Radio frequency detection device

Abstract

A radio frequency detection device is used for detecting the resonant frequency and standing-wave ratio of a resonator before the resonator is installed in an ion implanter, and comprises a detection cavity detachably connected with the resonator, and after the detection cavity is connected with the resonator, part of the resonator is located in the detection cavity; the detection device is located in the detection cavity; and the measuring device is electrically connected with the resonator. The radio frequency detection device is arranged outside the ion implanter, the environment in the ion implanter is simulated through the detection device, and the resonant frequency and the standing-wave ratio of the resonator are detected before the resonator is installed in the ion implanter. The resonant frequency and the standing-wave ratio of the resonator are adjusted in a relatively spacious radio frequency detection device, so that the maintenance efficiency of the ion implanter is improved, the damage of a sealing ceramic part of the resonator caused by repeated installation is avoided, and the maintenance cost of the high-energy ion implanter is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of radio frequency detection, especially to a radio frequency detection device. BACKGROUND

[0002] The radio frequency type high-energy ion implanter main body includes an ion source, a mass spectrum screening instrument, a radio frequency acceleration unit, a beam scanning device and a target chamber, wherein the radio frequency acceleration unit comprises a combination of multiple focusing electrodes and resonators, and by means of accurately adjusting the phase of the resonators, the radio frequency acceleration structure can make the ion beam cascade accelerate in the electric field in time periods, and by increasing the acceleration time, the space is reduced to obtain a high-energy ion beam.

[0003] However, the resonant frequency and the standing wave ratio, which are key performance indicators of the resonator, are easily affected by the installation environment, and the debugging operation is very inconvenient in the narrow internal space of the ion implanter, which leads to the fact that the detected resonant frequency and the standing wave ratio cannot meet the needs of the machine use, and the performance of the ion implanter is affected. Not only is the resonator easily damaged by multiple disassembly and debugging on the radio frequency acceleration unit, but also the efficiency of machine maintenance is reduced, which cannot meet the production demand. SUMMARY

[0004] The technical problem solved by the utility model is how to improve the performance of the ion implanter and reduce the maintenance cost.

[0005] To solve the above technical problem, the utility model embodiment provides a radio frequency detection device for detecting the resonant frequency and the standing wave ratio of a resonator before the resonator is installed into an ion implanter, comprising: a detection cavity, which is detachably connected with the resonator, and part of the resonator is located in the detection cavity after the detection cavity is connected with the resonator; a detection device located in the detection cavity; and a measurement device electrically connected with the resonator.

[0006] Optionally, the detection device comprises: an adjusting support arm, which is movably penetrated through the side wall of the detection cavity; and a focusing electrode, which is detachably connected to one end of the adjusting support arm located in the detection cavity.

[0007] Optionally, the focusing electrode comprises: a base, which is detachably connected to one end of the adjusting support arm located in the detection cavity; and an electrode sheet, which is fixedly connected to the base and has a groove in the electrode sheet.

[0008] Optionally, the electrode sheet is in the shape of a cylinder, the diameter of the electrode sheet ranges from 7 cm to 9 cm, the thickness of the electrode sheet ranges from 1 cm to 3 cm, the diameter of the groove in the electrode sheet ranges from 1 cm to 4 cm, and the depth of the groove in the electrode sheet ranges from 1 cm to 4 cm.

[0009] Optionally, the length of the adjusting support arm is 25-30 cm, the length of the inner part of the detection cavity is 10-15 cm, and the length of the detection cavity is 30-45 cm.

[0010] Optionally, the adjusting support arm and the detection cavity are made of aviation aluminum profile.

[0011] Optionally, the radio frequency detection device further comprises a fixed handle sleeved on the adjusting support arm and fixedly connected to the side wall of the detection cavity, the fixed handle having a through hole; and a fixing member penetrating through the through hole and extrudedly connected to the adjusting support arm.

[0012] Optionally, the through hole has a threaded surface, the fixing member is a bolt, and the extruded connection is achieved by the mutual engagement between the bolt and the threaded surface.

[0013] Optionally, the adjusting support arm has a scale.

[0014] Optionally, the detection cavity comprises a mounting interface on the upper surface of the detection cavity.

[0015] Optionally, the mounting interface is provided with an O-ring.

[0016] Optionally, the radio frequency detection device further comprises a plurality of fixing buckles annularly arranged on the mounting interface, the detection cavity being detachably connected to the resonator through the fixing buckles; and a front cover detachably connected to the detection cavity.

[0017] Optionally, the number of the fixing buckles is greater than or equal to 3.

[0018] Optionally, the front cover is connected to the detection cavity through a bolt.

[0019] Optionally, the measurement device is a standing wave ratio tester or a network vector analyzer.

[0020] Compared with the prior art, the technical scheme of the embodiment of the utility model has the following beneficial effects:

[0021] The radio frequency detection device in the utility model is arranged outside the ion implanter, the environment in the ion implanter is simulated through the detection device, the resonance frequency and the standing wave ratio of the resonator are detected before the resonator is installed into the ion implanter, the specific parameters are acquired through the measuring device, and after the resonance frequency and the standing wave ratio meet the requirements of the ion implanter, the resonator is installed into the ion implanter, the accuracy of the resonator installation is realized, the resonator resonance frequency and the standing wave ratio are adjusted in the relatively spacious radio frequency detection device, the maintenance efficiency of the ion implanter is improved, the damage of the sealing ceramic piece of the resonator caused by repeated installation is avoided, and the maintenance cost of the high-energy ion implanter is reduced.

[0022] Further, the adjusting support arm is movably penetrated in the side wall of the detection cavity, so that the distance between the focusing electrode and the resonator can be adjusted, the environment in the ion implanter is simulated, and the accuracy of the resonator installation position is improved.

[0023] Further, the adjusting support arm is movably penetrated in the side wall of the detection cavity, so that the distance between the focusing electrode and the resonator can be adjusted, the environment in the ion implanter is simulated, and the accuracy of the resonator installation position is improved.

[0024] Further, the adjusting support arm is movably penetrated in the side wall of the detection cavity, so that the distance between the focusing electrode and the resonator can be adjusted, the environment in the ion implanter is simulated, and the accuracy of the resonator installation position is improved.

[0025] Further, the adjusting support arm is movably penetrated in the side wall of the detection cavity, so that the distance between the focusing electrode and the resonator can be adjusted, the environment in the ion implanter is simulated, and the accuracy of the resonator installation position is improved. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 It is the structure diagram of a radio frequency detection device in the utility model embodiment Figure 1 ;

[0027] Figure 2 It is the structure diagram of a radio frequency detection device in the utility model embodiment Figure 2 ;

[0028] Figure 3 It is the structure diagram of a radio frequency detection device in the utility model embodiment Figure 3 ;

[0029] Figure 4It is a structure schematic diagram of a radio frequency detection device in the embodiment of the utility model. Figure 4 ;

[0030] Figure 5 It is a structure schematic diagram of a resonator in the embodiment of the utility model. DETAILED DESCRIPTION

[0031] It should be noted that the "surface", "upper", in the specification, for describing the relative position relationship of space, and not limited to whether direct contact.

[0032] The high-energy ion implanter is divided into electrostatic acceleration and radio frequency acceleration two modes, wherein the electrostatic acceleration mode increases the physical size of the equipment due to the increasing insulation distance, and the ion beam energy required by the device deep well doping process is often MeV (megavoltage), which cannot meet the requirements of equipment integration and miniaturization of semiconductor manufacturing Fab. The high-energy ion implanter based on the design of radio frequency linear accelerator is gradually widely used due to its miniaturization and the advantages of meeting the energy requirements of different scenes.

[0033] At present, due to the increasing speed of the doping ion beam in the radio frequency acceleration area, the length of the corresponding multi-stage resonator drift tube electrode is continuously increasing, and the distance between the front and rear two focusing electrodes of the resonator is also continuously increasing, which means that each new resonator needs to be installed in the specified high-energy ion implanter radio frequency acceleration unit area to detect whether the resonance frequency and standing wave ratio meet the needs of the machine. But the key performance indicators of the resonator, the resonance frequency and the standing wave ratio, are easily affected by the installation environment, and the debugging operation is very inconvenient in the narrow internal space of the ion implanter, which leads to the fact that the detected resonance frequency and standing wave ratio cannot meet the needs of the machine, affecting the performance of the ion implanter. Not only the resonator is easily damaged by repeatedly disassembling and debugging on the radio frequency acceleration unit, but also the efficiency of machine maintenance is reduced, which cannot meet the production demand.

[0034] To solve the above technical problems, the utility model provides a kind of semiconductor structure and its forming method, through detection device simulates the environment in ion implanter, realize the resonance frequency and standing wave ratio of the resonator are detected before being installed to ion implanter, and specific parameters are obtained by measuring device, and after the resonance frequency and standing wave ratio meet the requirements of ion implanter, the resonator is installed to ion implanter, the precision of resonator installation is realized, the resonance frequency and standing wave ratio of resonator are adjusted in the relatively spacious radio frequency detection device, the maintenance efficiency of ion implanter is improved, and the damage of sealing ceramic piece of resonator caused by repeated installation is avoided, the maintenance cost of high-energy ion implanter is reduced.

[0035] In order to make the above-mentioned purposes, characteristics and beneficial effects of the utility model more obvious and easy to understand, the specific embodiments of the utility model will be described in detail below with reference to the drawings.

[0036] Figure 1 Figure 1 is a structural schematic diagram of a radio frequency detection device 201 in the embodiment of the present application.

[0037] Please refer to Figure 1 The utility model provides a kind of radio frequency detection device 201, for detecting the resonant frequency and standing wave ratio of the resonator 100 before the resonator 100 is installed to ion implanter, comprising: detection cavity 200, the detection cavity is detachably connected with the resonator, and part of the resonator 100 is located in the detection cavity 200 after the detection cavity is connected with the resonator 100;Detection device 201 is located in the detection cavity 200;Measuring device 300 is electrically connected with the resonator 100.

[0038] In an embodiment of the utility model, the detection cavity 200 is used to accommodate detection device 201, and the detection device 201 is used to detect the resonant frequency and standing wave ratio of the resonator 100.

[0039] The range of the standing wave ratio is 0.9 to 1.1.

[0040] In a specific embodiment, the material of the detection cavity 200 is aviation aluminum profile.

[0041] In a preferred embodiment, the material of the detection cavity 200 is aluminum-magnesium alloy.

[0042] In some embodiments of the utility model, the measuring device 300 is a standing wave ratio tester or a network vector analysis instrument.

[0043] In the embodiment, the detection cavity 200 is detachably connected with the resonator 100, so that the radio frequency detection device 201 can detect different resonators, realizing the flexibility of detection.

[0044] Please refer to Figure 2 The detection device 201 comprises: adjusting support arm 202, which is movably penetrated through the side wall of the detection cavity 200;Focusing electrode 203, which is detachably connected to one end of the adjusting support arm 202 located in the detection cavity 200.

[0045] In the embodiment, the focusing electrode 203 is used to simulate the environment of resonator in ion implanter.

[0046] In the embodiment, the number of the focusing electrode 203 is two.

[0047] In some embodiments of the utility model, the length of the adjusting support arm 202 is 25-30 cm, the length of the adjusting support arm 202 in the inner part of the detection cavity 200 is 10-15 cm, and the length of the detection cavity 200 is 30-45 cm.

[0048] In a specific embodiment, the length of the adjusting support arm 202 in the inner part of the detection cavity 200 is 14 cm.

[0049] Since the focusing electrode 203 is connected to the adjusting support arm 202, the focusing electrode 203 is also moved when the adjusting support arm 202 is moved, so that the distance between the focusing electrode 203 and the accelerating electrode is changed.

[0050] In some embodiments of the utility model, the accelerating electrode is located between adjacent focusing electrodes 203.

[0051] In some embodiments of the utility model, the materials of the focusing electrode 203 and the adjusting support arm 202 are aviation aluminum profiles.

[0052] In other embodiments of the utility model, the material of the focusing electrode is an electrical material, such as stainless steel or copper, to ensure good electrical conductivity and corrosion resistance.

[0053] The working principle between the accelerating electrode and the focusing electrode 203 is as follows: first, the ion source generates ions of a doping element, which are extracted by the extraction electrode; when the ions pass through the accelerating electrode area, they are accelerated to the required energy level under the action of a high-voltage electric field; the accelerated ion beam passes through the focusing electrode 203 area, and the voltage on the electrode is accurately controlled to form an appropriate electric field, thereby focusing the ion beam.

[0054] The utility model adjusts the distance between the accelerating electrode and the focusing electrode 203 by the telescopic movement of the adjusting support arm 202, and then adjusts the phase of the radio frequency, so that the amplitude of the accelerating electrode changes.

[0055] In the above scheme, the adjusting support arm 202 of the utility model is movably arranged through the side wall of the detection cavity 200, so that the adjusting support arm 202 can be telescopically arranged in the detection cavity 200, thereby adjusting the distance between the focusing electrode 203 and the resonator, simulating the environment in the ion implanter, and increasing the accuracy of the resonator installation position.

[0056] In some embodiments of the utility model, the radio frequency detection device 201 further includes: a fixed handle 204, which is sleeved on the adjusting support arm 202, and the fixed handle 204 is fixedly connected to the side wall of the detection cavity 200, the fixed handle 204 has a through hole (not shown in the figure); a fixing part 2041 is penetrated through the through hole and is extrudedly connected with the adjusting support arm 202.

[0057] The through hole has a threaded surface, the fixing part 2041 is a bolt, and the mutual engagement between the bolt and the threaded surface realizes the fastening extrusion connection.

[0058] In the above scheme, the fixing part 2041 is extrudedly connected with the adjusting support arm 202 in the utility model, so that the adjusting support arm 202 can be fixed in the detection cavity 200, the deviation of the detection result caused by the movement of the adjusting support arm 202 during the detection process is avoided, and the accuracy of the detection result is further increased.

[0059] In other embodiments, the adjusting support arm has a scale.

[0060] Specifically, the adjusting support arm 202 has a scale, and when the adjusting support arm 202 is stretched or retracted, the distance between the focusing electrode 203 and the acceleration electrode is determined by the part of the fixed handle 204 exposed outside.

[0061] The utility model sets a scale on the fixed handle 204, so that the length of the adjusting support arm 202 during stretching or retraction can be intuitively displayed, the environment in the ion implanter is more accurately simulated, and the accuracy of the installation position of the resonator is increased.

[0062] Please refer to Figure 3 The detection cavity 200 includes: a mounting interface 205 located on the upper surface of the detection cavity 200.

[0063] In some embodiments of the utility model, the radio frequency detection device 201 further includes: a plurality of fixed buckles 207, which are annularly arranged on the mounting interface 205, and the detection cavity 200 is detachably connected to the resonator through the fixed buckles 207; a front cover 206 is detachably connected to the detection cavity 200.

[0064] In some embodiments of the utility model, the number of fixed buckles 207 is greater than or equal to 3.

[0065] In this embodiment, the number of fixed buckles 207 is four.

[0066] When the number of the fixed buckles 207 is four, the stability of the connection between the resonator and the detection cavity can be ensured, and thus the safety and accuracy of the detection process can be ensured.

[0067] The fixed buckles 207 can ensure the stability of the position of the focusing electrode 203 during the radio frequency detection process of the resonator, that is, ensure the fixed capacitance value between the focusing electrode 203 and the accelerating electrode, so as to not affect the stability of the measurement result of the standing wave ratio analyzer or the vector network analyzer.

[0068] In the embodiment, the shape of the mounting interface 205 matches the shape of the resonant cavity, so that the resonant cavity can be connected with the radio frequency detection device 201.

[0069] In some embodiments of the utility model, the front cover 206 is detachably connected to the detection cavity 200 through bolts, when it is necessary to adjust the adjusting support arm 202, the front cover is opened, so that the distance between the focusing electrode 203 and the accelerating electrode can be clearly observed and adjusted, when the detection is carried out, the detection cavity 200 needs to maintain a sealed environment to increase the accuracy of the detection result.

[0070] In some embodiments of the utility model, the front cover 206 is connected with the detection cavity 200 through bolts.

[0071] In some embodiments of the utility model, the mounting interface 205 is provided with an O-shaped ring 2051, so that the resonator can be fixed on the detection cavity 200.

[0072] In the above scheme, the detection cavity 200 in the utility model is detachably connected with the resonator through the fixed buckle 207, the resonator and the detection cavity 200 are fixed, the resonator can be fixed on the radio frequency detection device 201, the deviation of the detection result caused by the movement of the resonator during the detection process is avoided, and thus the accuracy of the detection result is increased.

[0073] Please refer to any one of the focusing electrodes 203 in Figure 3 on the basis of Figure 4 , Figure 3 The focusing electrode 203 comprises a base 2031 which is detachably connected to one end of the adjusting support arm 202 in the detection cavity 200, and an electrode sheet 2032 which is fixedly connected to the base 2031, and the electrode sheet 2032 has a groove.

[0074] In some embodiments of the utility model, the electrode sheet 2032 is in the shape of a cylinder, the diameter of the electrode sheet 2032 is 7-9 cm, and the thickness of the electrode sheet 2032 is 1-3 cm.

[0075] In some embodiments of the present application, the thickness of the electrode sheet 2032 is 2 cm.

[0076] In other embodiments of the present application, the shape of the electrode sheet is annular or plate-shaped.

[0077] In some embodiments of the present application, the shape of the groove in the electrode sheet 2032 matches the shape of the accelerating electrode.

[0078] In this embodiment, the diameter of the groove in the electrode sheet 2032 is 1 cm to 4 cm, and the depth of the groove in the electrode sheet 2032 is 1 cm to 4 cm.

[0079] In some embodiments of the present application, the material of the base 2031 is an insulating material, which generally has good mechanical strength and high voltage resistance, and good insulation support is required between the electrode sheet 2032 and the adjusting support arm 202 to prevent electric field leakage and short circuit.

[0080] Please refer to Figure 5 , the resonator comprises a resonant cavity 101, an electric lead 102, an accelerating electrode 103 and a capacitor (not shown in the figure), wherein the electric lead 102 is located in the resonant cavity 101, the accelerating electrode 103 and the capacitor are located outside the resonant cavity 101, and the electric lead 102 is electrically connected with the accelerating electrode 103 and the capacitor.

[0081] In other embodiments of the present application, the material of the accelerating electrode is an electrical material, such as stainless steel or copper, to ensure good electrical conductivity and corrosion resistance.

[0082] In some embodiments of the present application, the shape of the accelerating electrode 103 is cylindrical.

[0083] In other embodiments of the present application, the shape of the accelerating electrode is annular or plate-shaped.

[0084] The resonator is a device or system capable of vibrating or oscillating at a specific frequency, and the resonator generally refers to a circuit component capable of storing energy and producing resonance at a specific frequency, such as an RLC resonant circuit

[0085] In this embodiment and other embodiments, the resonator further comprises a feed-in antenna, wherein the accelerating electrode is an output voltage terminal, the feed-in antenna is a radio frequency power input terminal, and the resonant cavity body controls the high and low of the output voltage through tuning.

[0086] In an embodiment of the utility model, the radio frequency detection device 201 is applied to a radio frequency type high-energy ion implanter, specifically, the radio frequency type high-energy ion implanter comprises an ion source, a mass spectrum screening instrument, a radio frequency acceleration unit, a beam scanning device and a target chamber, wherein the radio frequency acceleration unit comprises a combination of a plurality of focusing electrodes 203 and resonators, by means of the mode of accurately adjusting the phase of the resonator, the radio frequency acceleration structure can make the ion beam cascade accelerate in the electric field in time periods, by means of the mode of increasing the acceleration time to reduce the space, high-energy ion beams are obtained.

[0087] In the embodiment, the number of resonators is 12, and the radio frequency detection device 201 is used for detecting the 12 resonators respectively to obtain the resonance frequency and the standing wave ratio of the resonators in different environments.

[0088] In summary, the radio frequency detection device 201 in the utility model is arranged outside the ion implanter, the environment in the ion implanter is simulated through the detection device 201, the resonance frequency and the standing wave ratio of the resonator are detected before the resonator is installed into the ion implanter, specific parameters are obtained through the measuring device 300, and after the resonance frequency and the standing wave ratio meet the requirements of the ion implanter, the resonator is installed into the ion implanter, the precision of resonator installation is realized, the resonance frequency and the standing wave ratio of the resonator are adjusted in the relatively spacious radio frequency detection device, the maintenance efficiency of the ion implanter is improved, the damage of the sealing ceramic piece of the resonator caused by repeated installation is avoided, and the maintenance cost of the high-energy ion implanter is reduced.

[0089] Although the utility model discloses as above, the utility model is not limited to this. Any person skilled in the art, without departing from the spirit and scope of the utility model, can make various changes and modifications, therefore the protection scope of the utility model should be the range limited by the claims.

Claims

1. A radio frequency detection device for detecting the resonant frequency and standing wave ratio of a resonator before it is installed in an ion implanter, characterized in that, include: A detection cavity is provided, which is detachably connected to the resonator, and after the detection cavity is connected to the resonator, part of the resonator is located inside the detection cavity. The detection device is located inside the detection cavity; The measuring device is electrically connected to the resonator.

2. The radio frequency detection device as described in claim 1, characterized in that, The detection device includes: an adjustable support arm that extends through the side wall of the detection cavity; and a focusing electrode that is detachably connected to one end of the adjustable support arm located inside the detection cavity.

3. The radio frequency detection device as described in claim 2, characterized in that, The focusing electrode includes: a substrate, detachably connected to one end of the adjustment support arm located in the detection cavity; and an electrode sheet, fixedly connected to the substrate, wherein the electrode sheet has a groove.

4. The radio frequency detection device as described in claim 3, characterized in that, The electrode sheet is cylindrical in shape, with a diameter ranging from 7 cm to 9 cm, a thickness ranging from 1 cm to 3 cm, a groove within the electrode sheet with a diameter ranging from 1 cm to 4 cm, and a groove within the electrode sheet with a depth ranging from 1 cm to 4 cm.

5. The radio frequency detection device as described in claim 3, characterized in that, The length of the adjustable support arm ranges from 25 cm to 30 cm, the length of the portion of the adjustable support arm located inside the detection cavity ranges from 10 cm to 15 cm, and the length of the detection cavity ranges from 30 cm to 45 cm.

6. The radio frequency detection device as described in claim 3, characterized in that... The focusing electrode, the adjusting support arm, and the detection cavity are made of aerospace aluminum profiles.

7. The radio frequency detection device as described in claim 3, characterized in that, Also includes: A fixed handle is sleeved on the adjusting support arm and fixedly connected to the side wall of the detection cavity. The fixed handle has a through hole. A fastener extends through the through hole and is press-fitted to the adjusting support arm.

8. The radio frequency detection device as described in claim 7, characterized in that, The through hole has a threaded surface, and the fastener is a bolt. The bolt and the threaded surface engage to achieve a tight and compression connection.

9. The radio frequency detection device as described in claim 7, characterized in that, The adjustable support arm has a scale.

10. The radio frequency detection device as described in claim 1, characterized in that, The detection cavity includes an installation interface located on the upper surface of the detection cavity.

11. The radio frequency detection device as described in claim 10, characterized in that, An O-ring is provided at the installation interface.

12. The radio frequency detection device as described in claim 10, characterized in that, Also includes: Several fixing buckles are arranged around the mounting interface, and the detection cavity is detachably connected to the resonator through the fixing buckles; The front cover is detachably connected to the detection chamber.

13. The radio frequency detection device as described in claim 12, characterized in that, The number of the fixing buckles is greater than or equal to 3.

14. The radio frequency detection device as described in claim 12, characterized in that, The front cover is connected to the detection cavity by bolts.

15. The radio frequency detection device as claimed in claim 1, characterized in that, The measuring device is a standing wave ratio (SWR) meter or a network vector analysis instrument.

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