Pneumatic diaphragm valve for high-purity pipeline
By designing a pneumatic diaphragm valve for high-purity pipelines, and employing an interference fit between the valve body and seat, a weir-type flow channel, and a lightweight structure, the sealing performance and lifespan issues of existing valves in ultra-high purity media applications have been solved, achieving excellent sealing and long service life.
Patent Information
- Application Number
- CN202423177838.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-23
- Publication Date
- 2025-11-14
- Estimated Expiration
- 2034-12-23
AI Technical Summary
Existing valves suffer from insufficient sealing performance, large leakage, and short lifespan when used with ultra-high purity media, making it difficult to meet the requirements for high-purity media applications.
A pneumatic diaphragm valve for high-purity pipelines was designed, featuring an interference fit between the valve body and seat, a weir-type flow channel structure, a smooth transition design, special polishing treatment, and a lightweight structure. Combined with piston assemblies and O-rings, it ensures optimized sealing performance and lifespan.
It has achieved long-term stable use in ultra-high purity storage tanks and pipelines, with good sealing performance and low leakage, while extending the service life of the valve and meeting the requirements of lightweight design.
Smart Images

Figure CN223549852U_ABST
Abstract
Description
Technical Field
[0001] This utility model application belongs to the field of industrial valves, specifically relating to a pneumatic diaphragm valve for high-purity pipelines. Background Technology
[0002] With technological advancements, various industries are moving towards greater precision, leading to increasingly stringent requirements for the purity of pipeline media. As pipeline control equipment, valves must correspondingly evolve to be more compatible with high-purity media. In recent years, my country's materials industry has experienced rapid growth. The emergence of new materials, upgrades in materials smelting equipment, and advancements in materials smelting methods have created new possibilities for the manufacture of ultra-high purity valves. This utility model application discloses a pneumatic diaphragm valve suitable for ultra-high purity pipelines and storage tanks, primarily used in the semiconductor industry. It can also be applied to industries such as natural gas, photovoltaic solar energy, microelectronics, LCD panels, chemicals, and pharmaceuticals. It is suitable for use with ultra-high purity gases, corrosive gases, toxic gases, and flammable and explosive fluids. Its main advantages include suitability for high-purity media, very low material composition in contact with the media, high cleanliness requirements, ease of cleaning, excellent sealing performance and low leakage, and extremely long cycle life. Utility Model Content
[0003] The purpose of this invention is to design a pneumatic diaphragm valve for high-purity pipelines, applicable to ultra-high-purity pipelines and storage tanks in industries such as semiconductors. The valve ensures normal operation throughout its lifespan, possesses the required sealing performance, and meets low precipitation requirements. Furthermore, the valve's lifespan and lightweight design have been optimized.
[0004] The implementation method of this utility model is as follows: a pneumatic diaphragm valve for high-purity pipelines, comprising a valve body, the valve body having a weir-type structure, a valve seat being provided on the top of the valve body, a valve seat connecting device being provided on the valve seat, and a piston assembly being provided on the valve seat connecting device.
[0005] As described above, a pneumatic diaphragm valve for high-purity pipelines has an interference fit between the top of the valve body and the valve seat.
[0006] As described above, a pneumatic diaphragm valve for high-purity pipelines includes a valve seat connection device comprising a central cavity nut, a valve cap, and a drive button. The central cavity nut is fixedly connected to the valve seat, the valve cap is disposed inside the central cavity nut, and the drive button is disposed inside the valve cap.
[0007] As described above, a pneumatic diaphragm valve for high-purity pipelines is provided with a diaphragm between the valve cap and the valve seat.
[0008] As described above, a pneumatic diaphragm valve for high-purity pipelines includes a piston assembly comprising a cylinder, a piston disposed within the cylinder, and a spring connecting the piston to the outside.
[0009] In the pneumatic diaphragm valve for high-purity pipelines described above, an O-ring is provided on the contact surface between the piston and the cylinder.
[0010] The pneumatic diaphragm valve for high-purity pipelines described above features a smooth transition at the valve body corners.
[0011] As described above, a pneumatic diaphragm valve for high-purity pipelines has a grooved end face of the valve body.
[0012] The advantages of this utility model are: This application can guarantee that the designed pneumatic diaphragm valve for high-purity pipelines, when used in ultra-high purity storage tanks and pipelines, can be used normally within its service life, and has the required sealing performance and meets the low precipitation requirements. At the same time, the valve life and lightweight design have been optimized. Attached Figure Description
[0013] Figure 1 A schematic diagram of a pneumatic diaphragm valve for high-purity pipelines provided by this utility model;
[0014] Figure 2 A schematic diagram of a pneumatic diaphragm valve for high-purity pipelines provided by this utility model;
[0015] Figure 3a This utility model provides a valve body structure for a high-purity pipeline pneumatic diaphragm valve.
[0016] Figure 3b for Figure 3a A magnified view of a portion of the image;
[0017] Figure 3c yes Figure 3a A three-dimensional image.
[0018] In the diagram: 1. Valve body, 2. Valve seat, 3. Diaphragm, 4. Drive button, 5. Valve cap, 6. Middle cavity nut, 7. Cylinder, 8. Piston, 9. O-ring, 10. Spring. Detailed Implementation
[0019] A pneumatic diaphragm valve for high-purity pipelines mainly comprises a valve body 1, a valve seat 2, a diaphragm 3, a drive button 4, a valve cap 5, a cavity nut 6, a cylinder 7, a piston 8, an O-ring 9, and a spring 10. The valve body 1 has a weir-type structure, with its top interlocked with the valve seat 2. The cavity nut 6 is internally threaded into the valve body, indirectly compressing the diaphragm 3 by pressing the valve cap 4 to achieve a seal in the valve cavity. The compressed diaphragm 3 and the valve seat 2 together form the sealing elements, achieving valve sealing. The valve cap 5 is interlocked with the cylinder 7. The piston 8, O-ring 9, and spring 10 are internal components of the cylinder, working together to open the valve when air is supplied. When air is supplied, the piston 8 moves upward, the spring 10 compresses, the pressure on the diaphragm towards the sealing surface decreases, and the diaphragm rebounds, pushing up the drive button 4, thus opening the valve.
[0020] In the design of the flow channel of valve body 1, a simulation analysis design method was introduced, a weir-type flow channel was adopted, and a smooth transition method was used at the corners to optimize the flow field structure of the flow channel, which is a structure that can reduce media residue and is easy to clean.
[0021] The valve seat 2 is interference-fitted with the valve body 1, and there is no limit to the inner side of the valve seat ring, allowing for easy replacement of the valve seat.
[0022] The inner surface of the flow channel of valve body 1 undergoes special polishing treatment, with a surface roughness of Ra0.2, and meets the requirements for low precipitation.
[0023] The valve body 1 end connection surface is grooved, which satisfies both the welding space requirement and the valve's lightweight requirement.
[0024] The upper part of the valve body 1 has a conical shape, which reduces the weight of the valve, increases the installation space of the middle cavity nut 6, and improves the appearance of the valve.
[0025] The functions of each part are described below:
[0026] 1. In the design of the flow channel of valve body 1, the design method of simulation analysis was introduced, a weir-type flow channel was adopted, and a smooth transition was used at the corner, which optimized the flow field structure of the flow channel. It is a structure that can reduce media residue and is easy to clean.
[0027] 2. The valve seat 2 is interference-fitted with the valve body 1, and there is no limit to the inner side of the valve seat ring, allowing for easy replacement of the valve seat.
[0028] 3. The inner surface of the flow channel of valve body 1 undergoes special polishing treatment, with a surface roughness of Ra0.2, and meets the requirements for low precipitation.
[0029] 4. The connecting surface at the end of valve body 1 is grooved, which satisfies both the welding space requirement and the requirement for lightweight valve.
[0030] 5. The upper part of the valve body 1 has a conical shape, which reduces the weight of the valve, increases the installation space of the middle cavity nut 6, and improves the appearance of the valve.
Claims
1. A pneumatic diaphragm valve for high-purity pipelines, characterized in that: It includes a valve body (1), which is a weir-type structure. A valve seat (2) is provided on the top of the valve body (1). A valve seat connection device is provided on the valve seat (2), and a piston assembly is provided on the valve seat connection device.
2. The pneumatic diaphragm valve for high-purity pipelines as described in claim 1, characterized in that: The top of the valve body (1) is press-fitted with the valve seat (2).
3. A pneumatic diaphragm valve for high-purity pipelines as described in claim 2, characterized in that: The valve seat connection device includes a central cavity nut (6), a valve cap (5), and a transmission button (4). The central cavity nut (6) is fixedly connected to the valve seat (2), the valve cap (5) is installed inside the central cavity nut (6), and the transmission button (4) is installed inside the valve cap (5).
4. A pneumatic diaphragm valve for high-purity pipelines as described in claim 3, characterized in that: A diaphragm (3) is provided between the valve cap (5) and the valve seat (2).
5. A pneumatic diaphragm valve for high-purity pipelines as described in claim 4, characterized in that: The piston assembly includes a cylinder (7), a piston (8) is disposed inside the cylinder (7), and the piston (8) is connected to the outside via a spring (10).
6. A pneumatic diaphragm valve for high-purity pipelines as described in claim 5, characterized in that: An O-ring (9) is provided on the contact surface between the piston (8) and the cylinder (7).
7. A pneumatic diaphragm valve for high-purity pipelines as described in claim 6, characterized in that: The valve body (1) uses a smooth transition at the corner.
8. A pneumatic diaphragm valve for high-purity pipelines as described in claim 7, characterized in that: The valve body (1) has a grooved end connection surface.