High-purity gas filtering system

Abstract

A high-purity gas filtering system comprises a raw material storage tank and further comprises at least two first-stage filters, at least two second-stage filters and at least two third-stage filters, and the single first-stage filter, the single second-stage filter and the single third-stage filter are connected through pipelines to form a single-group filtering line; the system comprises a plurality of groups of filtering lines, a discharging pipeline is arranged on a raw material storage tank, the discharging pipeline is branched and connected to an inlet of a first-stage filter in the plurality of groups of filtering lines, and the tail ends of the plurality of groups of filtering lines are connected to the same high-purity gas outlet pipe and extend to a next working section; the system further comprises a purging pipeline, the purging pipeline is divided into a plurality of branch pipelines which are connected to input pipelines of the filters respectively, the input pipelines of the filters are connected with second tail gas pipelines, a main pipeline of the discharging pipeline is provided with a first tail gas pipeline, and the first tail gas pipeline is connected to a tail gas outlet pipe. And the plurality of second tail gas pipelines are connected to the first tail gas pipeline. By the adoption of the structure, particle impurities in high-purity gas are effectively removed.

Description

Technical Field

[0001] The utility model relates to the technical field of high-purity gas filtration, in particular to a high-purity gas filtration system. Background Art

[0002] High-purity gases (HPGs) are a term used in the gas industry, typically referring to gases of a certain purity achieved using modern purification technology. Purity criteria vary for different gas types. For example, hydrogen, nitrogen, helium, and argon are generally considered high-purity gases if their purity is equal to or greater than 99.999%. Oxygen, on the other hand, is considered high-purity if its purity is 99.199%. For hydrocarbons, a purity of 99.99% is considered high-purity. High-purity gases have a wide range of applications. In the semiconductor industry, high-purity nitrogen, hydrogen, argon, and helium are used as carrier gases, shielding gases, and as base gases for preparing mixed gases. High-purity gases can be categorized as organic and inorganic based on their molecular structure.

[0003] High-purity gas not only has high requirements on impurity content, but also has stringent requirements on particle size. In addition, the particle size content of the gas also has a great impact on the purification process of high-purity gas and the service life of the equipment. Summary of the Invention

[0004] The technical problem to be solved by the utility model is to provide a high-purity gas filtering system for effectively removing particulate impurities in the high-purity gas.

[0005] In order to solve the above technical problems, the technical solution adopted by the present invention is as follows: a high-purity gas filtration system, including a raw material storage tank for storing high-purity gas, and at least two primary filters, a secondary filter and a tertiary filter, wherein the single primary filter, the secondary filter and the tertiary filter are connected by pipelines to form a single group of filtration circuits;

[0006] The system includes multiple groups of filtration lines. A discharge pipeline is provided on the raw material storage tank. The discharge pipeline branches and is connected to the inlet of the first-stage filter in the multiple groups of filtration lines. The tail ends of the multiple groups of filtration lines are connected to the same high-purity gas outlet pipe and extend to the next process section.

[0007] The system also includes a purge pipeline, which is divided into multiple branch pipelines and is respectively connected to the input pipeline of each filter. The input pipeline of each filter is connected to a second exhaust pipeline. The main line of the discharge pipeline is provided with a first exhaust pipeline, which is connected to the exhaust outlet pipe, and multiple second exhaust pipelines are all connected to the first exhaust pipeline.

[0008] In a preferred solution, the discharge pipeline is further connected to a purge pipeline via a pipeline, and a control valve is provided on the connecting pipeline.

[0009] In a preferred solution, a pneumatic regulating valve is provided on the discharge pipeline, a parallel pipeline is provided on one side of the pneumatic regulating valve, and a bypass valve is provided on the pipeline.

[0010] In a preferred solution, a bottom valve is provided on the first tail gas pipeline.

[0011] In a preferred solution, a filter control valve is provided on the discharge line branch connected to the primary filter, the secondary filter and the tertiary filter;

[0012] A purge control valve is provided on the purge line branch line connected to the front ends of the primary filter, the secondary filter and the tertiary filter.

[0013] In a preferred embodiment, the purge line input end is connected to at least one of a nitrogen main pipe and a helium main pipe.

[0014] In a preferred solution, the first-stage filter adopts a sintered filter element, and a drain valve is provided at the bottom of the first-stage filter;

[0015] The secondary filter and the tertiary filter adopt PP material filter elements.

[0016] In a preferred embodiment, the primary filter comprises a filter housing cap and a filter housing cover, the filter housing cap and the filter housing cover are fixed by a flange connection, a plug-in screw device is provided on the filter housing cap, and an air inlet and an air outlet are provided on both sides of the filter housing cap;

[0017] The outer wall of the filter housing is provided with a handrail, and the bottom of the filter housing is provided with a drain port;

[0018] There are two plug-in and rotating devices, and two filter elements are correspondingly installed on the plug-in and rotating devices.

[0019] In a preferred embodiment, the secondary filter and the tertiary filter include a filter housing cap and a filter housing cover, the filter housing cap and the filter housing cover are fixed by a flange connection, the filter housing cap is provided with an inserting and rotating device, and the filter housing cap is provided with an air inlet and an air outlet on both sides;

[0020] There is one plug-and-screw device, and a filter element is correspondingly installed on the plug-and-screw device.

[0021] The high-purity gas filtration system provided by the present invention has the following beneficial effects by adopting the above structure:

[0022] (1) Through multi-stage filtration, the particulate impurities in high-purity gas are gradually removed from large to small, which can ensure the purification quality of high-purity gas materials;

[0023] (2) Through the design of multiple filtration routes, different filtration routes can be selected according to actual needs, or when a route fails, it can be quickly switched to other routes to ensure the continuity and stability of the filtration operation;

[0024] (3) Each filter input line is connected to a second exhaust line, and a purge control valve is provided on the purge line branch connected to the front end of the first-stage filter, the second-stage filter, and the third-stage filter. This allows clean gas to be introduced through the purge line when the filter element needs to be cleaned or replaced, effectively removing impurities inside the filter without affecting the operation of other lines.

[0025] (4) The first-stage filter uses a sintered filter element, which can ensure the removal of large particles of impurities while achieving the cleaning and recycling of the filter element. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0027] Figure 1 This is the pipeline diagram of the utility model.

[0028] Figure 2 This is a structural diagram of the first-stage filter of the utility model.

[0029] Figure 3 It is a schematic diagram of the structure of the two-stage filter and the three-stage filter of the utility model.

[0030] In the figure: primary filter 1, secondary filter 2, tertiary filter 3, nitrogen main pipe 4, helium main pipe 5, raw material storage tank 6, discharge pipeline 7, pneumatic regulating valve 8, bypass valve 9, first tail gas pipeline 10, second tail gas pipeline 11, purge pipeline 12, bottom valve 13, filter control valve 14, purge control valve 15, drain valve 16, high-purity gas outlet pipe 17, tail gas outlet pipe 18, filter shell cap 19, plug-in device 20, filter shell cover 21, handrail 22, flange 23. DETAILED DESCRIPTION

[0031] like Figure 1 In the embodiment, a high-purity gas filtration system includes a raw material storage tank 6 for storing high-purity gas, and at least two primary filters 1, a secondary filter 2, and a tertiary filter 3. The single primary filter 1, the secondary filter 2, and the tertiary filter 3 are connected by pipelines to form a single group of filtration circuits;

[0032] The system includes multiple groups of filtration lines. A discharge pipeline 7 is provided on the raw material storage tank 6. The discharge pipeline 7 branches and is connected to the inlet of the first-stage filter 1 in the multiple groups of filtration lines. The tail ends of the multiple groups of filtration lines are connected to the same high-purity gas outlet pipe 17 and extend to the next section.

[0033] The system also includes a purge pipeline 12, which is divided into multiple branch pipelines and is respectively connected to the input pipeline of each filter. The input pipeline of each filter is connected to a second exhaust pipeline 11. A first exhaust pipeline 10 is provided on the main line of the discharge pipeline 7. The first exhaust pipeline 10 is connected to the exhaust outlet pipe 18, and multiple second exhaust pipelines 11 are all connected to the first exhaust pipeline 10.

[0034] In a preferred solution, the discharge pipeline 7 is further connected to the purge pipeline 12 through a pipeline, and a control valve is provided on the connecting pipeline.

[0035] In a preferred solution, a pneumatic regulating valve 8 is provided on the discharge pipeline 7 , a parallel pipeline is provided on one side of the pneumatic regulating valve 8 , and a bypass valve 9 is provided on the pipeline.

[0036] In a preferred solution, a bottom valve 13 is provided on the first tail gas pipeline 10 .

[0037] In a preferred solution, a filter control valve 14 is provided on the branch pipes of the discharge pipe 7 connected to the primary filter 1, the secondary filter 2 and the tertiary filter 3;

[0038] A purge control valve 15 is provided on the branch pipelines of the purge pipeline 12 connected to the front ends of the primary filter 1 , the secondary filter 2 and the tertiary filter 3 .

[0039] In a preferred solution, the input end of the purge pipeline 12 is connected to at least one of a nitrogen main pipe 4 and a helium main pipe 5 .

[0040] In a preferred embodiment, the first-stage filter 1 adopts a sintered filter element, and a drain valve 16 is provided at the bottom of the first-stage filter 1;

[0041] The secondary filter 2 and the tertiary filter 3 are made of PP filter elements.

[0042] In a preferred embodiment, the primary filter 1 includes a filter housing cap 19 and a filter housing cover 21. The filter housing cap 19 and the filter housing cover 21 are connected and fixed by a flange 23. The filter housing cap 19 is provided with an inserting and rotating device 20. An air inlet and an air outlet are provided on both sides of the filter housing cap 19.

[0043] The outer wall of the filter housing 21 is provided with a handrail 22, and the bottom of the filter housing 21 is provided with a drain port;

[0044] There are two plug-in and rotating devices 20 , and two filter elements are correspondingly installed on the plug-in and rotating devices 20 .

[0045] In a preferred embodiment, the secondary filter 2 and the tertiary filter 3 include a filter housing cap 19 and a filter housing cover 21. The filter housing cap 19 and the filter housing cover 21 are connected and fixed by a flange 23. The filter housing cap 19 is provided with an inserting and rotating device 20. An air inlet and an air outlet are provided on both sides of the filter housing cap 19.

[0046] There is one inserting and rotating device 20 , and a filter element is correspondingly installed on the inserting and rotating device 20 .

[0047] The high-purity gas filtration system disclosed in this invention has the following features during the filtration operation:

[0048] Open the filter control valve 14 at the front end of one group of filter lines, and the high-purity gas in the raw material storage tank 6 is input into the single group of filter lines through the discharge pipeline 7, filtered in the primary filter 1, the secondary filter 2 and the tertiary filter 3, and then discharged from the high-purity gas outlet pipe 17.

[0049] In the above process, the pneumatic regulating valve 8 is used to control the pressure in the line. When a problem occurs in the control of the pneumatic regulating valve 8, the bypass valve 9 is used to temporarily discharge the material to avoid excessive pressure in the pipeline.

[0050] During the above process, the purge control valve 15 and the control valve on the second tail gas line 11 are kept in a closed state.

[0051] During purging operations:

[0052] A filter circuit is purged via the nitrogen main pipe 4 or the helium main pipe 5 by means of the purge line 12 , and the waste gas generated by the purge enters the first tail gas line 10 through the second tail gas line 11 and is output from the tail gas outlet pipe 18 .

[0053] During the above process, the filter control valve 14 remains closed.

[0054] To further prevent excessive pressure in the raw material storage tank 6 , when the pressure in the raw material storage tank 6 is abnormal, the bottom valve 13 is opened to release the pressure in the raw material storage tank 6 through the first tail gas line 10 to adjust the pressure in the tank.

Claims

1. A high-purity gas filtration system, comprising a raw material storage tank (6) for storing high-purity gas, characterized in that: It also includes at least two primary filters (1), secondary filters (2) and tertiary filters (3), wherein the single primary filter (1), the secondary filter (2) and the tertiary filter (3) are connected by pipelines to form a single filter circuit; The system includes multiple groups of filter lines, a discharge pipeline (7) is provided on the raw material storage tank (6), the discharge pipeline (7) branches and is connected to the inlet of the first-stage filter (1) in the multiple groups of filter lines, and the tail ends of the multiple groups of filter lines are connected to the same high-purity gas outlet pipe (17) and extend to the next section; The system further comprises a purge pipeline (12), the purge pipeline (12) being divided into a plurality of branch pipelines and respectively connected to the input pipeline of each filter, the input pipeline of each filter being connected to a second tail gas pipeline (11), a first tail gas pipeline (10) being provided on the main pipeline of the discharge pipeline (7), the first tail gas pipeline (10) being connected to the tail gas outlet pipe (18), and a plurality of second tail gas pipelines (11) being connected to the first tail gas pipeline (10).

2. A high-purity gas filtration system according to claim 1, characterized in that: The discharge pipeline (7) is also connected to the purge pipeline (12) via a pipeline, and a control valve is provided on the connecting pipeline.

3. A high-purity gas filtration system according to claim 1, characterized in that: The discharge pipeline (7) is provided with a pneumatic regulating valve (8), and a parallel pipeline is provided on one side of the pneumatic regulating valve (8), and a bypass valve (9) is provided on the pipeline.

4. A high-purity gas filtration system according to claim 1, characterized in that: A bottom valve (13) is provided on the first tail gas pipeline (10).

5. The high-purity gas filtration system according to claim 1, characterized in that: A filter control valve (14) is provided on a branch line of a discharge pipeline (7) connected to the primary filter (1), the secondary filter (2) and the tertiary filter (3); A purge control valve (15) is provided on a branch line of a purge line (12) connected to the front ends of the primary filter (1), the secondary filter (2) and the tertiary filter (3).

6. A high-purity gas filtration system according to claim 1, characterized in that: The input end of the purge pipeline (12) is connected to at least one of a nitrogen main pipe (4) and a helium main pipe (5).

7. The high-purity gas filtration system according to claim 1, characterized in that: The first-stage filter (1) adopts a sintered filter element, and a drain valve (16) is provided at the bottom of the first-stage filter (1); The secondary filter (2) and the tertiary filter (3) use filter elements made of PP material.

8. A high-purity gas filtration system according to claim 7, characterized in that: The primary filter (1) comprises a filter shell cap (19) and a filter shell cover (21), the filter shell cap (19) and the filter shell cover (21) are connected and fixed via a flange (23), a plug-in screw device (20) is provided on the filter shell cap (19), and an air inlet and an air outlet are provided on both sides of the filter shell cap (19); A handrail (22) is provided on the outer wall of the filter housing cover (21), and a drain port is provided at the bottom of the filter housing cover (21); There are two plug-in and rotating devices (20), and two filter cores are correspondingly installed on the plug-in and rotating devices (20).

9. A high-purity gas filtration system according to claim 7, characterized in that: The secondary filter (2) and the tertiary filter (3) include a filter shell cap (19) and a filter shell cover (21), the filter shell cap (19) and the filter shell cover (21) are connected and fixed via a flange (23), a plug-in screw device (20) is provided on the filter shell cap (19), and an air inlet and an air outlet are provided on both sides of the filter shell cap (19); There is one inserting and rotating device (20), and a filter element is correspondingly mounted on the inserting and rotating device (20).

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