Tool for disassembling molecular pump

Abstract

The utility model discloses a tool for disassembling a molecular pump. The tool comprises a supporting piece, a lap joint piece, a first pulling-out part and a second pulling-out part. The supporting piece is used for being inserted into the shell from the air inlet of the shell and erected on a rotating shaft of the molecular pump. The lap joint piece is provided with a first through hole and a second through hole, and the lap joint piece is perpendicularly fixed to the supporting piece and suspended above the flange structure of the shell. The first pulling-out component comprises a first bolt penetrating through the first through hole of the lap joint piece and a bolt containing hole of the flange structure, and a first nut matched with the first bolt and used for jointly connecting the lap joint piece and the flange structure. The second pulling-out component comprises a second bolt penetrating through the second through hole of the lap joint piece and the other bolt containing hole of the flange structure, and a second nut matched with the second bolt and used for jointly connecting the lap joint piece and the flange structure. The tool can ensure the sealing performance between the shell of the molecular pump and the base when the shell of the molecular pump is mounted on the base again, and can also improve the dismounting efficiency of the molecular pump.

Description

Technical Field

[0001] The embodiments of the present utility model relate to the technical field of molecular pump disassembly tools, and more specifically, the present utility model relates to a tool for disassembling a molecular pump. Background Art

[0002] In the field of vacuum technology, molecular pumps, as a crucial vacuum-generating device, are widely used in high-tech fields such as semiconductor manufacturing, materials science research, and aerospace. With their efficient and stable pumping performance, molecular pumps play an irreplaceable role in applications requiring high or ultra-high vacuum environments. However, during routine maintenance and overhaul of molecular pumps, disassembly presents a significant technical challenge.

[0003] The molecular pump includes a base, a housing mounted on the base and having an air inlet and an air outlet, a motor mounted on the base and located within the housing, a worm gear fixedly mounted on the motor's rotating shaft and located within the housing, a filter cover that can be removed from a flange structure at the top of the housing and is used to cover the air inlet, and a sealing ring that is compressed between the housing and the base to ensure that the housing and the base are sealed. During routine maintenance and overhaul of the molecular pump, the filter cover is first removed from the air inlet. A pointed tool, such as a screwdriver, is then inserted into the gap between the housing and the base, and the housing is lifted to separate the housing from the base, thereby achieving the purpose of routine maintenance and overhaul of the molecular pump. However, this disassembly method has some disadvantages: tools such as screwdrivers can easily rub against the surface of the molecular pump's housing or base during operation, causing scratches. The molecular pump's housing is typically made of precision-machined, high-strength materials. Once the surface is scratched, it not only affects its aesthetics but, more importantly, may damage the sealing performance between the housing and the base, resulting in a decrease in vacuum and even shortening the service life of the molecular pump. Utility Model Content

[0004] In order to solve one or more of the technical problems mentioned above, the present invention provides a tool for disassembling a molecular pump, which can ensure the structural integrity of the molecular pump to ensure the sealing between the housing of the molecular pump and the base when the housing is reinstalled on the base, and can also reduce the disassembly time required by the operator during disassembly, thereby improving the disassembly efficiency of the molecular pump and reducing the labor burden of the user.

[0005] The present invention provides a tool for disassembling a molecular pump, the molecular pump comprising a base, a housing provided on the base and having an air inlet and an air outlet, a motor provided on the base and located within the housing, a worm gear fixedly sleeved on a rotating shaft of the motor and located within the housing, and a filter cover removed from a flange structure on the top of the housing and used to cover the air inlet, the tool comprising:

[0006] A support member, which is used to be inserted into the housing through the air inlet of the housing and stand on the rotating shaft of the molecular pump;

[0007] a bridge piece having a first through hole and a second through hole, wherein the bridge piece is vertically fixed to the support member and suspended above the flange structure of the housing;

[0008] a first extraction component comprising a first bolt passing through the first through hole of the bridging member and a bolt-receiving hole of the flange structure, and a first nut cooperating with the first bolt and used to connect the bridging member and the flange structure; and

[0009] The second extraction component includes a second bolt passing through the second through hole of the bridging member and another bolt-receiving hole of the flange structure, and a second nut matched with the second bolt and used to connect the bridging member and the flange structure.

[0010] Furthermore, the connecting piece includes a strip-shaped or rod-shaped connecting piece body, and the first through hole and the second through hole are respectively provided at two ends of the connecting piece body.

[0011] Furthermore, the first through hole and the second through hole are both waist-shaped holes, and the length direction of each waist-shaped hole is the same as the length direction of the connecting piece body.

[0012] Furthermore, the support member is detachably provided in a middle area of ​​the connecting member, and the first through hole and the second through hole are mirror-symmetrical about a central axis of the support member.

[0013] Furthermore, the support member includes a screw rod passing through the center of the joint member, and a first locking nut cooperating with the screw rod and a second locking nut cooperating with the screw rod, and the first locking nut and the second locking nut are respectively located on both sides of the joint member.

[0014] Furthermore, the first nut and the second nut are both located on a side of the connecting piece facing away from the molecular pump.

[0015] Furthermore, the first pulling-out component further includes a first washer sleeved on the first bolt and located between the bridging piece and the operating end of the first bolt; the second pulling-out component further includes a second washer sleeved on the second bolt and located between the bridging piece and the operating end of the second bolt.

[0016] Furthermore, the first washer and the second washer are both flat washers.

[0017] Furthermore, the tool is made of metal material.

[0018] Furthermore, the metal material is steel or aluminum alloy.

[0019] The tool provided in this embodiment is specifically for disassembling the molecular pump, which abandons the cumbersome method of relying on a screwdriver to insert into the gap between the molecular pump housing and the base and prying to implement disassembly in the traditional method. Under the support of the support and the lap joint, the tool innovatively uses the first pull-out part and the second pull-out part to drive the flange structure originally used to install the filter cover on the molecular pump to move. Since the flange structure is part of the housing, the housing can be subjected to the force of the first pull-out part and the second pull-out part and move away from the base. This design cleverly borrows the original structural features of the molecular pump (i.e., the flange structure) to separate the housing and the base, effectively avoiding any form of damage to the housing or the base, thereby ensuring the integrity of their structures. This feature is crucial to ensuring the sealing performance of the housing and the base during subsequent reassembly. In addition, compared to the traditional method that requires precise alignment of the narrow gap between the housing and the base, the use of this tool greatly simplifies the operation process, significantly reduces the operation time, and effectively reduces the labor intensity and physical exertion of the operator. This improvement not only improves work efficiency, but also optimizes the operating experience, making the disassembly of the molecular pump easier and faster. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The above and other objects, features and advantages of the exemplary embodiments of the present invention will become readily understood by reading the detailed description below with reference to the accompanying drawings. In the accompanying drawings, several embodiments of the present invention are shown in an exemplary and non-limiting manner, and the same or corresponding reference numerals represent the same or corresponding parts, wherein:

[0021] Figure 1 A schematic structural diagram of a tool for disassembling a molecular pump provided by an embodiment of the present utility model is shown;

[0022] Figure 2 A tool for disassembling a molecular pump provided by an embodiment of the present utility model and a schematic diagram of the structure of the molecular pump involved in the embodiment of the present utility model are shown;

[0023] Figure 3 A schematic diagram of the structure of a tool for disassembling a molecular pump provided by an embodiment of the present utility model is shown when disassembling the molecular pump.

[0024] In the picture:

[0025] 1. Support member; 11. Screw; 12. First locking nut; 13. Second locking nut;

[0026] 2. Bridge piece; 21. First through hole; 22. Second through hole; 23. Bridge piece body;

[0027] 3. First extraction member; 31. First bolt; 32. First nut; 33. First washer;

[0028] 4. Second extraction member; 41. Second bolt; 42. Second nut; 43. Second washer;

[0029] 100. Base; 200. Housing; 201. Flange structure. DETAILED DESCRIPTION

[0030] The following will be combined with the accompanying drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the embodiments described are part of the embodiments of the present disclosure, not all of them. Based on the embodiments of the present disclosure, all other embodiments obtained by those skilled in the art without making any creative efforts shall fall within the scope of protection of the present disclosure.

[0031] Figure 1 FIG. 1 shows a schematic structural diagram of a tool for disassembling a molecular pump provided in this embodiment. Figure 2 The figure shows a tool for disassembling a molecular pump provided by this embodiment and a schematic diagram of the structure of the molecular pump involved in the embodiment of the utility model. Figure 1 and Figure 2 As shown, this embodiment provides a tool for disassembling a molecular pump, which includes a base 100, a housing 200 provided on the base 100 and having an air inlet and an air outlet, a motor provided on the base 100 and located in the housing 200, a worm gear fixedly mounted on the rotating shaft of the motor and located in the housing 200, and a filter cover that has been removed from the flange structure 201 on the top of the housing 200 and is used to cover the air inlet. The tool includes a support member 1, a bridge member 2, a first pull-out component 3, and a second pull-out component 4. The support member 1 is used to insert the housing 200 from the air inlet of the housing 200 and stand on the rotating shaft of the molecular pump. The bridge member 2 has a first through hole 21 and a second through hole 22. The bridge member 2 is vertically fixed to the support member 1 and hangs above the flange structure 201 of the housing 200. First extraction component 3 includes a first bolt 31 that passes through first through-hole 21 of bridging member 2 and a bolt-receiving hole in flange structure 201, and a first nut 32 that cooperates with first bolt 31 and is used to connect bridging member 2 and flange structure 201. Second extraction component 4 includes a second bolt 41 that passes through second through-hole 22 of bridging member 2 and another bolt-receiving hole in flange structure 201, and a second nut 42 that cooperates with second bolt 41 and is used to connect bridging member 2 and flange structure 201.

[0032] This embodiment provides a tool for disassembling a molecular pump. The support member 1 is inserted into the housing 200 and erected on the rotating shaft of the molecular pump to fix the support member 1 and the bridge member 2. At the same time, the first pull-out member 3 and the second pull-out member 4 located on the bridge member 2 are operated. The end faces of the first nut 32 of the first pull-out member 3 and the second nut 42 of the second pull-out member 4 abut against the side of the flange structure 201 close to the base 100, thereby causing the flange structure 201 to move away from the base 100.

[0033] The tool for disassembling the molecular pump provided in this embodiment abandons the cumbersome method of relying on a screwdriver to insert into the gap between the molecular pump housing 200 and the base 100 and prying to implement disassembly in the traditional method. Under the support of the support member 1 and the lap joint 2, the tool innovatively uses the first pull-out component 3 and the second pull-out component 4 to drive the flange structure 201 originally used to install the filter cover on the molecular pump to move. Since the flange structure 201 is part of the housing 200, the housing 200 can be subjected to the force of the first pull-out component 3 and the second pull-out component 4 and move away from the base 100. This design cleverly borrows the original structural features of the molecular pump (i.e., the flange structure 201) to separate the housing 200 and the base 100, effectively avoiding any form of damage to the housing 200 or the base 100, thereby ensuring that their structures are intact. This feature is crucial to ensuring the sealing performance of the housing 200 and the base 100 during subsequent reassembly. Furthermore, compared to the traditional method, which requires precise alignment of the narrow gap between the housing 200 and the base 100, the use of this tool greatly simplifies the operation process, significantly reduces operation time, and effectively reduces the operator's labor intensity and physical exertion. This improvement not only improves work efficiency but also optimizes the operating experience, making the disassembly of the molecular pump easier and faster.

[0034] It should be noted that when the molecular pump is not undergoing routine maintenance and overhaul, the filter screen cover of the molecular pump is always installed on the flange structure 201 and covers the air inlet. Since the application scenario of the tool provided in this embodiment is the situation where the molecular pump undergoes routine maintenance and overhaul, the filter screen cover is not shown in the accompanying drawings, and the other structures of the molecular pump described are only for clarifying the general structure of the molecular pump, which has no direct relationship with the disassembly of the outer shell 200 and the base 100. Therefore, the specific structures of the air inlet, air outlet, motor and worm gear are not shown in the accompanying drawings.

[0035] Furthermore, the connecting piece 2 includes a strip-shaped or rod-shaped connecting piece body 23, and the first through hole 21 and the second through hole 22 are respectively arranged at the two ends of the connecting piece body 23. The strip-shaped or rod-shaped connecting piece body 23 can not only provide effective support for the tool as a whole when the shell 200 is pulled out using the tool, but also reduce the space occupied by the tool. The strip-shaped or rod-shaped connecting piece body 23 can also be easy for the operator to hold, so as to facilitate quick disassembly and carrying of the tool.

[0036] Furthermore, the first through hole 21 and the second through hole 22 are both waist-shaped holes, and the length direction of each waist-shaped hole is the same as the length direction of the bridging member body 23, so as to adjust the first pull-out component 3 located in the first through hole 21 and the second pull-out component 4 located in the second through hole 22 along the length direction of the bridging member body 23, so that the first pull-out component 3 and the second pull-out component 4 can be adjusted to adapt to flange structures 201 of different radii, thereby improving the applicability of the tool.

[0037] Furthermore, the support member 1 is detachably arranged in the middle area of ​​the lap member 2, and the first through hole 21 and the second through hole 22 are mirror-symmetrical about the central axis of the support member 1, so as to keep the supporting effect of the support member 1 on both sides of the lap member 2 consistent, and prevent the lap member 2 from breaking due to uneven force when the first pulling member 3 and the second pulling member pull out the shell 200.

[0038] Furthermore, the support member 1 includes a screw 11 passing through the center of the joint 2, and a first locking nut 12 cooperating with the screw 11 and a second locking nut 13 cooperating with the screw 11. The first locking nut 12 and the second locking nut 13 are respectively located on both sides of the joint 2, so that the position of the joint 2 along the axial direction of the screw 11 can be adjusted by the first locking nut 12 and the second locking nut 13, and the joint 2 can be fixed on the screw 11 after adjusting the joint 2 to the desired position to adapt to molecular pumps of different specifications, thereby improving the applicability of this tool.

[0039] Specifically, the first nut 32 and the second nut 42 are both located on the side of the bridge member 2 facing away from the molecular pump, so that by screwing the first nut 32 and the second nut 42, the corresponding first bolt 31 and the second bolt 41 are driven to move, thereby forcing the first bolt 31 and the second bolt 41 to abut against the end surface of the flange structure 201 close to the base 100, so that the housing 200 moves along with the first bolt 31 and the second bolt 41, thereby achieving the purpose of moving the housing 200 and the base 100 away from each other and disassembling the molecular pump. In addition, the arrangement on the side facing away from the molecular pump can prevent the first nut 32 and the second nut 42 from making hard contact with the molecular pump of the housing 200 when screwing the first nut 32 and the second nut 42, thereby avoiding scratching the surface of the flange structure 201.

[0040] Figure 3 FIG. 1 shows a schematic diagram of the structure of a tool for disassembling a molecular pump provided in this embodiment when disassembling a molecular pump. Figure 3 Combined with Figure 1 and Figure 2 As shown, the first extraction component 3 further includes a first washer 33 that is sleeved over the first bolt 31 and positioned between the bridging member 2 and the operating end of the first bolt 31. The second extraction component 4 further includes a second washer 43 that is sleeved over the second bolt 41 and positioned between the bridging member 2 and the operating end of the second bolt 41. The first and second washers 33 and 43 prevent the surface of the flange structure 201 near the base 100 from being scratched by the operating ends of the first and second bolts 31 and 41, and disperse the pressure exerted on the flange structure 201 by the operating ends of the first and second bolts 31 and 41, thereby improving the stability of the first and second bolts 31 and 41 when they abut against the flange structure 201.

[0041] It should be noted that the operating ends of the first bolt 31 and the second bolt 41 specifically refer to the heads of the bolts.

[0042] Preferably, the first washer 33 and the second washer 43 are both flat washers to further disperse the pressure exerted by the operating ends of the first bolt 31 and the second bolt 41 on the flange structure 201 .

[0043] Preferably, since the housing 200 is made of metal material and is relatively heavy, the tool is configured to be made of metal material to ensure that the tool has good stability when disassembling the molecular pump.

[0044] For example, the metal material is steel or aluminum alloy. In practical applications, the metal material of the tool can be selected based on the weight of different molecular pumps. For example, if the molecular pump is heavy, a steel tool can be selected to ensure that the tool can withstand greater pressure. If the molecular pump is light, an aluminum alloy tool can be selected to ensure that the tool can withstand a certain pressure while reducing the weight of the tool, making it easier for the operator to quickly disassemble and carry it.

[0045] In the above description of this application, unless otherwise expressly specified or limited, terms such as "fixed," "installed," "connected," or "connected" should be understood in a broad sense. For example, with respect to the term "connected," it can mean a fixed connection, a detachable connection, or an integral connection; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean internal communication between two elements or an interaction between two elements. Therefore, unless otherwise expressly defined in this application, those skilled in the art can understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0046] According to the above description of the present application, those skilled in the art may also understand that the terms used below, such as "upper", "length", "thickness", "top", "bottom", "inside", "outside", "axial" and other terms indicating orientation or position relationship are based on the orientation or position relationship shown in the drawings of the present application. They are only for the purpose of facilitating the explanation of the scheme of the present invention and simplifying the description, rather than explicitly or implicitly indicating that the device or element involved must have the specific orientation, be constructed and operated in a specific orientation. Therefore, the above-mentioned orientation or position relationship terms cannot be understood or interpreted as limitations on the scheme of the present invention.

[0047] In addition, the terms "first" or "second" used in this application to refer to numbers or ordinal numbers are used for descriptive purposes only and should not be understood as explicitly or implicitly indicating relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of this application, the meaning of "plurality" is at least two, such as two, three or more, etc., unless otherwise clearly and specifically defined.

[0048] Although multiple embodiments of the present invention have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided by way of example only. Those skilled in the art may conceive of many modifications, changes, and alternatives without departing from the concept and spirit of the present invention. It should be understood that in practicing the present invention, various alternatives to the embodiments of the present invention described herein may be adopted. The appended claims are intended to define the scope of protection of the present invention and therefore cover equivalents or alternatives within the scope of these claims.

Claims

1. A tool for disassembling a molecular pump, the molecular pump comprising a base, a housing provided on the base and having an air inlet and an air outlet, a motor provided on the base and located within the housing, a worm gear fixedly sleeved on a rotating shaft of the motor and located within the housing, and a filter cover removed from a flange structure on the top of the housing and used to cover the air inlet, characterized in that: The tools include: A support member, which is used to be inserted into the housing through the air inlet of the housing and stand on the rotating shaft of the molecular pump; a bridge piece having a first through hole and a second through hole, wherein the bridge piece is vertically fixed to the support member and suspended above the flange structure of the housing; a first extraction component comprising a first bolt passing through the first through hole of the bridging member and a bolt-receiving hole of the flange structure, and a first nut cooperating with the first bolt to connect the bridging member and the flange structure; and The second extraction component includes a second bolt passing through the second through hole of the bridging member and another bolt-receiving hole of the flange structure, and a second nut that cooperates with the second bolt to connect the bridging member and the flange structure.

2. The tool according to claim 1, characterized in that The connecting piece includes a strip-shaped or rod-shaped connecting piece body, and the first through hole and the second through hole are respectively provided at two ends of the connecting piece body.

3. The tool according to claim 2, characterized in that The first through hole and the second through hole are both waist-shaped holes, and the length direction of each waist-shaped hole is the same as the length direction of the connecting piece body.

4. The tool according to claim 1, characterized in that The support member is detachably arranged in a middle area of ​​the connecting member, and the first through hole and the second through hole are mirror-symmetrical with respect to a central axis of the support member.

5. The tool according to claim 4, characterized in that The support member includes a screw rod passing through the center of the lap joint, a first locking nut matched with the screw rod, and a second locking nut matched with the screw rod. The first locking nut and the second locking nut are respectively located on both sides of the lap joint.

6. The tool according to claim 1, characterized in that The first nut and the second nut are both located on a side of the connecting piece facing away from the molecular pump.

7. The tool according to claim 1, characterized in that The first extraction component further includes a first washer sleeved on the first bolt and located between the bridging piece and the operating end of the first bolt; the second extraction component further includes a second washer sleeved on the second bolt and located between the bridging piece and the operating end of the second bolt.

8. The tool according to claim 7, characterized in that The first washer and the second washer are both flat washers.

9. The tool according to claim 1, wherein The tool is made of metal material.

10. The tool according to claim 9, characterized in that The metal material is steel or aluminum alloy.

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