Testing device

Abstract

The utility model relates to a testing device, which comprises a sorting machine, an adapter, a first connecting line and a second connecting line, and is characterized in that the sorting machine comprises a first power terminal and a first signal terminal; the adapter comprises a second power terminal and a second signal terminal; the two ends of the first connecting line are electrically connected with the first power terminal and the second power terminal respectively, and the first connecting line is used for transmitting power current; the two ends of the second connecting line are electrically connected with the first signal terminal and the second signal terminal respectively, and the second connecting line is used for transmitting signal current. The power current and the signal current are wired independently, high-low voltage crosstalk caused by the fact that the power current and the signal current are transmitted through the same cable is avoided, the stray inductance of a power testing loop is effectively reduced, and therefore signals transmitted between the sorting machine and the adapter are more real and complete, and the testing efficiency is improved. And the power test loop distance between the sorting machine and the adapter can be prolonged, so that the test device can be suitable for more application scenes.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor testing, in particular to a testing device. Background Art

[0002] During the semiconductor testing process, the test machine collects signals from the semiconductor to determine whether the function and performance of the semiconductor meet the design specifications. The test results are fed back to the sorting machine through the power test loop. The sorting machine then marks, sorts and collects the semiconductors accordingly.

[0003] In related prior art, copper-core cables are typically used as power test loops between the tester and the sorter to transmit both power and signal currents. However, transmitting both power and signal currents together results in high noise levels, weak anti-interference capabilities, and high- and low-voltage signal crosstalk within the power test loop, which can affect the tester's test data and lead to misjudgments by the sorter. Furthermore, to minimize environmental influences, the power test loop is relatively short, making it unsuitable for a wide range of applications. Utility Model Content

[0004] Based on this, it is necessary to provide a testing device to address the above problems, so as to improve the accuracy of signal transmission and extend the distance of the power test loop.

[0005] The utility model provides a testing device, comprising: a sorter, comprising a first power terminal and a first signal terminal; an adapter, comprising a second power terminal and a second signal terminal; a first connecting circuit, both ends of which are electrically connected to the first power terminal and the second power terminal, respectively, and the first connecting circuit is used to transmit power current; and a second connecting circuit, both ends of which are electrically connected to the first signal terminal and the second signal terminal, respectively, and the second connecting circuit is used to transmit signal current.

[0006] In the above-mentioned test device, the sorter is used to be electrically connected to the semiconductor, and the adapter is used to be electrically connected to the tester. The first connecting line and the second connecting line are respectively used to transmit power current and signal current between the sorter and the adapter, so that the power current and signal current are routed separately, avoiding high and low voltage crosstalk caused by using the same cable to transmit power current and signal current, effectively reducing the noise of the power test loop, so that the signal transmitted between the sorter and the adapter is more real and complete, and can also extend the power test loop distance between the sorter and the adapter, so that the test device can be applied to more application scenarios.

[0007] In one embodiment, the first connection line includes two spaced copper strips, two ends of each copper strip are electrically connected to the first power terminal and the second power terminal respectively, and the currents flowing through the two copper strips are in opposite directions.

[0008] With this arrangement, the contact area between the copper strip and the first power terminal and the second power terminal is larger, the contact effect is better, and a larger current can be withstood.

[0009] In one embodiment, the first connecting line further includes a heat shrink tubing, and the heat shrink tubing is wrapped around the outer circumference of the two copper strips.

[0010] With this arrangement, the heat shrink tubing can provide insulation protection for the copper strip, preventing current leakage, short circuit and other phenomena, while also preventing the copper strip from being worn or aged due to long-term exposure.

[0011] In one embodiment, the two copper strips are located in the same plane; and / or the copper strips extend along a straight line, and the two copper strips are parallel to each other.

[0012] Such an arrangement ensures that the movement trajectory of the power current between the sorting machine and the adapter in each copper strip is the shortest path and the return area is the smallest, thereby reducing the loop inductance of the first connecting line.

[0013] In one embodiment, the first power terminal includes a first positive terminal and a first negative terminal arranged at intervals, and the second power terminal includes a second positive terminal and a second negative terminal arranged at intervals; the two ends of one of the copper strips are electrically connected to the first positive terminal and the second positive terminal, respectively, and the two ends of the other copper strip are electrically connected to the first negative terminal and the second negative terminal, respectively.

[0014] This arrangement forms a power current loop.

[0015] In one embodiment, the second connecting circuit includes a signal line and a ground line arranged at intervals, and the two ends of the signal line are electrically connected to the first signal terminal and the second signal terminal respectively; the sorting machine also includes a first ground terminal, and the adapter also includes a second ground terminal, and the two ends of the ground line are electrically connected to the first ground terminal and the second ground terminal respectively, and the current flowing through the signal line and the ground line is in opposite directions.

[0016] With this arrangement, the signal line is used to transmit signals between the sorting machine and the adapter, the ground line is used for grounding, and the magnetic fields generated by the signal line and the ground line can offset each other to ensure the integrity of the signal transmitted by the signal line.

[0017] In one embodiment, the number of the second connecting lines is at least three, and the second connecting lines are arranged at intervals.

[0018] With such configuration, each second connecting line can be used to transmit currents of different signals, or two or more second connecting lines can be used to transmit currents of the same signal.

[0019] In one embodiment, the number of the first signal terminals is at least three and they are arranged in a one-to-one correspondence with the signal lines; the number of the second signal terminals is at least three and they are arranged in a one-to-one correspondence with the signal lines; and both ends of each of the signal lines are electrically connected to the corresponding first signal terminal and second signal terminal, respectively.

[0020] This arrangement forms a driving signal current loop.

[0021] In one embodiment, each of the second connecting lines includes a first connecting segment, an extension segment, and a second connecting segment connected in sequence, the first connecting segment is electrically connected to the first signal terminal and the first ground terminal, the second connecting segment is electrically connected to the second signal terminal and the second ground terminal, the extension segment extends along a straight line, and each of the extension segments is parallel to each other.

[0022] This arrangement ensures that the movement trajectory of the signal current between the sorting machine and the adapter in each extension section is the shortest path and the return area is minimized, thereby reducing the loop inductance of the second connecting line and allowing multiple second connecting lines to be arranged neatly for easy wiring.

[0023] In one embodiment, the second connection circuit further includes a sheath covering the outer periphery of the signal line and the ground line; and / or the signal line and / or the ground line are silver-plated conductors.

[0024] With this arrangement, the sheath can provide insulation protection for the signal line and the grounding wire, preventing current leakage, short circuit and other phenomena, while also preventing the signal line and the grounding wire from being worn or aged due to long-term exposure. The silver-plated conductor can effectively shield the interference of the external environment on the signal, making the signal transmitted between the adapter and the sorting machine more real and complete. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the conventional technology, the following briefly introduces the drawings required for use in the embodiments or the conventional technology descriptions. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0026] Figure 1 This is a schematic diagram of the three-dimensional structure of a testing device according to one embodiment of the present invention;

[0027] Figure 2 The utility model provides Figure 1 Schematic diagram of the enlarged structure at A in the middle;

[0028] Figure 3 The utility model provides Figure 1 Schematic diagram of the enlarged structure at B in the middle;

[0029] Figure 4 The utility model provides Figure 1 Schematic diagram of the three-dimensional structure at another angle;

[0030] Figure 5 The utility model provides Figure 1 A schematic diagram of the three-dimensional structure of the first connecting line;

[0031] Figure 6 The utility model provides Figure 1 Schematic diagram of the three-dimensional structure of the second connecting line.

[0032] Figure numerals: 1, sorter; 11, first power terminal; 111, first positive terminal; 112, first negative terminal; 12, first signal terminal; 12a, signal terminal one; 12b, signal terminal two; 12c, signal terminal three; 13, first ground terminal; 2, adapter; 21, second power terminal; 211, second positive terminal; 212, second negative terminal; 22, second signal terminal; 22a, signal terminal four; 22b, signal terminal 5; 22c, signal terminal six; 23, second ground terminal; 3, first connecting line; 31, copper strip; 31a, first copper strip; 31b, second copper strip; 32, heat shrink tubing; 4, second connecting line; 41, signal line; 41a, first signal line; 41b, second signal line; 41c, third signal line; 42, ground line; 43, sheath; 401, first connecting section; 402, extension section; 403, second connecting section; 5, semiconductor. DETAILED DESCRIPTION

[0033] To make the above-mentioned objects, features, and advantages of the present application more clearly understood, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways than those described herein, and those skilled in the art can make similar improvements without violating the scope of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0034] It should be noted that when a component is referred to as being "fixed to" or "disposed on" another component, it may be directly on the other component or there may be a central component. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may be a central component at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in the specification of this application are for illustrative purposes only and do not represent the only implementation method.

[0035] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of such features. Throughout the description of this application, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0036] In this application, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it can mean that the first feature is directly in contact with the second feature, or the first feature and the second feature are indirectly in contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it can mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is higher in level than the second feature. When a first feature is "below," "below," or "below" a second feature, it can mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is lower in level than the second feature.

[0037] Unless otherwise defined, all technical and scientific terms used in the specification of this application have the same meaning as commonly understood by those skilled in the art to which this application belongs. The terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used in the specification of this application includes any and all combinations of one or more of the relevant listed items.

[0038] During the semiconductor testing process, the tester collects signals from the semiconductor to determine whether the function and performance of the semiconductor meet the design specifications, and feeds the test results back to the sorting machine through the power test loop. The sorting machine then marks, sorts, and collects the semiconductor accordingly. In the relevant existing technology, a copper-core cable is generally used as a power test loop between the tester and the sorting machine to transmit power current and signal current. However, the transmission of power current and signal current together will cause the power test loop to have large noise, weak anti-interference ability, and easy crosstalk between high and low voltage signals, which will affect the test data of the tester and cause the sorting machine to misjudge. In addition, in order to reduce the impact of the external environment, the distance of the power test loop is relatively short, which cannot meet more application scenarios.

[0039] In order to solve the above problems, Figures 1 to 6 As shown, the present invention provides a testing device to improve the accuracy of signal transmission and extend the distance of the power test loop.

[0040] like Figure 1 and Figure 4 As shown, specifically, the testing device includes a sorter 1, an adapter 2, a first connecting line 3 and a second connecting line 4, wherein: the sorter 1 includes a first power terminal 11 and a first signal terminal 12; the adapter 2 includes a second power terminal 21 and a second signal terminal 22; the two ends of the first connecting line 3 are electrically connected to the first power terminal 11 and the second power terminal 21 respectively, and the first connecting line 3 is used to transmit power current; the two ends of the second connecting line 4 are electrically connected to the first signal terminal 12 and the second signal terminal 22 respectively, and the second connecting line 4 is used to transmit signal current.

[0041] In the test device provided by the embodiment of the present invention, the sorter 1 is used to be electrically connected to the semiconductor 5, the adapter 2 is used to be electrically connected to the tester, and the first connecting line 3 and the second connecting line 4 are respectively used to transmit power current and signal current between the sorter 1 and the adapter 2, so that the power current and the signal current are routed separately, avoiding high and low voltage crosstalk caused by using the same cable to transmit power current and signal current, effectively reducing the noise of the power test loop, so that the signal transmitted between the sorter 1 and the adapter 2 is more real and complete, and can also extend the power test loop distance between the sorter 1 and the adapter 2, so that the test device can be applied to more application scenarios.

[0042] The first power terminal 11 and the first signal terminal 12 are provided on the test claw of the sorter 1 , which is used to contact the semiconductor chip 5 and collect data. The adapter 2 is a circuit board for receiving data from the sorter 1 .

[0043] like Figures 4 and 5 As shown, the first connecting line 3 includes two spaced copper strips 31. The two ends of each copper strip 31 are electrically connected to the first power terminal 11 and the second power terminal 21, respectively. The current flowing through the two copper strips 31 flows in opposite directions. The two ends of each copper strip 31 can be welded to the first power terminal 11 and the second power terminal 21, respectively. Compared to ordinary copper-core cables, the contact area between the copper strips 31 and the first power terminal 11 and the second power terminal 21 is larger, providing better contact and being able to withstand higher currents. This improves the stability and safety of the first connecting line 3 in transmitting power current between the sorting machine 1 and the adapter 2.

[0044] like Figures 4 and 5As shown, specifically, the first power terminal 11 includes a first positive terminal 111 and a first negative terminal 112 arranged at intervals, and the second power terminal 21 includes a second positive terminal 211 and a second negative terminal 212 arranged at intervals. The two copper strips 31 are respectively denoted as a first copper strip 31a and a second copper strip 31b. The ends of the first copper strip 31a are electrically connected to the first positive terminal 111 and the second positive terminal 211, respectively, and the ends of the second copper strip 31b are electrically connected to the first negative terminal 112 and the second negative terminal 212, respectively.

[0045] like Figure 5 As shown, the first connecting line 3 also includes a heat shrink tubing 32, which is wrapped around the outer circumference of the two copper strips 31. The heat shrink tubing 32 can provide insulation protection for the copper strips 31, preventing current leakage, short circuits, and other phenomena. It also prevents the copper strips 31 from being exposed to the outside for a long time, which may cause wear or aging, thereby improving the safety and reliability of the first connecting line 3 and extending its service life. Specifically, the number of heat shrink tubing 32 can be one, with one heat shrink tubing 32 wrapped around the outer circumference of the two copper strips 31 and providing insulation protection for both copper strips 31. Alternatively, the number of heat shrink tubing 32 can be two, with two heat shrink tubing 32 respectively wrapped around the outer circumference of the two copper strips 31 and providing insulation protection for both copper strips 31.

[0046] like Figures 4 and 5 As shown, in one embodiment, the two copper strips 31 are located in the same plane, the copper strips 31 extend in a straight line, and the two copper strips 31 are parallel to each other. Specifically, the two copper strips 31 extending in a straight line and arranged in parallel at intervals can be set in the same plane by a heat shrink tubing 32. In this way, the movement trajectory of the power current between the sorting machine 1 and the adapter 2 in each copper strip 31 is the shortest path, and the return area is minimized, thereby reducing the loop inductance of the first connecting line 3. Of course, in other embodiments, the two copper strips 31 can also be stacked according to actual needs; or, the copper strips 31 can also be curved, and the two copper strips 31 can also be at an angle to each other. As long as it is ensured that the two copper strips 31 can normally transmit power current between the sorting machine 1 and the adapter 2, the embodiment of the utility model is not specifically limited here.

[0047] like Figure 2 、 Figure 3 and Figure 6As shown, the second connection line 4 includes a signal line 41 and a ground line 42 arranged at intervals. The two ends of the signal line 41 are electrically connected to the first signal terminal 12 and the second signal terminal 22, respectively. The sorting machine 1 also includes a first ground terminal 13, and the adapter 2 also includes a second ground terminal 23. The two ends of the ground line 42 are electrically connected to the first ground terminal 13 and the second ground terminal 23, respectively. The currents flowing through the signal line 41 and the ground line 42 are in opposite directions. The two ends of the signal line 41 can be welded to the first signal terminal 12 and the second signal terminal 22, respectively, and the two ends of the ground line 42 can be welded to the first ground terminal 13 and the second ground terminal 23, respectively. The signal line 41 is used to transmit signals between the sorting machine 1 and the adapter 2, and the ground line 42 is used for grounding. Since the currents flowing through the signal line 41 and the ground line 42 are in opposite directions, the magnetic fields generated by the signal line 41 and the ground line 42 can cancel each other out, thereby ensuring the integrity of the signal transmitted by the signal line 41.

[0048] like Figure 1 and Figure 4 As shown, there are at least three second connection lines 4, and the second connection lines 4 are arranged at intervals. Each second connection line 4 can be used to transmit currents of different signals, or two or more second connection lines 4 can jointly transmit currents of the same signal, so that the signal transmission is more realistic and complete, and the test device can be applied to more application scenarios.

[0049] like Figures 2 to 3 As shown, there are at least three first signal terminals 12, which are arranged in a one-to-one correspondence with the signal lines 41. There are at least three second signal terminals 22, which are arranged in a one-to-one correspondence with the signal lines 41. The two ends of each signal line 41 are electrically connected to the corresponding first signal terminal 12 and second signal terminal 22. Specifically, when there are three second connection lines 4, three first signal terminals 12, and three second signal terminals 22, the three signal lines 41 of the second connection lines 4 are respectively designated as a first signal line 41a, a second signal line 41b, and a third signal line 41c. The three first signal terminals 12 are respectively designated as a signal terminal 1 12a, a signal terminal 2 12b, and a signal terminal 3 12c. The three second signal terminals 22 are respectively designated as a signal terminal 4 22a, a signal terminal 5 22b, and a signal terminal 6 22c. The first signal line 41a has two ends electrically connected to signal terminal 1 12a and signal terminal 4 22a, respectively. The second signal line 41b has two ends electrically connected to signal terminal 2 12b and signal terminal 5 22b, respectively. The third signal line 41c has two ends electrically connected to signal terminal 3 12c and signal terminal 6 22c, respectively. Furthermore, there is only one first ground terminal 13 and one second ground terminal 23. The ground lines 42 of the three second connection lines 4 each have two ends electrically connected to the first ground terminal 13 and the second ground terminal 23, respectively.

[0050] like Figures 2 to 4 As shown, in one embodiment, when the semiconductor 5 is an IGBT, the semiconductor 5 generally includes three pins: G, C, and E. Each pin corresponds to the S terminal and the F terminal, that is, the six terminals GS, GF, CS, CF, ES, and EF. In the sorting machine 1, the first positive terminal 111 and the first negative terminal 112 correspond to the CF and EF terminals of the semiconductor 5, respectively. The signal terminal 1 12a, the signal terminal 2 12b, and the signal terminal 3 12c correspond to the CS, GF, and GS terminals of the semiconductor 5, respectively. The first ground terminal 13 corresponds to the ES terminal of the semiconductor 5. In the adapter 2, the second positive terminal 211 and the second negative terminal 212 correspond to the CF and EF terminals of the semiconductor 5, respectively. The signal terminal 4 22a, the signal terminal 5 22b, and the signal terminal 6 22c correspond to the CS, GF, and GS terminals of the semiconductor 5, respectively. The second ground terminal 23 corresponds to the ES terminal of the semiconductor 5. During operation, the drive signal current sequentially passes through the tester's GF terminal, signal terminal five 22b, second signal line 41b, signal terminal two 12b, the IGBT's G terminal, signal terminal three 12c, third signal line 41c, signal terminal six 22c, and the tester's GS terminal, forming a drive signal current loop. The power current sequentially passes through the tester's CF terminal, second positive terminal 211, first copper strip 31a, first positive terminal 111, IGBT's C terminal, first negative terminal 112, second copper strip 31b, second negative terminal 212, and the tester's EF terminal, forming a power current loop.

[0051] like Figure 1 As shown, each second connection line 4 includes a first connection segment 401, an extension segment 402, and a second connection segment 403, which are connected in sequence. The first connection segment 401 is electrically connected to the first signal terminal 12 and the first ground terminal 13, and the second connection segment 403 is electrically connected to the second signal terminal 22 and the second ground terminal 23. The extension segments 402 extend in a straight line, and the extension segments 402 are parallel to each other. This ensures that the signal current between the sorting machine 1 and the adapter 2 follows the shortest path within each extension segment 402, minimizing the return flow area. This reduces the loop inductance of the second connection line 4 and allows multiple second connection lines 4 to be arranged neatly for easier wiring.

[0052] like Figure 6 As shown, the second connection line 4 further includes a sheath 43 covering the outer periphery of the signal line 41 and the ground line 42. The sheath 43 can provide insulation protection for the signal line 41 and the ground line 42, preventing current leakage, short circuits, and the like. It also prevents the signal line 41 and the ground line 42 from being exposed to the outside for a long time, thereby preventing wear and aging, thereby improving the safety and reliability of the second connection line 4 and extending its service life.

[0053] In one embodiment, the signal line 41 and the ground line 42 are silver-plated conductors. The silver-plated conductor can effectively shield the interference of the external environment on the signal, so that the signal transmitted between the adapter 2 and the sorting machine 1 is more real and complete, thereby also being able to extend the power test loop distance between the sorting machine 1 and the adapter 2, so that the test device can be applied to more application scenarios. Of course, in other embodiments, the signal line 41 and the ground line 42 can also be made of other materials such as copper wire and aluminum wire. As long as it is ensured that the second connecting line 4 can normally transmit the signal current between the sorting machine 1 and the adapter 2, the embodiment of the utility model does not make specific restrictions here.

[0054] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0055] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, all of which fall within the scope of protection of the present application. Therefore, the scope of patent protection for the present application shall be determined by the appended claims.

Claims

1. A testing device, characterized in that: include: A sorting machine (1) comprising a first power terminal (11) and a first signal terminal (12); The adapter (2) includes a second power terminal (21) and a second signal terminal (22); a first connecting line (3), two ends of which are electrically connected to the first power terminal (11) and the second power terminal (21), respectively, and the first connecting line (3) is used to transmit power current; as well as, The second connecting line (4) has two ends electrically connected to the first signal terminal (12) and the second signal terminal (22), respectively. The second connecting line (4) is used to transmit signal current.

2. The testing device according to claim 1, characterized in that The first connecting line (3) comprises two spaced copper strips (31), the two ends of each copper strip (31) being electrically connected to the first power terminal (11) and the second power terminal (21), respectively, and the currents flowing through the two copper strips (31) are in opposite directions.

3. The testing device according to claim 2, characterized in that The first connecting line (3) further comprises a heat shrink tubing (32), and the heat shrink tubing (32) is coated on the outer periphery of the two copper strips (31).

4. The testing device according to claim 2, characterized in that The two copper strips (31) are located in the same plane; and / or, The copper strips (31) extend in a straight line, and the two copper strips (31) are parallel to each other.

5. The testing device according to claim 2, characterized in that: The first power terminal (11) includes a first positive terminal (111) and a first negative terminal (112) arranged at intervals, and the second power terminal (21) includes a second positive terminal (211) and a second negative terminal (212) arranged at intervals; Two ends of one of the copper strips (31) are electrically connected to the first positive terminal (111) and the second positive terminal (211), respectively, and two ends of the other copper strip (31) are electrically connected to the first negative terminal (112) and the second negative terminal (212), respectively.

6. The testing device according to claim 1, wherein: The second connecting circuit (4) comprises a signal line (41) and a ground line (42) arranged at intervals, and two ends of the signal line (41) are electrically connected to the first signal terminal (12) and the second signal terminal (22) respectively; The sorting machine (1) further includes a first grounding terminal (13), the adapter (2) further includes a second grounding terminal (23), the two ends of the grounding wire (42) are electrically connected to the first grounding terminal (13) and the second grounding terminal (23), respectively, and the currents flowing through the signal line (41) and the grounding wire (42) are in opposite directions.

7. The testing device according to claim 6, characterized in that The number of the second connecting lines (4) is at least three, and the second connecting lines (4) are arranged at intervals.

8. The testing device according to claim 7, characterized in that: The number of the first signal terminals (12) is at least three, and they are arranged in a one-to-one correspondence with the signal lines (41); the number of the second signal terminals (22) is at least three, and they are arranged in a one-to-one correspondence with the signal lines (41); Both ends of each signal line (41) are electrically connected to the corresponding first signal terminal (12) and the second signal terminal (22).

9. The testing device according to claim 7, characterized in that: Each second connecting line (4) comprises a first connecting section (401), an extension section (402) and a second connecting section (403) connected in sequence, wherein the first connecting section (401) is electrically connected to the first signal terminal (12) and the first ground terminal (13), and the second connecting section (403) is electrically connected to the second signal terminal (22) and the second ground terminal (23). The extension sections (402) extend in a straight line, and the extension sections (402) are parallel to each other.

10. The testing device according to claim 6, characterized in that: The second connecting line (4) further includes a sheath (43) covering the outer periphery of the signal line (41) and the ground line (42); and / or, The signal line (41) and / or the ground line (42) are silver-plated conductors.

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