Eccentric calibration jig and electroplating equipment
By measuring the vertical distance between the plating tank and the motor using the distance meter in the eccentric calibration fixture, the problem of inaccurate calibration of the plating tank and the motor is solved, achieving a more efficient electroplating process and equipment utilization rate.
Patent Information
- Application Number
- CN202423122619.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-17
- Publication Date
- 2025-10-14
- Estimated Expiration
- 2034-12-17
AI Technical Summary
In the prior art, the calibration of electroplating tanks and motors relies on visual observation, which results in inaccurate and time-consuming calibration results, affecting the accuracy of the electroplating process and the utilization rate of the equipment.
An eccentric calibration fixture is used, including a fixed base, a connecting rod and a distance meter. The distance meter is used to measure the vertical distance between the plating tank and the motor instead of visual observation to ensure that the plating tank and the motor rotate concentrically.
The accuracy and objectivity of the calibration results are improved, calibration time is saved, and the utilization rate of electroplating equipment and the yield rate of semiconductor products are increased.
Smart Images
Figure CN223435608U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to the field of semiconductor technology, especially relates to a eccentricity calibration fixture and electroplating equipment. BACKGROUND
[0002] In the preparation process of semiconductor, the upper surface of wafer needs to keep horizontal to reduce the error in etching, deposition and photolithography and the like, and improve the manufacturing precision and performance of semiconductor device. For example, in electroplating process, the central axis of electroplating tank and motor must be on the same straight line, so that the electroplating tank and motor keep concentric rotation to form uniform metal film on the upper surface of wafer. However, at present, when calibrating whether the electroplating tank and motor keep concentric, the naked eye is relied on to observe, so that the calibration result is not accurate and objective, and the calibration process is time-consuming. SUMMARY
[0003] The utility model discloses a eccentricity calibration fixture and electroplating equipment, can improve the accuracy and objectivity of eccentricity calibration result, and save the use time of calibration process, improve the operation rate of equipment.
[0004] To solve the above technical problems, the utility model is realized through the following technical schemes:
[0005] The utility model provides a eccentricity calibration fixture, at least includes:
[0006] Fixed base is placed on the structure to be calibrated,
[0007] A plurality of connecting rods are arranged on the same side of the fixed base, and the plurality of connecting rods are equidistantly distributed, and
[0008] A range finder is arranged on one end of each connecting rod away from the fixed base to measure the vertical distance between the structure to be calibrated and the reference structure.
[0009] In an embodiment of the utility model, the eccentricity calibration fixture further includes a fixing groove, and the fixing groove is connected to one end of the connecting rod away from the fixed base.
[0010] In an embodiment of the utility model, the eccentricity calibration fixture further includes a positioning groove, and the positioning groove is arranged on one side of the fixed base close to the connecting rod.
[0011] In an embodiment of the utility model, the connecting rod includes a first part, and the first part extends in a direction away from the fixed base from the positioning groove.
[0012] In an embodiment of the present application, the connecting rod comprises a second part, the second part is a section of the first part away from the fixed base, extending in a direction away from the center of the fixed base.
[0013] In an embodiment of the present application, the connecting rod comprises a third part, the third part is an end of the second part away from the first part, extending in a direction away from the second part.
[0014] In an embodiment of the present application, the reference structure is arranged on one side of the structure to be calibrated, and a gap is arranged between the structure to be calibrated and the reference structure.
[0015] In an embodiment of the present application, one end of the connecting rod away from the fixed base is located in the gap.
[0016] In an embodiment of the present application, the distance measuring instrument is located in the gap.
[0017] The present application also provides a kind of electroplating equipment, at least comprising:
[0018] Electroplating tank;
[0019] Motor, arranged on one side of the electroplating tank;And
[0020] The eccentricity calibration jig described above is installed on the side of the electroplating tank away from the motor.
[0021] In summary, the present application provides an eccentricity calibration jig and electroplating equipment, by improving the structure of the eccentricity calibration jig, the unexpected technical effect of the present application is to improve the objectivity and accuracy of the calibration result, thereby improving the electroplating process and improving the yield of semiconductor products. Moreover, the eccentricity calibration jig provided by the present application does not need to be adjusted frequently, and whether the electroplating tank and the motor are kept concentric can be monitored in real time, thereby saving calibration time and improving the operation rate of the electroplating equipment. BRIEF DESCRIPTION OF DRAWINGS
[0022] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiment description. Obviously, the drawings in the following description are only some embodiments of the present application, and those skilled in the art can obtain other drawings according to these drawings without creating any creative labor.
[0023] Figure 1 It is a front view of the eccentricity calibration jig in an embodiment.
[0024] Figure 2 It is Figure 1 a top view of the eccentricity calibration jig.
[0025] Figure 3 Schematic diagram of calibrating an electroplating tank and a motor using an eccentric calibration fixture in one embodiment.
[0026] Description of labels:
[0027] 10. Fixed base; 11. Connecting rod; 111. First subsection; 112. Second subsection; 113. Third subsection; 12. Rangefinder; 13. Fixing slot; 14. Structure to be calibrated; 15. Reference structure. DETAILED DESCRIPTION
[0028] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.
[0029] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application pertains. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application.
[0030] In the description of this specification, it should be understood that the directions or positional relationships indicated by terms such as "center," "upper," "lower," "front," "back," "left," and "right" are based on the directions or positional relationships shown in the accompanying drawings and are intended solely to facilitate the description of this solution and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific direction, be constructed, or operate in a specific direction. Therefore, they should not be construed as limitations on this solution. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0031] The electroplating process, an integral part of semiconductor device manufacturing, forms a uniform, dense, and well-structured metal film on the wafer surface, enhancing device performance and reliability. During the electroplating process, the central axes of the plating tank and motor must be aligned, ensuring concentric rotation. This ensures uniform metal film thickness and surface resistance across the wafer, thereby improving semiconductor product yield.
[0032] See also Figure 1 and Figure 3As shown, the utility model provides a eccentricity calibration fixture, for example including fixed base 10, connecting rod 11 and range finder 12 etc. Among them, fixed base 10 places on the structure to be calibrated 14, connecting rod 11 sets up at one side of fixed base 10, along the height direction of the structure to be calibrated 14 extension, range finder 12 sets up on the end of connecting rod 11 away from fixed base 10, to measure the perpendicular distance between the structure to be calibrated 14 and reference structure 15. The utility model provides an eccentricity calibration fixture, replaces naked eye observation by range finder 12, can improve the objectivity and accuracy of calibration result. Moreover, the utility model provides an eccentricity calibration fixture, can save the use time of calibration process, improves the equipment's operation rate. The utility model provides an eccentricity calibration fixture, can be applicable to the eccentricity calibration process of various equipment, in this embodiment, take electroplating equipment as an example to eccentricity calibration fixture is explained, wherein, the structure to be calibrated 14 for example is electroplating tank, reference structure 15 for example is motor, the structure to be calibrated 14 for example sets up at one side of reference structure 15, and the structure to be calibrated 14 and reference structure 15 are set apart, and the utility model does not limit the size relation between the lateral dimension of the structure to be calibrated 14 and the lateral dimension of reference structure 15, for example, the lateral dimension of the structure to be calibrated 14 and the lateral dimension of reference structure 15 are equal to explain.
[0033] As shown in Figure 1 and Figure 3 In an embodiment of the utility model, fixed base 10 is used to provide support for the subsequently arranged connecting rod 11, and the shape and size parameters of fixed base 10 are consistent with the shape and size parameters of the cross section of the structure to be calibrated 14, so that fixed base 10 can be placed on the structure to be calibrated 14. In this embodiment, the cross section of the structure to be calibrated 14 is taken as an example to explain fixed base 10. In this embodiment, fixed base 10 is, for example, annular, the outer diameter of fixed base 10 is, for example, 300mm-400mm, and the width of fixed base 10 is, for example, 0.1mm-1mm.
[0034] As shown in Figure 1 In an embodiment of the utility model, a positioning groove (not shown in the figure) is arranged on fixed base 10. The number of the positioning grooves and the distribution of the positioning grooves on fixed base 10 are, for example, the same as the number of connecting rods 11 and the distribution between the connecting rods 11, so as to connect fixed base 10 and the subsequently arranged connecting rods 11.
[0035] As shown in Figure 1 and Figure 3As shown, in one embodiment of the present invention, a connecting rod 11 is disposed on one side of a fixed base 10. For example, there may be multiple connecting rods 11, each disposed on the same side of the fixed base 10, and the multiple connecting rods 11 are equidistantly spaced. In this embodiment, there may be four connecting rods 11, for example, each connected to the fixed base 10 via a positioning slot. The end of the connecting rod 11 away from the fixed base 10 is positioned in the gap between the structure to be calibrated 14 and the reference structure 15, so that the rangefinder 12 disposed on the connecting rod 11 can accurately measure the vertical distance between the structure to be calibrated 14 and the reference structure 15. The length of the connecting rod 11 is, for example, greater than the height of the structure to be calibrated 14 and less than the sum of the lengths of the structure to be calibrated 14 and the gap. The width of the connecting rod 11 can be selected based on actual conditions. In this embodiment, the length of the connecting rod 11 is, for example, 100 mm to 150 mm, and the width of the connecting rod 11 is, for example, 10 mm to 40 mm.
[0036] See also Figures 1 to 3 As shown, in one embodiment of the present invention, the specific shape of the connecting rod 11 can be selected according to actual needs, and this application does not impose any restrictions. In this embodiment, the connecting rod 11 includes, for example, a first sub-section 111, a second sub-section 112, and a third sub-section 113. Among them, the first sub-section 111 extends from the positioning groove to the side away from the fixed base 10, the second sub-section 112 extends from the end of the first sub-section 111 away from the fixed base 10 in a direction away from the center of the fixed base 10, and the third sub-section 113 extends from the end of the second sub-section 112 away from the first sub-section 111 in a direction away from the second sub-section 112. The first sub-section 111, the second sub-section 112, and the third sub-section 113 are, for example, integrally formed, and the first sub-section 111 and the third sub-section 113 are perpendicular to the plane where the fixed base 10 is located, and the second sub-section 112 is parallel to the plane where the fixed base 10 is located. In this embodiment, the length of the first section 111 is, for example, 50 mm to 80 mm, the length of the second section 112 is, for example, 50 mm to 90 mm, and the length of the third section 113 is, for example, 50 mm to 70 mm. The provision of the first section 111, the second section 112, and the third section 113 facilitates the rangefinder 12 provided on the connecting rod 11 to transmit signals to the structure to be calibrated 14 and the reference structure 15, respectively, to accurately measure the vertical distance between the structure to be calibrated 14 and the reference structure 15.
[0037] See also Figure 1As shown, in one embodiment of the present invention, a fixing groove 13 is further provided on the end of the connecting rod 11 away from the fixed base 10. In this embodiment, the fixing groove 13 is connected to the end of the third subsection 113 away from the second subsection 112 to accommodate the rangefinder 12 to be installed later. The specific shape of the fixing groove 13 can be selected according to actual needs and is not limited by this application. In this embodiment, the fixing groove 13 is, for example, a polyhedron, and the interior of the polyhedron is hollow. The volume of the polyhedron is, for example, greater than or equal to the volume of the rangefinder 12 to accommodate the rangefinder 12. Furthermore, in this embodiment, either side of the fixing groove 13 is open to facilitate the placement and removal of the rangefinder 12 within the fixing groove 13.
[0038] See also Figure 1 and Figure 3 As shown, in one embodiment of the present invention, a distance meter 12 is disposed on the end of each connecting rod 11 away from the fixed base 10. In this embodiment, four distance meters 12 are provided, for example, with one distance meter 12 disposed on the end of each connecting rod 11 away from the fixed base 10. The provision of four distance meters 12 enables measurement of the vertical distance between the structure to be calibrated 14 and the reference structure 15 in multiple directions, thereby improving the accuracy of the concentricity calibration between the structure to be calibrated 14 and the reference structure 15. This also improves calibration efficiency, reduces calibration time, and increases the utilization rate of the electroplating equipment.
[0039] See also Figure 1 and Figure 3 As shown, in one embodiment of the present invention, a rangefinder 12 is placed in a fixing slot 13, an eccentric calibration jig is placed on a structure to be calibrated 14, and a fixed base 10 is in contact with the top of the structure to be calibrated 14 to measure the vertical distance between the structure to be calibrated 14 and a reference structure 15. The rangefinder 12 can be, for example, a photoelectric rangefinder or an acoustic rangefinder. In this embodiment, the calibration process of the eccentric calibration jig is described using a laser rangefinder as an example. If the structure to be calibrated 14 and the reference structure 15 remain concentric, the vertical distance between them remains constant regardless of orientation. By setting up a rangefinder 12, laser A is emitted onto the structure to be calibrated 14, and laser A falls on point A' of the structure to be calibrated 14. At the same time, the rangefinder 12 emits laser B onto the reference structure 15, and laser B falls on point B' of the reference structure 15. The angle between laser A and laser B is, for example, 180°, and points A' and B' are on the same vertical line.
[0040] See also Figure 1 and Figure 3As shown, in an embodiment of the present application, after the distance meters 12 simultaneously emit laser A and B to the to-be-calibrated structure 14 and the reference structure 15, the distance between the A' point and the B' point can be measured, that is, the perpendicular distance A'B' between the to-be-calibrated structure 14 and the reference structure 15, if the perpendicular distance A'B' between the to-be-calibrated structure 14 and the reference structure 15 obtained by the four distance meters 12 is equal to a fixed value, the to-be-calibrated structure 14 and the reference structure 15 remain concentric, that is, the central axes of the to-be-calibrated structure 14 and the reference structure 15 are located on the same straight line. On the contrary, as long as the perpendicular distance A'B' between the to-be-calibrated structure 14 and the reference structure 15 obtained by one distance meter 12 is not equal to the fixed value, the to-be-calibrated structure 14 and the reference structure 15 do not remain concentric, that is, the central axes of the to-be-calibrated structure 14 and the reference structure 15 are not on the same straight line, at this time, the positions of the to-be-calibrated structure 14 and the reference structure 15 need to be adjusted until the perpendicular distances A'B' measured by the four distance meters 12 are all equal to the fixed value. By arranging the distance meters 12, whether the to-be-calibrated structure 14 and the reference structure 15 remain concentric can be monitored in real time, so as to facilitate the daily maintenance of the to-be-calibrated structure 14 or the reference structure 15, thereby saving the maintenance time of the equipment and improving the operation rate of the equipment.
[0041] In summary, the present application provides an eccentric calibration jig and electroplating equipment, and the unexpected technical effect is that the perpendicular distance between the electroplating tank and the motor is measured by arranging the distance meter, instead of observing with the naked eye, so that the accuracy and objectivity of the eccentric calibration result can be improved, thereby improving the electroplating process and improving the yield of semiconductor products. Moreover, the eccentric calibration jig provided by the present application can monitor whether the electroplating tank and the motor remain concentric in real time, save the time of the eccentric calibration process, and improve the calibration efficiency and the operation rate of the equipment.
[0042] The above disclosed embodiments of the present application are only used to help explain the present application. The embodiments do not describe all the details, nor limit the present application to the specific embodiments described. Obviously, according to the content of the present application, many modifications and changes can be made. The present application selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present application, so that those skilled in the art can well understand and utilize the present application. The present application is limited by the claims and the entire scope and equivalents thereof.
Claims
1. An eccentric calibration fixture, characterized in that: At least: A fixed base is placed on the structure to be calibrated; A plurality of connecting rods are arranged on the same side of the fixed base, and the plurality of connecting rods are equidistantly distributed; as well as A distance meter is provided on one end of each connecting rod away from the fixed base to measure the vertical distance between the structure to be calibrated and the reference structure.
2. The eccentricity calibration jig according to claim 1, characterized in that: The eccentricity calibration fixture further includes a fixing slot connected to an end of the connecting rod away from the fixing base.
3. The eccentricity calibration jig according to claim 1, characterized in that: The eccentric calibration fixture further includes a positioning groove, which is arranged on a side of the fixed base close to the connecting rod.
4. The eccentricity calibration jig according to claim 3, characterized in that: The connecting rod includes a first section, and the first section extends from the positioning slot in a direction away from the fixing base.
5. The eccentricity calibration jig according to claim 4, characterized in that: The connecting rod includes a second section, which extends from a section of the first section away from the fixed base in a direction away from the center of the fixed base.
6. The eccentricity calibration jig according to claim 5, characterized in that: The connecting rod includes a third section, and the third section extends from an end of the second section away from the first section in a direction away from the second section.
7. The eccentricity calibration jig according to claim 1, characterized in that: The reference structure is arranged on one side of the structure to be calibrated, and a gap is arranged between the structure to be calibrated and the reference structure.
8. The eccentricity calibration jig according to claim 7, characterized in that: One end of the connecting rod away from the fixing base is located in the gap.
9. The eccentricity calibration jig according to claim 7, characterized in that: The rangefinder is located in the gap.
10. An electroplating device, characterized in that: At least: electroplating tanks; A motor is arranged on one side of the electroplating tank; as well as The eccentric calibration jig according to any one of claims 1 to 9 is mounted on a side of the electroplating tank away from the motor.