End face anti-disengagement combined sealing element with force applied by rectangular elastic body
By designing a combination of rectangular elastic elements and PTFE jackets, the problem of unstable sealing rings in semiconductor wet processes is solved, achieving stable elastic compensation and durable sealing, which is suitable for semiconductor wet processes.
Patent Information
- Application Number
- CN202423158685.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-20
- Publication Date
- 2025-10-31
- Estimated Expiration
- 2034-12-20
AI Technical Summary
Existing end-face spring energy storage seals cannot be used in semiconductor wet processes because metal components do not allow for them. At the same time, O-rings are unstable in PTFE jackets and are prone to permanent compression deformation, leading to seal leakage. Combined seals are at risk of falling off when flipped or placed vertically.
It adopts a rectangular elastic element and a PTFE material jacket design. The jacket has a conical groove and a U-shaped structure, and is equipped with bumps and anti-slip texture. Combined with the rectangular elastic element made of silicone rubber, it provides stable elastic compensation and limiting, prevents falling off, and is resistant to high temperature and chemical corrosion.
It improves the stability and durability of the combined sealing ring, prevents it from falling off, reduces compression deformation, maintains the sealing effect in high-temperature environments, and is suitable for semiconductor wet processes.
Smart Images
Figure CN223498676U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor wet process technology, specifically to a rectangular elastomer force-applying end-face anti-detachment combination seal. Background Technology
[0002] Semiconductor wet processing is an important technology in semiconductor manufacturing. It uses chemical solutions to process and treat semiconductor materials. Semiconductor wet processing refers to a class of technologies that use chemical solutions to perform steps such as cleaning, etching, photolithography, and coating on semiconductor materials. It has advantages such as high precision, high efficiency, and low cost, and is an indispensable and important link in semiconductor manufacturing.
[0003] Existing end-face spring-loaded sealing rings consist of a PTFE jacket and a metal spring. The metal spring provides the initial sealing force, and the PTFE component is interference-fitted to achieve a seal. However, semiconductor wet processes do not allow for metal components, so existing spring-loaded sealing rings cannot be used in this process. Currently, there are combination sealing structures on the market that replace the internal metal spring with an O-ring, using the O-ring to provide the initial sealing force. However, O-rings have two problems: one is that the O-ring is unstable within the PTFE jacket, and the other is that the O-ring is prone to permanent compression deformation, leading to low-pressure leaks.
[0004] The existing combined sealing outer ring has a vertical plane structure. When the sealing groove is flipped upside down or placed vertically, the combined sealing ring is at risk of falling off the groove. Utility Model Content
[0005] To address the shortcomings of existing technologies, this application provides a rectangular elastomer force-applying end-face anti-detachment combination seal, which has advantages such as improved practicality and solves the problems mentioned in the background technology.
[0006] To achieve the above objectives, this application provides the following technical solution: a rectangular elastic body force-applying end-face anti-detachment combined seal, including an installation component, a groove is formed on the upper surface of the installation component, a jacket is installed inside the groove, a rectangular elastic body is installed inside the jacket, and a plane is provided above the installation component, the plane contacting the upper surface of the jacket.
[0007] With the above solution, the rectangular elastic element structure in the middle of the overall sealing ring is more stable and can provide more stable elastic compensation.
[0008] Furthermore, the inner wall of the groove is provided with a conical groove, and the left side of the jacket is adapted to the conical groove.
[0009] The above solution, through the design of the tapered groove and the jacket, can form a limit, which can prevent the assembled sealing ring from falling out of the groove, thereby improving the stability of the assembled sealing ring.
[0010] Furthermore, the sleeve is U-shaped, and two protrusions are fixedly connected to the inner wall of the sleeve.
[0011] The above solution, by setting the jacket in a U-shape and setting two protrusions, can limit the rectangular elastic element, prevent the rectangular elastic element from detaching from the jacket, and ensure that the rectangular elastic element can be stably located inside the jacket, thereby improving the stability of the overall combined sealing ring.
[0012] Furthermore, the jacket is made of PTFE material.
[0013] The above solution uses PTFE material for the jacket, which can resist the erosion of various chemical substances, giving it good high-temperature resistance and the ability to maintain a stable sealing effect in high-temperature environments. It also has good wear resistance and can withstand a certain amount of mechanical friction and wear.
[0014] Furthermore, the outer surface of the jacket is fixedly connected with two sets of anti-slip textures.
[0015] By implementing the above solution, the anti-slip texture can increase the resistance between the jacket and the groove plane, enabling them to maintain a stable contact state and thus improve their stability.
[0016] Furthermore, the rectangular elastic element is made of silicone rubber.
[0017] By using the above scheme, making the rectangular elastic element with silicone rubber can give it excellent high temperature resistance, cold resistance, aging resistance, oxidation resistance, radiation resistance, electrical insulation and other characteristics, as well as acid and alkali resistance and corrosion resistance.
[0018] Furthermore, the upper surface of the jacket is slightly higher than the upper surface of the mounting component.
[0019] With the above scheme, the upper surface of the jacket is slightly higher than the mounting part, which can reserve enough compression space for the plane, so that the stress can be applied to the jacket and transferred to the arc-shaped elastic element.
[0020] Furthermore, the rectangular elastic element is in close contact with the inner wall of the jacket.
[0021] The above scheme ensures that the tight contact between the rectangular elastic element and the inner wall of the jacket ensures stress transmission, so that the force applied to the jacket can be evenly transmitted to the rectangular elastic element.
[0022] Compared with the prior art, the technical solution of this application has the following beneficial effects:
[0023] This rectangular elastic force-applying end-face anti-detachment combination seal has two advantages over existing combination seals that use O-rings to provide elastic compensation. First, the rectangular elastic element has a more stable structure, thus providing more stable elastic compensation. Second, compared with O-rings, the rectangular elastic element has a smaller compression amount when generating the same sealing force, thus making it less prone to permanent compression deformation. Attached Figure Description
[0024] Figure 1 This is a schematic diagram of the overall structure of this application;
[0025] Figure 2 This is a schematic diagram of the installation component structure in this application;
[0026] Figure 3 This is a schematic diagram of the jacket structure of this application.
[0027] In the picture:
[0028] 1. Mounting component; 2. Groove; 3. Jacket; 4. Rectangular elastic element; 5. Flat surface; 6. Conical groove; 7. Protrusion; 8. Anti-slip texture. Detailed Implementation
[0029] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0030] Please see Figure 1 , Figure 2 and Figure 3 This embodiment of a rectangular elastic force-applying end-face anti-detachment combination seal includes a mounting component 1. The upper surface of the mounting component 1 has a groove 2. A jacket 3 is installed inside the groove 2. A rectangular elastic element 4 is installed inside the jacket 3. A plane 5 is provided above the mounting component 1. The plane 5 contacts the upper surface of the jacket 3. Compared with the existing combination seals that use O-rings to provide elastic compensation, the rectangular elastic element 4 in the middle of this integral combination seal has two advantages. First, the structure of the rectangular elastic element 4 is more stable, thus providing more stable elastic compensation. Second, compared with O-rings, the rectangular elastic element 4 has a smaller compression amount when generating the same sealing force, so it is less likely to produce permanent compression deformation.
[0031] Please see Figure 1 , Figure 2 and Figure 3The inner wall of the groove 2 is provided with a conical groove 6. The left side of the jacket 3 is adapted to the conical groove 6. The design of the conical groove 6 and the jacket 3 can form a limit, which can prevent the combined sealing ring from falling out of the groove 2, thereby improving the stability of the combined sealing ring. The jacket 3 is U-shaped, and two protrusions 7 are fixedly connected to the inner wall of the jacket 3. By making the jacket 3 U-shaped and setting two protrusions 7, the rectangular elastic element 4 can be limited, preventing the rectangular elastic element 4 from falling out of the jacket 3, so that the rectangular elastic element 4 can be stably located inside the jacket 3, thereby improving the stability of the overall combined sealing ring. The jacket 3 is made of PTFE material. The PTFE material of the jacket 3 can resist the corrosion of various chemicals, giving it good high temperature resistance and maintaining a stable sealing effect in high temperature environments. At the same time, it has good wear resistance and can withstand a certain amount of mechanical friction and wear.
[0032] Please see Figure 1 , Figure 2 and Figure 3 Two sets of anti-slip textures 8 are fixedly connected to the outer surface of the jacket 3. The anti-slip textures 8 can increase the resistance between the jacket 3 and the plane 5 of the groove 2, so that it can maintain a stable contact state, thereby improving its stability. The rectangular elastic element 4 is made of silicone rubber, which gives it excellent high temperature resistance, cold resistance, aging resistance, oxidation resistance, radiation resistance, electrical insulation and other characteristics. It also has the characteristics of acid and alkali resistance and corrosion resistance. The upper surface of the jacket 3 is slightly higher than the upper surface of the mounting part 1. The upper surface of the jacket 3 is slightly higher than the mounting part 1, which can reserve enough compression space for the plane 5, so that the stress can be applied to the jacket 3 and transferred to the arc-shaped elastic element. The rectangular elastic element 4 is in close contact with the inner wall of the jacket 3. The close contact between the rectangular elastic element 4 and the inner wall of the jacket 3 can ensure the transmission of stress, so that the force applied to the jacket 3 can be evenly transmitted to the rectangular elastic element 4.
[0033] The rectangular elastic body force-applying end-face anti-detachment combination seal in this embodiment has two advantages over the existing combination seals that use O-rings to provide elastic compensation. First, the rectangular elastic body 4 has a more stable structure, thus providing more stable elastic compensation. Second, compared with O-rings, the rectangular elastic body 4 has a smaller compression amount when generating the same sealing force, thus making it less prone to permanent compression deformation.
[0034] The working principle of the above embodiment is as follows: During installation, after the end face combined seal that can compensate for axial dynamic clearance is inserted into the groove 2, the plane 5 presses and locks the sealing ring. The jacket 3 squeezes the rectangular elastic element 4. After the rectangular elastic element 4 deforms, it generates elastic stress, which is applied to the jacket 3, so that the jacket 3 is close to the plane 5 to form a seal. Compared with the existing combined seal that uses O-rings to provide elastic compensation, the rectangular elastic element 4 in the middle of the overall combined seal ring has two advantages. First, the structure of the rectangular elastic element 4 is more stable, thus providing more stable elastic compensation. Second, compared with O-rings, the rectangular elastic element 4 has a smaller compression amount when generating the same sealing force, so it is less likely to produce permanent compression deformation. The design of the tapered groove 6 and the jacket 3 can form a limit, which can prevent the combined sealing ring from falling out of the groove 2, thereby improving the stability of the combined sealing ring. By setting the jacket 3 as U-shaped and setting two protrusions 7, the rectangular elastic element 4 can be limited to avoid the rectangular elastic element 4 from falling out of the groove 2. The rectangular elastic element 4 detaches from the jacket 3, allowing it to remain stably positioned inside the jacket 3, thereby improving the stability of the overall sealing ring. The anti-slip texture 8 increases the resistance between the jacket 3 and the plane 5 of the groove 2, ensuring stable contact and enhancing stability. The upper surface of the jacket 3 is slightly higher than the mounting part 1, providing sufficient compression space for the plane 5, allowing stress to be applied to the jacket 3 and transferred to the arc-shaped elastic element. The jacket 3 is made of PTFE, resisting the erosion of various chemicals and exhibiting excellent high-temperature resistance, maintaining a stable sealing effect in high-temperature environments. It also has good wear resistance, withstanding certain mechanical friction and wear. The anti-slip texture 8 further increases the resistance between the jacket 3 and the plane 5 of the groove 2, ensuring stable contact and enhancing stability.
[0035] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes the element.
[0036] Although embodiments of this application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A rectangular elastomer force-applying end-face anti-detachment combination seal, comprising an mounting component (1), characterized in that: The mounting component (1) has a groove (2) on its upper surface. A sleeve (3) is installed inside the groove (2). A rectangular elastic element (4) is installed inside the sleeve (3). A plane (5) is provided above the mounting component (1). The plane (5) is in contact with the upper surface of the sleeve (3).
2. The rectangular elastomer force-applying end-face anti-detachment combined seal according to claim 1, characterized in that: The inner wall of the groove (2) is provided with a conical groove (6), and the left side of the sleeve (3) is adapted to the conical groove (6).
3. The rectangular elastomer force-applying end-face anti-detachment combination seal according to claim 1, characterized in that: The sleeve (3) is U-shaped, and two protrusions (7) are fixedly connected to the inner wall of the sleeve (3).
4. The rectangular elastomer force-applying end-face anti-detachment combination seal according to claim 1, characterized in that: The jacket (3) is made of PTFE material.
5. The rectangular elastomer force-applying end-face anti-detachment combination seal according to claim 1, characterized in that: The outer surface of the jacket (3) is fixedly connected with two sets of anti-slip textures (8).
6. The rectangular elastomer force-applying end-face anti-detachment combination seal according to claim 1, characterized in that: The rectangular elastic element (4) is made of silicone rubber.
7. The rectangular elastomer force-applying end-face anti-detachment combination seal according to claim 1, characterized in that: The upper surface of the sleeve (3) is slightly higher than the upper surface of the mounting part (1).
8. The rectangular elastomer force-applying end-face anti-detachment combination seal according to claim 1, characterized in that: The rectangular elastic element (4) is tightly connected to the inner wall of the sleeve (3).