Photomask box

Abstract

The photomask box comprises a crown block and an upper cover, a connecting column is arranged at the top of the upper cover and connected with the crown block through a bolt, and a safety structure composed of a first connecting piece and a second connecting piece is arranged between the upper cover and the crown block to ensure stable and reliable connection. And a positioning bracket with a positioning plate and a structure with an elastic part and an abutting part are arranged in the upper cover, so that accurate positioning and stable supporting of the photomask are effectively ensured. In addition, the photomask box is provided with the base comprising the sealing ring, so that the sealing performance is enhanced, the photomask can be accurately placed, the position of the photomask can be kept through the clamping assembly, and the operation convenience and the working efficiency are improved. By optimizing the design of the photomask box, the safety, the accuracy and the use convenience of photomask transportation are remarkably improved.

Description

Technical Field

[0001] This application relates to a photomask box. Background Technology

[0002] Photomasks play a crucial role in pattern transfer during semiconductor manufacturing. In microelectronics manufacturing, photomasks serve as tools or master templates for pattern transfer, carrying the design patterns and transferring them onto the semiconductor through photolithography. They are the carriers of intellectual property information such as design and process technology. During photolithography, the image on the mask can cover the entire wafer, ensuring that the manufactured semiconductor devices have high precision and high quality.

[0003] Currently, photomasks are typically stored or transported in photomask cases. Most mainstream photomask cases on the market are made of metal and have internal shock-absorbing materials to reduce the impact of vibration and shock during handling. Furthermore, most photomask cases use standard screw fastening structures to ensure the integrity and safety of the case.

[0004] However, this design has some obvious limitations: standard screws may loosen or even fall off after long-term use or when subjected to large external impacts, resulting in instability of the photomask box structure and easy disintegration of the photomask box, which may lead to the photomask falling and being damaged. Utility Model Content

[0005] This application provides a photomask box with high stability and security. The technical solution adopted is as follows:

[0006] A photomask box includes a crane head and a top cover, the top cover having a connecting post, and the crane head being connected to the connecting post by bolts;

[0007] A safety structure is also provided between the crane head and the connecting column. The safety structure includes a first connecting member on the crane head and a second connecting member on the connecting column. The first connecting member and the second connecting member are engaged to achieve relative fixation between the crane head and the connecting column.

[0008] By adopting the above technical solution, a safety buckle structure is provided between the crane head and the top cover, which can prevent disintegration when the fastening screws become loose.

[0009] Preferably, the first connector is configured as a connecting buckle, and the first connector extends to the horizontal side of the connecting post; the second connector is configured as a connector head, and the connector head engages with the connecting buckle.

[0010] By adopting the above technical solution, and through the snap-fit ​​of the connecting buckle and the connector, a stable connection between the crane head and the top cover can be effectively achieved, avoiding disintegration.

[0011] Preferably, a positioning bracket is also fixed to the inner side of the upper cover; the positioning bracket has a positioning plate, and the positioning plate is inclined.

[0012] By adopting the above technical solution, when the top cover and the base are engaged, the positioning plate can abut against the edge of the photomask, thereby adjusting the lateral position of the photomask and positioning it.

[0013] Preferably, the positioning bracket further includes an elastic part and an abutment part. The elastic part is fixedly connected to the side wall of the upper cover, and the abutment part is located below the elastic part and fixedly connected to the elastic part. The abutment part is used to abut against the photomask.

[0014] By adopting the above technical solution, the elastic part can make the positioning bracket undergo a certain elastic deformation, avoiding excessive force between the positioning bracket and the photomask, which could damage the photomask or the positioning bracket. The abutment part can further improve the stability of the photomask.

[0015] Preferably, the positioning bracket also has a fixing plate, the upper cover is provided with a pin, and the fixing plate has a mounting hole for inserting and engaging with the pin;

[0016] The upper cover is also provided with an abutment plate for restricting the movement of the fixing plate along the length direction of the pin.

[0017] By adopting the above technical solution, the pins and the abutment plate can be used to effectively fix the fixing plate.

[0018] Preferably, it also includes a base, the upper cover is disposed on the upper side of the base, the base is also provided with a sealing ring, and the upper cover is provided with a flange that abuts against the sealing ring.

[0019] By adopting the above technical solution, the sealing ring can effectively improve the sealing performance of the photomask box.

[0020] Preferably, the upper surface of the base is provided with a groove, and the sealing ring is provided with a fitting part, which engages with the groove.

[0021] By adopting the above technical solution, the groove can limit the sealing ring, ensuring the stability of the sealing ring and preventing it from loosening or falling off.

[0022] Preferably, it also includes a base, on which a placement area for placing a photomask is provided. A retainer is provided on one side of the placement area and a clamping assembly is provided on the other side. The photomask is placed between the retainer and the clamping assembly. The clamping assembly is used to apply a pushing force to the photomask and make the photomask abut against the retainer.

[0023] By adopting the above technical solution, the cage and clamping components can be used to fix the photomask laterally, thereby effectively improving the stability of the photomask and preventing shaking.

[0024] Preferably, the clamping assembly is disposed on the upper cover, and the clamping assembly includes a fixed base and a clamping plate. The two ends of the clamping plate are respectively configured as an abutment end and a counterweight end. The clamping plate is rotatably connected to the fixed base, and the abutment end is located on the side of the fixed base facing the placement area, and the counterweight end is located on the other side of the fixed base. The weight of the counterweight end is greater than the weight of the abutment end. The base is provided with a contact surface that slides against the counterweight.

[0025] By adopting the above technical solution, in the open state, the counterweight end hangs down under gravity, thereby causing the contact end to flip upward and avoid the photomask, thus ensuring that the clamping piece does not interfere with the photomask when the cover is open. When the cover is closed, the counterweight end abuts against the contact surface, and the lever principle is used to drive the contact end to abut against the photomask to achieve automatic clamping.

[0026] In summary, this application includes at least one of the following beneficial technical effects:

[0027] 1. The safety buckle structure between the crane head and the top cover can prevent the photomask box from disintegrating when the fastening screws loosen, which significantly improves the structural stability and safety of the photomask box;

[0028] 2. The snap-fit ​​design of the connecting buckle and connector not only enhances the connection strength between the crane head and the top cover, but also simplifies the assembly process and improves the overall assembly efficiency;

[0029] 3. The design of the positioning bracket and its internal structure (including the inclined positioning plate, the elastic support part, and the abutment part that directly acts on the surface of the photomask) can accurately control the position of the photomask and reduce the risk of damage caused by improper pressure, thus ensuring the safe storage of the photomask. Attached Figure Description

[0030] Figure 1 This is an exploded view of the photomask box in an embodiment of this application;

[0031] Figure 2 Primarily used to demonstrate the structure of insurance;

[0032] Figure 3 This is a cross-sectional view of the top cover in an embodiment of this application, used to illustrate the structure of the positioning bracket;

[0033] Figure 4 It is mainly used to demonstrate the structure of the clamping components.

[0034] The following are labels in the attached diagram: 1. Crane head; 2. Top cover; 21. Connecting column; 22. Pin; 23. Abutment plate; 24. Flange; 3. Safety structure; 31. First connecting piece; 32. Second connecting piece; 4. Positioning bracket; 41. Positioning plate; 42. Elastic part; 43. Abutment part; 44. Fixing plate; 5. Base; 51. Sealing ring; 52. Retainer; 6. Clamping assembly; 61. Fixing seat; 62. Clamping piece; 621. Abutment end; 622. Counterweight end. Detailed Implementation

[0035] The following is combined with Figure 1-4 This application is described in further detail.

[0036] This application discloses a photomask box, as shown in the embodiments below. Figure 1 and Figure 2 The system includes a crane head 1 and a top cover 2. The top cover 2 has a connecting post 21, and the crane head 1 is bolted to the connecting post 21. To increase the reliability of the connection, a safety structure 3 is also provided between the crane head 1 and the connecting post 21. This safety structure 3 mainly includes a first connecting member 31 on the crane head 1 and a second connecting member 32 on the connecting post 21. These two parts are snap-fitted together to achieve relative fixation between the crane head 1 and the connecting post 21. This design ensures that the connection between the crane head 1 and the top cover 2 is maintained even if the bolts accidentally loosen, avoiding the risk of disintegration of the photomask due to connection failure, and greatly improving the safety and reliability of the equipment.

[0037] Specifically, the first connector 31 is designed as a snap-fit ​​that extends laterally to the horizontal side of the connecting post 21. The second connector 32 is a connector head that engages with the snap-fit ​​through precise geometric matching. The first connector 31 can be not only a snap-fit ​​but also a magnetic quick-connector or a hook with a self-locking function. The second connector 32 can also be selected with appropriate components, such as magnets or hooks, depending on the specific requirements. Regardless of the choice, the key is to ensure that the connection between the two is both secure and easy to operate for convenient daily use.

[0038] Reference Figure 3 Furthermore, a positioning bracket 4 is fixed to the inner side of the upper cover 2. This positioning bracket 4 consists of a positioning plate 41, an elastic part 42, and an abutment part 43. The positioning plate 41 is inclined and is mainly used to form a tight fit with the edge of the photomask when the upper cover 2 is closed, thereby correcting and adjusting the lateral position of the photomask to make it more centered. This not only improves the storage safety of the photomask but also reduces the additional stress caused by positional misalignment, extending the service life of the photomask.

[0039] Regarding the structural details of the positioning bracket 4, the elastic part 42 is made of a flexible plastic plate or spring plate. One end of it is fixed to the side wall of the upper cover 2, and the other end is connected to the abutment part 43. The main function of the abutment part 43 is to provide appropriate pressure to the photomask through its own elastic deformation after the photomask is placed in the photomask box, so as to prevent the photomask from moving unnecessarily during transportation.

[0040] In addition, to achieve a fixed connection between the positioning bracket 4 and the upper cover 2, the positioning bracket 4 is also equipped with a fixing plate 44, which has mounting holes. Meanwhile, an abutment plate 23 is provided on the top wall of the upper cover 2. The fixing plate 44 can be fixed by the abutment plate 23. The top wall of the upper cover 2 also has an abutment plate 23 with an abutment block extending to the side of the fixing plate 44 opposite to the top wall of the upper cover 2, thus limiting the position of the fixing plate 44. The abutment plate 23, in conjunction with the pin 22, can achieve stable fixing of the positioning bracket 4.

[0041] Reference Figure 4 The base 5 is also equipped with a sealing ring 51, which surrounds the periphery of the base 5. Furthermore, a groove is formed on the upper surface of the base 5, and a corresponding fitting part is provided on the sealing ring 51. After assembly, the fitting part will be embedded into the groove, ensuring that the sealing ring 51 maintains a good fixed state throughout the entire service life and will not easily fall out of its original position due to external impacts or other factors.

[0042] The bottom of the top cover 2 is provided with a flange 24. When the top cover 2 is fully closed, the flange 24 will press tightly against the sealing ring 51, effectively achieving a seal between the top cover 2 and the base 5, which helps to maintain the cleanliness inside the photomask box, which is especially important for precision semiconductor components.

[0043] Furthermore, this embodiment further improves the fixation effect of the photomask in the photomask box. Specifically, the upper surface of the base 5 is provided with a placement area for placing the photomask. A retainer 52 and a clamping assembly 6 are respectively provided on both sides of the placement area. The retainer 52 serves as a static support frame, while the clamping assembly 6 is a dynamic adjustment unit. The two work together to achieve effective fixation of the photomask.

[0044] The clamping assembly 6 can be fixed on the base 5 and adopts a spring clamping plate structure. Under the action of the spring, the clamping plate applies a clamping force to the photomask placed in the placement area, thereby ensuring the fixation of the photomask.

[0045] In a preferred embodiment of this application, the clamping component 6 is disposed inside the upper cover 2. Specifically, the clamping component 6 consists of two parts: a fixed base 61 and a clamping piece 62. The two ends of the clamping piece 62 are an abutment end 621 and a counterweight end 622, respectively, and are connected to the fixed base 61 via a pivot in the middle, forming a simple lever structure. In practical applications, when the upper cover 2 is opened, since the mass of the counterweight end 622 is greater than that of the abutment end 621, the clamping piece 62 will naturally swing downward under its own gravity, thereby causing the abutment end 621 to leave the working area, making it convenient for the user to easily pick up and put down the photomask. Once the upper cover 2 is closed, the counterweight end 622 will contact the contact surface on the base 5. At this time, through the lever principle, the abutment end 621 will be lifted and apply a certain pressure to the photomask, causing the photomask to fit tightly against the retainer 52, thereby achieving the best fixing effect.

[0046] The above are all preferred embodiments of the present application, and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.

Claims

1. A photomask box, characterized in that: It includes a crane head (1) and a top cover (2), the top cover (2) having a connecting column at the top, and the crane head (1) being connected to the connecting column by bolts; A safety structure (3) is also provided between the crane head (1) and the connecting column. The safety structure (3) includes a first connector (31) on the crane head (1) and a second connector (32) on the connecting column. The first connector (31) and the second connector (32) are engaged to achieve relative fixation between the crane head (1) and the connecting column.

2. The photomask box according to claim 1, characterized in that: The first connector (31) is configured as a connector buckle, and the first connector (31) extends to the horizontal side of the connecting post; the second connector (32) is configured as a connector head, and the connector head is engaged with the connector buckle.

3. The photomask box according to claim 1, characterized in that: The upper cover (2) is also fixed with a positioning bracket (4); the positioning bracket (4) has a positioning plate (41), which is inclined.

4. The photomask box according to claim 3, characterized in that: The positioning bracket (4) further includes an elastic part (42) and an abutment part (43). The elastic part (42) is fixedly connected to the side wall of the upper cover (2). The abutment part (43) is located below the elastic part (42) and is fixedly connected to the elastic part (42). The abutment part (43) is used to abut against the photomask.

5. The photomask box according to claim 3, characterized in that: The positioning bracket (4) also has a fixing plate (44), and the upper cover (2) is provided with an abutment plate (23). The fixing plate (44) is provided with an installation hole that is inserted and matched with the abutment plate (23). The upper cover (2) is also provided with an abutment plate (23) for restricting the movement of the fixing plate (44) along the length direction of the abutment plate (23).

6. The photomask box according to claim 1, characterized in that: It also includes a base (5), the upper cover (2) is placed on the upper side of the base (5), the base (5) is also provided with a sealing ring (51), and the upper cover (2) is provided with a flange (24) that abuts against the sealing ring (51).

7. The photomask box according to claim 6, characterized in that: The upper surface of the base (5) is provided with a groove, and the sealing ring (51) is provided with a fitting part, which is engaged with the groove.

8. The photomask box according to claim 1, characterized in that: It also includes a base (5), on which a placement area for placing a photomask is provided. A retainer (52) is provided on one side of the placement area and a clamping assembly (6) is provided on the other side. The photomask is placed between the retainer (52) and the clamping assembly (6). The clamping assembly (6) is used to apply a pushing force to the photomask and make the photomask abut against the retainer (52).

9. The photomask box according to claim 8, characterized in that: The clamping assembly (6) is mounted on the upper cover (2). The clamping assembly (6) includes a fixed base (61) and a clamping piece (62). The two ends of the clamping piece (62) are respectively configured as an abutment end (621) and a counterweight end (622). The clamping piece (62) is rotatably connected to the fixed base (61), and the abutment end (621) is located on the side of the fixed base (61) facing the placement area, while the counterweight end (622) is located on the other side of the fixed base (61). The weight of the counterweight end (622) is greater than the weight of the abutment end (621). The base (5) is provided with a contact surface that slides against the counterweight.

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