Probe card tip pressure detection equipment

Abstract

The utility model relates to probe card tip pressure detection equipment, which belongs to the technical field of probe card detection and comprises a fixed base, a rotary fixing mechanism is arranged at the top of the fixed base and comprises a rotary motor fixedly mounted in the fixed base, and a placement frame is fixedly mounted on an output shaft of the rotary motor. According to the probe card tip pressure detection equipment, the probe card body can be pressed and fixed under the action of the adjusting screw rod and the fixed pressing plate, the probe card body can be detected through the testing machine, and the testing machine is used for detecting the inter-diameter of the probe, the position of the probe, the flatness of the tip, the pressure of the probe and the impedance of the probe. The rotary motor can drive the placing frame and the probe card body to rotate, the stepping motor can be started to drive the threaded rod to rotate, the limiting rod drives the testing machine to move left and right, the testing machine can conveniently and comprehensively detect the surface of the probe card body, multiple probe card bodies can be conveniently and rapidly detected, and the flexibility of the device is improved.

Description

Technical Field

[0001] This utility model relates to the field of probe detection technology, specifically a probe tip pressure detection device. Background Technology

[0002] Probe cards are critical testing interfaces in semiconductor manufacturing. They connect ATE (Automatic Test Equipment) systems to semiconductor wafers and are used in the wafer testing process. A probe card mainly consists of a printed circuit board (PCB), probes, and functional components. Sometimes it also includes electronic components and reinforcement boards. The probes on the probe card directly contact the pads or bumps on the chip to extract chip signals. With the help of peripheral testing instruments and software control, it achieves the purpose of automated measurement. It is mainly responsible for performing preliminary electrical performance measurements before chip slab packaging and screening out defective chips.

[0003] Currently, the probe testing equipment used by manufacturers generally has a fixed, integrated testing device, which is inconvenient for quick adjustments during use and cannot quickly disassemble and assemble the probe card to test more samples. This results in low flexibility and practicality of the testing equipment. Therefore, this application proposes an alternative technical solution to address the above problems. Utility Model Content

[0004] To address the shortcomings of existing technologies, this utility model provides a probe card tip pressure detection device, which has the advantages of conveniently rotating and adjusting the probe card inside the detection platform and quick assembly and disassembly, facilitating mobile scanning detection. It solves the problem that current probe card detection devices used by manufacturers are generally fixed as a single unit, which is inconvenient for quick adjustment during use and cannot quickly disassemble and assemble the probe card to test more samples, resulting in low flexibility and practicality of the detection device.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a probe card tip pressure detection device, including a fixed base, wherein a rotating fixing mechanism is provided on the top of the fixed base;

[0006] The rotating fixing mechanism includes a rotating motor fixedly installed inside the fixed base, a placement frame fixedly installed on the output shaft of the rotating motor, a support rod fixedly installed on the bottom of the placement frame, a pulley slidably connected to the fixed base fixedly installed on the bottom of the support rod, and a detection platform fixedly installed inside the placement frame.

[0007] A fixed frame is fixedly installed on the top of the testing station. An adjusting screw is threaded inside the fixed frame. A fixed pressure plate is fixedly installed at the bottom of the adjusting screw. A probe card body is movably connected to the bottom of the fixed pressure plate. A movable adjustment component is provided on the top of the fixed base.

[0008] Furthermore, the movable adjustment assembly includes a mounting box fixedly installed on the top of the fixed base, a stepper motor fixedly installed inside the mounting box, and a threaded rod rotatably connected to the mounting box fixedly installed on the output shaft of the stepper motor.

[0009] The outer side of the threaded rod is threaded with two threaded blocks. A limiting rod that is slidably connected to the mounting box is fixedly installed on the top of the threaded blocks. A testing machine is fixedly installed on the top of the limiting rod.

[0010] Furthermore, the fixed base has an internal mounting groove, through which the rotary motor is fixedly connected to the fixed base.

[0011] Furthermore, a circular movable groove is formed on the top of the fixed base, and the pulley is slidably connected to the fixed base through the movable groove.

[0012] Furthermore, a threaded groove is provided on the top of the fixed frame, and the adjusting screw is threadedly connected to the fixed frame through the threaded groove.

[0013] Furthermore, the threaded block has a threaded groove inside, and the threaded block is threadedly connected to the threaded rod through the threaded groove.

[0014] Furthermore, a limiting groove is provided on the top of the mounting box, and the limiting rod is movably connected to the mounting box through the limiting groove.

[0015] Compared with the existing technology, the technical solution of this application has the following beneficial effects:

[0016] This probe card tip pressure testing device, through a set rotation fixing mechanism, uses an adjusting screw and a fixing plate to press and fix the probe card body. The probe card body can be tested by a testing machine, which is used to test the inter-needle diameter, needle position, needle tip flatness, needle pressure, and needle impedance. A rotary motor can drive the placement frame and probe card body to rotate, and a stepper motor can be started to drive the threaded rod to rotate. The limit rod drives the testing machine to move left and right, which facilitates the testing machine to perform comprehensive testing on the surface of the probe card body. It can quickly test multiple probe card bodies, increasing the flexibility of the device. Attached Figure Description

[0017] Figure 1 This is a cross-sectional view of the structure of this utility model;

[0018] Figure 2 This is a rear view schematic diagram of the structure of this utility model;

[0019] Figure 3 This is a three-dimensional structural schematic diagram of the present utility model.

[0020] In the diagram: 1. Fixed base; 2. Rotary motor; 3. Placement frame; 4. Support rod; 5. Pulley; 6. Testing table; 7. Fixed frame; 8. Adjusting screw; 9. Fixed pressure plate; 10. Probe card body; 11. Mounting box; 12. Stepper motor; 13. Threaded rod; 14. Threaded block; 15. Limiting rod; 16. Testing machine. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Please see Figures 1 to 3 The probe card tip pressure detection device in this embodiment includes a fixed base 1, and a rotating fixing mechanism is provided on the top of the fixed base 1.

[0023] In the first embodiment, the rotating fixing mechanism includes a rotating motor 2 fixedly installed inside a fixed base 1. The fixed base 1 has an installation groove inside, and the rotating motor 2 is fixedly connected to the fixed base 1 through the installation groove, which facilitates the installation and fixing of the rotating motor 2. The output shaft of the rotating motor 2 is fixedly installed with a placement frame 3, and a support rod 4 is fixedly installed at the bottom of the placement frame 3.

[0024] Among them, the bottom of the support rod 4 is fixedly installed with a pulley 5 that is slidably connected to the fixed base 1. The top of the fixed base 1 has a circular movable groove. The pulley 5 is slidably connected to the fixed base 1 through the movable groove, which helps the pulley 5 to rotate and move on the top of the fixed base 1, and facilitates the limiting of the placement frame 3. The inside of the placement frame 3 is fixedly installed with a detection table 6.

[0025] In this embodiment, a fixed frame 7 is fixedly installed on the top of the detection platform 6. An adjusting screw 8 is threadedly connected inside the fixed frame 7. A threaded groove is opened on the top of the fixed frame 7. The adjusting screw 8 is threadedly connected to the fixed frame 7 through the threaded groove, which helps the adjusting screw 8 to move up and down on the top of the fixed frame 7. A fixed pressure plate 9 is fixedly installed on the bottom of the adjusting screw 8. A probe card body 10 is movably connected to the bottom of the fixed pressure plate 9. A movable adjustment component is provided on the top of the fixed base 1.

[0026] In embodiment 2, the movable adjustment assembly includes a mounting box 11 fixedly mounted on the top of the fixed base 1. A stepper motor 12 is fixedly mounted inside the mounting box 11. A threaded rod 13 rotatably connected to the mounting box 11 is fixedly mounted on the output shaft of the stepper motor 12. Two threaded blocks 14 are threadedly connected to the outer side of the threaded rod 13.

[0027] The threaded block 14 has a threaded groove inside, and the threaded block 14 is threadedly connected to the threaded rod 13 through the threaded groove, which helps the threaded block 14 to move left and right. A limiting rod 15 that is slidably connected to the mounting box 11 is fixedly installed on the top of the threaded block 14. A limiting groove is opened on the top of the mounting box 11, and the limiting rod 15 is movably connected to the mounting box 11 through the limiting groove, which facilitates limiting the threaded block 14. A testing machine 16 is fixedly installed on the top of the limiting rod 15.

[0028] It should be noted that this probe card tip pressure testing device, through a set rotation fixing mechanism, uses the adjusting screw 8 and the fixing pressure plate 9 to press and fix the probe card body 10. The probe card body 10 can be tested by the testing machine 16. The testing machine 16 is used to test the inter-needle diameter, needle position, needle tip flatness, needle pressure, and needle impedance. The rotary motor 2 can drive the placement frame 3 and the probe card body 10 to rotate. The stepper motor 12 can also be started to drive the threaded rod 13 to rotate. The limit rod 15 drives the testing machine 16 to move left and right, which facilitates the testing machine 16 to perform comprehensive testing on the surface of the probe card body 10. It is convenient to quickly test multiple probe card bodies 10 and increases the flexibility of the device.

[0029] The working principle of the above embodiments is as follows:

[0030] When using this probe card tip pressure testing device, first place the probe card body 10 on top of the testing platform 6, then rotate the adjusting screw 8. The adjusting screw 8 moves downward inside the fixed frame 7, causing the fixed pressure plate 9 to move downward, thus pressing and fixing the probe card body 10. Then, the probe card body 10 can be tested by the testing machine 16. The testing machine 16 is used to test the needle diameter, needle position, needle tip flatness, needle pressure, and needle impedance. The top of the testing machine 16 is equipped with a laser head for online laser adjustment. Adjustment is performed while adjusting the voltage and the fuse control voltage. To stabilize the output voltage, it is necessary to ensure that the corresponding fuse is broken. If it is not completely broken, it will be directly broken by the laser head. The first test is performed to see if it is qualified. If it is not qualified, it will be directly broken by the laser, and then the test is performed again to see if the voltage can be adjusted. The laser size can be adjusted manually or by software.

[0031] During the testing process, the rotary motor 2 can also be activated, which drives the probe card body 10 inside the placement frame 3 to rotate, so that the laser emitted by the testing machine 16 can scan the probe card body 10 from all directions. The stepper motor 12 can also be activated, which drives the threaded rod 13 to rotate. The threaded block 14 on the outside of the threaded rod 13 can move left and right under the limit of the limiting rod 15. The limiting rod 15 drives the testing machine 16 to move left and right, so that the testing machine 16 can perform comprehensive testing on the surface of the probe card body 10. This allows for quick testing of multiple probe card bodies 10, increasing the flexibility and practicality of the device.

[0032] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply the existence of any such actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article, or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such process, method, article, or device. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of other identical elements in the process, method, article, or device comprising the element.

[0033] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A probe card tip pressure detection device, comprising a fixed base (1), characterized in that: The top of the fixed base (1) is provided with a rotating fixing mechanism; The rotating fixing mechanism includes a rotating motor (2) fixedly installed inside a fixed base (1), a placement frame (3) fixedly installed on the output shaft of the rotating motor (2), a support rod (4) fixedly installed at the bottom of the placement frame (3), a pulley (5) slidably connected to the fixed base (1) fixedly installed at the bottom of the support rod (4), and a testing platform (6) fixedly installed inside the placement frame (3). A fixed frame (7) is fixedly installed on the top of the testing platform (6). An adjusting screw (8) is threaded inside the fixed frame (7). A fixed pressure plate (9) is fixedly installed at the bottom of the adjusting screw (8). A probe card body (10) is movably connected to the bottom of the fixed pressure plate (9). A movable adjustment component is provided on the top of the fixed base (1).

2. The probe card tip pressure detection device according to claim 1, characterized in that: The movable adjustment assembly includes a mounting box (11) fixedly mounted on the top of a fixed base (1), a stepper motor (12) fixedly mounted inside the mounting box (11), and a threaded rod (13) rotatably connected to the mounting box (11) fixedly mounted on the output shaft of the stepper motor (12). The outer side of the threaded rod (13) is threaded with two threaded blocks (14). The top of the threaded block (14) is fixedly installed with a limiting rod (15) that is slidably connected to the mounting box (11). The top of the limiting rod (15) is fixedly installed with a testing machine (16).

3. The probe card tip pressure detection device according to claim 1, characterized in that: The fixed base (1) has an installation groove inside, and the rotary motor (2) is fixedly connected to the fixed base (1) through the installation groove.

4. The probe card tip pressure detection device according to claim 1, characterized in that: The top of the fixed base (1) has a circular movable groove, and the pulley (5) is slidably connected to the fixed base (1) through the movable groove.

5. The probe card tip pressure detection device according to claim 1, characterized in that: The top of the fixed frame (7) is provided with a threaded groove, and the adjusting screw (8) is threadedly connected to the fixed frame (7) through the threaded groove.

6. The probe card tip pressure detection device according to claim 2, characterized in that: The threaded block (14) has a threaded groove inside, and the threaded block (14) is threadedly connected to the threaded rod (13) through the threaded groove.

7. The probe card tip pressure detection device according to claim 2, characterized in that: The top of the mounting box (11) has a limiting groove, and the limiting rod (15) is movably connected to the mounting box (11) through the limiting groove.

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