Pipeline structure for adjusting gas flow

Abstract

The utility model discloses a pipeline structure for adjusting gas flow, which comprises a gas mixing valve body, a silane main pipe is arranged on the outer wall of the gas mixing valve body, a mixed gas branch pipe is arranged on the outer wall of the silane main pipe, a barometer is arranged at the top of the silane main pipe, a first circulation port is arranged on the outer wall of the gas mixing valve body, and a second circulation port is arranged on the outer wall of the gas mixing valve body. A second circulation opening is formed in the outer wall of the gas mixing valve body, a clamping sleeve threaded connector is installed in the first circulation opening in a threaded mode, an adjusting assembly is installed in the gas mixing valve body, a connector is installed on the front face of the gas mixing valve body, a valve rod is connected to the interior of the connector in a threaded mode, and a hand wheel is fixedly connected to one end of the valve rod. According to the pipeline structure for adjusting the gas flow, all the pipelines are connected with the controller, the gas circulation amount is controlled through the adjusting assembly, the two circulation openings are formed in the outer side of the gas mixing valve body, and one circulation opening is added to be used for adjusting the gas flow of the pipelines to guarantee certain pressure of the pipelines.

Description

TECHNICAL FIELD

[0001] The utility model relates to pipeline technical field, concretely is a pipeline structure of adjusting gas flow. BACKGROUND

[0002] In the utility model with application publication number CN112783219B, application publication date 2023.03, the name is the utility model patent application of "a gas flow regulating device", the present application provides a kind of gas flow regulating device, belongs to flow regulating device technical field;The gas flow regulating device includes first ventilation disc and second ventilation disc, the first ventilation disc and the second ventilation disc are attached;Multiple ventilation holes are provided on the first ventilation disc and the second ventilation disc, and the ventilation hole on the first ventilation disc and the ventilation hole on the second ventilation disc are one-to-one corresponding;The first ventilation disc is connected with driving mechanism, and the driving mechanism is used to drive the first ventilation disc to rotate relative to the second ventilation disc.The above scheme, the gas flow regulating device utilizes the coincidence degree of the ventilation hole of two ventilation discs to adjust the size of ventilation quantity, specifically, when indoor pressure exceeds specified value, the first ventilation disc rotates relative to the second ventilation disc, increases the ventilation quantity between indoor and outdoor, to reduce the air pressure value of indoor, to achieve the purpose of adjusting indoor air pressure.

[0003] In the prior art including the above patent, the gas pipeline is used for circulating gas, and the circulation capacity is affected by the diameter of the pipeline. If the circulation capacity is too large, the pipeline may burst due to the package. Since the pipeline structure transports active gases such as silane, nitrogen and hydrogen mixed gas, there is a certain risk of gas pipe rupture. Therefore, a pipeline structure for adjusting gas flow according to gas circulation capacity is needed. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing a pipeline structure for adjusting gas flow to solve the problem of adjusting gas flow in the above background technology.

[0005] To achieve the above object, the utility model provides the following technical scheme: a pipeline structure for adjusting gas flow, comprising a gas mixing valve body, a silane main pipe is installed on the outer wall of the gas mixing valve body, a mixed gas branch pipe is installed on the outer wall of the silane main pipe, a gas pressure gauge is installed on the top of the silane main pipe, a first flow passage is formed in the outer wall of the gas mixing valve body, a second flow passage is formed in the outer wall of the gas mixing valve body, a sleeve threaded joint is screwed in the inside of the first flow passage, an adjusting assembly is installed in the inside of the gas mixing valve body, a connector is installed on the front of the gas mixing valve body, a valve stem is screwed in the inside of the connector, and a hand wheel is fixedly connected to one end of the valve stem.

[0006] Further, the silane main pipe and the mixed gas branch pipe are perpendicular to each other, and the cross-sectional diameter of the mixed gas branch pipe is smaller than that of the silane main pipe.

[0007] Further, the bottom probe of the air pressure gauge penetrates the mixed gas valve body, and the bottom of the air pressure gauge is threadedly connected with the slotted top of the mixed gas valve body.

[0008] Further, the first and second flow-through openings are provided with sleeve thread joints, and the flow range of the second flow-through opening is 0-5000 ml / min under standard conditions.

[0009] Further, the inside of the adjusting assembly comprises an outer chamber, a movable chamber and helical blades, the inside of the mixed gas valve body is fixedly connected with the outer chamber, the inside of the outer chamber is bearingly connected with the movable chamber, and the inside of the movable chamber is provided with the helical blades.

[0010] Further, the outer wall of the outer chamber is provided with a through hole, the outer wall of the movable chamber is provided with an adjusting opening, and the through hole corresponds to the adjusting opening, and the valve rod penetrates the mixed gas valve body and is connected with the outer wall of the movable chamber.

[0011] Further, the mixed gas valve body is arranged between pipes, and is arranged at the starting position of the pipe flow process, and is connected with a plurality of valves, pipes and pressure controllers.

[0012] Compared with the prior art, the pipe structure for adjusting gas flow has the following advantages:

[0013] (1) The device is connected with various pipes and controllers, the adjusting assembly is used for controlling the flow of gas, two flow-through openings are arranged on the outside of the mixed gas valve body, one of the flow-through openings is used for adjusting the gas flow of the pipe to ensure the pressure of the pipe, the second flow-through opening is connected with other pipes in the gas flow chart by means of a sleeve thread joint, and is driven by the impact pressure of gas flow to drive the helical blades to move, so that the through hole in the upper part of the outer chamber is connected with the groove in the upper part of the movable chamber, after the flow is adjusted, the valve rod is driven by the hand wheel to fix the helical blades, so that the pressure of the pipe is finely adjusted, the pressure of the pipe is more accurately controlled, the gas flow of the pipe is more accurately controlled according to the process requirement, the flow is more accurate, and the process stability is ensured.

[0014] (2) The pipes are connected by means of thread connection, the connection is more firm, the sleeve thread joint is used for connecting the two flow-through openings, the installation is more rapid, the mixed gas valve body is used for mixing the silane, nitrogen and hydrogen mixed gas, the connection port is more sealed, the gas leakage is reduced, the connection of the device is more stable, the air pipe is convenient to replace, a single pipe is convenient to replace, and the later maintenance is more simple and convenient.BRIEF DESCRIPTION OF DRAWINGS BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 is the front view of the utility model;

[0016] Figure 2 is the side view of the utility model;

[0017] Figure 3 is the structure schematic view of the adjusting assembly of the utility model;

[0018] Figure 4 is the rear view of the utility model.

[0019] In the drawing: 1, mixed gas valve body; 2, silane main pipe; 3, mixed gas branch pipe; 4, air pressure gauge; 5, first flow-through port; 6, second flow-through port; 7, collet threaded joint; 8, adjusting assembly; 801, outer bin; 802, movable bin; 803, spiral blade; 9, connector; 10, valve stem; 11, hand wheel. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0021] Please refer to Figures 1-4 The utility model provides a technical scheme:

[0022] A pipeline structure for adjusting gas flow, comprising a mixed gas valve body 1, a silane main pipe 2 is installed on the outer wall of the mixed gas valve body 1, a mixed gas branch pipe 3 is installed on the outer wall of the silane main pipe 2, an air pressure gauge 4 is installed on the top of the silane main pipe 2, a first flow-through port 5 is formed in the outer wall of the mixed gas valve body 1, a second flow-through port 6 is formed in the outer wall of the mixed gas valve body 1, a collet threaded joint 7 is screw-mounted in the first flow-through port 5, an adjusting assembly 8 is installed in the mixed gas valve body 1, a connector 9 is installed on the front of the mixed gas valve body 1, a valve stem 10 is screw-connected in the connector 9, and a hand wheel 11 is fixedly connected to one end of the valve stem 10.

[0023] The above structure is connected with various pipelines and controllers by the device, the adjusting assembly 8 is used to control the flow of gas, two flow-through ports are installed on the outside of the mixed gas valve body 1, and one MFC flow range 0~5000sccm is added to adjust the pipeline gas flow and ensure the pipeline pressure.

[0024] Further, the silane main pipe 2 and the mixed gas branch pipe 3 are perpendicular to each other, the cross-sectional diameter of the mixed gas branch pipe 3 is smaller than that of the silane main pipe 2, the bottom probe of the gas pressure gauge 4 penetrates the mixed gas valve body 1, the bottom of the gas pressure gauge 4 is threadedly connected with the top of the mixed gas valve body 1, the first flow-through port 5 and the second flow-through port 6 are both provided with a sleeve threaded joint 7, and the flow range of the second flow-through port 6 is 0-5000 milliliters per minute at standard conditions.

[0025] The above structure can fine-tune the pressure of the pipeline, more accurately control the pipeline pressure, more accurately control the pipeline gas flow according to the process requirements, and ensure the process stability.

[0026] Further, the inside of the adjusting assembly 8 comprises an outer bin 801, a movable bin 802 and a spiral blade 803, the inside of the mixed gas valve body 1 is fixedly connected with the outer bin 801, the inside of the outer bin 801 is bearing-connected with the movable bin 802, the inside of the movable bin 802 is provided with the spiral blade 803, the outer wall of the outer bin 801 is provided with a through hole, the outer wall of the movable bin 802 is provided with an adjusting port, and the through hole corresponds to the adjusting port, and the valve rod 10 penetrates the mixed gas valve body 1 and is connected with the outer wall of the movable bin 802.

[0027] The above structure is driven by the impact pressure of the gas flow to drive the spiral blade 803 to move, so that the through hole above the outer bin 801 is connected with the notch above the movable bin 802, and the flow size is adjusted.

[0028] Further, the mixed gas valve body 1 is installed between the pipelines, the mixed gas valve body 1 is installed between the pipelines, and the mixed gas valve body 1 is arranged at the starting position of the pipeline process, and the mixed gas valve body 1 is connected with each other by a plurality of valves, pipelines and pressure controllers.

[0029] The above structure can fine-tune the pressure of the pipeline, more accurately control the pipeline pressure.

[0030] Working principle: in use, first, SiH4 silane and N2 / H2 nitrogen and hydrogen mixed gas enters the system from the silane main pipe 2, the mass flow controller is located between the pipelines for controlling the flow of gas, and the pipeline is designed with a plurality of MFCs, which are marked as "1000sccm" and "50sccm", respectively, indicating that they can control the maximum flow;

[0031] Secondly, a module is added to increase the flow path of the gas, and the flow of the gas is controlled by the adjusting assembly 8, two flow-through openings are installed on the outside of the gas mixing valve body 1, one MFC flow range 0~5000sccm is added to adjust the pipeline gas flow to ensure the pipeline pressure, and the second flow-through opening 6 is connected with other pipelines in the gas flow chart by a sleeve threaded joint 7, and is driven by the gas flow impact pressure to drive the spiral blade 803 to move, so that the through hole above the outer bin 801 is connected with the notch opened on the movable bin 802, after adjusting the flow size, the hand wheel 11 drives the valve rod 10 to fix the spiral blade 803, so as to fine-tune the pressure of the pipeline, more accurately control the pipeline pressure, more accurately control the pipeline gas flow according to the process requirement, more accurately control the flow, ensure the process stability;

[0032] Finally, the adjusting pipeline structure has multiple valves for controlling the on-off of the gas, for example, multiple valves are arranged around the "H5" module for adjusting the flow direction of the gas, and the pressure controller PC is arranged between the pipelines for controlling the pressure of the gas, and one pressure sensor PS6 and one pressure controller PC are shown in the figure for monitoring and adjusting the pressure in the system, multiple groups of nodes are arranged between the pipelines for connecting different gas pipelines and equipment, and these connection points ensure that the gas can flow along the predetermined path.

[0033] It is obvious for those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or essential characteristics of the present application. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting, and the scope of the present application is defined by the appended claims rather than the above description, and therefore all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present application. Any reference signs in the claims should not be regarded as limiting the claims involved.

Claims

1. A piping structure for regulating gas flow, comprising a gas mixing valve body (1), characterized in that: The outer wall of the mixed gas valve body (1) is provided with a silane main pipe (2), the outer wall of the silane main pipe (2) is provided with a mixed gas branch pipe (3), the top of the silane main pipe (2) is provided with a gas pressure gauge (4), the outer wall of the mixed gas valve body (1) is provided with a first flow-through port (5), the outer wall of the mixed gas valve body (1) is provided with a second flow-through port (6), the inside of the first flow-through port (5) is provided with a sleeve threaded joint (7), the inside of the mixed gas valve body (1) is provided with an adjusting assembly (8), the front of the mixed gas valve body (1) is provided with a connector (9), the inside of the connector (9) is provided with a valve stem (10), one end of the valve stem (10) is fixedly connected with a hand wheel (11).

2. The pipe structure for regulating the flow of gas according to claim 1, wherein: The silane main pipe (2) and the mixed gas branch pipe (3) are perpendicular to each other, and the cross-sectional diameter of the mixed gas branch pipe (3) is smaller than that of the silane main pipe (2).

3. The pipe structure for regulating the flow of gas according to claim 1, wherein: The bottom probe of the gas pressure gauge (4) penetrates the mixed gas valve body (1), and the bottom of the gas pressure gauge (4) is threadedly connected with the top of the mixed gas valve body (1).

4. The conduit structure of claim 1, wherein: The first flow-through port (5) and the second flow-through port (6) are both provided with a sleeve threaded joint (7), and the flow range of the second flow-through port (6) is 0-5000 milliliters per minute under standard conditions.

5. The conduit structure of claim 1, wherein: The inside of the adjusting assembly (8) comprises an outer bin (801), a movable bin (802) and a spiral blade (803), the inside of the mixed gas valve body (1) is fixedly connected with the outer bin (801), the inside of the outer bin (801) is bearingly connected with the movable bin (802), and the inside of the movable bin (802) is provided with the spiral blade (803).

6. A conduit arrangement for regulating the flow of a gas according to claim 5, wherein: The outer wall of the outer bin (801) is provided with a through hole, the outer wall of the movable bin (802) is provided with an adjusting port, and the through hole corresponds to the adjusting port, and the valve stem (10) penetrates the mixed gas valve body (1) and is connected with the outer wall of the movable bin (802).

7. The conduit structure of claim 1, wherein: The mixed gas valve body (1) is installed between pipelines, and the mixed gas valve body (1) is arranged at the starting position of the pipeline process, and the mixed gas valve body (1) is connected with each other by a plurality of valves, pipelines and pressure controllers.

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