Polishing and grinding device for optical reflector

By combining the linear drive component and the positioning component, multi-angle polishing and stable clamping of the optical mirror are achieved, which solves the shortcomings of the existing device in high-precision polishing and stable positioning, and improves the polishing effect and efficiency.

CN223544904UActive Publication Date: 2025-11-14CHANGZHOU MINA OPTOELECTRONICS TECH CO LTD
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Patent Information

Application Number
CN202423181191.4
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-23
Publication Date
2025-11-14
Estimated Expiration
2034-12-23

AI Technical Summary

Technical Problem

Existing optical mirror polishing devices are insufficient to meet the requirements for high-precision polishing of optical mirrors with a certain curvature on their surface, and it is also difficult to achieve stable clamping and positioning.

Method used

The polishing disc is adjusted and stably clamped by using a combination of linear drive components, adjustment components, and positioning components, including a rotating shell, drive gear, driven gear, servo motor, and hydraulic cylinder. The polishing disc is rotated and moved by the servo motor.

Benefits of technology

This technology enables high-precision polishing of optical mirrors with a certain curvature, improving polishing effect and efficiency, ensuring stable clamping and positioning of the optical mirrors, and enhancing the practicality of the device.

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Abstract

The utility model relates to a polishing and grinding device for an optical reflector, which belongs to the technical field of optical reflectors and comprises a workbench, a base plate is fixed at the top of the workbench, a positioning block is fixed at the top of the base plate, a connecting plate is fixed at the top of the positioning block, and a fixing plate is fixed at the top of the workbench. A linear driving assembly is installed between the opposite sides of the connecting plate and the fixing plate, an adjusting assembly capable of being driven by the linear driving assembly to linearly move is installed at the bottom of the linear driving assembly, and a positioning assembly for positioning an optical reflector is installed at the top of the base plate. The adjusting assembly comprises a rotating shell, a driving shaft rotationally connected to the inner side of the rotating shell through a bearing, a driving gear fixedly arranged on the outer side of the driving shaft in a sleeving mode, and a driven shaft rotationally connected to the inner top wall of the rotating shell through a bearing. The polishing and grinding device for the optical reflector can meet more diversified polishing requirements.
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Description

Technical Field

[0001] This application relates to the field of optical mirror technology, specifically to a polishing and grinding device for optical mirrors. Background Technology

[0002] With the rapid development of optoelectronic technology and semiconductor industry, the demand for high-precision optical components is increasing. As one of the important optical components, optical mirrors play a vital role in various precision instruments, laser systems and satellite communications. However, the production of high-quality optical mirrors places extremely high demands on the processing technology, especially the surface polishing and grinding process, which directly affects the working performance and service life of the mirror.

[0003] According to the silicon carbide ceramic optical mirror surface polishing device disclosed in Chinese Patent Publication No. CN220637311U, this patent uses a rack and pinion mechanism. The user provides power to the motor via a control console, which drives the motor gear to rotate. This causes the gear to move back and forth on the rack, simultaneously driving the first hydraulic press fixedly connected to the lower end of the motor to move synchronously, thereby adjusting the polishing wheel. The second hydraulic press provides power to the second hydraulic rod, which pushes the sliding clamping plate to slide on the sliding track, forming a clamping structure with the fixed clamping plate. This fixes the silicon carbide ceramic optical mirror material to be polished on the base plate, facilitating polishing.

[0004] However, this patent has certain shortcomings in actual use. The adjustment method of the first hydraulic press in this patent can only meet the longitudinal adjustment of the polishing wheel. When polishing an optical mirror with a certain curvature, this type of adjustment method is difficult to meet the high-precision adjustment requirements. In this regard, this application provides a polishing and grinding device for optical mirrors to solve the above problems. Utility Model Content

[0005] To address the shortcomings of existing technologies, this application provides a polishing and grinding device for optical mirrors, which has the advantages of meeting more diverse polishing needs and solves the problem that existing optical mirror surface polishing devices are inconvenient for polishing and grinding optical mirrors with a certain curvature.

[0006] To achieve the above objectives, this application provides the following technical solution: a polishing and grinding device for an optical mirror, comprising a worktable, a base plate fixed to the top of the worktable, a positioning block fixed to the top of the base plate, a connecting plate fixed to the top of the positioning block, a fixing plate fixed to the top of the worktable, a linear drive assembly installed between the connecting plate and the fixing plate on opposite sides, an adjustment assembly capable of being driven to move linearly installed at the bottom of the linear drive assembly, and a positioning assembly for positioning the optical mirror installed on the top of the base plate;

[0007] The adjustment assembly includes a rotating housing, a drive shaft rotatably connected to the inner side of the rotating housing via bearings, a drive gear sleeved and fixed to the outer side of the drive shaft, a driven shaft rotatably connected to the inner top wall of the rotating housing via bearings, a driven gear fixedly installed at the bottom end of the driven shaft, a second servo motor fixedly installed at the bottom of the rotating housing, a hydraulic cylinder fixedly installed at the bottom of the driven gear, a connecting hole opened at the bottom of the rotating housing for the hydraulic cylinder to pass through and move, an adjustment plate fixedly installed on the output shaft of the hydraulic cylinder, two support plates fixedly installed at the bottom of the adjustment plate, a rotating box rotatably connected between the two support plates on opposite sides via a rotating shaft, a third servo motor fixedly installed on the left side of the left support plate, a fourth servo motor fixedly installed on the inner bottom wall of the rotating box, and a polishing disc fixedly installed on the output shaft of the fourth servo motor.

[0008] By adopting the above technical solutions, more diverse polishing needs can be met.

[0009] Furthermore, the linear drive assembly includes a first drive box fixed between opposite sides of the connecting plate and the fixed plate, a first lead screw rotatably connected to the inside of the first drive box via a bearing, a first positioning rod fixed to the inside of the first drive box, a first slider threaded to the outside of the first lead screw, a second drive box fixed to the bottom of the first slider, a second lead screw rotatably connected to the inside of the second drive box via a bearing, two second positioning rods fixed to the inside of the second drive box, a second slider threaded to the outside of the second lead screw, and two first servo motors respectively fixedly installed on the left side of the connecting plate and the front side of the second drive box.

[0010] By adopting the above technical solution, the polishing disc can be adjusted by linear movement.

[0011] Furthermore, the positioning component includes a hydraulic push rod that passes through and is fixedly installed on the right side of the fixed plate, an active clamping plate that is fixedly installed on the output shaft of the hydraulic push rod, two guide blocks fixed to the bottom of the active clamping plate, two guide grooves opened on the top of the base plate, and a fixed clamping plate fixed to the right side of the positioning block.

[0012] By adopting the above technical solution, the optical reflector can be stably positioned.

[0013] Furthermore, both the active clamping plate and the fixed clamping plate are V-shaped and their positions correspond to each other. The guide block is inserted into and slidably connected to the inner side of the corresponding guide groove.

[0014] By adopting the above technical solution, the openings of both can clamp and position the optical reflector, allowing the active clamping plate to move forward stably under the guidance of the guide block.

[0015] Furthermore, both the bottom of the first drive box and the second drive box are open, the right end of the first positioning rod passes through the left side of the first slider, and one end of the front of the second positioning rod passes through the front of the second slider.

[0016] By adopting the above technical solution, the first slider and the second slider can be limited by the first positioning rod and the second positioning rod respectively, and then can be driven by the first lead screw and the second lead screw to move linearly.

[0017] Furthermore, the output shaft of the first servo motor on the left side passes through the left side of the connecting plate and the left side of the first drive box and is fixedly connected to the left end of the first lead screw. The output shaft of the first servo motor on the front side passes through the front side of the second drive box and is fixedly connected to one end of the front side of the second lead screw. The bottom of the second slider and the top of the rotating shell are fixedly connected.

[0018] By adopting the above technical solution, the two first servo motors can drive the first lead screw and the second lead screw to rotate respectively, so that the second slider can drive the rotating shell to move.

[0019] Furthermore, the outer sides of the driving gear and the outer sides of the driven gear mesh with each other, the diameter of the driven gear is much larger than the diameter of the driving gear, and the output shaft of the second servo motor passes through the bottom of the rotating housing and is fixedly connected to the bottom end of the driving shaft.

[0020] By adopting the above technical solution, the driving gear can drive the driven gear to rotate stably and slowly, and the second servo motor can drive the driving shaft to rotate.

[0021] Furthermore, the bottom of the driven gear and the inner bottom wall of the rotating shell are fitted together, and the fitting surfaces are both smooth. Rotating shafts are fixed on both the left and right sides of the rotating box, and the outer side of the rotating shaft is rotatably connected to the outer side of the corresponding support plate through a bearing. The output shaft of the third servo motor passes through the left support plate and is fixedly connected to the end of the corresponding rotating shaft. The output shaft of the fourth servo motor passes through the bottom of the rotating box.

[0022] By adopting the above technical solution, the driven gear can be supported by the bottom of the rotating shell, so that the third servo motor can drive the rotating shaft to rotate, thereby driving the rotating box to rotate, and the polishing disc can be driven to rotate and polish on the outside of the rotating box.

[0023] Compared with the prior art, the technical solution of this application has the following beneficial effects:

[0024] This polishing and grinding device for optical mirrors, through the coordinated use of the base plate, positioning block, linear drive component, adjustment component, and positioning component on the top of the worktable, can meet more diverse polishing needs. This allows the device to perform high-precision polishing on optical mirrors with a certain curvature. At the same time, by changing the shape of the clamping component, it can achieve more stable clamping and positioning of the optical mirror, thereby improving the polishing effect and efficiency, and effectively enhancing the practicality of the polishing and grinding device for optical mirrors. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of this application;

[0026] Figure 2 This is a cross-sectional schematic diagram of the hydraulic cylinder connection structure in this application.

[0027] Figure 3 This is a three-dimensional cross-sectional view of the internal structure of the rotating shell in this application.

[0028] Figure 4 This is a three-dimensional schematic diagram of the active clamping plate in the structure of this application.

[0029] In the diagram: 1. Worktable; 2. Base plate; 3. Positioning block; 401. Connecting plate; 402. Fixing plate; 500. Linear drive assembly; 501. First drive box; 502. First lead screw; 503. First positioning rod; 504. First slider; 505. Second drive box; 506. Second lead screw; 507. Second positioning rod; 508. Second slider; 509. First servo motor; 600. Adjustment assembly; 601. Rotating shell; 602. Drive shaft; 603. Driven gear; 604. Driven shaft; 605. Driven gear; 606. Second servo motor; 607. Hydraulic cylinder; 608. Connecting hole; 609. Adjusting plate; 610. Support plate; 611. Rotating box; 612. Third servo motor; 613. Fourth servo motor; 614. Polishing disc; 700. Positioning assembly; 701. Hydraulic push rod; 702. Active clamping plate; 703. Guide block; 704. Guide groove; 705. Fixed clamping plate. Detailed Implementation

[0030] The technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0031] Please see Figures 1 to 4This application provides a technical solution: a polishing and grinding device for an optical mirror, including a worktable 1, a base plate 2 fixed to the top of the worktable 1, a positioning block 3 fixed to the top of the base plate 2, a connecting plate 401 fixed to the top of the positioning block 3, a fixing plate 402 fixed to the top of the worktable 1, a linear drive assembly 500 installed between opposite sides of the connecting plate 401 and the fixing plate 402, an adjustment assembly 600 capable of linear movement driven by the linear drive assembly 500 installed at the bottom of the linear drive assembly 500, and a positioning device for positioning the optical mirror installed on the top of the base plate 2. Positioning component 700; through the coordinated use of the base plate 2, positioning block 3, linear drive component 500, adjustment component 600 and positioning component 700 on the top of the worktable 1, more diverse polishing needs can be met, enabling this polishing and grinding device to perform high-precision polishing on optical mirrors with a certain curvature. At the same time, by changing the shape of the clamping component, it can more stably clamp and position the optical mirror, thereby improving the polishing and grinding effect and efficiency, and effectively enhancing the practicality of the polishing and grinding device for optical mirrors.

[0032] In this embodiment, the adjustment component 600 is a structure used to make diverse adjustments to the polishing angle.

[0033] like Figure 1 , Figure 2 and Figure 3 As shown, the adjustment assembly 600 includes a rotating housing 601, a drive shaft 602 rotatably connected to the inner side of the rotating housing 601 via bearings, a drive gear 603 sleeved and fixed to the outer side of the drive shaft 602, a driven shaft 604 rotatably connected to the inner top wall of the rotating housing 601 via bearings, a driven gear 605 fixedly installed at the bottom end of the driven shaft 604, a second servo motor 606 fixedly installed at the bottom of the rotating housing 601, a hydraulic cylinder 607 fixedly installed at the bottom of the driven gear 605, and a cylinder formed at the bottom of the rotating housing 601. The system includes a through hole 608 for the hydraulic cylinder 607 to pass through and move, an adjusting plate 609 fixedly installed on the output shaft of the hydraulic cylinder 607, two support plates 610 fixedly installed at the bottom of the adjusting plate 609, a rotating box 611 rotatably connected between the two support plates 610 on opposite sides via a rotating shaft, a third servo motor 612 fixedly installed on the left side of the left support plate 610, a fourth servo motor 613 fixedly installed on the inner bottom wall of the rotating box 611, and a polishing disc 614 fixedly installed on the output shaft of the fourth servo motor 613.

[0034] It should be noted that the outer side of the driving gear 603 and the outer side of the driven gear 605 mesh with each other. The diameter of the driven gear 605 is much larger than the diameter of the driving gear 603, which enables the driving gear 603 to drive the driven gear 605 to rotate stably and slowly. The output shaft of the second servo motor 606 passes through the bottom of the rotating housing 601 and is fixedly connected to the bottom end of the driving shaft 602, which enables the second servo motor 606 to drive the driving shaft 602 to rotate.

[0035] In addition, the bottom of the driven gear 605 is in contact with the inner bottom wall of the rotating shell 601, and the contact surfaces are both smooth. The diameter of the driven gear 605 is larger than the diameter of the connecting hole 608, so that the driven gear 605 can be supported by the bottom of the rotating shell 601. The left and right sides of the rotating box 611 are fixed with rotating shafts, and the outer side of the rotating shafts is rotatably connected to the outer side of the corresponding support plate 610 through bearings. The output shaft of the third servo motor 612 passes through the left support plate 610 and is fixedly connected to the end of the corresponding rotating shaft, so that the third servo motor 612 can drive the rotating shaft to rotate, thereby driving the rotating box 611 to rotate. The output shaft of the fourth servo motor 613 passes through the bottom of the rotating box 611, so that the polishing disc 614 can be driven to rotate and polish on the outer side of the rotating box 611.

[0036] In this embodiment, the linear drive assembly 500 is a structure used to adjust the position of the polishing disc 614.

[0037] like Figure 1 As shown, the linear drive assembly 500 includes a first drive box 501 fixed between the connecting plate 401 and the fixed plate 402 on opposite sides, a first lead screw 502 rotatably connected to the inside of the first drive box 501 via bearings, a first positioning rod 503 fixed to the inside of the first drive box 501, a first slider 504 threaded to the outside of the first lead screw 502, a second drive box 505 fixed to the bottom of the first slider 504, a second lead screw 506 rotatably connected to the inside of the second drive box 505 via bearings, two second positioning rods 507 fixed to the inside of the second drive box 505, a second slider 508 threaded to the outside of the second lead screw 506, and two first servo motors 509 respectively fixedly installed on the left side of the connecting plate 401 and the front side of the second drive box 505.

[0038] It should be noted that the bottoms of both the first drive box 501 and the second drive box 505 are open. The right end of the first positioning rod 503 passes through the left side of the first slider 504, and one end of the front of the second positioning rod 507 passes through the front of the second slider 508. This allows the first slider 504 and the second slider 508 to be limited by the first positioning rod 503 and the second positioning rod 507, respectively, and thus to be driven by the first lead screw 502 and the second lead screw 506 to move linearly.

[0039] In addition, the output shaft of the first servo motor 509 on the left passes through the left side of the connecting plate 401 and the left side of the first drive box 501 and is fixedly connected to the left end of the first lead screw 502. The output shaft of the first servo motor 509 on the front passes through the front of the second drive box 505 and is fixedly connected to one end of the front of the second lead screw 506, so that the two first servo motors 509 can drive the first lead screw 502 and the second lead screw 506 to rotate respectively. The bottom of the second slider 508 is fixedly connected to the top of the rotating shell 601, so that the second slider 508 can drive the rotating shell 601 to move.

[0040] In this embodiment, the positioning component 700 is a structure used for positioning the optical reflector.

[0041] like Figure 1 and Figure 4 As shown, the positioning assembly 700 includes a hydraulic push rod 701 that passes through and is fixedly installed on the right side of the fixed plate 402, an active clamping plate 702 that is fixedly installed on the output shaft of the hydraulic push rod 701, two guide blocks 703 that are fixed to the bottom of the active clamping plate 702, two guide grooves 704 that are opened on the top of the base plate 2, and a fixed clamping plate 705 that is fixed to the right side of the positioning block 3.

[0042] It should be noted that both the active clamping plate 702 and the fixed clamping plate 705 are V-shaped and their positions are corresponding. The active clamping plate 702 and the fixed clamping plate 705 are symmetrically distributed from left to right, so that their openings can clamp and position the optical reflector. The guide block 703 is inserted into and slidably connected to the inner side of the corresponding guide groove 704, so that the active clamping plate 702 can move forward stably under the guidance of the guide block 703.

[0043] The working principle of the above embodiments is as follows:

[0044] When polishing the optical mirror, the optical mirror to be processed is placed on top of the base plate 2, with its outer side abutting against the right side of the fixed clamping plate 705. The hydraulic push rod 701 is activated, pushing the active clamping plate 702 to move closer to the fixed clamping plate 705 under the cooperation of the guide block 703 and the guide groove 704. The optical mirror is then clamped and positioned by the cooperation between the fixed clamping plate 705 and the active clamping plate 702. The two first servo motors 509 are activated, driving the first lead screw 502 or the second lead screw 506 to rotate, so that the first slider 504 and the second slider 508 can move left and right respectively. The linear motion to the right and back and forth completes the position adjustment of the polishing disc 614. When the grinding angle needs to be adjusted, the third servo motor 612 is started, which drives the rotating box 611 to rotate. The second servo motor 606 is started, which drives the drive shaft 602 to rotate and makes the drive gear 603 rotate, which in turn drives the driven gear 605 to rotate, so that the polishing disc 614 after the angle adjustment can be rotated to fit the surface of the optical mirror. The hydraulic cylinder 607 is started, which pushes the adjustment plate 609 to move downward. The fourth servo motor 613 is started, which drives the polishing disc 614 to rotate to polish the surface of the optical mirror.

[0045] Compared with existing technologies, this polishing and grinding device for optical mirrors, through the coordinated use of the base plate 2, positioning block 3, linear drive component 500, adjustment component 600, and positioning component 700 on the top of the worktable 1, can meet more diverse polishing needs. This allows the device to perform high-precision polishing on optical mirrors with a certain curvature. Furthermore, by changing the shape of the clamping components, it can achieve more stable clamping and positioning of the optical mirror, thereby improving the polishing effect and efficiency. This effectively enhances the practicality of the polishing and grinding device for optical mirrors and solves the problem that existing optical mirror surface polishing devices are inconvenient for polishing optical mirrors with a certain curvature.

[0046] All electrical components mentioned in this article are electrically connected to the main controller and power supply. The provision of power supply is common knowledge in the field. The main controller can be a conventional known device such as a computer that can be controlled. It can be implemented by a person skilled in the art through simple programming. All of these are existing public power connection technologies, which will not be described in detail in this article.

Claims

1. A polishing and grinding apparatus for optical mirrors, comprising a worktable (1), characterized in that: A base plate (2) is fixed to the top of the worktable (1), a positioning block (3) is fixed to the top of the base plate (2), a connecting plate (401) is fixed to the top of the positioning block (3), a fixing plate (402) is fixed to the top of the worktable (1), a linear drive assembly (500) is installed between the opposite sides of the connecting plate (401) and the fixing plate (402), an adjustment assembly (600) that can be driven to move linearly is installed at the bottom of the linear drive assembly (500), and a positioning assembly (700) for positioning the optical reflector is installed on the top of the base plate (2). The adjustment assembly (600) includes a rotating housing (601), a drive shaft (602) rotatably connected to the inner side of the rotating housing (601) via bearings, a drive gear (603) sleeved and fixed to the outer side of the drive shaft (602), a driven shaft (604) rotatably connected to the inner top wall of the rotating housing (601) via bearings, a driven gear (605) fixedly installed at the bottom end of the driven shaft (604), a second servo motor (606) fixedly installed at the bottom of the rotating housing (601), a hydraulic cylinder (607) fixedly installed at the bottom of the driven gear (605), and a section opened in the rotating housing (601). The bottom has a connecting hole (608) through which the hydraulic cylinder (607) passes and moves, an adjusting plate (609) fixedly installed on the output shaft of the hydraulic cylinder (607), two support plates (610) fixedly installed on the bottom of the adjusting plate (609), a rotating box (611) rotatably connected between the two support plates (610) on opposite sides via a rotating shaft, a third servo motor (612) fixedly installed on the left side of the left support plate (610), a fourth servo motor (613) fixedly installed on the inner bottom wall of the rotating box (611), and a polishing disc (614) fixedly installed on the output shaft of the fourth servo motor (613).

2. The polishing and grinding device for an optical mirror according to claim 1, characterized in that: The linear drive assembly (500) includes a first drive box (501) fixed between the opposite sides of the connecting plate (401) and the fixing plate (402), a first lead screw (502) rotatably connected to the inside of the first drive box (501) via a bearing, a first positioning rod (503) fixed to the inside of the first drive box (501), a first slider (504) threaded to the outside of the first lead screw (502), a second drive box (505) fixed to the bottom of the first slider (504), a second lead screw (506) rotatably connected to the inside of the second drive box (505) via a bearing, two second positioning rods (507) fixed to the inside of the second drive box (505), a second slider (508) threaded to the outside of the second lead screw (506), and two first servo motors (509) respectively fixedly installed on the left side of the connecting plate (401) and the front side of the second drive box (505).

3. The polishing and grinding device for an optical mirror according to claim 1, characterized in that: The positioning assembly (700) includes a hydraulic push rod (701) that passes through and is fixedly installed on the right side of the fixed plate (402), an active clamping plate (702) that is fixedly installed on the output shaft of the hydraulic push rod (701), two guide blocks (703) fixed to the bottom of the active clamping plate (702), two guide grooves (704) opened on the top of the base plate (2), and a fixed clamping plate (705) fixed to the right side of the positioning block (3).

4. The polishing and grinding device for an optical mirror according to claim 3, characterized in that: Both the active clamping plate (702) and the fixed clamping plate (705) are V-shaped and their positions correspond to each other. The guide block (703) is inserted into and slidably connected to the inner side of the corresponding guide groove (704).

5. The polishing and grinding apparatus for an optical mirror according to claim 2, characterized in that: The bottoms of the first drive box (501) and the second drive box (505) are both open. The right end of the first positioning rod (503) passes through the left side of the first slider (504), and one end of the front of the second positioning rod (507) passes through the front of the second slider (508).

6. The polishing and grinding apparatus for an optical mirror according to claim 2, characterized in that: The output shaft of the first servo motor (509) on the left side passes through the left side of the connecting plate (401) and the left side of the first drive box (501) and is fixedly connected to the left end of the first lead screw (502). The output shaft of the first servo motor (509) on the front side passes through the front side of the second drive box (505) and is fixedly connected to one end of the front side of the second lead screw (506). The bottom of the second slider (508) is fixedly connected to the top of the rotating shell (601).

7. The polishing and grinding apparatus for an optical mirror according to claim 1, characterized in that: The outer side of the driving gear (603) and the outer side of the driven gear (605) mesh with each other. The diameter of the driven gear (605) is much larger than the diameter of the driving gear (603). The output shaft of the second servo motor (606) passes through the bottom of the rotating housing (601) and is fixedly connected to the bottom end of the driving shaft (602).

8. The polishing and grinding apparatus for an optical mirror according to claim 1, characterized in that: The bottom of the driven gear (605) and the inner bottom wall of the rotating shell (601) are in contact, and the contact surfaces are smooth. The left and right sides of the rotating box (611) are fixed with rotating shafts, and the outer side of the rotating shaft is rotatably connected to the outer side of the corresponding support plate (610) through a bearing. The output shaft of the third servo motor (612) passes through the left support plate (610) and is fixedly connected to the end of the corresponding rotating shaft. The output shaft of the fourth servo motor (613) passes through the bottom of the rotating box (611).

Citation Information

Patent Citations

  • Silicon carbide ceramic optical reflector surface polishing device

    CN220637311U