Automatic uncovering furnace with buffering protection function

Abstract

The utility model discloses an automatic uncovering furnace with a buffer protection function. The automatic uncovering furnace comprises a furnace body, a furnace cover arranged on the furnace body, a driving source, a transmission assembly and an uncovering arm assembly, the transmission assembly comprises an idle stroke connecting block capable of being controlled by the driving source to move up and down and a lifting spindle, the idle stroke connecting block comprises a fixed limiting part and a buffering part, a step face is formed at the junction of the fixed limiting part and the buffering part, one end of the lifting spindle is arranged on the outer side of the buffering part in a sleeving mode, and the fixed limiting part limits downward movement of the lifting spindle. The other end of the lifting main shaft is connected with the uncovering arm assembly, the fixed limiting part drives the lifting main shaft to move upwards when moving upwards, and a gap exists between the step face of the fixed limiting part and the lower end face of the lifting main shaft when the fixed limiting part moves downwards to the lowest position. The gap between the step face of the fixed limiting part and the lower end face of the lifting main shaft serves as idle stroke buffering of lifting power, the furnace cover is prevented from colliding with the furnace body in the cover closing process, and the set structure of the idle stroke connecting block is simple and high in reliability and stability.

Description

Technical Field

[0001] This utility model relates to crystal growth equipment furnaces, specifically to an automatic lid-opening furnace with buffer protection. Background Technology

[0002] High-temperature furnaces of various types, such as silicon carbide single crystal furnaces and silicon single crystal furnaces, require a vacuum-sealed environment for crystal growth. Therefore, convenient and reliable furnace door opening and closing are essential for material feeding, unloading, and internal maintenance. Due to the widespread application of crystal materials, the demand for crystal growth equipment, especially silicon carbide crystal equipment, is increasing. A simple and highly reliable furnace lid opening and closing mechanism provides a reliable guarantee for crystal growth. Furthermore, to prevent the force driving the lid's lifting and lowering from directly impacting the furnace body and the mechanism itself during lid closing, a buffer device is typically installed.

[0003] Currently, existing technologies typically employ two solutions. Method one involves adding a spring and a guide column between the furnace cover and the lifting mechanism. The guide column maintains the position of the furnace cover, while the spring force acts as a buffer between the furnace cover and the furnace body. Method two involves adding a torque limiter between the motor and the lifting mechanism for protection.

[0004] The first method has the disadvantage that the mechanism and the furnace cover are fixed in position by multiple springs and guide rods, making it difficult to adjust the level of the furnace cover. Secondly, during spring compression, if the gap between the guide rod and the furnace cover is too tight or too loose, it cannot guarantee the level of the furnace cover when it is closed, easily leading to failure to close the furnace. In severe cases, it can damage the sealing ring and flange sealing surface. The second method has the problem that the torque limiter's torque is difficult to adjust accurately; excessive torque can damage the lifting mechanism. Utility Model Content

[0005] Purpose of the utility model: In view of the above-mentioned shortcomings, this utility model provides an automatic lid-opening furnace with buffer protection that has higher stability and reliability.

[0006] Technical solution: To solve the above problems, this utility model adopts an automatic lid-opening furnace with buffer protection, comprising:

[0007] The furnace body includes a furnace body and a furnace cover disposed on the furnace body, the furnace cover being detachably connected to the furnace body;

[0008] The opening mechanism includes a drive source, a transmission component driven by the drive source, and an opening arm assembly driven by the transmission component. The opening arm assembly is connected to the furnace cover. The drive source is used to drive the transmission component to move so that the opening arm assembly moves the furnace cover closer to or away from the furnace body.

[0009] The transmission assembly includes a free-stroke connecting block that can move up and down under the control of the drive source, and a lifting spindle that cooperates with the free-stroke connecting block. The free-stroke connecting block includes a fixed limiting part and a buffer part. The diameter of the fixed limiting part is larger than the diameter of the buffer part, and a stepped surface is formed at the junction of the fixed limiting part and the buffer part. One end of the lifting spindle is sleeved on the outside of the buffer part. The inner diameter of the lifting spindle is smaller than the outer diameter of the fixed limiting part. The fixed limiting part restricts the downward movement of the lifting spindle. The other end of the lifting spindle is connected to the cover opening arm assembly. The fixed limiting part can move up and down under the control of the drive source. When the fixed limiting part moves up, it drives the lifting spindle to move up. When the fixed limiting part moves down, the lifting spindle moves down with the fixed limiting part under the action of gravity. When the free-stroke connecting block is at the bottom and the furnace cover is on the furnace body, there is a gap between the stepped surface of the fixed limiting part and the lower end face of the lifting spindle.

[0010] Furthermore, the cover opening arm assembly includes a cover screwing bracket sleeved on the outer side of the upper end of the lifting main shaft. The cover screwing bracket is axially positioned with the lifting main shaft, rotates circumferentially relative to the lifting main shaft, and is fixedly connected to the furnace cover.

[0011] Furthermore, the cap opening arm assembly also includes a damping disc, and the cap screwing bracket is connected to the lifting main shaft through the damping disc. The damping disc is used to ensure that the cap screwing bracket and the lifting main shaft are relatively stationary when there is no external force acting on the cap screwing bracket.

[0012] Furthermore, the lifting spindle is installed inside the spindle support, and the inner wall of the spindle support is provided with a first linear bearing and a guide bearing. The lifting spindle moves up and down vertically inside the spindle support through the first linear bearing and the guide bearing. The furnace body is fixedly connected to the spindle support.

[0013] Furthermore, the cap-opening arm assembly also includes a limiting screw and a limiting plate. The limiting screw is fixedly connected to the cap-screwing bracket, and the limiting plate is fixedly connected to the main shaft bracket. The limiting screw and the limiting plate cooperate to limit the rotational limit position of the cap-screwing bracket. The main shaft bracket is fixedly mounted on the lower fixed bracket via a support column.

[0014] Furthermore, the drive source is a linear push rod, the output end of which is fixedly connected to the fixed limiting part of the idle stroke connecting block, and the fixed end of the linear push rod is fixedly connected to the lower fixed bracket through a push rod fixing block. The lower fixed bracket and the furnace body are fixedly mounted on the frame.

[0015] Furthermore, a second linear bearing is fixedly installed at the lower end of the lifting spindle, and the buffer part of the idle stroke connecting block forms a linear sliding pair with the second linear bearing.

[0016] Furthermore, a limit switch is provided on the support column, which is used to control the end point of the upward stroke of the lifting spindle.

[0017] Beneficial effects: Compared with the prior art, the present invention has the advantage of using the gap between the stepped surface of the fixed limiting part and the lower end surface of the lifting main shaft as a buffer for the empty stroke of the lifting power, preventing the lifting main shaft from driving the furnace cover to collide with the furnace body during the closing process. The empty stroke connecting block has a simple setting structure and high reliability and stability. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of the automatic lid-opening furnace of this utility model.

[0019] Figure 2 This is a cross-sectional view of the automatic lid-opening furnace of this utility model. Detailed Implementation

[0020] like Figure 1 and Figure 2 As shown, an automatic lid-opening furnace with buffer protection in this embodiment includes a furnace lid 1, a lid-opening mechanism 2, a furnace lid leveling screw 3, an upper fixed bracket 4, a limit switch 5, a furnace body 6, a lower fixed bracket 7, and a frame 8. The furnace lid 1 is mounted on the furnace body 6 and is detachably connected to the furnace body 6. The lid-opening mechanism includes a drive source 20, a transmission component driven by the drive source 20, and a lid-opening arm assembly driven by the transmission component. The lid-opening arm assembly is connected to the furnace lid 1. The drive source 20 is used to drive the transmission component to move so that the lid-opening arm assembly moves the furnace lid 1 closer to or away from the furnace body 6. The level of the furnace lid and the upper flange surface of the furnace body 6 is adjusted by the furnace lid leveling screw 3.

[0021] The cover-opening arm assembly includes a cover-swivel bracket 11, a damping disc 9, a limit screw 12, and a limit plate 13, all sleeved on the outer side of the upper end of the lifting main shaft 15. The cover-swivel bracket 11 is connected to the lifting main shaft 15 via the damping disc 9. The cover-swivel bracket 11 and the lifting main shaft 15 form a rotating pair via upper and lower bearings 10. The cover-swivel bracket 11 and the lifting main shaft 15 are axially positioned and rotate relative to each other circumferentially. The cover-swivel bracket 11 is fixedly connected to the furnace cover 1. The damping disc 9 is provided between the cover-swivel bracket 11 and the lifting main shaft 15 to control rotational damping, ensuring that rotation stops when pushing is stopped. The damping disc 9 is used to ensure that the cover-swivel bracket 11 and the lifting main shaft 15 are relatively stationary when there is no external force acting on the cover-swivel bracket 11. The limit screw 12 is fixedly connected to the cover-swivel bracket 11, and the limit plate 13 is fixedly connected to the main shaft bracket 17. The limit screw 12 and the limit plate 13 cooperate to limit the rotational limit position of the cover-swivel bracket 11.

[0022] The transmission assembly includes a free-stroke connecting block 19 that can move up and down under the control of the drive source 20, and a lifting spindle 15 that cooperates with the free-stroke connecting block 19. The free-stroke connecting block 19 includes a fixed limiting part and a buffer part, which are stepped structures with different diameters. The diameter of the fixed limiting part is larger than the diameter of the buffer part, and a stepped surface is formed at the junction of the fixed limiting part and the buffer part. One end of the lifting spindle 15 is sleeved on the outside of the buffer part. The inner diameter of the lifting spindle 15 is smaller than the outer diameter of the fixed limiting part, and the fixed limiting part restricts the downward movement of the lifting spindle 15. The lifting spindle 15 is installed inside the spindle support 17. The inner wall of the spindle support 17 is provided with a first linear bearing 14 and a guide bearing 16. The lifting spindle 15 is supported by the upper and lower first linear bearings 14. The lifting spindle 15 moves up and down vertically inside the spindle support 17 through the first linear bearings 14 and the guide bearings 16. The furnace body 6 is fixedly connected to the spindle support 17 through the upper fixed support 4. The spindle support 17 is fixedly installed on the lower fixed support 7 through the support column 21. The lower fixed support 7 and the furnace body 6 are fixedly set on the frame 8.

[0023] A second linear bearing 18 is fixedly installed at the lower end of the lifting spindle 15. The lifting spindle has a limited guide groove inside. The buffer part of the idle stroke connecting block 19 and the second linear bearing 18 form a linear moving pair. The fixed limit part of the idle stroke connecting block 19 can be controlled by the drive source 20 to move up and down. When the fixed limit part moves up, it drives the lifting spindle 15 to move up. When the fixed limit part moves down, the lifting spindle 15 moves down with the fixed limit part under the action of gravity. When the idle stroke connecting block 19 is at the lowest end and the furnace cover is on the furnace body, there is a gap between the stepped surface of the fixed limit part and the lower end surface of the lifting spindle. This provides an idle stroke for the lifting spindle to prevent hard collision force during the closing process.

[0024] The drive source 20 uses a linear push rod. The output end of the linear push rod is fixedly connected to the fixed limiting part of the idle stroke connecting block 19. The fixed end of the linear push rod is fixedly connected to the lower fixed bracket 7 through the push rod fixing block 22. The linear push rod drives the idle stroke connecting block 19 to slide within the second linear bearing 18. The idle stroke connecting block 19 moves upward, and the stepped surface at the bottom of the idle stroke connecting block contacts the lower part of the lifting main shaft. The idle stroke connecting block 19 continues to move upward, driving the lifting main shaft upward, thereby driving the furnace cover at the end of the transmission mechanism to rise together. The level of the furnace cover relative to the furnace body can be adjusted by the furnace cover leveling screw. After the furnace cover is raised to the correct position, the furnace cover can be manually pushed to rotate around the lifting main shaft with damping. The rotation angle is controlled by the limiting screw and the limiting plate. The end point of the opening and closing lifting stroke of the opening mechanism is controlled by the limit switch 5. When the idle stroke connecting block 19 moves down, the lower end face of the lifting spindle 15 contacts the stepped surface of the idle stroke connecting block under the action of gravity and moves down with the fixed limiting part. After the furnace cover is closed on the furnace body, the lifting spindle stops moving down, and the idle stroke connecting block 19 continues to move down until the linear push rod reaches the end of the drive. After the lifting spindle stops, the driving force of the linear push rod acts on the idle stroke connecting block and does not act on the lifting spindle, thereby avoiding the lifting spindle from continuing to apply pressure to the furnace body after the furnace cover is closed, and preventing the furnace body from being impacted and stressed.

[0025] During the closing process, the linear push rod drives the idle stroke connecting block and the furnace cover to move downwards. After the furnace cover and the furnace body come into contact, the linear push rod continues to drive the idle stroke connecting block to move downwards to achieve the protection idle stroke. Since the lifting spindle and the spindle support are composed of a high-precision moving pair through linear bearings, the movement accuracy between the furnace cover and the furnace body can be maintained.

Claims

1. An automatic lid-opening furnace with buffer protection, characterized in that, include: The furnace body includes a furnace body (6) and a furnace cover (1) disposed on the furnace body (6), wherein the furnace cover (1) is detachably connected to the furnace body (6); The opening mechanism includes a drive source (20), a transmission component driven by the drive source (20), and an opening arm assembly driven by the transmission component. The opening arm assembly is connected to the furnace cover (1). The drive source is used to drive the transmission component to move so that the opening arm assembly drives the furnace cover to move closer to or away from the furnace body. The transmission assembly includes a free-stroke connecting block (19) that can move up and down under the control of the drive source (20), and a lifting spindle (15) that cooperates with the free-stroke connecting block (19). The free-stroke connecting block (19) includes a fixed limiting part and a buffer part. The diameter of the fixed limiting part is larger than the diameter of the buffer part, and a stepped surface is formed at the junction of the fixed limiting part and the buffer part. One end of the lifting spindle (15) is sleeved on the outside of the buffer part. The inner diameter of the lifting spindle (15) is smaller than the outer diameter of the fixed limiting part. The limiting part restricts the downward movement of the lifting spindle (15). The other end of the lifting spindle (15) is connected to the opening arm assembly. The fixed limiting part can be controlled by the drive source (20) to move up and down. When the fixed limiting part moves up, it drives the lifting spindle (15) to move up. When the fixed limiting part moves down, the lifting spindle (15) moves down with the fixed limiting part under the action of gravity. When the idle stroke connecting block (19) is at the lowest end and the furnace cover is on the furnace body, there is a gap between the step surface of the fixed limiting part and the lower end surface of the lifting spindle.

2. The automatic lid-opening furnace with buffer protection according to claim 1, characterized in that, The opening arm assembly includes a cap-screwing bracket (11) sleeved on the outer side of the upper end of the lifting main shaft (15). The cap-screwing bracket (11) is axially positioned with the lifting main shaft (15), and the cap-screwing bracket (11) rotates relative to the lifting main shaft (15) in the circumferential direction. The cap-screwing bracket (11) is fixedly connected to the furnace cover (1).

3. The automatic lid-opening furnace with buffer protection according to claim 2, characterized in that, The opening arm assembly also includes a damping disk (9). The capping bracket (11) and the lifting main shaft (15) are connected by the damping disk (9). The damping disk (9) is used to ensure that the capping bracket (11) and the lifting main shaft (15) are relatively stationary when there is no external force acting on the capping bracket (11).

4. The automatic lid-opening furnace with buffer protection according to claim 2, characterized in that, The lifting spindle (15) is installed inside the spindle support (17). The inner wall of the spindle support (17) is provided with a first linear bearing (14) and a guide bearing (16). The lifting spindle (15) moves up and down vertically inside the spindle support (17) through the first linear bearing (14) and the guide bearing (16). The furnace body (6) is fixedly connected to the spindle support (17).

5. The automatic lid-opening furnace with buffer protection according to claim 4, characterized in that, The cap opening arm assembly also includes a limiting screw (12) and a limiting plate (13). The limiting screw (12) is fixedly connected to the cap screw bracket (11), and the limiting plate (13) is fixedly connected to the main shaft bracket (17). The limiting screw (12) and the limiting plate (13) cooperate to limit the rotation limit position of the cap screw bracket (11).

6. The automatic lid-opening furnace with buffer protection according to claim 4, characterized in that, The main shaft support (17) is fixedly installed on the lower fixed support (7) by the support column (21).

7. The automatic lid-opening furnace with buffer protection according to claim 6, characterized in that, The drive source (20) adopts a linear push rod. The output end of the linear push rod is fixedly connected to the fixed limiting part of the idle stroke connecting block (19). The fixed end of the linear push rod is fixedly connected to the lower fixed bracket (7) through the push rod fixing block (22).

8. The automatic lid-opening furnace with buffer protection according to claim 7, characterized in that, The lower fixed bracket (7) and the furnace body (6) are fixedly mounted on the frame (8).

9. The automatic lid-opening furnace with buffer protection according to claim 1, characterized in that, The lower end of the lifting spindle (15) is fixedly provided with a second linear bearing (18), and the buffer part of the idle stroke connecting block (19) and the second linear bearing (18) form a linear moving pair.

10. The automatic lid-opening furnace with buffer protection according to claim 6, characterized in that, A limit switch (5) is provided on the support column (21), and the limit switch (5) is used to control the end point of the upward stroke of the lifting spindle (15).

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