Quartz crucible detection device

Abstract

The utility model provides a quartz crucible detection device, and relates to the technical field of detection equipment. The quartz crucible detection device comprises a rack; the turntable is arranged on the rack and is used for placing a quartz crucible and driving the quartz crucible to rotate; the light shield is arranged on the rack and is used for covering the turntable, and a door body for allowing the quartz crucible to enter and exit is arranged on the light shield; the electron microscope camera is used for acquiring images of the inner wall of the quartz crucible; the driving assembly is arranged on the light shield, the electron microscope camera is arranged on the driving assembly, and the driving assembly is configured to drive the electron microscope camera to move, so that the electron microscope camera enters and exits the crucible. According to the quartz crucible detection device, the detection efficiency of the quartz crucible is improved, and the labor intensity of operators is reduced.

Description

Technical Field

[0001] This application relates to the field of testing equipment technology, and in particular to a quartz crucible testing device. Background Technology

[0002] The raw material for quartz crucibles is natural quartz sand, which may cause microbubbles to form in the transparent layer of the inner wall during the crucible production process. Because the inner wall of the quartz crucible is in contact with the silicon melt, if bubbles exist on the inner wall at high temperatures, these bubbles will cause gases and impurities to be released from the crucible into the melt, thus disrupting the growth of single-crystal silicon and resulting in problems such as high oxygen content and voids in the single crystal.

[0003] Therefore, the quality of the inner wall of a quartz crucible needs to be inspected before use. In existing technologies, the inspection of the inner wall of a quartz crucible typically involves microscopic photography. During this process, a person manually holds the camera inside the crucible to capture images and determine the product quality.

[0004] However, manually taking photos by hand requires a high level of physical exertion for the operators, and the differences in image acquisition points affect the testing quality of the quartz crucible. Utility Model Content

[0005] This application provides a quartz crucible testing device to solve the problem of high labor intensity for operators when image acquisition is done manually.

[0006] This application provides a quartz crucible testing device, including: a frame;

[0007] A turntable, mounted on the frame, is used to hold a quartz crucible and drive the quartz crucible to rotate;

[0008] A light shield is mounted on the frame and is used to cover the turntable. The light shield is provided with a door for the quartz crucible to enter and exit.

[0009] An electron microscope camera is used for acquiring images of the inner wall of the quartz crucible;

[0010] A drive assembly is disposed on the light shield, and the electron microscope camera is disposed on the drive assembly. The drive assembly is configured to drive the electron microscope camera to move so that the electron microscope camera enters and exits the quartz crucible.

[0011] In some embodiments, the driving assembly includes a translation member and a lifting member. The translation member is disposed on the light shield, and the lifting member is disposed on the translation member to drive the lifting member to move directly above the quartz crucible. The electron microscope camera is disposed on the lifting member to drive the electron microscope camera in and out of the quartz crucible.

[0012] In some embodiments, the translation member includes a slide rail, a slider, and a drive unit. The slide rail is disposed inside the light shield, the slider is slidably disposed on the slide rail, the lifting member is disposed on the slider, and the drive unit is disposed on the slider to drive the slider to slide on the slide rail.

[0013] In some embodiments, the lifting component is a hydraulic rod, which is vertically mounted on the slider, and the electron microscope camera is mounted on the piston rod of the hydraulic rod.

[0014] In some embodiments, the quartz crucible detection device further includes a control element for detecting the position of the quartz crucible and controlling the electron microscope camera to move to the central axis of the quartz crucible.

[0015] In some embodiments, the control unit includes a laser scanning device and a controller. The laser scanning device is disposed on the slider and faces the quartz crucible to scan the position of the quartz crucible. The controller is electrically connected to the laser scanning device and the drive assembly respectively to control the drive assembly to move the electron microscope camera to the central axis of the quartz crucible.

[0016] In some embodiments, the turntable is provided with a first fixing groove for placing the packaging box of the quartz crucible.

[0017] In some embodiments, the turntable is provided with a second fixing groove, which is adapted to the bottom of the quartz crucible for placing the quartz crucible, and the central axis of the second fixing groove coincides with that of the first fixing groove.

[0018] In some embodiments, the quartz crucible detection device further includes a plurality of straightening members disposed on the light shield and used to abut against the quartz crucible so that the central axis of the quartz crucible is parallel to the lifting direction of the electron microscope camera.

[0019] In some embodiments, the straightening member includes a telescopic rod and an abutment block. The telescopic rod is disposed on the light shield, and the abutment block is disposed on the telescopic rod. The telescopic rod extends and retracts in a horizontal direction so that the abutment block abuts against the outer wall of the quartz crucible.

[0020] The quartz crucible testing device provided in this application uses a turntable mounted on a frame to place the quartz crucible on the turntable. The turntable drives the quartz crucible to rotate, and an electron microscope camera is placed inside a light shield. A drive assembly moves the electron microscope camera into the quartz crucible to acquire images of its interior. This replaces manual image acquisition, improving image acquisition efficiency while reducing the labor intensity of operators. Furthermore, the image acquisition points are uniform, improving the testing quality of the quartz crucible. Attached Figure Description

[0021] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0022] Figure 1 This is a schematic diagram of the structure of the quartz crucible testing device provided in the embodiments of this application;

[0023] Figure 2 for Figure 1 A cross-sectional schematic diagram of the quartz crucible testing device.

[0024] Explanation of reference numerals in the attached figures:

[0025] 1. Quartz crucible; 2. Packaging box; 100. Frame; 200. Turntable; 210. First fixing slot; 220. Second fixing slot; 300. Light shield; 310. Door; 400. Electron microscope camera; 500. Drive assembly; 510. Translation component; 511. Slide rail; 512. Slider; 513. Drive unit; 520. Lifting component; 600. Laser scanning device; 700. Alignment component; 710. Telescopic rod; 720. Abutment block;

[0026] The accompanying drawings illustrate specific embodiments of this application, which will be described in more detail below. These drawings and descriptions are not intended to limit the scope of the concept in any way, but rather to illustrate the concept of this application to those skilled in the art through reference to particular embodiments. Detailed Implementation

[0027] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this application as detailed in the appended claims.

[0028] It should be noted that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0029] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "fixation," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between components; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0030] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0031] The raw material for quartz crucibles is natural quartz sand, which may cause microbubbles to form in the transparent layer of the inner wall during the crucible production process. Because the inner wall of the quartz crucible is in contact with the silicon melt, if bubbles exist on the inner wall at high temperatures, these bubbles will cause gases and impurities to be released from the crucible into the melt, thus disrupting the growth of single-crystal silicon and resulting in problems such as high oxygen content and voids in the single crystal.

[0032] Therefore, the quality of the inner wall of a quartz crucible needs to be inspected before use. In existing technologies, the inspection of the inner wall of a quartz crucible typically involves microscopic photography. During this process, a person manually holds the camera inside the crucible to capture images and determine the product quality.

[0033] However, manually taking photos by hand requires a high level of physical exertion for the operators, and the differences in image acquisition points affect the testing quality of the quartz crucible.

[0034] To address the aforementioned problems, this application provides a quartz crucible testing device. A turntable is mounted on a frame, and the quartz crucible is placed on the turntable. The turntable rotates the quartz crucible, and an electron microscope camera is placed inside a light shield. A drive assembly moves the electron microscope camera into the quartz crucible to acquire images of its interior. This replaces manual image acquisition, improving image acquisition efficiency while reducing the operator's workload. Furthermore, the image acquisition points are uniform, improving the testing quality of the quartz crucible.

[0035] The technical solution of this application and how the technical solution of this application solves the above-mentioned technical problems are described in detail below with specific embodiments. These specific embodiments can be combined with each other, and the same or similar concepts or processes may not be described again in some embodiments. The embodiments of this application will now be described with reference to the accompanying drawings.

[0036] This application provides a quartz crucible testing device, referring to... Figure 1 and Figure 2 The quartz crucible testing device includes: a frame 100;

[0037] A turntable 200 is mounted on the frame 100. The turntable 200 is used to place the quartz crucible 1 and drive the quartz crucible 1 to rotate.

[0038] A light shield 300 is mounted on the frame 100 and is used to cover the turntable 200. The light shield 300 is provided with a door 310 for the quartz crucible 1 to enter and exit.

[0039] Electron microscope camera 400, used for image acquisition of the inner wall of quartz crucible 1;

[0040] A drive assembly 500 is disposed on a light shield 300, and an electron microscope camera 400 is disposed on the drive assembly 500. The drive assembly 500 is configured to drive the electron microscope camera 400 to move so that the electron microscope camera 400 enters and exits the quartz crucible 1.

[0041] The rotation axis of the turntable 200 is vertical, and a drive structure for driving the turntable 200 to rotate is mounted on the frame 100. For example, the drive structure can be a motor or a motor gear structure, which will not be described in detail here.

[0042] The light shield 300 is fixed to the frame 100, and the light shield 300 covers the turntable 200 inside the light shield 300 to block the influence of external light on the image acquisition of the electron microscope camera 400. An opening is provided on one side of the light shield 300 for the quartz crucible 1 to enter and exit, and a door 310 is provided on the light shield 300 for opening and closing the opening to facilitate the placement and removal of the quartz crucible 1.

[0043] In this application, an electron microscope camera 400 is used to acquire images of the interior of the quartz crucible 1. Compared to X-ray-based flaw detection methods, the transparent layer of the quartz crucible 1 is made of a transparent material and can be seen with the naked eye using a magnifying glass, thus eliminating the need for X-rays. The atomic structure of silicon dioxide results in very low absorption of X-rays, preventing X-rays from penetrating and returning useful information. Furthermore, X-ray inspection typically requires focusing X-rays onto the material being inspected to obtain sufficient information. However, due to the transparency of the transparent layer of the quartz crucible 1, the transparent layer may absorb X-rays and cause interference. Tiny defects in the transparent layer may also cause X-ray scattering, thus affecting the accuracy of the inspection results.

[0044] Quartz crucible 1 is placed on turntable 200, which rotates the crucible 1. An electron microscope camera 400 is placed inside the light shield 300 and moved into the crucible 1 by a drive assembly 500. Images are acquired at different heights inside the crucible 1, replacing manual image acquisition. This improves image acquisition efficiency, reduces the labor intensity of operators, and ensures uniformity of image acquisition points, thus improving the detection quality of the crucible 1. Furthermore, it avoids direct contact with the operator, reducing the contamination of the crucible 1 by alkaline substances such as sweat, dandruff, and saliva, which could affect its subsequent use.

[0045] In some embodiments, refer to Figure 2 The drive assembly 500 includes a translation component 510 and a lifting component 520. The translation component 510 is disposed on the light shield 300, and the lifting component 520 is disposed on the translation component 510 to drive the lifting component 520 to move directly above the quartz crucible 1. The electron microscope camera 400 is disposed on the lifting component 520 to drive the electron microscope camera 400 to enter and exit the quartz crucible 1.

[0046] The electron microscope camera 400 is moved to directly above the quartz crucible 1 via the translation component 510, and then moved towards the bottom of the quartz crucible 1 via the lifting component 520. The distance of each descent of the electron microscope camera 400 is controlled according to the image acquisition density. After the electron microscope camera 400 descends to one image acquisition height, the turntable 200 is rotated, causing the quartz crucible 1 to rotate, thus achieving image acquisition at different positions at the same height on the quartz crucible 1. The electron microscope camera 400 is gradually moved downwards until it reaches the bottom of the quartz crucible 1. During the movement of the electron microscope camera 400, because the inner diameter of the quartz crucible 1 gradually changes, the electron microscope camera 400 needs to automatically focus. Furthermore, the image acquisition spacing can be set to be equidistant or gradually decreasing to acquire more images of the bottom of the quartz crucible 1.

[0047] Furthermore, refer to Figure 2 The translation component 510 includes a slide rail 511, a slider 512, and a drive unit 513. The slide rail 511 is disposed inside the light shield 300, the slider 512 is slidably disposed on the slide rail 511, the lifting component 520 is disposed on the slider 512, and the drive unit 513 is disposed on the slider 512 to drive the slider 512 to slide on the slide rail 511.

[0048] The slide rail 511 is fixed to the top of the light shield 300, and the slider 512 is slidably connected to the slide rail 511. For example, the drive unit 513 is a motor gear structure, with a rack provided on the slide rail 511. The gear is rotatably connected to the slider 512, and the output shaft of the motor is connected to the gear to drive the gear to rotate. The gear meshes with the rack, thereby driving the slider 512 to move on the slide rail 511.

[0049] Furthermore, refer to Figure 2 The lifting component 520 is a hydraulic rod, which is vertically mounted on the slider 512. The electron microscope camera 400 is mounted on the piston rod of the hydraulic rod.

[0050] For example, the lifting component 520 can also be a telescopic structure such as an electric push rod. The hydraulic rod extends and retracts the piston rod in the vertical direction, thereby driving the electron microscope camera 400 mounted on the piston rod to rise and fall.

[0051] In some embodiments, the quartz crucible detection device further includes a control element for detecting the position of the quartz crucible 1 and controlling the electron microscope camera 400 to move to the central axis of the quartz crucible 1.

[0052] Specifically, the control components include a laser scanning device 600 and a controller. The laser scanning device 600 is mounted on the slider 512 and faces the quartz crucible 1 to scan the position of the quartz crucible 1. The controller is electrically connected to the laser scanning device 600 and the drive assembly 500 to control the drive assembly 500 to move the electron microscope camera 400 to the central axis of the quartz crucible 1.

[0053] A laser scanning device 600 is mounted on a slider 512 and scans downwards. The controller is a computer. During the movement of the slider 512, the laser scanning device 600 scans the position of the quartz crucible 1, and the computer controls the movement of the slider 512. The computer determines the position of the quartz crucible 1 by measuring the distance between the laser scanning device 600 and the bottom of the quartz crucible 1, thus moving the electron microscope camera 400 directly above the quartz crucible 1 and aligning it with its central axis. This allows the electron microscope camera 400 to move to the bottom of the quartz crucible 1, avoiding the influence of the curved bottom wall of the quartz crucible 1 on image acquisition. Furthermore, the distance information between the laser scanning device 600 and the bottom of the crucible can determine the descent distance of the electron microscope camera 400, thereby avoiding the possibility of collision between the electron microscope camera 400 and the quartz crucible 1.

[0054] In some embodiments, refer to Figure 2 The turntable 200 is provided with a first fixing groove 210 for placing the packaging box 2 of the quartz crucible 1.

[0055] During the testing process, the quartz crucible 1 is typically placed on a foam board. The crucible 1, along with the foam board, can be placed directly on the first fixing slot 210 for subsequent image acquisition. This reduces the need to remove the crucible 1 from the foam board, further improving work efficiency and reducing the workload of the operators.

[0056] In some embodiments, a second fixing groove 220 is provided on the turntable 200. The second fixing groove 220 is adapted to the bottom of the quartz crucible 1 for placing the quartz crucible 1. The central axis of the second fixing groove 220 coincides with that of the first fixing groove 210.

[0057] The second fixing groove 220 is adapted to the bottom of the quartz crucible 1, thus limiting the position of the quartz crucible 1 when it is placed in the second fixing groove 220, reducing the possibility of the quartz crucible 1 tipping over. Furthermore, the area of ​​the second fixing groove 220 is smaller than the area of ​​the first fixing groove 210, therefore, during the testing process, the use and fixation of the quartz crucible 1 are not affected regardless of whether it is in its packaging box 2.

[0058] In some embodiments, refer to Figure 2 The quartz crucible testing device also includes multiple straightening elements 700, which are mounted on the light shield 300 and are used to abut against the quartz crucible 1 so that the central axis of the quartz crucible 1 is parallel to the lifting direction of the electron microscope camera 400.

[0059] The setting of the straightening component 700 helps to straighten the quartz crucible 1 so that the central axis of the quartz crucible 1 is parallel to the lifting direction of the electron microscope camera 400. This allows the electron microscope camera 400 to move accurately to the bottom of the quartz crucible 1, avoiding errors in image acquisition points and reducing the possibility of collision between the electron microscope camera 400 and the bottom of the quartz crucible 1.

[0060] In some embodiments, the straightening member 700 includes a telescopic rod 710 and an abutment block 720. The telescopic rod 710 is disposed on the light shield 300, and the abutment block 720 is disposed on the telescopic rod 710. The telescopic rod 710 extends and retracts in the horizontal direction so that the abutment block 720 abuts against the outer wall of the quartz crucible 1.

[0061] The telescopic rod 710 is either electrically operated or hydraulically operated, and extends and retracts horizontally. The abutment block 720 is an arc-shaped block that fits the outer wall of the quartz crucible 1. In this application, two straightening members 700 are provided, symmetrically arranged on the side wall of the light shield 300, and move synchronously to straighten the quartz crucible 1.

[0062] The quartz crucible testing device provided in this application uses a turntable 200 set on a frame 100 to place a quartz crucible 1 on the turntable 200. The turntable 200 drives the quartz crucible 1 to rotate. An electron microscope camera 400 is set inside a light shield 300 and moved into the quartz crucible 1 by a drive assembly 500 to acquire images of the interior of the quartz crucible 1. This replaces manual image acquisition, improves image acquisition efficiency, reduces the labor intensity of operators, and ensures uniformity of image acquisition points, thereby improving the testing quality of the quartz crucible 1.

[0063] Other embodiments of this application will readily conceive of by those skilled in the art upon consideration of the specification and practice of this application. This application is intended to cover any variations, uses, or adaptations of this application that follow the general principles of this application and include common knowledge or customary techniques in the art not disclosed in this application. The specification and embodiments are to be considered exemplary only, and the true scope and spirit of this application are indicated by the following claims.

[0064] It should be understood that this application is not limited to the precise structure described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of this application is limited only by the appended claims.

Claims

1. A quartz crucible testing device, characterized in that, include: Rack (100); A turntable (200) is disposed on the frame (100), the turntable (200) is used to place the quartz crucible (1) and drive the quartz crucible (1) to rotate; A light shield (300) is provided on the frame (100) and is used to cover the turntable (200). The light shield (300) is provided with a door (310) for the quartz crucible (1) to enter and exit. An electron microscope camera (400) is used for image acquisition of the inner wall of the quartz crucible (1); A drive assembly (500) is disposed on the light shield (300), and an electron microscope camera (400) is disposed on the drive assembly (500). The drive assembly (500) is configured to drive the electron microscope camera (400) to move so that the electron microscope camera (400) enters and exits the quartz crucible (1) for image acquisition.

2. The quartz crucible testing device according to claim 1, characterized in that, The drive assembly (500) includes a translation component (510) and a lifting component (520). The translation component (510) is disposed on the light shield (300), and the lifting component (520) is disposed on the translation component (510) to drive the lifting component (520) to move directly above the quartz crucible (1). The electron microscope camera (400) is disposed on the lifting component (520) to drive the electron microscope camera (400) to enter and exit the quartz crucible (1).

3. The quartz crucible testing device according to claim 2, characterized in that, The translation component (510) includes a slide rail (511), a slider (512), and a drive unit (513). The slide rail (511) is disposed inside the light shield (300). The slider (512) is slidably disposed on the slide rail (511). The lifting component (520) is disposed on the slider (512). The drive unit (513) is disposed on the slider (512) to drive the slider (512) to slide on the slide rail (511).

4. The quartz crucible testing device according to claim 3, characterized in that, The lifting component (520) is a hydraulic rod, which is vertically mounted on the slider (512), and the electron microscope camera (400) is mounted on the piston rod of the hydraulic rod.

5. The quartz crucible testing device according to claim 3, characterized in that, It also includes a control unit for detecting the position of the quartz crucible (1) and controlling the electron microscope camera (400) to move to the central axis of the quartz crucible (1).

6. The quartz crucible testing device according to claim 5, characterized in that, The control unit includes a laser scanning device (600) and a controller. The laser scanning device (600) is disposed on the slider (512) and faces the quartz crucible (1) to scan the position of the quartz crucible (1). The controller is electrically connected to the laser scanning device (600) and the drive assembly (500) respectively to control the drive assembly (500) to drive the electron microscope camera (400) to move to the central axis of the quartz crucible (1).

7. The quartz crucible testing device according to any one of claims 1-4, characterized in that, The turntable (200) is provided with a first fixing groove (210) for placing the packaging box (2) of the quartz crucible (1).

8. The quartz crucible testing device according to claim 7, characterized in that, The turntable (200) is provided with a second fixing groove (220), which is adapted to the bottom of the quartz crucible (1) for placing the quartz crucible (1). The central axis of the second fixing groove (220) coincides with that of the first fixing groove (210).

9. The quartz crucible testing device according to any one of claims 1-4, characterized in that, It also includes multiple straightening components (700), which are disposed on the light shield (300) and are used to abut against the quartz crucible (1) so that the central axis of the quartz crucible (1) is parallel to the lifting direction of the electron microscope camera (400).

10. The quartz crucible testing device according to claim 9, characterized in that, The straightening component (700) includes a telescopic rod (710) and an abutment block (720). The telescopic rod (710) is disposed on the light shield (300), and the abutment block (720) is disposed on the telescopic rod (710). The telescopic rod (710) extends and retracts in the horizontal direction so that the abutment block (720) abuts against the outer wall of the quartz crucible (1).

Images