Light box detection light source

Abstract

The utility model relates to the technical field of visual inspection, and provides a light box detection light source, which comprises a box body, a light guide plate, a light guide plate and a light guide plate, the lamp body is mounted in the box body; the diffusion plate is mounted in the box body and is opposite to the lamp body; light emitted by the lamp body is at least subjected to twice diffuse reflection of the diffusion plate and the diffuse reflection wall and then is emitted outwards from the light outlet. According to the utility model, the light emitted from the light outlet can become more uniform, and the irradiation intensity of the light is improved, so that a camera can obtain a clear image in the image taking process, the situation that some defects cannot be detected is avoided, the use of an area light source is reduced, and the detection cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of visual detection, in particular to a light box detection light source. Background Art

[0002] Currently, in the process of defect detection on silicon wafers, a light box light source is usually used for detection. This light box detection light source generally uses a surface light source to illuminate the object to be tested, and then the object to be tested is photographed by a camera to obtain the characteristic defects of the object to be tested.

[0003] However, the current vision industry has increasingly higher requirements for light box vision projects for silicon wafer inspection. For some light boxes that can be compatible with various inspection requirements, such as silicon wafer defect inspection, appearance inspection, positioning inspection, and external dimension inspection, etc., to be compatible with so many requirements, traditional light box light sources have illumination limitations due to the use of surface light sources of multiple different colors. The illumination uniformity cannot meet the inspection requirements, which can easily cause a certain inspection requirement of the silicon wafer to be unable to be completed, resulting in some defects not being detected, affecting the user experience. Utility Model Content

[0004] In view of the shortcomings of the existing technology, the purpose of the present invention is to provide a light box detection light source that can meet the uniformity requirements of detection and improve the defect detection capability.

[0005] In order to solve the above problems, the present invention provides the following technical solutions:

[0006] A light box detection light source, comprising:

[0007] A box body, wherein the inner wall of the box body is configured as a diffuse reflection wall, and the box body is provided with a detection port and a light outlet;

[0008] A lamp body is installed inside the box;

[0009] A diffusion plate is installed inside the box and opposite to the lamp body;

[0010] The light emitted from the lamp body undergoes at least two diffuse reflections from the diffuse plate and the diffuse reflection wall, and then is emitted outward from the light outlet.

[0011] In one embodiment, the box body includes a side panel and a bottom panel, the light outlet is arranged on the bottom panel, the diffuse reflection wall is arranged on the inner wall of the side panel, the lamp body includes a first lamp body, the first lamp body is arranged on the side of the bottom panel away from the light outlet, and the diffuse plate is installed on the direction of the first lamp body away from the bottom panel.

[0012] In one embodiment, the box body further includes a top plate arranged opposite to the bottom plate, and the detection port is arranged on the top plate.

[0013] In an embodiment, the lamp body further comprises a second lamp body, the second lamp body is arranged on the inner wall of the side plate, and the diffusion plate is located between the second lamp body and the first lamp body.

[0014] In an embodiment, the box body further comprises a driving frame located at the detection opening, the driving frame is used for mounting a camera, and the driving frame is provided with a driving mechanism for driving the camera to move in the first direction and / or the second direction.

[0015] In an embodiment, the box body further comprises a support frame, the side plates are all mounted on the support frame, and the support frame is made of an aluminum alloy material.

[0016] In an embodiment, the bottom plate is provided with a mounting groove, and the first lamp body is mounted in the mounting groove.

[0017] In an embodiment, the diffusion plate is mounted in the slot of the mounting groove and covers the mounting groove, and the diffusion plate is arranged opposite to the first lamp body.

[0018] In an embodiment, the second lamp body comprises four strip-shaped lamps, and the four strip-shaped lamps are arranged on the inner sides of different surfaces of the side plates.

[0019] In an embodiment, the light box detection light source further comprises a light transmission plate mounted on the light outlet.

[0020] The lamp box detection light source has the advantages that the light emitted by the lamp body is subjected to twice diffusion reflection of the diffusion plate and the diffusion reflection wall and then is emitted outward from the light outlet, so that the uniformity of the light emitted from the light outlet is improved, the irradiation intensity is improved, the camera can obtain a clear image in the image taking process, the situation that some defects cannot be detected is avoided, the use of the area light source is reduced, and the detection cost is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 It is a perspective view of one of the embodiments of the lamp box detection light source of the utility model;

[0022] Figure 2 It is a sectional view of one of the embodiments of the lamp box detection light source of the utility model;

[0023] Figure 3 It is a perspective view of one of the embodiments of the lamp box detection light source of the utility model; Figure 2

[0024] Figure 4 It is an exploded view of one of the embodiments of the lamp box detection light source of the utility model.

[0025] REFERENCE SIGNS:

[0026] ​100, light box detection light source; 110, box body; 121, diffuse reflection wall; 11a, detection area; 200, measured object; 111, support frame; 300, camera; 112, driving frame; 113, lamp body; 131, first lamp body; 132, second lamp body; 141, side plate; 142, bottom plate; 13a, mounting groove; 151, strip-shaped lamp; 114, diffuser plate; 115, light transmission plate; 13b, embedding slot; 13c, detection port; 161, driving mechanism. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the present application.

[0028] In addition, the terms "first", "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0029] Please refer to Figure 1-4As shown, this embodiment provides a light box detection light source 100, which includes a box body 110, a support frame 111, a lamp body 113 and a diffuser 114, wherein the box body 110 is provided with an inner tank structure, the inner tank surface is a reflective surface, and the reflective surface of the inner tank in this embodiment is set as a diffuse reflection wall 121, and the box body 110 is provided with a detection port 13c and a light outlet 13d; a detection area 11a is provided below the box body 110, and the detection area 11a is used to place the object to be measured 200. It can be understood that the detection port 13c in this embodiment is used for the camera 300 to take an image of the object to be measured 200 placed in the detection area 11a for detection; the box body 110 also includes a drive frame 112 located at the detection port 13c, and the support frame 111 is installed on the box body. 110, a driving frame 112 for installing a camera 300 is provided on the top of the support frame 111. The camera 300 is installed on the driving frame 112 and faces the inside of the box 110. This embodiment selects 5 million pixels and 25 million pixels to cope with different types of objects under test 200, and the objects under test 200 are all silicon wafers; further, there is provided at least one lamp body 113, and at least one lamp body 113 is installed on the inside of the box 110, and a diffuser plate 114 is installed inside the box 110 and opposite to the lamp body 113; wherein, the light of at least one lamp body 113 passes through the diffuser plate 114 and irradiates the diffuse reflection wall 121, and is reflected twice by the diffuse reflection wall 121, and then emitted from the light outlet 13d to the detection area 11a.

[0030] According to the above scheme, preferably, in this embodiment, the lamp body 113 includes a first lamp body 132 and a second lamp body 131, the box body 110 includes a side panel 141 and a bottom panel 142, the first lamp body 132 is arranged on the side of the bottom panel 142 away from the light outlet 13d, and the diffuser 114 is installed in the direction of the first lamp body 132 away from the bottom panel 142. In this embodiment, the diffuser 114 is located between the second lamp body 131 and the first lamp body 132, and the first lamp body 132 is arranged opposite to the diffuser 114. The illumination directions of the first lamp body 132 and the second lamp body 131 are different. The first lamp body 132 and the second lamp body 131 are both installed inside the box body 110, and the illumination directions of the first lamp body 132 and the second lamp body 131 are perpendicular to each other, and both are reflected toward the diffuse reflection wall 121 and reflected toward the detection area 11a through the diffuse reflection wall; optionally, in other embodiments, the second lamp body 131 and the diffuser 114 can also be arranged opposite to each other.

[0031] Optionally, the inner liner is precisely sprayed with white diffuse reflective paint using foreign machinery and equipment, completely replacing manual painting. This ensures high adhesion between the white paint and the inner liner, uniform distribution of particles, and optimal results.

[0032] Optionally, the second lamp body 131 in this embodiment uses a 3-chip 3-color high-power lamp bead; multiple lights of different colors can be emitted through one second lamp body 131.

[0033] Optionally, the box body 110 in this embodiment is made of a new material 5052, which has low density, high tensile strength and high elongation. The box body 110 material commonly used in the industry for light box light sources is galvanized sheet (high density and bulky). The use of this material can reduce the weight of the box body 110 and improve the convenience of installation and transportation; in addition, the four supporting columns of the support frame 111 arranged on the side of the box body 110 are made of European standard aluminum 1515, which ensures strength and stability, so that the flat plate on which the camera 300 bracket is mounted is relatively level with the bottom plate.

[0034] It can be understood that in this embodiment, the inner wall of the box 110 is set as a diffuse reflection surface, and the light from at least one lamp body 113 passes through the diffuse plate 114 and then irradiates the diffuse reflection wall 121, and is reflected twice by the diffuse reflection wall 121 and then irradiates the detection area 11a through the light outlet 13c, thereby making the light irradiated to the object to be measured 200 more uniform and improving the illumination intensity of the light, so that the camera 300 can obtain a clear image during the imaging process, avoiding the situation where certain defects cannot be detected, and reducing the use of surface light sources, thereby reducing the detection cost.

[0035] Optionally, the box body 110 structure in this embodiment is designed to be similar to the shape of an integrating sphere structure, the purpose of which is to achieve the effect of fully reflecting the light from the first lamp body 132 and the second lamp body 131, thereby avoiding the illumination limitations of traditional light box light sources due to the use of surface light sources of multiple different colors, so that its illumination effect meets the detection requirements and can provide the camera 300 with the ability to shoot the detection area 11a.

[0036] Specifically, the light outlet 13d is arranged on the bottom plate 142, the diffuse reflection wall 121 is arranged on the inner wall of the side plate 141, the first lamp body 132 is installed on the inner side of the side plate 141, and the second lamp panel is installed on the side of the bottom plate 142 facing the drive frame 112; the first lamp body 132 is arranged toward the first direction, the second lamp body 131 is arranged toward the second direction, and the first lamp body 132 is perpendicular to the second lamp body 131; that is, the irradiation direction of the first lamp body 132 and the irradiation direction of the second lamp body 131 are perpendicular to each other. The purpose of designing this structure is to enable the light of the first lamp body 132 to irradiate the side plate 141, through the diffuse reflection of the inner wall of the side plate 141, and to enable the light of the second lamp body 131 to irradiate the top of the box 110, and be reflected toward the bottom plate 142 and irradiate the detection area 11a.

[0037] In one embodiment, the box body further includes a top plate arranged opposite to the bottom plate, and the detection port is arranged on the top plate.

[0038] Preferably, the bottom plate 142 is arranged at the bottom end of the side plate 141 and connected with the side plate 141, and the bottom plate 142 is located at the upper side of the detection area 11a along the second direction, and the bottom plate 142 is provided with a mounting groove 13a on the side facing the driving frame 112, and the first lamp body 132 is mounted in the mounting groove 13a. It can be understood that the purpose of designing the mounting groove 13a is to limit the first lamp body 132, so that the first lamp body 132 can avoid displacement. In other embodiments, the side plate 141 can also be designed to have a limiting groove for limiting the second lamp body 131, which is not limited in the present embodiment.

[0039] Preferably, the second lamp body 131 includes four strip-shaped lamps 151, and the four strip-shaped lamps 151 are arranged on the inner side of different side plates 141, and the end portions of any two adjacent strip-shaped lamps 151 are aligned with each other. It can be understood that in the present embodiment, the second lamp body 131 is provided as four independent strip-shaped lamps 151, and the purpose of designing the strip-shaped lamp 151 is to facilitate installation and disassembly, thereby facilitating maintenance. In addition, the first lamp body 132 is designed as a ring structure, and the purpose of designing the first lamp body 132 in the present embodiment is to correspond to the four strip-shaped lamps 151 of the second lamp body 131, thereby achieving uniform light emission.

[0040] Preferably, the lamp box detection light source 100 further comprises a diffuser plate 114 mounted in the slot of the mounting groove 13a and covering the mounting groove 13a. It can be understood that the purpose of designing this structure is to perform first diffuse reflection on the light emitted by the first lamp body 132 through the diffuser plate 114, and then perform second diffuse reflection on the inner wall of the box body 110, and then perform second diffuse reflection on the detected area 11a placed in the detection area 11a.

[0041] Preferably, the lamp box detection light source 100 further comprises a light-transmitting plate 115 mounted on the light outlet 13d, and the bottom plate 142 is further provided with an embedding groove 13b facing the detection area 11a, and the light-transmitting plate 115 is embedded in the embedding groove 13b. It can be understood that the light-transmitting plate 115 in the present embodiment is made of quartz glass material, and the light-transmitting plate 115 is mounted in the embedding groove 13b for light transmission. In addition, the light-transmitting plate 115 is designed to be detachably mounted in the embedding groove 13b, so that the lamp box detection light source 100 can be adapted to more application scenarios, and can be removed from the embedding groove 13b at any time when not needed. In addition, the optical glass allows light with a wavelength of 400-700 nm to pass through, and filters out other wavelengths, thereby improving the uniformity of the light emitted to the measured object 200.

[0042] Preferably, the drive frame 112 is provided with a drive mechanism 161 that drives the camera 300 to move along the first direction and / or the second direction. The drive mechanism 161 can drive the camera 300 to move along the first direction, or drive the camera 300 to move along the second direction. It can be understood that in this embodiment, the first direction is the movement of the drive mechanism 161 along the x-axis, and the second direction is the movement of the drive mechanism 161 along the y-axis. Further, in this embodiment, the main movement direction of the camera 300 is the second direction along the y-axis. It can be moved up and down to approach or move away from the detection area 11a to improve its detection effect. In other embodiments, the camera 300 can also be driven by the drive mechanism 161 to achieve movement in the first direction along the x-axis, thereby achieving fine-tuning of the camera 300 so that the lens of the camera 300 is facing the object to be measured 200 located in the detection area 11a.

[0043] Preferably, a detection port 13c for the camera 300 to shoot is opened on the support frame 111, and the detection port 13c is arranged opposite to the detection area 11a. It can be understood that the design of the detection port 13c allows the camera 300 to extend into or out of the box 110, so as to improve the imaging effect of the camera 300 on the object 200 located in the detection area 11a.

[0044] The light-emitting principle of the light box detection light source 100 in this embodiment is as follows: a high-power multi-color light panel is used as the bottom light source, and the light is diffusely reflected for the first time through the front diffuser plate 114, and then passes through the diffuse reflection white paint on the inner wall of the box body 110, and then reflected for the second time, and finally reaches the optical glass of the light outlet, filtering out the clutter, so that the light source is more uniform and better. The light strips on the side walls around the inner tank are also used for supplementary lighting, which plays a compatible role. The introduction of new materials greatly reduces the weight, and the relative parallelism becomes higher, making the optical test more stable.

[0045] To sum up, the utility model provides a light box detection light source, in which the light from at least one lamp body passes through the diffuse plate and then irradiates the diffuse reflection wall, and is reflected twice by the diffuse reflection wall and irradiated to the detection area, so that the light irradiated to the object to be measured can form a more uniform light and improve the illumination intensity of the light, so that the camera can obtain a clear image during the imaging process, avoiding the situation where certain defects cannot be detected, and reducing the use of surface light sources and reducing detection costs.

[0046] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A light box detection light source, characterized in that: include: A box body, wherein the inner wall of the box body is configured as a diffuse reflection wall, and the box body is provided with a detection port and a light outlet; A lamp body is installed inside the box; A diffusion plate is installed inside the box and opposite to the lamp body; The light emitted from the lamp body undergoes at least two diffuse reflections from the diffuse plate and the diffuse reflection wall, and then is emitted outward from the light outlet.

2. The light box detection light source according to claim 1, characterized in that: The box body includes a side panel and a bottom panel, the light outlet is arranged on the bottom panel, the diffuse reflection wall is arranged on the inner wall of the side panel, the lamp body includes a first lamp body, the first lamp body is arranged on the side of the bottom panel away from the light outlet, and the diffuse plate is installed on the direction of the first lamp body away from the bottom panel.

3. The light box detection light source according to claim 2, characterized in that: The box body further includes a top plate arranged opposite to the bottom plate, and the detection port is arranged on the top plate.

4. The light box detection light source according to claim 3, characterized in that: The lamp body further includes a second lamp body, which is arranged on the inner wall of the side plate, and the diffusion plate is located between the second lamp body and the first lamp body.

5. The light box detection light source according to claim 1, characterized in that: The box body further comprises a driving frame located at the detection port, the driving frame is used to install a camera, and the driving frame is provided with a driving mechanism for driving the camera to move along the first direction and / or the second direction.

6. The light box detection light source according to claim 3, characterized in that: The box body also includes a support frame, the side panels are all installed on the support frame, and the support frame is made of aluminum alloy material.

7. The light box detection light source according to claim 2, characterized in that: The bottom plate is provided with a mounting groove, and the first lamp body is mounted in the mounting groove.

8. The light box detection light source according to claim 7, characterized in that: The diffusion plate is installed at the notch of the installation slot and covers the installation slot. The diffusion plate is arranged opposite to the first lamp body.

9. The light box detection light source according to claim 4, characterized in that: The second lamp body includes four strip lights, and the four strip lights are respectively arranged on the inner sides of different surfaces of the side plate.

10. The light box detection light source according to claim 1, characterized in that: The light box detection light source also includes a light-transmitting plate installed at the light outlet.

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