Lamination side edge detection device

Abstract

The utility model discloses a lamination side edge detection device. Wherein the laminated sheet side edge detection device comprises a laminated sheet conveying mechanism and a laminated sheet detection mechanism, a detection station is arranged on the laminated sheet conveying mechanism, and the laminated sheet conveying mechanism is configured to receive laminated sheets or material boxes containing the laminated sheets and convey the laminated sheets or the material boxes to the detection station; the lamination detection mechanism is configured to detect at least two adjacent side edges of the lamination located at the detection station; and the laminated sheet conveying mechanism is further configured to convey the laminated sheets or the material boxes detected at the detection station to the next working procedure. According to the invention, whether the lamination is tidy or not is detected.

Description

Technical Field

[0001] This application relates to the field of silicon wafer manufacturing technology, and in particular to a device for inspecting the side edges of wafer stacks. Background Technology

[0002] After being sorted by a sorting machine, silicon wafers with different test results are stacked in several boxes to form multiple sets of wafers with different test results.

[0003] In existing technology, the wafer cassettes need to be transported to testing equipment for visual inspection of the wafer stacks to identify those that fail the visual inspection. However, during the process of transporting the wafer stacks from the cassettes to the testing equipment, the silicon wafers in the stacks may move, resulting in uneven stacks. Uneven stacks may get stuck when placed into the packaging box. Therefore, before performing visual inspection on the wafer stacks, it is also necessary to check whether the stacks are neat. Utility Model Content

[0004] This application aims to at least solve one of the technical problems existing in the prior art. To this end, this application proposes a stacked sheet side detection device to detect whether the stacked sheets are neat.

[0005] In a first aspect, this application provides a stacked sheet side detection device, which includes a stacked sheet conveying mechanism and a stacked sheet detection mechanism, wherein:

[0006] The stacking conveyor is equipped with an inspection station. The stacking conveyor is configured to receive stacked pieces or a box containing stacked pieces and convey them to the inspection station.

[0007] The stacking inspection mechanism is configured to inspect at least two adjacent sides of the stack located at the inspection station;

[0008] The stacking conveyor is also configured to transport the stacked pieces or boxes that have been inspected at the inspection station to the next process.

[0009] The side inspection device of this application sequentially transports the received stacked sheets or the material box containing the stacked sheets to the stack inspection mechanism via a stack conveying mechanism for side inspection. After inspection, the stacked sheets are directly transported to the next process via the stack conveying mechanism, resulting in high stack inspection efficiency. At the same time, the stack inspection mechanism performs neatness inspection on at least two adjacent sides of the stacked sheets. The neatness inspection first removes a portion of the unqualified stacked sheets, and the unqualified stacked sheets are repaired as soon as possible. This avoids discovering that the stacked sheets are not neat enough for packaging only after subsequent procedures such as appearance inspection. Performing side inspection on the stacked sheets before appearance inspection can effectively improve production efficiency.

[0010] Optionally, the stack detection mechanism includes a mounting frame and several detectors. The mounting frame is mounted on the stack conveying mechanism, and the several detectors are mounted on the mounting frame. The several detectors are configured to detect the position of at least two adjacent sides of the stack at the detection station or the stack in the hopper to confirm whether the stack is misaligned.

[0011] By using several detectors to detect and determine the position of at least two adjacent sides of the stacked wafers, it is possible to determine whether the stacked wafers are aligned. If the stacked wafers are not aligned, some of the wafers will have their sides protruding from their normal positions. In this case, the detectors will detect or identify the protruding wafers, thereby determining whether the stacked wafers are misaligned.

[0012] Optionally, the detector is an infrared sensor. Several detectors are divided into two groups, with each group of detectors corresponding to one side of the stack. The infrared light emitted by each group of detectors is perpendicular to the outside of the side of the stack to sense the offset silicon wafer in the stack.

[0013] Infrared sensors can directly detect whether there are silicon wafers protruding from their normal positions on the side of the wafer stack corresponding to the emitted infrared light, enabling rapid side detection and effectively improving the detection efficiency of the wafer stack. In addition, the high precision of infrared sensors ensures the accuracy of side detection of the wafer stack.

[0014] Optionally, the material box includes a base, a support plate, and two baffles. The support plate is mounted at an angle on the base and is used to support the stacked pieces. The two baffles are respectively mounted on two downwardly inclined sides of the support plate and are configured to prevent the stacked pieces from detaching from the support plate.

[0015] The stacking inspection mechanism is configured to inspect the two upward-sloping sides of the stacked wafers in the feed box at the inspection station.

[0016] The wafer stacks are carried and transported by a material box. As the support plate tilts downward, the wafer stacks also tilt downward. Since the baffles prevent the wafer stacks from detaching from the support plate, the two sides of the wafer stack tilting downward will press against the two baffles due to gravity. The two sides of the wafer stack pressed against the two baffles will not protrude from their normal positions. Therefore, by simply detecting the two sides of the wafer stack tilting upward in the material box by the wafer stack detection mechanism, it can be determined whether there are any wafers in the stack that have shifted position. This makes the detection of wafer stack detection objects more convenient and improves the detection efficiency of the wafer stack.

[0017] Optionally, the stacking inspection mechanism includes a clamping assembly located above the inspection station, the clamping assembly being configured to clamp the stacked sheets in the hopper to be inspected at the inspection station into the hopper.

[0018] By setting up the clamping component, the stacked sheets are pressed into the material box to prevent displacement and facilitate the stacked sheet detection mechanism to perform positioning detection on the stacked sheets in the material box.

[0019] Optionally, the pressing assembly includes a first driving member and a pressure plate. The pressure plate is obliquely mounted on the driving end of the first driving member. The first driving member is configured to drive the pressure plate to move vertically up and down and / or horizontally to press down the stacked pieces in the material box. The angle and direction of the pressure plate and the stacked pieces in the material box are consistent.

[0020] The pressure plate is driven to move vertically and / or horizontally by the first driving component, so that the pressure plate can move to the position of the stacked pieces in the corresponding material box, thereby pressing down the stacked pieces in the material box. At the same time, since the stacked pieces carried in the material box may be tilted for easy transportation, in order to ensure that the stacked pieces can be stably pressed, the pressure plate needs to be consistent with the tilt angle and direction of the stacked pieces in the material box, so as to ensure that the stacked pieces will not shift at the inspection station, and facilitate the inspection of the stacked pieces inspection mechanism.

[0021] Optionally, the stacking conveyor mechanism is equipped with a leveling station located after the inspection station. The leveling station is equipped with a leveling mechanism and a conveying mechanism, wherein:

[0022] The stacking conveyor mechanism includes two parallel conveyor belts, and the leveling mechanism is located below the stacking conveyor mechanism and between the two conveyor belts.

[0023] The leveling mechanism includes a second driving member and a lifting member. The driving end of the second driving member is connected to the lifting member. The second driving member is configured to drive the lifting member to rise and fall, so that the lifting member will lift the material box at the leveling station away from the conveying surface of the stacking conveyor and tilt it at a preset angle. The preset angle is consistent with the angle of inclination of the bearing plate but opposite in direction.

[0024] The transport mechanism is configured to transport qualified stacks that are in a horizontal position to the next process.

[0025] The leveling mechanism adjusts the stacked pieces, which were originally tilted in the material box, to a horizontal state. The second driving component and the lifting component then lift the material box a certain height away from the conveying surface of the stacked piece conveying mechanism, making it easier for the handling mechanism to move and pick up the stacked pieces, thus improving production efficiency. At the same time, the horizontal stacked pieces are also easier for the next process to process, further improving production efficiency.

[0026] Optionally, the stacking conveyor is provided with a cleaning station located in front of the inspection station, and a stacking cleaning mechanism is provided at the cleaning station. The stacking cleaning mechanism is configured to clean the stacks located at the cleaning station.

[0027] The stack cleaning mechanism cleans the stacks to be inspected to remove dust and other impurities from the material box and the stacks, preventing impurities from affecting the inspection process, such as obscuring the sides of the object being inspected, thus improving the accuracy of stack inspection.

[0028] Optionally, the disc cleaning mechanism includes at least one set of air blowing components located at the cleaning station, the air blowing components being configured to blow air onto the discs located at the cleaning station.

[0029] By blowing air onto the stacked sheets at the cleaning station using at least one set of air blowing components, impurities on the material box and the stacked sheets can be blown away, thus cleaning the stacked sheets and improving the accuracy of subsequent stacked sheet inspection.

[0030] Optionally, the stacked sheet side inspection device also includes a material box transfer and conveying mechanism, which is located at the discharge end of the stacked sheet conveying mechanism. The material box transfer and conveying mechanism is configured to receive the stacked sheets that fail inspection, the material box containing the stacked sheets, or the empty material box conveyed by the stacked sheet conveying mechanism and transport them to the corresponding next process.

[0031] The material box transfer and conveying mechanism transports the inspected stacked pieces or material boxes to the corresponding next process, realizing the automatic conveying of unqualified stacked pieces and the circulation of empty material boxes. It provides a conveying mechanism that can automatically circulate unqualified stacked pieces and empty material boxes. The overall structure is compact and the production efficiency is high. Attached Figure Description

[0032] The disclosure of this application will become more readily understood with reference to the accompanying drawings. It will be readily understood by those skilled in the art that these drawings are for illustrative purposes only and are not intended to limit the scope of protection of this application. Furthermore, similar numbers in the drawings are used to denote similar components, wherein:

[0033] Figure 1 This is a three-dimensional structural schematic diagram of a stacked wafer side detection device according to one embodiment of this application;

[0034] Figure 2 This is a three-dimensional structural diagram of a material box containing stacked sheets according to one embodiment of this application;

[0035] Figure 3 This is a three-dimensional structural schematic diagram of a stacked sheet side detection device having a leveling mechanism and a conveying mechanism according to one embodiment of this application;

[0036] Figure 4 This is a three-dimensional structural schematic diagram of a stacked sheet side detection device with a stacked sheet cleaning mechanism according to one embodiment of this application;

[0037] Figure 5 This is a schematic diagram of the overall three-dimensional structure of the stacked sheet side detection device according to one embodiment of this application (the conveying platform of the material box transfer and conveying mechanism is in the first position);

[0038] Figure 6This is a schematic diagram of the overall three-dimensional structure of a stacked sheet side detection device according to one embodiment of this application (the conveying platform of the material box transfer and conveying mechanism is in the second position).

[0039] Figures 1 to 6 The following reference numerals are included:

[0040] 10. Stacking conveyor mechanism; 11. Conveyor belt;

[0041] 20. Stacking detection mechanism; 21. Mounting bracket; 211. First drive module; 212. Second drive module; 22. Detector; 23. Clamping assembly; 231. First drive component; 232. Pressure plate;

[0042] 30. Stacking pieces;

[0043] 40. Material box; 41. Base; 42. Support plate; 43. Baffle;

[0044] 50. Leveling mechanism; 51. Second drive component; 52. Lifting component;

[0045] 60. Handling mechanism; 70. Stacking and cleaning mechanism; 71. Air blowing assembly; 80. Material box transfer and conveying mechanism; 81. Lifting drive assembly; 82. Conveying platform. Detailed Implementation

[0046] Some embodiments of this application are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of this application and are not intended to limit the scope of protection of this application.

[0047] As described in the background section, the wafer cassettes still need to be transported to testing equipment for visual inspection of the stacked wafers, identifying those that fail the visual inspection. However, during the transport of the stacked wafers from the cassettes to the testing equipment, the silicon wafers within the stack may shift, resulting in uneven stacking. Uneven stacked wafers may get stuck when placed into the packaging box. Therefore, before visual inspection, it is necessary to check whether the stacked wafers are neat. Currently, there is no device to perform side inspection on the transported stacked wafers before visual inspection. If uneven stacking is discovered during packaging, making smooth packaging impossible, it will severely affect the production efficiency of the stacked wafers. Based on this, this application proposes a wafer stack side inspection device to perform side inspection on the stacked wafers before visual inspection, thereby improving production efficiency.

[0048] See appendix Figure 1 , Figure 1 This is a schematic diagram of a stacked wafer side detection device according to an embodiment of this application. Figure 1As shown, in one or more embodiments, the stacked sheet side detection device of this application includes a stacked sheet conveying mechanism 10 and a stacked sheet detection mechanism 20, wherein: the stacked sheet conveying mechanism 10 is provided with a detection station M, and the stacked sheet conveying mechanism 10 is configured to receive stacked sheets 30 or a material box 40 containing stacked sheets 30 and convey them to the detection station M; the stacked sheet detection mechanism 20 is configured to detect at least two adjacent sides of the stacked sheets 30 located at the detection station M; the stacked sheet conveying mechanism 10 is also configured to convey the stacked sheets 30 or the material box 40 after detection at the detection station M to the next process.

[0049] The side inspection device of this application embodiment transports the received stacked sheets 30 or the material box 40 containing the stacked sheets 30 sequentially to the stacked sheet inspection mechanism 20 via the stacked sheet conveying mechanism 10 for side inspection of the stacked sheets 30. After inspection, the stacked sheets 30 are directly transported to the next process via the stacked sheet conveying mechanism 10, resulting in high stacked sheet inspection efficiency. At the same time, the stacked sheet inspection mechanism 20 performs neatness inspection on at least two adjacent sides of the stacked sheets 30. The neatness inspection first removes a portion of unqualified stacked sheets, and the unqualified stacked sheets are repaired as soon as possible. This avoids discovering that the stacked sheets are not neat enough for packaging only after subsequent procedures such as appearance inspection. Performing side inspection of the stacked sheets before appearance inspection can effectively improve production efficiency.

[0050] In one implementation, see Appendix Figure 1 The stacking detection mechanism 20 includes a mounting frame 21 and a plurality of detectors 22. The mounting frame 21 is mounted on the stacking conveying mechanism 10, and the plurality of detectors 22 are mounted on the mounting frame 21. The plurality of detectors 22 are configured to detect the position of at least two adjacent sides of the stacked sheets 30 on the detection station M or in the material box 40 to confirm whether the stacked sheets 30 are offset.

[0051] Specifically, the detector 22 can be a camera. The camera takes pictures of at least two adjacent sides of the stacked wafers 30 on the inspection station M or in the material box 40, and obtains image information of at least two adjacent sides. If the stacked wafers 30 are not aligned, some silicon wafers in the stacked wafers 30 will have their sides protruding from the normal position of the stack. The stacked wafer inspection mechanism 20 can identify the protruding silicon wafers by taking pictures of the image information, thereby confirming whether the stacked wafers 30 are not aligned.

[0052] Specifically, the detector 22 can be installed either above or to one side of the detection station M, allowing for flexible installation to detect two adjacent, different sides of the stacked wafers 30. To achieve flexible installation, the mounting frame 21 includes a first drive module 211 and a second drive module 212. The detector 22 is installed at the drive end of the first drive module 211 and / or the second drive module 212. The first drive module 211 drives the detector 22 to move horizontally along the Y direction, and the second drive module 212 drives the detector 22 to move vertically along the Z direction. The X direction is the direction in which the stacked wafers 30 are conveyed by the stacked wafer conveying mechanism 10. The X, Y, and Z directions are perpendicular to each other. The first drive module 211 and the second drive module 212 can be linear modules, with the linear guide rails set in the same direction as their corresponding drive directions. The detector 22 is slidably installed on the corresponding linear rails, enabling flexible installation and position adjustment of the detector 22, facilitating side detection of the stacked wafers 30 in various states.

[0053] In one possible implementation, the detector 22 is an infrared sensor. Several detectors 22 are divided into two groups, with each group of detectors 22 corresponding to one side of the stack 30. The infrared rays emitted by each group of detectors 22 are perpendicularly irradiated to the outside of the side of the stack 30 to sense the offset silicon wafer in the stack 30.

[0054] Specifically, the infrared sensor detects whether there is an obstacle at the corresponding position by emitting infrared light, thereby triggering the corresponding control signal. Based on this, the detector 22 can be an infrared sensor, with each group of infrared sensors corresponding to one side. Its infrared light is perpendicularly irradiated to the outer side of the stack 30. If the stack 30 is not aligned, some silicon wafers in the stack 30 will have their sides protruding from the normal position of the stack 30. The infrared sensor will detect the protruding silicon wafers through infrared light, thereby determining whether the stack is misaligned.

[0055] Infrared sensors can directly detect whether there are silicon wafers protruding from their normal positions on the side of the stack corresponding to the emitted infrared light, enabling rapid side detection and effectively improving the detection efficiency of the stack. In addition, the high precision of infrared sensors improves the accuracy of side detection of the stack.

[0056] In one implementation, see Appendix Figure 1 and Figure 2 The material box 40 includes a base 41, a support plate 42 and two baffles 43. The support plate 42 is inclinedly mounted on the base 41 and is used to support the stacked pieces 30. The two baffles 43 are respectively mounted on the two downwardly inclined sides of the support plate 42 and are configured to prevent the stacked pieces 30 from detaching from the support plate 42.

[0057] The stacking detection mechanism 20 is configured to detect the two upwardly tilted sides of the stacked sheets 30 in the feed box 40 of the detection station M.

[0058] Specifically, when loading the stacked sheets 30 through the material box 40, in order to improve the side detection efficiency of the stacked sheets 30, the stacked sheet detection mechanism 20 only needs to detect the two upward tilted sides of the stacked sheets 30. For example, the detector 22 is installed at the corresponding position of the two upward tilted sides. There is no need to detect multiple sides or make corresponding adjustments to the position of the detector 22 to realize the side detection of the stacked sheets and confirm whether the stacked sheets 30 are neat.

[0059] The wafer stack 30 is carried and transported by the material box 40. Since the support plate 42 is tilted downward, the wafer stack 30 will also tilt downward. Since the baffle 43 can prevent the wafer stack 30 from detaching from the support plate 42, the two sides of the wafer stack 30 tilting downward will be close to the two baffles 43 due to gravity. The two sides of the wafer stack 30 close to the two baffles 43 will not cause the silicon wafer to bulge out of the normal position. Therefore, it is only necessary to detect the two sides of the wafer stack 30 tilting upward in the material box 40 by the wafer stack detection mechanism 20 to determine whether there is a silicon wafer in the wafer stack 30 that has been displaced. This makes it more convenient for the wafer stack detection mechanism to detect the object and improves the detection efficiency of the wafer stack 30.

[0060] In one implementation, see Appendix Figure 1 and attached Figure 2 The stacking detection mechanism 20 includes a clamping assembly 23 located above the detection station M. The clamping assembly 23 is configured to clamp the stacked sheets 30 in the material box 40 to be detected at the detection station M into the material box 40.

[0061] Specifically, the pressing assembly 23 includes a first driving member 231 and a pressure plate 232. The pressure plate 232 is installed on the driving end of the first driving member 231. The first driving member 231 is configured to drive the pressure plate 232 to move vertically and / or horizontally to press the stacked pieces 30 in the material box 40. The first driving member 231 drives the pressure plate 232 to move horizontally to adjust the corresponding position of the pressure plate 232 relative to the stacked pieces 30. The first driving member 231 can be installed on the driving end of the mounting bracket 21. The mounting bracket 21 drives the pressing assembly 23 to move horizontally relative to the stacked pieces 30 to adjust the corresponding position. The first driving member 231 drives the pressure plate 232 to move vertically and vertically to press the stacked pieces 30 into the material box 40. The first driving member 231 can be a cylinder.

[0062] By setting the clamping component 23, the stacked pieces 30 are pressed into the material box 40 to prevent the stacked pieces 30 from shifting, and to facilitate the stacked piece detection mechanism 20 to perform positioning detection on the stacked pieces 30 in the material box 40.

[0063] In one possible implementation, see Appendix Figure 1 and attached Figure 2The pressing assembly 23 includes a first driving member 231 and a pressure plate 232. The pressure plate 232 is obliquely installed at the driving end of the first driving member 231. The first driving member 231 is configured to drive the pressure plate 232 to move vertically and / or horizontally to press down the stacked pieces 30 in the material box 40. The angle and direction of the pressure plate 232 and the stacked pieces 30 in the material box 40 are consistent.

[0064] Specifically, the first driving component 231 can be installed on the driving end of the mounting frame 21. The mounting frame 21 drives the first driving component 231 to move, thereby causing the pressure plate 232 to move horizontally in the Y direction to adjust the position of the pressure plate 232 relative to the stacked pieces 30. The first driving component 231 drives the pressure plate 232 to rise and fall to press down the stacked pieces 30 in the material box 40. The tilt angle and direction of the pressure plate 232 need to be consistent with the tilt angle and direction of the stacked pieces 30, so as to adaptively press the stacked pieces 30 and facilitate inspection. In order to improve the stability of the pressure plate 232 during the movement, the first driving component 231 can be directly tilted and installed on the mounting frame 21. The tilt angle and direction of the first driving component 231 are consistent with the stacked pieces 30 in the material box 40. The pressure plate 232 is vertically arranged in the same direction as the first driving component 231 at the driving end of the first driving component 231. The first driving component 231 can be a cylinder.

[0065] The first driving component 231 drives the pressure plate 232 to move vertically and / or horizontally, so that the pressure plate 232 can move to the position of the stacked pieces 30 in the corresponding material box 40, thereby pressing down the stacked pieces 30 in the material box 40. At the same time, since the stacked pieces 30 carried in the material box 40 may be tilted for easy transportation, in order to ensure stable pressing of the stacked pieces, the pressure plate 232 needs to be consistent with the tilt angle and direction of the stacked pieces 30 in the material box 40, so as to ensure that the stacked pieces 30 will not shift on the inspection station M, so as to facilitate the stacked piece inspection mechanism 20 to perform inspection.

[0066] In one implementation, see Appendix Figure 3 The stacking conveyor mechanism 10 is equipped with a leveling station N located after the inspection station M. The leveling station N is equipped with a leveling mechanism 50 and a conveying mechanism 60, wherein:

[0067] The stacking conveyor mechanism 10 includes two parallel conveyor belts 11, and the leveling mechanism 50 is located below the stacking conveyor mechanism 10 and between the two conveyor belts 11;

[0068] The leveling mechanism 50 includes a second driving member 51 and a lifting member 52. The driving end of the second driving member 51 is connected to the lifting member 52. The second driving member 51 is configured to drive the lifting member 52 to rise and fall, so that the lifting member 52 will lift the material box 40 at the leveling station N away from the conveying surface of the stacking conveying mechanism 10 and tilt it at a preset angle. The preset angle is consistent with the angle of inclination of the bearing plate 42 and opposite in direction.

[0069] The conveying mechanism 60 is configured to convey qualified stacks that are in a horizontal position to the next process.

[0070] Specifically, the second driving component 51 can be a cylinder. The second driving component 51 drives the lifting component 52 to lift and raise the material box 40 at the leveling station N and tilt the material box 40 so that the stacked pieces 30 inside the material box 40 are in a horizontal state, which can facilitate the handling mechanism 60 to handle the stacked pieces 30. The second driving component 51 can be a cylinder, and the lifting component 52 can be an inclined top plate or top block installed on the driving end of the cylinder. The handling mechanism 60 includes a third driving component and a picking component. The driving end of the third driving component is connected to the picking component. The third driving component drives the picking component to move to pick up the stacked pieces 30 at the leveling station N and drives the picking component to move so as to move the stacked pieces 30 on the picking component to the next process.

[0071] The leveling mechanism 50 adjusts the originally tilted stacked pieces 30 in the material box 40 to a horizontal state, and the second driving component 51 and the lifting component 52 lift the material box 40 away from the conveying surface of the stacked piece conveying mechanism 10 by a certain height, so that the handling mechanism 60 can easily handle the stacked pieces 30 and pick them up, thus improving production efficiency. At the same time, the horizontal stacked pieces 30 are also easier to process in the next process, further improving production efficiency.

[0072] In one implementation, see Appendix Figure 4 The stacking conveyor 10 is equipped with a cleaning station H located in front of the detection station M. A stacking cleaning mechanism 70 is installed at the cleaning station H. The stacking cleaning mechanism 70 is configured to clean the stacked sheets 30 located at the cleaning station H to remove dust and other impurities from the material box 40 and the stacked sheets 30, so as to avoid impurities affecting the detection process, such as impurities obscuring the side of the object to be detected, and improve the accuracy of stacking detection.

[0073] Specifically, the stack cleaning mechanism 70 includes at least one set of air blowing components 71, which are located at the cleaning station H. The air blowing components 71 are configured to blow air onto the stack 30 located at the cleaning station H, which can blow away impurities on the stack 30 and clean the stack 30, thereby improving the accuracy of subsequent stack detection.

[0074] In one possible implementation, the air blowing assembly 71 has several air holes. The air blowing assembly 71 can blow air towards the cleaning station H through the air holes. During the process of conveying the stacked sheets 30, the moving stacked sheets 30 can pass through the air blowing assembly 71 and enter the inspection station M, so that cleaning can be completed during the stacked sheet conveying process without affecting the normal transportation process of the stacked sheets 30 and ensuring production efficiency.

[0075] In one implementation, see Appendix Figure 5The stacked sheet side inspection device also includes a material box transfer and conveying mechanism 80, which is located at the discharge end of the stacked sheet conveying mechanism 10. The material box transfer and conveying mechanism 80 is configured to receive the stacked sheets that fail inspection, the material box containing the stacked sheets, or the empty material box conveyed by the stacked sheet conveying mechanism 10 and convey them to the corresponding next process.

[0076] Specifically, after the stacked sheets conveyed by the stacked sheet conveying mechanism 10 are inspected by the stacked sheet inspection mechanism 20, if the side inspection result shows that the stacked sheets are neat and qualified, the stacked sheets are picked up by the handling mechanism 60 and transported to the next corresponding process, such as appearance inspection. If the stacked sheets 30 are carried by the material box 40, the empty material box 40 is left after the stacked sheets 30 are removed and is continued to be conveyed by the stacked sheet conveying mechanism 10 to the material box transfer conveying mechanism 80. The material box transfer conveying mechanism 80 can transport the empty material box to the material box recycling conveying line to complete the recycling of the empty material box or transport the empty material box to the receiving mechanism for receiving the stacked sheets 30 to realize the recycling of the empty material box. If the side inspection result shows that the stacked sheets are not neat and qualified, the stacked sheets are continued to be conveyed by the stacked sheet conveying mechanism 10 to the material box transfer conveying mechanism 80. The material box transfer conveying mechanism 80 transports the unqualified stacked sheets or the material box containing the unqualified stacked sheets to the maintenance station for maintenance, thereby improving production efficiency.

[0077] For details, please refer to the appendix. Figure 5 and Figure 6 The material box transfer and conveying mechanism 80 includes a lifting drive assembly 81 and a conveying platform 82. The conveying platform 82 is used to receive the stacked sheets that have failed inspection, the material boxes containing the stacked sheets, or the empty material boxes at the discharge end of the stacked sheet conveying mechanism 10. The lifting drive assembly 81 drives the conveying platform to rise and fall to different positions, so as to transport the received qualified stacked sheets, the material boxes containing the stacked sheets, or the empty material boxes to the corresponding next process position, for example... Figure 5 In the middle, the stacked sheet transfer conveyor 80 receives the material box containing defective stacked sheets at the discharge end (first position) of the stacked sheet conveyor 10, and in Figure 6 In the middle, the stacked piece transfer conveyor 80 moves the material box containing the defective stacked pieces to the second position (away from the discharge end of the stacked piece conveyor 10) and conveys it to the next transport line.

[0078] The material box transfer conveyor 80 transports the inspected stacked pieces 30 or material boxes 40 to the corresponding next process, realizing the automatic conveying of unqualified stacked pieces and the circulation of empty material boxes. It provides a conveying mechanism that can automatically circulate unqualified stacked pieces and empty material boxes. The overall structure is compact and the production efficiency is high.

[0079] See appendix Figures 1-6 An optional working process of the stacked edge-rubbing detection device in this application embodiment is as follows:

[0080] The receiving end of the stacking conveyor 10 receives the stacked pieces 30 or the material box 40 containing the stacked pieces 30 and conveys them to the inspection station M;

[0081] Before entering the inspection station M, the stacked sheet 30 or the material box 40 containing the stacked sheet 30 passes through the cleaning station H. The stacked sheet cleaning mechanism 70 blows air onto the stacked sheet 30 that has passed through the cleaning station H through at least one set of air blowing components 71 to blow away the impurities on the material box 40 and the stacked sheet 30.

[0082] The stacked sheet 30 enters the inspection station M, where the stacked sheet inspection mechanism 20 inspects at least two adjacent sides to confirm whether the stacked sheet 30 is offset.

[0083] After being inspected by the stacking inspection mechanism 20, the stacked sheets 30 are continued to be conveyed by the stacking conveyor mechanism 10;

[0084] During the transportation process:

[0085] If the stack 30 after inspection is a qualified stack, that is, a stack with neat sides, the conveying mechanism 60 will transport the qualified stack to the next process, such as the appearance inspection process.

[0086] If the stacked pieces 30 after inspection are qualified and are carried by the material box 40, when the material box 40 enters the leveling station N, the leveling mechanism 50 drives the lifting member 52 through the second driving member 51 to push the material box 40 away from the conveying surface of the stacked piece conveying mechanism 10 and tilt it at a preset angle so that the stacked pieces in the material box 40 are in a horizontal state. Then, the transport mechanism 60 transports the qualified stacked pieces to the next process. At the same time, the empty material box 40 with the stacked pieces 30 removed is transported by the stacked piece conveying mechanism 10 to the material box transfer conveying mechanism 80.

[0087] If the stacked pieces 30 are found to be defective after inspection, they will be directly conveyed by the stacked piece conveying mechanism 10 to the material box transfer conveying mechanism 80.

[0088] The material box transfer and conveying mechanism 80 receives the empty material boxes, defective stacks, or material boxes containing defective stacks and conveys them to the corresponding next process. For example, empty material boxes are conveyed to the material box recycling station or the receiving station to realize the recycling or reuse of material boxes; or, for example, defective stacks are directly conveyed to the maintenance station for maintenance to improve production efficiency.

[0089] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0090] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0091] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A device for detecting the side edge of stacked wafers, characterized in that, The stacked sheet side detection device includes a stacked sheet conveying mechanism and a stacked sheet detection mechanism, wherein: The stacking conveyor mechanism is equipped with a detection station, and the stacking conveyor mechanism is configured to receive stacked pieces or a material box containing stacked pieces and convey them to the detection station; The stacking inspection mechanism is configured to inspect at least two adjacent sides of the stack located at the inspection station; The stacking conveyor mechanism is also configured to convey the stacked pieces or cassettes that have been inspected at the inspection station to the next process.

2. The stacked wafer side detection device according to claim 1, characterized in that, The stack detection mechanism includes a mounting frame and several detectors. The mounting frame is mounted on the stack conveying mechanism, and the several detectors are mounted on the mounting frame. The several detectors are configured to detect the position of at least two adjacent sides of the stack at the detection station or the stack in the hopper to confirm whether the stack is offset.

3. The stacked wafer side detection device according to claim 2, characterized in that, The detector is an infrared sensor. Several detectors are divided into two groups. Each group of detectors is set to one side of the stack. The infrared rays emitted by each group of detectors are perpendicular to the outside of the side of the stack to sense the offset silicon wafer in the stack.

4. The stacked wafer side detection device according to claim 1, characterized in that, The material box includes a base, a support plate, and two baffles. The support plate is installed at an angle on the base and is used to support stacked pieces. The two baffles are respectively installed on two downwardly inclined sides of the support plate and are configured to prevent the stacked pieces from detaching from the support plate. The stacking detection mechanism is configured to detect the two upward tilting sides of the stacked pieces in the material box at the detection station.

5. The stacked wafer side detection device according to any one of claims 1-4, characterized in that, The stacking detection mechanism includes a clamping component located above the detection station, the clamping component being configured to clamp the stacked sheets located in the material box to be detected at the detection station into the material box.

6. The stacked wafer side detection device according to claim 5, characterized in that, The pressing assembly includes a first driving member and a pressure plate. The pressure plate is obliquely mounted on the driving end of the first driving member. The first driving member is configured to drive the pressure plate to move vertically up and down and / or horizontally to press down the stacked pieces in the material box. The angle and direction of the pressure plate are consistent with those of the stacked pieces in the material box.

7. The stacked wafer side detection device according to claim 4, characterized in that, The stacking conveying mechanism is provided with a leveling station located after the inspection station. The leveling station is equipped with a leveling mechanism and a conveying mechanism, wherein: The stacking conveyor includes two parallel conveyor belts, and the leveling mechanism is located below the stacking conveyor and between the two conveyor belts. The leveling mechanism includes a second driving member and a lifting member. The driving end of the second driving member is connected to the lifting member. The second driving member is configured to drive the lifting member to move up and down, so that the lifting member pushes the material box at the leveling station away from the conveying surface of the stacking conveyor and tilts it at a preset angle. The preset angle is the same as the angle of inclination of the bearing plate but opposite in direction. The transport mechanism is configured to transport qualified stacks that are in a horizontal position to the next process.

8. The stacked wafer side detection device according to claim 1, characterized in that, The stacking conveying mechanism is provided with a cleaning station located in front of the inspection station. The cleaning station is equipped with a stacking cleaning mechanism, which is configured to clean the stacked sheets located at the cleaning station.

9. The stacked wafer side detection device according to claim 8, characterized in that, The stacked blade cleaning mechanism includes at least one set of air blowing components located at the cleaning station, and the air blowing components are configured to blow air onto the stacked blades located at the cleaning station.

10. The stacked wafer side detection device according to claim 1, characterized in that, The stacked sheet side inspection device also includes a material box transfer and conveying mechanism, which is located at the discharge end of the stacked sheet conveying mechanism. The material box transfer and conveying mechanism is configured to receive the stacked sheets that fail inspection, the material box containing the stacked sheets, or the empty material box conveyed by the stacked sheet conveying mechanism and transport them to the corresponding next process.

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