POPAID carrier plate capable of automatically aligning and positioning silicon wafer

Abstract

The utility model discloses a POPAID carrier plate capable of automatically aligning and positioning a silicon wafer, which comprises a transfer plate, the top of the transfer plate is fixedly connected with a placement table, the top and the bottom of the inner cavity of the placement table are fixedly connected with limiting frames, the inner cavity of each limiting frame is slidably connected with two symmetrical sliding blocks, and the sliding blocks are fixedly connected with the placement table. Racks are fixedly connected to the opposite sides of the two sliding blocks correspondingly, and a gear is rotationally connected to an inner cavity of the containing table. By starting the motor, the threaded rod and one of the sliding blocks are made to move in a threaded mode, the sliding blocks slide towards the rack through limiting of the limiting strips and the limiting grooves, the sliding blocks can drive the other three sliding blocks to gather the centers through the arrangement of the rack, and the four clamping blocks conduct center clamping; therefore, the purposes of aligning and positioning the silicon wafer through the positioning structure, preventing the silicon wafer from shifting when the silicon wafer is placed at the top of the carrier plate and ensuring the processing efficiency of the silicon wafer can be achieved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of silicon wafer processing, especially relates to a silicon wafer automatic return positioning's POPAID carrier. BACKGROUND

[0002] POPAID technology is a brand new Chinese innovative concept and technology, which is used in the field of photovoltaic cell manufacturing, utilizes chain type platform transmission carrier, completes tunneling oxidation and doped amorphous silicon deposition simultaneously without damaging vacuum, realizes completely no plating, has no damage to surface, plating film thickness is in the range of 0.1nm precision, and truly realizes sub-nanometer plating film process control.

[0003] At present, silicon wafers are mostly processed by using POPAID technology, when the silicon wafers are processed, the silicon wafers to be processed need to be placed on the transmission carrier, so as to convey and process the silicon wafers, when the silicon wafers are placed on the carrier, the silicon wafers may be deviated, and then the following processing may be affected, therefore, a silicon wafer automatic return positioning's POPAID carrier is needed, the silicon wafers can be positioned by the positioning structure, deviation of the silicon wafers placed on the top of the carrier can be avoided, and the processing efficiency of the silicon wafers is ensured. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a silicon wafer automatic return positioning's POPAID carrier, which can position the silicon wafers by the positioning structure, avoid deviation of the silicon wafers placed on the top of the carrier, and ensure the processing efficiency of the silicon wafers, so as to solve the above background technical problems.

[0005] The utility model solves the technical problem that the utility model provides a silicon wafer automatic return positioning's POPAID carrier, its including transfer plate, the top fixedly connected of transfer plate has the placing table, the top and bottom of the inner chamber of placing table all are fixedly connected with the limit frame, the inner chamber slidingly connected of limit frame has two symmetry's sliding block, two the opposite sides of sliding block all are fixedly connected with the rack, the inner chamber rotationally connected of placing table has the gear, the rack is engaged with gear, the both sides of sliding block and the one side of rack all are fixedly connected with the limit strip, the inner chamber of limit frame is equipped with two symmetry's limit slot, the limit strip is matched with limit slot, the top fixedly connected of sliding block has the connecting block, the top of placing table is equipped with four symmetry's sliding slot, the connecting block passes through sliding slot and is fixedly connected with the clamping block, the inner chamber of placing table is fixedly connected with the fixed block, the fixed block is located in the inner chamber of one limit frame, the one side rotationally connected of fixed block has the screw rod, the screw rod penetrates sliding block and is connected with sliding block threadedly, the surface of placing table is fixedly installed with motor through bolt, the output shaft of motor penetrates to the inner chamber of placing table and is fixedly connected with screw rod.

[0006] Preferably, the bottom of the transfer plate is fixedly provided with two symmetrical supporting blocks, and the supporting blocks are rectangular blocks.

[0007] Preferably, the placement table is a disc type, and the two limiting frames are vertically arranged.

[0008] Preferably, the sliding block is attached to the inner wall of the limiting frame, the limiting strip is a cylindrical type, and the connecting block is matched with the sliding groove.

[0009] Preferably, the bottom of the clamping block is attached to the top of the placement table, and the top and bottom of the fixed block are fixedly connected with the top and bottom of the inner cavity of the placement table, respectively.

[0010] The beneficial effects of the utility model are:

[0011] 1. The utility model discloses a positioning structure which comprises a placement table, a supporting block, a transfer plate, a fixed block, a clamping block, a sliding block, a limiting frame, a limiting strip, a sliding groove, a connecting block and a rack.

[0012] 2. The utility model discloses a positioning structure which comprises a placement table, a supporting block, a transfer plate, a fixed block, a clamping block, a sliding block, a limiting frame, a limiting strip, a sliding groove, a connecting block and a rack. BRIEF DESCRIPTION OF DRAWINGS

[0013] Among them:

[0014] Figure 1 It is the three-dimensional schematic view of one embodiment of the utility model;

[0015] Figure 2 It is the three-dimensional schematic view of one embodiment of the utility model;

[0016] Figure 3 It is the front view schematic view of one embodiment of the utility model;

[0017] Figure 4 It is one embodiment of the utility model Figure 2 The partial close-up view of point A in one embodiment of the utility model.

[0018] In the drawings, the components represented by each sign are listed as follows:

[0019] 1, transfer plate, 2, placement table, 3, limit frame, 4, sliding block, 5, rack, 6, gear, 7, limit strip, 8, limit groove, 9, connecting block, 10, sliding groove, 11, clamping block, 12, fixed block, 13, threaded rod, 14, motor, 15, support block. DETAILED DESCRIPTION

[0020] Hereinafter, the embodiment of the POPAID carrier of the silicon wafer automatic return positioning of the present application will be described with reference to the accompanying drawings.

[0021] Example one:

[0022] Figure 1-4 The POPAID carrier of the silicon wafer automatic return positioning of one embodiment of the present application is shown, which comprises a transfer plate 1, the bottom of the transfer plate 1 is fixedly installed with two symmetrical support blocks 15, the support block 15 is a rectangular block, through the setting of the support block 15, when the transfer plate 1 is idle and placed on the desktop, the support block 15 will support the transfer plate 1, avoiding the bottom of the transfer plate 1 directly sticking to the desktop, which is not convenient for the user to take, improving the convenience of the user to take the transfer plate 1, the top of the transfer plate 1 is fixedly connected with a placement table 2, the placement table 2 is a disc type, two limit frames 3 are vertically arranged, the limit frame 3 is a rectangular frame, the top and bottom of the inner cavity of the placement table 2 are fixedly connected with the limit frame 3, the inner cavity of the limit frame 3 is slidingly connected with two symmetrical sliding blocks 4, the opposite sides of the two sliding blocks 4 are fixedly connected with a rack 5, the inner cavity of the placement table 2 is rotatably connected with a gear 6, the rack 5 is engaged with the gear 6, the two sides of the sliding block 4 and one side of the rack 5 are fixedly connected with a limit strip 7, two symmetrical limit grooves 8 are formed in the inner cavity of the limit frame 3, the limit strip 7 is matched with the limit groove 8, the top of the sliding block 4 is fixedly connected with a connecting block 9, four symmetrical sliding grooves 10 are formed in the top of the placement table 2, the connecting block 9 passes through the sliding groove 10 and is fixedly connected with a clamping block 11, the inner cavity of the placement table 2 is fixedly connected with a fixed block 12, the fixed block 12 is located in the inner cavity of one of the limit frames 3, one side of the fixed block 12 is rotatably connected with a threaded rod 13, the threaded rod 13 penetrates through the sliding block 4 and is threadedly connected with the sliding block 4, the surface of the placement table 2 is fixedly installed with a motor 14 through bolts, the output shaft of the motor 14 penetrates into the inner cavity of the placement table 2 and is fixedly connected with the threaded rod 13.

[0023] Example two:

[0024] Figure 1-4The utility model discloses a kind of POPAID plate of automatic return-to-zero positioning of silicon wafer of the embodiment of the utility model, it includes transfer plate 1, the top of transfer plate 1 is fixedly connected with placing table 2, the top and bottom of the inner cavity of placing table 2 are fixedly connected with limiting frame 3, the inner cavity of limiting frame 3 is slidably connected with two symmetrical sliding blocks 4, sliding block 4 and the inner wall of limiting frame 3 are in close contact, limiting strip 7 is cylindrical, connecting block 9 is adapted with sliding slot 10, the side opposite of two sliding blocks 4 is fixedly connected with rack 5, the inner cavity of placing table 2 is rotatably connected with gear 6, rack 5 and gear 6 are engaged, the side of the both sides of sliding block 4 and rack 5 is fixedly connected with limiting strip 7, the inner cavity of limiting frame 3 is provided with two symmetrical limiting grooves 8, limiting strip 7 is adapted with limiting groove 8, the top of sliding block 4 is fixedly connected with connecting block 9, the top of placing table 2 is provided with four symmetrical sliding slots 10, connecting block 9 passes through sliding slot 10 and is fixedly connected with clamping block 11, the bottom of clamping block 11 and the top of placing table 2 are in close contact, the top and bottom of fixed block 12 are fixedly connected with the top and bottom of the inner cavity of placing table 2 respectively, the inner cavity of placing table 2 is fixedly connected with fixed block 12, fixed block 12 is located in the inner cavity of one of limiting frame 3, the side of fixed block 12 is rotatably connected with threaded rod 13, threaded rod 13 penetrates sliding block 4 and is threadedly connected with sliding block 4, the surface of placing table 2 is fixedly installed with motor 14 by bolt, the output shaft of motor 14 penetrates to the inner cavity of placing table 2 and is fixedly connected with threaded rod 13.

[0025] Working principle: when the utility model is used, the user places the silicon wafer to be processed on the top of placing table 2, starts motor 14, makes threaded rod 13 and one of sliding blocks 4 threadedly move, limits sliding block 4 to the direction of gear 6 by limiting strip 7 and limiting groove 8, makes sliding block 4 gather to the center by gear 6 and rack 5 drive the remaining three sliding blocks 4, further makes sliding block 4 drive clamping block 11 to center clamping by connecting block 9, avoids the deviation of silicon wafer when being placed on the top of placing table 2, guarantees the silicon wafer processing efficiency, through the setting of supporting block 15, when transfer plate 1 is idle and placed on the desktop, supporting block 15 will support transfer plate 1, avoids the bottom of transfer plate 1 directly and the desktop in close contact and is inconvenient for user to take, improves the convenience of user to take transfer plate 1.

[0026] In conclusion: the POPAID plate of automatic return-to-zero positioning of silicon wafer, by starting motor 14, makes threaded rod 13 and one of sliding blocks 4 threadedly move, limits sliding block 4 to the direction of rack 5 by limiting strip 7 and limiting groove 8, by the setting of rack 5, sliding block 4 will drive the other three sliding blocks 4 to gather to the center, so that four clamping blocks 11 are clamped to the center, that is, the positioning structure can be used to return-to-zero positioning of silicon wafer, avoid the deviation of silicon wafer when being placed on the top of plate, guarantee the purpose of silicon wafer processing efficiency.

Claims

1. A POPAID carrier with automatic silicon wafer positioning, characterized in that: The invention comprises a transfer plate (1), wherein the top of the transfer plate (1) is fixedly connected to a placement table (2), the top and bottom of the inner cavity of the placement table (2) are fixedly connected to a limit frame (3), the inner cavity of the limit frame (3) is slidably connected to two symmetrical sliders (4), the two opposite sides of the sliders (4) are fixedly connected to racks (5), the inner cavity of the placement table (2) is rotatably connected to a gear (6), the rack (5) is meshed with the gear (6), both sides of the slider (4) and one side of the rack (5) are fixedly connected to a limit bar (7), the inner cavity of the limit frame (3) is provided with two symmetrical limit grooves (8), the limit bar (7) is adapted to the limit groove (8), the slider (4) The top of the placing table (2) is fixedly connected with a connecting block (9), the top of the placing table (2) is provided with four symmetrical sliding grooves (10), the connecting block (9) passes through the sliding grooves (10) and is fixedly connected with a clamping block (11), the inner cavity of the placing table (2) is fixedly connected with a fixing block (12), the fixing block (12) is located in the inner cavity of one of the limit frames (3), one side of the fixing block (12) is rotatably connected with a threaded rod (13), the threaded rod (13) passes through the slider (4) and is threadedly connected to the slider (4), the surface of the placing table (2) is fixedly installed with a motor (14) by bolts, the output shaft of the motor (14) passes through the inner cavity of the placing table (2) and is fixedly connected to the threaded rod (13).

2. The POPAID plate carrier with automatic silicon wafer self-centering according to claim 1, characterized in that: Two symmetrical support blocks (15) are fixedly mounted on the bottom of the transfer plate (1), and the support blocks (15) are rectangular blocks.

3. The POPAID plate carrier with automatic silicon wafer self-centering according to claim 2, characterized in that: The placement platform (2) is disc-shaped, and the two limiting frames (3) are vertically arranged, and the limiting frames (3) are rectangular frames.

4. The POPAID carrier with automatic silicon wafer positioning according to claim 3, characterized in that: The slider (4) is fitted with the inner wall of the limit frame (3), the limit strip (7) is cylindrical, and the connecting block (9) is adapted to the slide groove (10).

5. The POPAID plate carrier with automatic silicon wafer self-centering according to claim 4, characterized in that: The bottom of the clamping block (11) fits with the top of the placement table (2), and the top and bottom of the fixing block (12) are fixedly connected to the top and bottom of the inner cavity of the placement table (2), respectively.

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