Jig for preventing seed crystal from sliding

Abstract

The utility model relates to a jig for preventing a seed crystal from sliding, which relates to the technical field of crystal growth devices and comprises a limiting piece and a pressing block, a vertically through accommodating part is arranged in the limiting piece, the bottom of the accommodating part is matched with a crucible upper cover in size and shape, and the top of the accommodating part is matched with the pressing block in size and shape. And a buffer layer is also arranged between the pressing block and the seed crystal. According to the utility model, the production problems of deviation and non-uniform solidification of the seed crystal when the seed crystal is bonded with the graphite paper in a hot pressing manner can be solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to crystal growth device technical field especially relates to a jig of preventing seed crystal from sliding. BACKGROUND

[0002] The seed crystal adheres graphite paper after the glue film sintering solidification process is a key process in the preparation of semiconductor materials. The main steps of the process include: the seed crystal is fixed on the graphite paper by adhesive method, and then the seed crystal and the graphite paper are heat pressed by using a heat pressing tray, so that the glue film is solidified, thereby realizing the close adhesion of the seed crystal and the graphite paper. This process is crucial to ensure the stability and quality of the seed crystal in the subsequent crystal growth process.

[0003] However, the current process used is to directly use the heat pressing tray to heat press the seed crystal onto the graphite paper, so the following problems are prone to occur: 1) the seed crystal deviates: when the heat pressing tray is used to apply pressure to the seed crystal, the seed crystal is prone to sliding due to the small friction of the glue film before solidification, and then the heat pressing stress is uneven, affecting the adhesion quality; 2) uneven solidification: during the heat pressing process, there is no jig to keep the periphery warm, resulting in a large temperature difference between the central region and the edge region, causing uneven solidification and bubbles. SUMMARY

[0004] In order to overcome the defects of the prior art, the technical problem to be solved by the utility model is to provide a jig for preventing seed crystal from sliding, which can solve the production problems of seed crystal deviation and uneven solidification during heat pressing and adhesion of graphite paper.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] The jig for preventing seed crystal from sliding provided by the utility model comprises a limiting piece and a pressing block, a through accommodating part is arranged in the limiting piece, the size and shape of the bottom of the accommodating part and the upper cover of the crucible are matched, the size and shape of the top of the accommodating part and the pressing block are matched, and a buffer layer is further arranged between the pressing block and the seed crystal.

[0007] The preferred technical solution of the utility model is that a first heat preservation layer is further arranged between the pressing block and the seed crystal.

[0008] The preferred technical solution of the utility model is that the limiting piece is further provided with a second heat preservation layer.

[0009] The preferred technical solution of the utility model is that the flatness of the pressing block is less than or equal to 5um.

[0010] The preferred technical solution of the utility model is that the shape of the limiting piece is cylindrical.

[0011] The preferred technical solution of the utility model is that the material of the limiting piece is graphite.

[0012] The utility model discloses preferably technical scheme is at, the material of pressure block is 316 stainless steel.

[0013] The utility model discloses preferably technical scheme is at, the buffer layer is graphite soft felt.

[0014] The utility model discloses the beneficial effect:

[0015] The utility model discloses a prevent seed crystal from sliding's tool, through setting up the stopper that restricts crucible upper cover and pressure block horizontal direction removal, and the buffer layer is set up between pressure block and seed crystal, and its bottom is according to the profile design of crucible upper cover, has guaranteed that the tool can be firmly attached to the crucible upper cover when installing, has effectively limited the removal of tool in vertical direction, has provided stable reference surface for the positioning of seed crystal, and the top of containing portion is closely matched with the shape and size of pressure block, and the buffer layer is as the medium of pressure transmission, can absorb and disperse part of impact force that pressure block applies, prevents seed crystal from deviating because of direct pressure. DRAWINGS

[0016] In order to more clearly illustrate the technical scheme in the embodiment of the utility model or prior art, the following will briefly introduce the drawing needed to be used in the embodiment or prior art description, and obviously, the drawing in the following description is only some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained according to these drawings without paying the creative labor.

[0017] Figure 1 It is the use assembly schematic drawing of the tool of preventing seed crystal from sliding of embodiment one;

[0018] Figure 2 It is the perspective view of the tool of preventing seed crystal from sliding of embodiment one;

[0019] Figure 3 It is the plan view of the tool of preventing seed crystal from sliding of embodiment one;

[0020] Figure 4 It is Figure 3 The sectional view along A-A direction;

[0021] Figure 5 It is the perspective view of the stopper of embodiment one.

[0022] In the drawing:

[0023] 1-stop piece;2-pressure block;3-containing portion;4-crucible upper cover;5-seed crystal;6-buffer layer;7-graphite paper. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments of the present application, all the other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0025] In the description of the present application, it should be noted that the orientations or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, unless explicitly specified and limited, the terms "mounting", "connection", "connecting" should be understood broadly, for example, can be fixed connection, can also be detachable connection, or integral connection; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0026] Embodiment one

[0027] As Figures 1-5As shown, the jig for preventing seed crystal sliding provided in the embodiment includes a limiting piece 1 and a pressing block 2. The limiting piece 1 is provided with a through upper and lower accommodating part 3. The bottom of the accommodating part 3 and the size and shape of the crucible upper cover 4 are matched. The top of the accommodating part 3 and the size and shape of the pressing block 2 are matched. The pressing block 2 and the seed crystal 5 are further provided with a buffer layer 6. Specifically, the through upper and lower accommodating part built in the limiting piece, which is accurately matched in shape and size, plays a core role: the bottom is designed according to the profile of the crucible upper cover, which ensures that the jig can be firmly attached to the crucible upper cover when installed, effectively limiting the movement of the jig in the vertical direction, and providing a stable reference surface for the positioning of the seed crystal; while the top of the accommodating part is closely matched with the shape and size of the pressing block. Such design not only enables the pressing block to accurately align the seed crystal position to apply pressure, but also reduces the loss in the process of pressure transmission through the close contact surface, ensuring the uniformity of pressure distribution. Further, the buffer layer added between the pressing block and the seed crystal serves as a medium for pressure transmission, which can not only absorb and disperse part of the impact force exerted by the pressing block, preventing the seed crystal from deviating due to direct pressure, but also ensure that the pressure on the surface of the seed crystal is softer and more uniform through its elastic properties, which helps the uniform curing of the adhesive between the graphite paper and the seed crystal, avoiding the deviation problem of the seed crystal caused by excessive local pressure. In summary, the present scheme solves the problems of deviation and uneven curing in the process of seed crystal hot-pressing bonding through the accurate matching of the limiting piece, the accurate pressure of the pressing block and the soft transmission of the buffer layer, and the three work together to fundamentally solve the problems of deviation and uneven curing in the process of seed crystal hot-pressing bonding, significantly improving the production efficiency and product quality.

[0028] During the hot-pressing process, if the jig does not provide heat preservation to the periphery, the temperature difference between the middle region and the edge region is large, resulting in uneven curing and bubbles. Preferably, a first heat preservation layer is further provided between the pressing block 2 and the seed crystal 5. During the hot-pressing bonding process, the seed crystal needs to maintain a certain temperature to ensure the effective curing of the adhesive. The presence of the first heat preservation layer can effectively reduce the loss of heat during the transmission process from the pressing block to the seed crystal, maintaining the stability of the temperature around the seed crystal. This not only helps the adhesive to cure uniformly and quickly, but also avoids the change of internal stress of the seed crystal caused by temperature fluctuation, thereby reducing the risk of seed crystal sliding due to temperature change. Further, the buffer layer 6 is graphite soft felt. As a buffer layer, graphite soft felt has the effect of a first heat preservation layer. Graphite soft felt has excellent flexibility and elasticity, which can play a good buffering role when the pressing block exerts pressure, protecting the seed crystal from direct impact and damage. At the same time, the good heat preservation performance and thermal stability of graphite soft felt can maintain stable physical and chemical properties in high temperature environment, and will not deform or fail due to temperature change. These characteristics not only effectively prevent the deviation of the seed crystal caused by uneven stress during the hot-pressing process, but also improve the overall heat preservation efficiency and stability of the jig.

[0029] Preferably, the shape of the limiting piece 1 is cylindrical. The cylindrical limiting piece not only has the advantages of simple structure, easy processing and installation, but also can provide stable support and positioning for the seed crystal during hot pressing.

[0030] Preferably, the limiting piece 1 is also provided with a second heat preservation layer. As a key component of the jig, the temperature stability of the limiting piece directly affects the positioning accuracy and bonding effect of the seed crystal. The second heat preservation layer can effectively isolate the influence of the external environment on the temperature of the limiting piece, maintain the constant temperature inside the limiting piece, and thus ensure that the seed crystal is always in an ideal temperature environment during hot pressing. This not only helps to reduce the thermal stress of the seed crystal caused by temperature changes, but also avoids the problem of seed crystal deviation caused by temperature gradient. Further, the material of the limiting piece 1 is graphite. Graphite has excellent heat preservation performance and thermal stability, and can maintain stable physical and chemical properties in a high temperature environment without deformation or damage due to temperature changes. At this time, the limiting piece itself acts as a second heat preservation layer. These characteristics make graphite an ideal choice for the material of the limiting piece, which not only effectively prevents the seed crystal from deviating during hot pressing due to temperature changes, but also improves the overall thermal efficiency and stability of the jig.

[0031] Preferably, the flatness of the pressing block 2 is less than or equal to 5um. As a component that directly acts on the seed crystal, the flatness of the surface of the pressing block directly affects the uniformity of the stress on the seed crystal and the bonding effect. A pressing block with high flatness can ensure that the pressure distribution on the surface of the seed crystal is more uniform when pressure is applied, avoiding damage or deviation of the seed crystal caused by excessive local pressure. In addition, a pressing block with high flatness can also increase the contact area between the adhesive and the seed crystal, enhance the bonding strength, and ensure the stability and reliability of the bonding effect. Further, the material of the pressing block 2 is 316 stainless steel. 316 stainless steel has excellent corrosion resistance and high temperature resistance and will not deform or be damaged due to corrosion or high temperature.

[0032] The assembly method of the present embodiment is as follows: the seed crystal 5 is bonded to the graphite paper 7, the seed crystal 5 is placed in the middle of the crucible cover 4 with the seed crystal 5 facing up, the limiting piece 1 is assembled to calibrate the position of the seed crystal 5 and prevent the seed crystal from sliding during hot pressing, the buffer layer 6, i.e. the graphite soft felt, is covered to provide heat preservation and reduce the temperature difference between the middle and the edge of the seed crystal. The pressing block 2 with high flatness and the graphite soft felt press the seed crystal 5 to make it bear uniform stress, ensuring that the thickness of the solidified glue film is uniform, and after hot pressing, the jig of the present embodiment can be easily disassembled and replaced, reducing the cooling time of the equipment and improving the utilization rate of the equipment.

[0033] The utility model discloses the description through the preferred embodiment, and the person skilled in the art knows that various changes or equivalent replacement can be made to these features and embodiments without departing from the spirit and scope of the utility model. The utility model is not limited by the specific embodiments disclosed here, and other embodiments falling within the claims of the present application all belong to the scope of protection of the utility model.

Claims

1. A fixture for preventing seed crystal slippage, characterized in that: It includes a limiting member (1) and a pressing block (2). The limiting member (1) has a through-hole receiving part (3). The bottom of the receiving part (3) matches the size and shape of the crucible cover (4), and the top of the receiving part (3) matches the size and shape of the pressing block (2). A buffer layer (6) is also provided between the pressing block (2) and the seed crystal (5).

2. The fixture for preventing seed crystal slippage according to claim 1, characterized in that: A first heat insulation layer is also provided between the pressing block (2) and the seed crystal (5).

3. The fixture for preventing seed crystal slippage according to claim 1, characterized in that: The limiting component (1) is also provided with a second heat insulation layer.

4. The fixture for preventing seed crystal slippage according to claim 1, characterized in that: The flatness of the pressing block (2) is less than or equal to 5 μm.

5. The fixture for preventing seed crystal slippage according to claim 1, characterized in that: The limiting member (1) is cylindrical in shape.

6. The fixture for preventing seed crystal slippage according to claim 1, characterized in that: The limiting member (1) is made of graphite.

7. The fixture for preventing seed crystal slippage according to claim 1, characterized in that: The material of the pressure block (2) is 316 stainless steel.

8. The fixture for preventing seed crystal slippage according to claim 1, characterized in that: The buffer layer (6) is a graphite felt.

Images