Device for enabling cover and pipe of long film machine table to be coaxial

Abstract

The utility model provides a device for enabling a cover and a pipe of a long film machine table to be coaxial. The device comprises a first light emitter, a plurality of first light receivers, a second light emitter, a plurality of second light receivers, a first coordinate platform, a second coordinate platform, a support and a displayer. The first light emitter is installed on the first coordinate platform, and the first coordinate platform is installed at one end of the support. The plurality of first light receivers are distributed in a circle, and the plurality of first light receivers are used for receiving the circular aperture emitted by the first light emitter; the second light emitter is installed on the second coordinate platform, and the second coordinate platform is installed below the first coordinate platform; the plurality of second optical receivers are distributed in a circle; and the plurality of first light receivers, the plurality of second light receivers, the first coordinate platform and the second coordinate platform are respectively connected with the display. According to the device, the cover of the long film machine table and the pipe can be quickly coaxial, and whether the cover and the pipe are coaxial or not does not need to be judged through visual inspection according to indentations on the cover.

Description

Technical Field

[0001] This utility model relates to the field of long film machine technology, and in particular to a device that makes the cover and tube of the long film machine coaxial. Background Technology

[0002] In semiconductor manufacturing, a long-film processing unit is used to process wafers, forming a thin silicon nitride film on the wafer's surface. (Reference) Figures 1-3 As shown, an existing long film extrusion machine includes a cap 1 and a tube 2, which are typically made of quartz. The cap 1 is installed at the bottom of the tube 2 and can move up and down relative to the tube 2 via a drive mechanism, while the tube 2 is typically fixed. The cap 1 and the tube 2 are connected by a metal ring 3 and a sealing ring. A first sealing ring 4 is provided between the metal ring 3 and the cap 1, and a second sealing ring 5 is provided on the top of the metal ring 3. An inlet pipe 6 for conveying long film gas is provided on the tube 2.

[0003] refer to Figure 1 As shown, the long film extrusion machine requires regular cleaning and maintenance. When installing cover 1, cover 1 and pipe 2 must be coaxial, that is, the axis of cover 1 and the axis of pipe 2 must coincide. If cover 1 and pipe 2 are not coaxial, the sealing performance between cover 1 and pipe 2 will decrease, and the long film gas used for long film extrusion will leak outward from the gap between cover 1 and pipe 2.

[0004] Currently, the coaxiality of cover 1 and tube 2 is mainly determined by visually inspecting the indentations on the surface of cover 1. However, this visual inspection method has the following problems:

[0005] 1. It is necessary to lift the cover 1, press the cover 1 and the tube 2 together, and then draw a vacuum before an indentation can be gradually formed on the cover 1, which takes a long time.

[0006] 2. Because the lid 1 is reused, the indentations on the lid 1 overlap, which interferes with the judgment and may even lead to inaccurate judgment;

[0007] 3. The indentation distribution is unclear, which interferes with the judgment and may even lead to inaccurate judgment. Utility Model Content

[0008] This invention provides a device for making the cover and tube of a long film machine coaxial, thereby solving the aforementioned technical problem of visually inspecting whether the cover and tube are coaxial.

[0009] To solve the above-mentioned technical problems, this utility model provides a device for making the cover and tube of the long film machine coaxial, including a first light emitter, a plurality of first light receivers, a second light emitter, a plurality of second light receivers, a first coordinate platform, a second coordinate platform, a bracket and a display.

[0010] The first light emitter is mounted on the first coordinate platform, and the first coordinate platform is mounted on one end of the bracket;

[0011] Multiple first optical receivers are arranged in a circular pattern, and the multiple first optical receivers are used to receive the circular light emitted by the first optical transmitter;

[0012] The second light emitter is mounted on the second coordinate platform, which is located below the first coordinate platform;

[0013] Multiple second optical receivers are arranged in a circular pattern, and the multiple second optical receivers are used to receive the circular aperture emitted by the second optical transmitter;

[0014] Multiple first light receivers, multiple second light receivers, a first coordinate platform, and a second coordinate platform are respectively connected to the display. The multiple first light receivers and multiple second light receivers respectively send the detected light intensity values ​​to the display. The first coordinate platform sends the coordinates of the first light emitter to the display. The second coordinate platform sends the coordinates of the second light emitter to the display. The display is used to display the light intensity values ​​sent by the multiple first light receivers, the light intensity values ​​sent by the multiple second light receivers, the coordinates of the first light emitter, and the coordinates of the second light emitter.

[0015] Preferably, the plurality of the first optical receivers are fixed together by double-sided tape and arranged in a circular pattern.

[0016] Preferably, a plurality of the second light receivers are fixed together by double-sided adhesive and arranged in a circular pattern.

[0017] Preferably, the diameter of the circle containing the plurality of first optical receivers is equal to the diameter of the circle containing the plurality of second optical receivers.

[0018] Preferably, the first coordinate platform is mounted on one end of the bracket by bolts.

[0019] Preferably, the second coordinate platform is mounted on the lower surface of the first coordinate platform by bolts.

[0020] Preferably, the first coordinate platform and the second coordinate platform have the same size.

[0021] Preferably, both the first coordinate platform and the second coordinate platform are cylindrical in shape.

[0022] Preferably, the other end of the bracket is provided with a counterweight base.

[0023] Preferably, the counterweight base is cylindrical in shape.

[0024] This invention provides a device for coaxializing the cover and tube of a long film forming machine. The device includes a first light emitter, multiple first light receivers, a second light emitter, multiple second light receivers, a first coordinate platform, a second coordinate platform, a support, and a display. By displaying the coordinates of the first and second light emitters, the light intensity values ​​corresponding to the multiple first and second light receivers, and the light intensity values ​​corresponding to the multiple second light receivers, the device can quickly align the cover and tube of the long film forming machine. Adjusting the coaxiality of one cover and tube takes only 0.5 hours, significantly reducing the time compared to the previous 2.5 hours. An unexpected benefit of this device is the rapid aligning of the cover and tube of the long film forming machine, eliminating the need for visual inspection based on indentations on the cover to determine coaxiality. Attached Figure Description

[0025] Figure 1 This is a partial structural diagram of a long film machine in the prior art.

[0026] Figure 2 This is a schematic diagram of the structure of a long film machine where the cover and tube are coaxial in the existing technology.

[0027] Figure 3 This is a schematic diagram of the structure of a long film machine when the cover and the tube are not coaxial.

[0028] Figure 4 This is a schematic diagram of the structure of a device for making the cover and tube of a long film machine coaxial during use, provided by an embodiment of this utility model.

[0029] Figure 5 This is a schematic diagram of a device that makes the cover and tube of a long film machine coaxial, according to an embodiment of the present invention.

[0030] Figure 6 yes Figure 5 A bottom-view diagram of the first light receiver and double-sided tape.

[0031] Figure 7 yes Figure 5 A schematic diagram of the structure of the second light emitter moving relative to the second coordinate platform.

[0032] [The annotations in the attached figures are explained below]:

[0033] 1. Cap - 2. Tube - 3. Metal ring - 4. First sealing ring - 5. Second sealing ring - 6. Inlet pipe - 7.

[0034] First light transmitter-11, first light receiver-12, second light transmitter-13, second light receiver-14, first coordinate platform-15, second coordinate platform-16, bracket-17, display-18, double-sided tape-19, circular aperture-20. Detailed Implementation

[0035] To make the objectives, advantages, and features of this utility model clearer, the following detailed description, in conjunction with the accompanying drawings, provides a device for coaxially positioning the cover and tube of a long film machine according to this utility model. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the explanation of the embodiments of this utility model.

[0036] In the description of this utility model, the terms "first," "second," and other qualifiers are added for convenience of description and reference, and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with qualifiers such as "first" and "second" may explicitly or implicitly include one or more of that feature.

[0037] like Figures 4-7 As shown, this embodiment provides a device for coaxializing the cover 1 and tube 2 of a long film machine, including a first light emitter 11, a plurality of first light receivers 12, a second light emitter 13, a plurality of second light receivers 14, a first coordinate platform 15, a second coordinate platform 16, a bracket 17, and a display 18; the first light emitter 11 is mounted on the first coordinate platform 15, and the first coordinate platform 15 is mounted on one end of the bracket 17; the plurality of first light receivers 12 are arranged in a circle, and the plurality of first light receivers 12 are used to receive the circular light emitted by the first light emitter 11; the second light emitter 13 is mounted on the second coordinate platform 16, and the second coordinate platform 16 is mounted below the first coordinate platform 15; the plurality of second light receivers 14 are arranged in a circle, and the plurality of second light receivers 15 .... Receiver 14 is used to receive the circular aperture 20 emitted by the second light emitter 13; a plurality of first light receivers 12, a plurality of second light receivers 14, a first coordinate platform 15 and a second coordinate platform 16 are respectively connected to the display 18. The plurality of first light receivers 12 and the plurality of second light receivers 14 respectively send the detected light intensity values ​​to the display 18. The first coordinate platform 15 sends the coordinates of the first light emitter 11 to the display 18. The second coordinate platform 16 sends the coordinates of the second light emitter 13 to the display 18. The display 18 is used to display the light intensity values ​​sent by the plurality of first light receivers 12, the light intensity values ​​sent by the plurality of second light receivers 14, the coordinates of the first light emitter 11 and the coordinates of the second light emitter 13. Figure 4 and Figure 5 The dashed lines in the diagram represent the light rays emitted by the first and second light emitters.

[0038] like Figures 4-7 As shown, the method of using the device for making the cover 1 and tube 2 of the long film machine coaxial, provided in this embodiment, is as follows: When it is necessary to adjust the position of the cover 1, firstly, fix multiple first light receivers 12 in a circular pattern on the open end face of the tube 2, so that the circle formed by the multiple first light receivers 12 is coaxial with the tube 2; then fix multiple second light receivers 14 in a circular pattern on the cover 1, so that the circle formed by the multiple second light receivers 14 is coaxial with the cover 1; then power on the device, move the bracket 17 so that the circular light ring emitted by the first light emitter 11 is directly facing the multiple first light receivers 12, at which time the light intensity received by the multiple first light receivers 12 is the strongest, and the display 1... The display shows the maximum light intensity value emitted by the multiple first light receivers 12. Whether the circular aperture emitted by the first light emitter 11 is directly facing the multiple first light receivers 12 can be determined by whether the light intensity value displayed on the display 18 is the maximum value. Similarly, the display 18 displays the light intensity values ​​emitted by the multiple second light receivers 14 in real time. When the circular aperture emitted by the first light emitter 11 is directly facing the multiple first light receivers 12, it indicates that the first light emitter 11 is on the axis of the tube 2. Taking the point on the axis of the tube 2 as the origin, the coordinates of the first light emitter 11 on the first coordinate platform 15 are (0, 0). The first coordinate platform 15 can then transmit the first light... The coordinate position of the device 11 is sent to the display 18 for display; similarly, the display 18 can display the coordinate position of the second light emitter 13 on the second coordinate platform 16; then move the second light emitter 13, and observe through the display 18 whether the light intensity value sent by the multiple second light receivers 14 is the maximum. If the light intensity value sent by the multiple second light receivers 14 is the maximum, it means that the circular aperture 20 emitted by the second light emitter 13 is facing the multiple second light receivers 14, and the axis of the second light emitter 13 and the cover 1 are coincident; if the display 18 shows that the coordinate position of the second light receiver 14 on the second coordinate platform 16 is (0, 0), it means that the tube 2, The first light emitter 11, the second light emitter 13, and the cover 1 are coaxial. If the coordinate position of the second light emitter 13 is not (0, 0), it means that the first light emitter 11 and the second light emitter 13 are not coaxial. At this time, according to the coordinate position of the second light emitter 13, move the second light emitter 13 and the cover 1 so that the coordinate position of the second light emitter 13 is (0, 0) and maximize the light intensity value corresponding to the multiple second light receivers 14. At this time, it means that the tube 2, the first light emitter 11, the second light emitter 13, and the cover 1 are coaxial. Remove the device that makes the cover 1 and the tube 2 of the long film machine coaxial, and then fix the cover 1 to the bottom of the tube 2.

[0039] This embodiment provides a device for coaxializing the cover 1 and tube 2 of a long film forming machine. The device includes a first light emitter 11, multiple first light receivers 12, a second light emitter 13, multiple second light receivers 14, a first coordinate platform 15, a second coordinate platform 16, a support 17, and a display 18. By displaying the coordinates of the first light emitter 11, the second light emitter 13, the light intensity values ​​corresponding to the multiple first light receivers 12, and the light intensity values ​​corresponding to the multiple second light receivers 14 on the display 18, the cover 1 and tube 2 of the long film forming machine can be quickly made coaxial. Adjusting the coaxiality of one cover 1 and tube 2 takes only 0.5 hours, significantly shorter than the previous 2.5 hours. An unexpected benefit of this device is that it can quickly make the cover 1 and tube 2 of the long film forming machine coaxial, eliminating the need for visual inspection based on indentations on the cover 1 to determine if the cover 1 and tube 2 are coaxial.

[0040] Preferred, such as Figure 4 and Figure 5 As shown, multiple first light receivers 12 are fixed together and arranged in a circular pattern using double-sided tape 19. The double-sided tape 19 facilitates the fixation of the multiple first light receivers 12 to the opening of the tube 2 and makes it easy to remove the multiple first light receivers 12 from the tube 2. In other embodiments, the first light receivers 12 can be fixed using suction cups or similar methods.

[0041] Preferred, such as Figure 4 and Figure 5 As shown, multiple second light receivers 14 are fixed together with double-sided tape and arranged in a circular pattern. The double-sided tape facilitates the attachment of the multiple second light receivers 14 to the upper surface of the cover 1 and allows for easy removal of the multiple second light receivers 14 from the cover 1. In other embodiments, the second light receivers 14 can be fixed using suction cups or similar methods.

[0042] Preferred, such as Figures 4-7 As shown, the diameter of the circle containing the plurality of first optical receivers 12 is equal to the diameter of the circle containing the plurality of second optical receivers 14, so that the circular apertures 20 emitted by the first optical transmitter 11 and the second optical transmitter 13 are the same size. The first optical transmitter 11 and the second optical transmitter 13 can be of the same model.

[0043] Preferred, such as Figure 5 As shown, the first coordinate platform 15 is mounted on one end of the bracket 17 by bolts, which facilitates the installation of the first coordinate platform 15.

[0044] Preferred, such as Figure 5 As shown, the second coordinate platform 16 is mounted on the lower surface of the first coordinate platform 15 by bolts, which facilitates the installation of the second coordinate platform 16.

[0045] Preferred, such as Figure 5 As shown, the first coordinate platform 15 and the second coordinate platform 16 have the same size, which facilitates the installation of the first coordinate platform 15 and the second coordinate platform 16.

[0046] Preferred, such as Figure 5 As shown, both the first coordinate platform 15 and the second coordinate platform 16 are cylindrical in shape, which facilitates the installation of the first coordinate platform 15 and the second coordinate platform 16, and makes it easy to view the positions of the first light emitter 11 and the second light emitter 13.

[0047] Preferred, such as Figure 5 As shown, a counterweight base is provided at the other end of the support 17. The counterweight base can prevent the support 17 from tilting or tipping over.

[0048] Preferably, the counterweight base is cylindrical in shape, which can prevent the counterweight base from having sharp edges that could injure workers.

[0049] In summary, the present invention provides a device for coaxializing the cover 1 and tube 2 of a long film forming machine, comprising a first light emitter 11, multiple first light receivers 12, a second light emitter 13, multiple second light receivers 14, a first coordinate platform 15, a second coordinate platform 16, a support 17, and a display 18. By displaying the coordinates of the first light emitter 11, the second light emitter 13, the light intensity values ​​corresponding to the multiple first light receivers 12, and the light intensity values ​​corresponding to the multiple second light receivers 14 on the display 18, the cover 1 and tube 2 of the long film forming machine can be quickly made coaxial. Adjusting the coaxiality of one cover 1 and tube 2 takes only 0.5 hours, significantly shorter than the previous 2.5 hours. An unexpected benefit of this device is that it can quickly make the cover 1 and tube 2 of the long film forming machine coaxial, eliminating the need for visual inspection based on indentations on the cover 1 to determine whether the cover 1 and tube 2 are coaxial.

[0050] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the present utility model.

Claims

1. A device for making the cover and tube of a long film machine coaxial, characterized in that, It includes a first optical transmitter, multiple first optical receivers, a second optical transmitter, multiple second optical receivers, a first coordinate platform, a second coordinate platform, a bracket, and a display; The first light emitter is mounted on the first coordinate platform, and the first coordinate platform is mounted on one end of the bracket; Multiple first optical receivers are arranged in a circular pattern, and the multiple first optical receivers are used to receive the circular light emitted by the first optical transmitter; The second light emitter is mounted on the second coordinate platform, which is located below the first coordinate platform; Multiple second optical receivers are arranged in a circular pattern, and the multiple second optical receivers are used to receive the circular aperture emitted by the second optical transmitter; Multiple first light receivers, multiple second light receivers, a first coordinate platform, and a second coordinate platform are respectively connected to the display. The multiple first light receivers and multiple second light receivers respectively send the detected light intensity values ​​to the display. The first coordinate platform sends the coordinates of the first light emitter to the display. The second coordinate platform sends the coordinates of the second light emitter to the display. The display is used to display the light intensity values ​​sent by the multiple first light receivers, the light intensity values ​​sent by the multiple second light receivers, the coordinates of the first light emitter, and the coordinates of the second light emitter.

2. The device for making the cover and tube of a long film machine coaxial as described in claim 1, characterized in that, Multiple first optical receivers are fixed together with double-sided tape and arranged in a circular pattern.

3. The device for making the cover and tube of a long film machine coaxial as described in claim 1, characterized in that, Multiple second optical receivers are fixed together with double-sided tape and arranged in a circular pattern.

4. The device for making the cover and tube of a long film machine coaxial as described in claim 1, characterized in that, The diameter of the circle containing the plurality of first optical receivers is equal to the diameter of the circle containing the plurality of second optical receivers.

5. The device for making the cover and tube of a long film machine coaxial as described in claim 1, characterized in that, The first coordinate platform is mounted on one end of the bracket by bolts.

6. The device for making the cover and tube of a long film machine coaxial as described in claim 1, characterized in that, The second coordinate platform is mounted on the lower surface of the first coordinate platform by bolts.

7. The device for making the cover and tube of a long film machine coaxial as described in claim 1, characterized in that, The first coordinate platform and the second coordinate platform have the same size.

8. The device for making the cover and tube of a long film machine coaxial as described in claim 7, characterized in that, Both the first coordinate platform and the second coordinate platform are cylindrical in shape.

9. The device for making the cover and tube of a long film machine coaxial as described in claim 1, characterized in that, The other end of the bracket is equipped with a counterweight base.

10. The device for making the cover and tube of a long film machine coaxial as described in claim 9, characterized in that, The counterweight base is cylindrical in shape.

Images