Liquid storage tank and heat exchange system

By introducing a buffer plate into the liquid storage tank to reduce the impact of high-temperature condensed liquid on the bottom wall, the problem of cracking at the bottom weld of the liquid storage tank was solved, and the service life of the liquid storage tank was extended.

CN223538170UActive Publication Date: 2025-11-11RONGXIN SEMICONDUCTOR (NINGBO) CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202423047661.8
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-10
Publication Date
2025-11-11
Estimated Expiration
2034-12-10

AI Technical Summary

Technical Problem

During the semiconductor device manufacturing process, the impact of high-temperature condensate entering the storage tank on the bottom of the tank can cause cracks at the welding points, affecting the service life of the storage tank.

Method used

Design a liquid storage tank, including a tank body and a buffer plate. The buffer plate is arranged parallel to the bottom wall and faces the inlet channel. The buffer plate is used to reduce the direct impact of high-temperature condensed liquid on the bottom wall. Through the design of the inlet channel and the buffer plate, the impact force on the bottom wall is reduced.

Benefits of technology

It effectively reduces the impact of high-temperature condensed liquid on the bottom wall of the storage tank, lowers the risk of breakage at the connection between the bottom wall and the side wall, and improves the service life of the storage tank.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN223538170U_ABST
    Figure CN223538170U_ABST
Patent Text Reader

Abstract

The utility model provides a liquid storage box and a heat exchange system, the liquid storage box comprises a box body and a buffer plate, the box body comprises a bottom wall, a side wall and a top wall which are connected in sequence, and the bottom wall, the side wall and the top wall define a liquid storage cavity; the liquid storage tank is also provided with a liquid inlet channel communicated with the liquid storage cavity; the buffer plate is positioned in the liquid storage cavity and is connected with the box body; the buffer plate and the bottom wall are arranged in parallel at an interval; and the buffer plate is also arranged facing an incoming path of liquid entering the liquid storage cavity from the liquid inlet channel. Thus, when the liquid inlet channel of the liquid storage tank is connected with the shell-and-tube heat exchanger through a pipeline and used for receiving a high-temperature gas-liquid mixture formed in the shell-and-tube heat exchanger, the gas-liquid mixture enters the liquid cavity along the liquid inlet channel and then impacts the buffer plate instead of the wall at first, and therefore impact on the bottom wall is reduced; therefore, the problem that the joint of the bottom wall and the side wall is broken due to impact is reduced, and the service life of the box body is prolonged.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] This utility model relates to the field of heat exchange equipment technology, specifically to a liquid storage tank and heat exchange system. Background Technology

[0002] In semiconductor device manufacturing, shell-and-tube heat exchangers are often used to transfer heat from steam to hot water. During this heat exchange, the steam condenses to form high-temperature condensate, which flows into a storage tank along pipes. The high-temperature condensate exerts a strong impact on the bottom wall of the storage tank as it enters, and prolonged impact can easily lead to cracks at the welded joints between the bottom and side walls. Utility Model Content

[0003] The purpose of this invention is to provide a liquid storage tank and heat exchange system, which aims to reduce the impact of high-temperature condensed liquid on the bottom of the tank when it enters the tank, thereby reducing damage to the bottom of the tank.

[0004] To achieve the above objectives, this utility model provides a liquid storage tank, including a tank body and a buffer plate. The tank body includes a bottom wall, side walls, and a top wall that are connected to each other, and the bottom wall, side walls, and top wall enclose a liquid storage cavity. The liquid storage tank is also provided with a liquid inlet channel communicating with the liquid storage cavity. The buffer plate is located in the liquid storage cavity and connected to the tank body. The buffer plate is arranged parallel to and spaced apart from the bottom wall, and the buffer plate is also arranged facing the path of the liquid entering the liquid storage cavity from the liquid inlet channel.

[0005] Optionally, the axis of the outlet end of the liquid inlet channel extends in a direction perpendicular to the bottom wall, and the projection of the outlet end of the liquid inlet channel on the plane where the buffer plate is located is located on the buffer plate.

[0006] Optionally, the liquid storage tank further includes an inlet pipe connected to the tank body, the lumen of the inlet pipe forming the inlet channel; the inlet pipe includes a drain section located inside the liquid storage cavity and extending in a direction perpendicular to the bottom wall, the end of the drain section near the bottom wall being a free end and forming the outlet end of the inlet channel;

[0007] The drainage section is equipped with an exhaust port.

[0008] Optionally, the drainage section is provided with multiple vent groups, and each vent group includes multiple vents;

[0009] Multiple vent groups are spaced apart in the circumferential direction of the drainage section, and multiple vents in the same vent group are spaced apart in the axial direction of the drainage section.

[0010] Optionally, a plurality of the vent groups are arranged at equal intervals in the circumferential direction of the drainage section.

[0011] Optionally, the liquid storage tank further includes an annular reinforcing rib, which is sleeved on the outer surface of the side wall.

[0012] Optionally, there may be multiple reinforcing ribs, which are arranged at intervals along a direction perpendicular to the bottom wall.

[0013] Optionally, the thickness of the bottom wall, the thickness of the side wall, and the thickness of the top wall decrease sequentially.

[0014] Optionally, a pressure relief port communicating with the liquid storage chamber is also provided on the top wall.

[0015] To achieve the above objectives, the present invention also provides a heat exchange system, including a shell-and-tube heat exchanger and a liquid storage tank as described in any of the preceding claims, wherein the shell-and-tube heat exchanger includes heat exchange tubes and a shell, the heat exchange tubes being disposed inside the shell; and the liquid inlet channel of the liquid storage tank is connected to one of the heat exchange tubes and the shell.

[0016] Compared with the prior art, the liquid storage tank and heat exchange system of this utility model have the following advantages:

[0017] The aforementioned liquid storage tank includes a tank body and a buffer plate. The tank body includes a bottom wall, side walls, and a top wall connected in sequence, which together form a liquid storage cavity. The liquid storage tank also has an inlet channel communicating with the liquid storage cavity. The buffer plate is located in the liquid storage cavity and connected to the tank body. The buffer plate is arranged parallel to and spaced apart from the bottom wall. The buffer plate also faces the path of the liquid entering the liquid storage cavity from the inlet channel. Thus, when the inlet channel of the liquid storage tank is connected to a shell-and-tube heat exchanger via a pipe to receive the high-temperature gas-liquid mixture formed within the shell-and-tube heat exchanger, the gas-liquid mixture, after entering the liquid storage cavity along the inlet channel, first impacts the buffer plate, rather than the bottom wall. This reduces the impact on the bottom wall, thereby reducing the risk of breakage at the connection between the bottom wall and the side wall due to impact, and improving the service life of the tank body. Attached Figure Description

[0018] The accompanying drawings are provided to better understand this utility model and do not constitute an undue limitation thereof. Wherein:

[0019] Figure 1 This is a cross-sectional schematic diagram of a liquid storage tank provided according to an embodiment of the present invention;

[0020] Figure 2 This is a top view of the liquid storage tank provided according to an embodiment of the present invention.

[0021] [The annotations in the attached figures are explained below]:

[0022] 100-Liquid storage tank, 110-Tank body, 111-Bottom wall, 112-Side wall, 113-Top wall, 120-Buffer plate, 130-Support column, 140-Liquid inlet pipe, 141-Drainage section, 142-Exhaust port, 150-Reinforcing rib, 101-Liquid storage cavity, 102-Pressure relief port. Detailed Implementation

[0023] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model. It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model. Therefore, the drawings only show components related to this utility model and are not drawn according to the actual number, shape, and size of the components in implementation. In actual implementation, the type, quantity, and proportion of each component can be arbitrarily changed, and the component layout may also be more complex.

[0024] Furthermore, while each embodiment described below possesses one or more technical features, this does not imply that users of this utility model must simultaneously implement all technical features in any embodiment, or can only separately implement some or all technical features in different embodiments. In other words, provided it is feasible, those skilled in the art can selectively implement some or all technical features in any embodiment, or selectively implement a combination of some or all technical features in multiple embodiments, based on the disclosure of this utility model and depending on design specifications or implementation requirements, thereby increasing the flexibility in implementing this utility model.

[0025] As used herein, the singular forms “a,” “an,” and “the” include plural objects, and the plural form “a plurality” includes two or more objects, unless otherwise expressly indicated. As used herein, the term “or” is generally used to include the meaning of “and / or,” unless otherwise expressly indicated, and the terms “install,” “connect,” and “link” should be interpreted broadly, for example, as a fixed connection, a detachable connection, or an integral connection. Connections can be mechanical or electrical. Connections can be direct or indirect through an intermediate medium, and can represent internal communication between two elements or an interaction between two elements. Relational terms such as “first,” “second,” etc., are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations, nor do they indicate relative importance or implicitly specify the number of indicated technical features. Those skilled in the art will understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0026] To make the objectives, advantages, and features of this utility model clearer, the following detailed description is provided in conjunction with the accompanying drawings. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to conveniently and clearly illustrate the objectives of the embodiments of this utility model. The same or similar reference numerals in the drawings represent the same or similar parts.

[0027] Figure 1 This diagram shows a cross-sectional view of the liquid storage tank 100 provided in some embodiments of the present invention. Figure 2 A top view of the liquid storage tank 100 is shown. (As shown) Figure 1 and Figure 2 As shown, the liquid storage tank 100 includes a tank body 110 and a buffer plate 120. The tank body 110 includes a bottom wall 111, a side wall 112, and a top wall 113 connected to each other, which together form a liquid storage cavity 101. The liquid storage tank 100 is also provided with a liquid inlet channel (not shown in the figure) communicating with the liquid storage cavity 101. The buffer plate 120 is located inside the liquid storage cavity 101 and connected to the tank body 110. The buffer plate 120 is arranged parallel to and spaced apart from the bottom wall 111. The buffer plate 120 is also arranged facing the path of the liquid entering the liquid storage cavity 101 from the liquid inlet channel.

[0028] Here, "bottom wall 111," "side wall 112," and "top wall 113" are defined based on the usage state of the liquid storage tank 100, referring to the various walls of the tank body 110. While not restrictive, during normal use of the liquid storage tank 100, "bottom wall 111" refers to the wall at the bottom of the tank body 110, "top wall 113" refers to the wall at the top of the tank body 110 (i.e., the top wall 113 is located above the bottom wall 111), and "side wall 112" refers to the wall located between the top wall 113 and the bottom wall 111. Typically, the bottom wall 111 is horizontally arranged; therefore, for ease of description, the direction perpendicular to the bottom wall 111 will be used directly in the following text.

[0029] In a non-limiting embodiment, the housing 110 can be a cubic structure. In this case, the top wall 113 and the bottom wall 111 can both be rectangular, and the side walls 112 can also be rectangular, with four side walls 112 in total. Generally, the bottom wall 111, the side walls 112, and the top wall 113 are all made of metal materials such as stainless steel, and the side walls 112 are welded to the bottom wall 111 and the top wall 113 respectively to ensure the sealing of the joints and prevent liquid leakage.

[0030] Furthermore, the "flow path of the liquid" refers to the path through which the liquid flows. In other words, the phrase "the buffer plate 120 is arranged facing the flow path of the liquid entering the liquid storage chamber 101 from the liquid inlet channel" means that the buffer plate 120 intersects with the flow path of the liquid between the outlet end of the liquid inlet channel and the buffer plate 120.

[0031] The liquid storage tank 100 is used in conjunction with a shell-and-tube heat exchanger (not shown in the figure). The shell-and-tube heat exchanger includes a shell and heat exchange tubes disposed inside the shell. The lumen of the heat exchange tubes forms a fluid chamber, and another fluid chamber is formed between the shell and the heat exchange tubes. One of the two fluid chambers is used for the flow of high-temperature steam, and the other is used for the flow of temperature-controlled liquid to achieve heat exchange. After heat exchange, the high-temperature steam partially condenses and forms a high-temperature condensate. The high-temperature condensate mixes with some uncondensed high-temperature steam to form a high-temperature gas-liquid mixture. The liquid inlet channel of the liquid storage tank 100 is connected to the fluid chamber of the shell-and-tube heat exchanger for the flow of high-temperature steam via a pipe. Thus, the high-temperature gas-liquid mixture can enter the liquid storage chamber 101 along the pipe via the liquid inlet channel. In this embodiment of the present invention, when the gas-liquid mixture enters the liquid storage chamber 101, it first impacts the buffer plate 120, and continues to flow after being diverted by the buffer plate 120. The energy of the gas-liquid mixture is reduced after diversion. That is, the buffer plate 120 buffers the energy of the gas-liquid mixture by blocking it, so that the gas-liquid mixture does not directly impact the bottom wall 111, thereby reducing the problem of cracking at the connection between the bottom wall 111 and the side wall 112 caused by impact and improving the service life of the box 110.

[0032] It should be noted that the buffer plate 120 can be connected to the housing 110 in any suitable manner and can be connected to any suitable wall of the housing 110. In an exemplary embodiment, the buffer plate 120 can be connected to the bottom wall 111 via a plurality of support columns 130.

[0033] In some optional embodiments, the axis of the outlet end of the liquid inlet channel extends vertically. Thus, when the gas-liquid mixture enters the liquid storage chamber 101 from the liquid inlet channel, it flows directly in a vertically downward direction. Therefore, as long as the projection of the outlet end of the liquid inlet channel on the plane where the buffer plate 120 is located is on the buffer plate 120, the effect of "the buffer plate 120 being arranged to face the path of the liquid entering the liquid storage chamber 101 from the liquid inlet channel" is achieved.

[0034] In other embodiments, the axis of the outlet end of the liquid inlet channel may also extend in a horizontal or inclined direction, as long as the buffer plate 120 can block the gas-liquid mixture to prevent the high-temperature condensate from directly impacting the bottom wall 111.

[0035] In some alternative embodiments, the liquid inlet channel includes a through hole (not shown) formed in the side wall or the top wall.

[0036] In some alternative embodiments, a connection hole (not shown in the figure) is provided on the top wall 113 or the side wall 112. The liquid storage tank 100 also includes a liquid inlet pipe 140, which is connected to the tank body 110 through the connection hole, and the lumen of the liquid inlet pipe 140 constitutes the liquid inlet channel. The liquid inlet pipe 140 includes a drain section 141, which is located in the liquid storage cavity 101 and extends vertically. The end of the drain section 141 near the bottom wall 111 is a free end, and the free end of the drain section 141 constitutes the outlet end of the liquid inlet channel.

[0037] Preferably, the drainage section 141 is further provided with an exhaust port 142. When the gas-liquid mixture flows within the drainage section 141, the heat carried in the gas-liquid mixture, as well as the gas therein, can be partially discharged from the exhaust port 142 to reduce the energy of the gas-liquid mixture. This reduces the impact on the buffer plate 120 when the gas-liquid mixture flows onto it, and further reduces the impact on the walls of the housing 110 during the subsequent flow.

[0038] Preferably, the drainage section 141 is provided with multiple vent groups, which are arranged at intervals along the circumference of the drainage section 141, preferably at equal intervals. Each vent group includes multiple vents 142, and the multiple vents 142 of the same vent group are arranged at intervals along the axial direction of the drainage section 141. In this way, during the flow of the gas-liquid mixture within the drainage section 141, more of the heat carried by the gas-liquid mixture and the gas therein can be discharged from the vents 142. Optionally, there are two vent groups, and each vent group includes four vents 142.

[0039] In some optional embodiments, the liquid storage tank 100 further includes reinforcing ribs 150, which are annular structures and fitted onto the outer surface of the side wall 112 to apply an inward supporting force to the side wall 112, thereby improving the pressure-bearing capacity and reliability of the tank body 110. Optionally, there may be multiple reinforcing ribs 150, which are arranged at intervals along the vertical direction.

[0040] In some optional embodiments, a pressure relief port 102 is also provided on the top wall 113 to discharge gas from the liquid storage chamber 101, reduce the gas pressure in the liquid storage chamber 101, and thereby reduce the pressure on the bottom wall 111, the side wall 112, and the top wall 113. It is understood that an insect-proof cover is provided at the pressure relief port 102, and the insect-proof cover may be a mesh structure to avoid obstructing the discharge of gas.

[0041] It is understood that the pressure on the top wall 113, the side wall 112, and the bottom wall 113 increases sequentially. Therefore, in this embodiment of the invention, it is preferable that the thickness of the top wall 113, the side wall 112, and the bottom wall 111 increases sequentially, so that the strength of the top wall 113, the side wall 112, and the bottom wall 111 increases sequentially. This approach can reduce the production cost of the housing 110 while still meeting its usage requirements.

[0042] Furthermore, this embodiment of the invention also provides a heat exchange system, which includes the aforementioned shell-and-tube heat exchanger and the liquid storage tank 100. The liquid inlet channel of the liquid storage tank 100 is connected to one of the heat exchange tubes and the shell via a pipe. Specifically, when high-temperature steam flows inside the heat exchange tubes, the liquid inlet channel is connected to the heat exchange tubes via the pipe; when high-temperature steam flows between the shell and the heat exchange tubes, the liquid inlet channel is connected to the shell via the pipe.

[0043] While the present invention has been disclosed above, it is not limited thereto. Those skilled in the art can make various modifications and variations to the present invention without departing from its spirit and scope. Therefore, if such modifications and variations fall within the scope of the claims of the present invention and their equivalents, the present invention also intends to include such modifications and variations.

Claims

1. A liquid storage tank, characterized in that, The device includes a housing and a buffer plate. The housing includes a bottom wall, side walls, and a top wall that are connected to each other. The bottom wall, side walls, and top wall enclose a liquid storage cavity. The liquid storage tank is also provided with a liquid inlet channel that communicates with the liquid storage cavity. The buffer plate is located in the liquid storage cavity and is connected to the housing. The buffer plate is arranged parallel to and spaced apart from the bottom wall, and the buffer plate is also arranged facing the path of the liquid entering the liquid storage cavity from the liquid inlet channel.

2. The liquid storage tank according to claim 1, characterized in that, The axis of the outlet end of the liquid inlet channel extends in a direction perpendicular to the bottom wall, and the projection of the outlet end of the liquid inlet channel on the plane where the buffer plate is located is located on the buffer plate.

3. The liquid storage tank according to claim 2, characterized in that, The liquid storage tank also includes an inlet pipe, which is connected to the tank body. The lumen of the inlet pipe forms the inlet channel. The inlet pipe includes a drain section, which is located inside the liquid storage cavity and extends in a direction perpendicular to the bottom wall. The end of the drain section near the bottom wall is a free end and forms the outlet end of the inlet channel. The drainage section is equipped with an exhaust port.

4. The liquid storage tank according to claim 3, characterized in that, The drainage section is provided with multiple vent groups, and each vent group includes multiple vents. Multiple vent groups are spaced apart in the circumferential direction of the drainage section, and multiple vents in the same vent group are spaced apart in the axial direction of the drainage section.

5. The liquid storage tank according to claim 4, characterized in that, Multiple vent groups are arranged at equal intervals in the circumferential direction of the drainage section.

6. The liquid storage tank according to any one of claims 1-5, characterized in that, The liquid storage tank also includes annular reinforcing ribs, which are sleeved on the outer surface of the side wall.

7. The liquid storage tank according to claim 6, characterized in that, The number of reinforcing ribs is multiple, and the multiple reinforcing ribs are arranged at intervals along a direction perpendicular to the bottom wall.

8. The liquid storage tank according to claim 1, characterized in that, The thickness of the bottom wall, the side wall, and the top wall decrease sequentially.

9. The liquid storage tank according to claim 8, characterized in that, The top wall is also provided with a pressure relief port that communicates with the liquid storage chamber.

10. A heat exchange system, characterized in that, The invention includes a shell-and-tube heat exchanger and a liquid storage tank as described in any one of claims 1-9, wherein the shell-and-tube heat exchanger includes heat exchange tubes and a shell, the heat exchange tubes being disposed inside the shell; and the liquid inlet channel of the liquid storage tank is in communication with one of the heat exchange tubes and the shell.