and the air inlet is connected to an air source; a first electrode, disposed outside the dielectric tube and close to the gas outlet of the dielectric tube, the first electrode being connected to a power source via a first connection; a second electrode disposed outside the dielectric tube and close to an air inlet of the dielectric tube, the second electrode being connected to the ground via a second connection; The distance between the first electrode and the second electrode is the pole distance, and the pole distance is 10-15 mm; The air outlet of the medium tube is rectangular; the specifications of the air outlet are rectangular width × rectangular height, the rectangular width is 10-17 mm, and the rectangular height is 1 mm; The distance between the first electrode and the gas outlet is extremely high, and the extremely high distance is 2 mm; The widths of the first electrode and the second electrode are extremely wide. The extremely wide width of the first electrode is the same as the extremely wide width of the second electrode, and the extremely wide width is 10 mm.

2. The two-dimensional planar cold plasma generating device according to claim 1, characterized in that: The gas source is a helium source.

3. The two-dimensional planar cold plasma generating device according to claim 1, characterized in that: The first electrode and the second electrode are copper electrodes.

4. The two-dimensional planar cold plasma generating device according to claim 1, characterized in that: The device further comprises a controller connected to the power source and the gas source; The controller is used to control the output voltage of the power supply, and is also used to control the air flow rate of the air source.

5. The two-dimensional planar cold plasma generating device according to claim 4, characterized in that: The device further includes a temperature sensor connected to the controller, and the temperature sensor is used to detect the real-time temperature of the first electrode and the second electrode.

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