Novel slurry filter device fixing support
By designing a new type of slurry filter mounting bracket, which uses a combination structure of mounting bracket base plate, filter mounting clip and base, the problem of slurry crystallization clogging is solved, the efficiency of disassembly and assembly is improved, the filter life is extended and the production cost is reduced.
Patent Information
- Application Number
- CN202423031097.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-10
- Publication Date
- 2025-11-07
- Estimated Expiration
- 2034-12-10
AI Technical Summary
In existing CMP equipment, slurry crystals remain in the filter holder slots, causing filter blockage, shortening lifespan and increasing production costs. They can also scratch wafers, and the holder slots are difficult to clean and expensive to replace.
A novel mounting bracket for slurry filters has been designed, which consists of a mounting bracket base plate, filter fixing clips, and a base, and is fixed by bolts or screws. Combined with sliding grooves, snap-fit and magnetic structures, the disassembly and assembly process is simplified.
It is easy to operate, improves disassembly and assembly efficiency, reduces slurry crystal residue, extends filter life, reduces production costs, and avoids wafer scratches.
Smart Images
Figure CN223517102U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to filter device fixed bolster technical field especially a novel slurry filter device fixed bolster. BACKGROUND
[0002] The slurry filter device in the CMP industry is composed of a filter body and a filter support. During use, the filter body is pushed into the support clamping groove and fixed by rotating the lock buckle. During the daily disassembly process, slurry crystals are left in the support clamping groove and enter the filter and the main machine table with the use of new filters, which blocks the filter, shortens the service life of the filter, increases production costs, contacts the wafer surface, causes scratches on the product, and increases the probability of scrapping. The support clamping groove is narrow and difficult to clean, and the replacement of the support is expensive. SUMMARY
[0003] The utility model solves the technical problems: in order to overcome the above-mentioned problems, a novel slurry filter device fixed bolster is provided, which solves the above-mentioned problems.
[0004] The utility model solves the technical problems by adopting the following technical scheme:
[0005] A novel slurry filter device fixed bolster, comprising a fixed bolster bottom plate, two filter fixing blocks and two filter fixing block bases, wherein the filter fixing block bases are fixed on the fixed bolster bottom plate by bolts or screws, the filter fixing blocks are provided with sliding groove structures that are inserted and fixed with the filter fixing block bases, and the two filter fixing blocks are designed to be opened and mutually clamped.
[0006] Preferably, a first screw hole is arranged on the fixed bolster bottom plate, a second screw hole matched with the first screw hole is arranged on the filter fixing block base, and the second screw hole and the first screw hole are fixed by bolts or screws.
[0007] Preferably, a through clamping groove is arranged on the filter fixing block, and the filter fixing block base is inserted into the clamping groove to fix it.
[0008] Preferably, a bottom support plate is fixed at the lower end of the filter fixing block base to support and hold the bottom of the filter fixing block.
[0009] Preferably, a second protrusion is fixedly provided on one of the filter fixing clips, and two first protrusions are fixedly provided on the other, with a locking position formed between the first protrusions for the second protrusion to be engaged. The first protrusion has a through first pin hole, and the second protrusion has a through second pin hole. It also includes a fixing pin with a pin limiting block for being inserted into the second pin hole and the fixing pin for fixing.
[0010] Preferably, the upper ends of the pin limiting block and the first protrusion are magnetically fixed together.
[0011] The advantages and positive effects of this utility model are: the new filter bracket is simple to operate, easy to disassemble and assemble, and improves work efficiency. Attached Figure Description
[0012] The present invention will be further described below with reference to the accompanying drawings and embodiments.
[0013] Figure 1 This is a schematic diagram of the structure of this utility model. Detailed Implementation
[0014] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the present invention, and therefore only show the components relevant to the present invention. The embodiments of the present invention will be further described in detail below with reference to the accompanying drawings:
[0015] like Figure 1 As shown, the present invention provides a novel slurry filter device mounting bracket, comprising a mounting bracket base plate 10, two filter mounting clips 12, and two filter mounting block bases 21. The filter mounting block bases 21 are fixed to the mounting bracket base plate 10 by bolts or screws, and the filter mounting clips 12 are provided with a sliding groove structure for engaging and inserting with the filter mounting block bases 21. The two filter mounting clips 12 are designed to be split open and interlocked with each other.
[0016] Preferably, a first screw hole 11 is provided on the base plate 10 of the fixed bracket, and a second screw hole 22 that mates with the first screw hole 11 is provided on the base 21 of the filter fixing block. The second screw hole 22 and the first screw hole 11 are fixed together by bolts or screws.
[0017] Preferably, a through slot 13 is provided on the filter fixing clip 12, and the filter fixing block base 21 is inserted into the slot 13 to fix it.
[0018] Preferably, a bottom supporting plate 23 is fixedly arranged at the lower end of the filter fixing block base 21 to support the bottom of the filter fixing block 12.
[0019] Preferably, a protruding second protruding block 17 is fixedly arranged on one of the filter fixing blocks 12, two protruding first protruding blocks 14 are fixedly arranged on the other filter fixing block 12, and a clamping position 15 for clamping the second protruding block 17 is formed between the first protruding blocks 14, the first protruding blocks 14 are provided with first pin holes 16, the second protruding block 17 is provided with second pin holes 18, and a fixed pin 19 with a pin limiting block 20 is arranged to be inserted into the second pin holes 18 and the fixed pin 19 to be fixed.
[0020] Preferably, the pin limiting block 20 and the upper end of the first protruding block 14 are fixedly magnetically attracted.
[0021] It should be emphasized that the embodiments of the present application are illustrative rather than limiting, and that claims are not limited to the embodiments described in the detailed description, but rather cover all modifications and equivalents consistent with the technical solution of the present application.
Claims
1. A new slurry filtration device fixing support, characterized by: The utility model provides a filter fixing device, which comprises a fixed support bottom plate (10) and two filter fixing clamping blocks (12) and two filter fixing block bases (21), wherein the filter fixing block base (21) is fixed on the fixed support bottom plate (10) through bolts or screws, the filter fixing clamping block (12) is provided with a sliding groove structure matched with the filter fixing block base (21), and the two filter fixing clamping blocks (12) are designed to be opened and are matched with each other.
2. A new slurry filtration device fixing support according to claim 1, characterized in that: A first screw hole (11) is arranged on the fixed support bottom plate (10), a second screw hole (22) matched with the first screw hole (11) is arranged on the filter fixing block base (21), and the second screw hole (22) and the first screw hole (11) are fixed through bolts or screws.
3. A new slurry filter device fixing support according to claim 2, characterized in that: A penetrating clamping groove (13) is arranged on the filter fixing clamping block (12), and the filter fixing block base (21) is inserted into the clamping groove (13) to be fixed.
4. The novel slurry filtration device fixing support according to claim 3, characterized in that: A bottom supporting plate (23) is fixed at the lower end of the filter fixing block base (21) to support the bottom of the filter fixing clamping block (12).
5. A new slurry filtration device fixing support according to claim 4, characterized in that: A second protruding block (17) is fixed on one of the filter fixing clamping blocks (12), two first protruding blocks (14) are fixed on the other filter fixing clamping block (12), a clamping position (15) for clamping the second protruding block (17) is formed between the first protruding blocks (14), a penetrating first pin hole (16) is arranged on the first protruding block (14), a penetrating second pin hole (18) is arranged on the second protruding block (17), and a fixed pin (19) with a pin limiting block (20) is arranged in the second pin hole (18) and the fixed pin (19) to be fixed.
6. A novel slurry filtration device fixing support according to claim 5, characterized in that: The pin limiting block (20) and the upper end of the first protruding block (14) are magnetically fixed.