Diaphragm adjusting device and detection equipment

Abstract

The utility model discloses a diaphragm adjusting device and detection equipment, and relates to the technical field of semiconductors, and the diaphragm adjusting device comprises a fixed seat, a deflection adjusting seat, a driving seat and a diaphragm assembly. The deflection adjusting seat is connected with the fixing seat, and an axial adjusting mechanism is arranged on the fixing seat and used for adjusting the assembling distance between the deflection adjusting seat and the fixing seat; the driving seat is mounted on the deflection adjusting seat, and a jacking and pulling mechanism is arranged on the deflection adjusting seat and used for adjusting the assembling angle of the driving seat in the first direction of the vertical plane; the diaphragm assembly is installed on the driving seat so that the driving seat can drive the diaphragm assembly to move linearly, a deflection adjusting mechanism is arranged on the deflection adjusting seat and used for adjusting the assembling angle of the diaphragm assembly in the second direction of the vertical plane, and the second direction is perpendicular to the first direction. According to the diaphragm adjusting device provided by the invention, the adjustability of the diaphragm can be realized through the top pulling mechanism, the deflection adjusting mechanism and the axial adjusting mechanism, and the optical effect is ensured.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and more specifically, to an aperture adjustment device and a detection device. Background Technology

[0002] In the semiconductor manufacturing field, the aperture plays a crucial role in the semiconductor manufacturing process. As one of the key components ensuring the stability and accuracy of the measurement system, the orientation and position of the aperture are among the most important factors in guaranteeing optical performance.

[0003] Therefore, how to achieve the adjustability of the aperture and ensure the optical effect has become a technical problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0004] In view of this, the purpose of this application is to provide an aperture adjustment device to achieve the adjustability of the aperture and ensure optical effect.

[0005] Another objective of this application is to provide a detection device having the aforementioned aperture adjustment device.

[0006] To achieve the above objectives, this application provides the following technical solution:

[0007] An aperture adjustment device, comprising:

[0008] Fixed base;

[0009] A deflection adjustment seat is connected to a fixed seat. An axial adjustment mechanism is provided on the fixed seat. The axial adjustment mechanism is used to adjust the assembly distance between the deflection adjustment seat and the fixed seat.

[0010] A drive seat is mounted on the deflection adjustment seat, and the deflection adjustment seat is provided with a top-pull mechanism, which is used to adjust the assembly angle of the drive seat in the first direction of the vertical plane.

[0011] An aperture assembly is mounted on the drive seat so that the drive seat drives the aperture assembly to move in a straight line. The deflection adjustment seat is provided with a deflection adjustment mechanism for adjusting the assembly angle of the aperture assembly in a second direction in the vertical plane, the second direction being perpendicular to the first direction.

[0012] Optionally, in the above-mentioned aperture adjustment device, the top-pull mechanism includes a top-pull adjustment screw and a first locking member. The top-pull adjustment screw passes through the deflection adjustment seat and is threadedly engaged with the drive seat to adjust the assembly angle of the drive seat in a first direction of the vertical plane. The first locking member is used to lock the adjustment position of the drive seat.

[0013] Optionally, in the diaphragm adjusting device, the deflection adjusting seat has two rotation axes arranged perpendicularly to each other, and at least one top-pulling adjusting screw is arranged on each side of each rotation axis.

[0014] Optionally, in the diaphragm adjusting device, the deflection adjusting mechanism comprises a deflection adjusting screw and a second locking member, the deflection adjusting screw passes through the deflection adjusting seat and is threadedly connected with the diaphragm assembly to adjust the assembly angle of the diaphragm assembly in the second direction of the vertical plane, and the second locking member is used to lock the adjusting position of the diaphragm assembly.

[0015] Optionally, in the diaphragm adjusting device, the deflection adjusting mechanism comprises at least two deflection adjusting screws, and each deflection adjusting screw is arranged on the deflection adjusting seat in a spaced manner.

[0016] Optionally, in the diaphragm adjusting device, the axial adjusting mechanism comprises an axial adjusting screw, and the axial adjusting screw passes through the fixing seat and is threadedly connected with the deflection adjusting seat to adjust the assembly distance between the deflection adjusting seat and the fixing seat.

[0017] Optionally, in the diaphragm adjusting device, the fixing seat is provided with a mounting hole for mounting the axial adjusting screw, and an opening is arranged on the peripheral wall of the mounting hole to facilitate the mounting of the axial adjusting screw.

[0018] Optionally, in the diaphragm adjusting device, the axial adjusting mechanism further comprises a guide assembly, the guide assembly comprises a guide waist hole arranged on the deflection adjusting seat and a guide shaft matched with the guide waist hole, the length direction of the guide waist hole is parallel to the adjusting direction of the axial adjusting screw, and the guide shaft is arranged on the mounting plate of the detection equipment.

[0019] Optionally, in the diaphragm adjusting device, the diaphragm assembly comprises a mounting seat and a diaphragm sheet arranged on the mounting seat, the mounting seat is mounted on the driving seat, and the deflection adjusting mechanism is used to adjust the assembly angle of the mounting seat in the second direction of the vertical plane.

[0020] Optionally, in the diaphragm adjusting device, the mounting seat comprises a connecting portion and a mounting portion, the mounting portion is located on one side of the connecting portion, the connecting portion is connected with the driving seat through a fastener, the mounting portion is provided with a mounting groove for mounting the diaphragm sheet, and the diaphragm sheet is bonded in the mounting groove.

[0021] Optionally, in the diaphragm adjusting device, the diaphragm sheet is provided with a plurality of light passing holes with different diameters, and the center connecting line of each light passing hole is parallel to the movement direction of the driving seat.

[0022] Optionally, in the abovementioned diaphragm adjusting device, the deflection adjusting base comprises a base and a deflection support;

[0023] The deflection support is fixed to the base by a fastener and extends from one side of the base, and the fixing base is located on the same side of the base as the deflection support, so that the fixing base, the base and the deflection support form an installation space for accommodating the driving base and the diaphragm assembly;

[0024] The top-pulling mechanism is arranged on the side of the base away from the fixing base, and the deflection adjusting mechanism is arranged on the deflection support.

[0025] A detection device comprising the diaphragm adjusting device according to any one of the preceding items.

[0026] The diaphragm adjusting device provided by the present application can realize multi-degree-of-freedom adjustment of the diaphragm assembly through the top-pulling mechanism, the deflection adjusting mechanism and the axial adjusting mechanism, so as to realize the adjustability of the diaphragm sheet and ensure the optical effect.

[0027] The technical features mentioned above, the technical features to be mentioned below and the technical features shown in the drawings alone can be combined with each other arbitrarily, as long as the combined technical features are not contradictory. All feasible combinations of features are explicitly described herein. Any one of the multiple sub-features contained in the same sentence can be applied independently, and does not have to be applied together with other sub-features. BRIEF DESCRIPTION OF DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or prior art description will be briefly introduced. Obviously, the drawings in the following description only belong to the embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative effort on the basis of the provided drawings.

[0029] Figure 1 Structure diagram of the light barrier adjusting device provided by the embodiment of the present application Figure 1

[0030] Figure 2 Structure diagram of the light barrier adjusting device provided by the embodiment of the present application Figure 2

[0031] Figure 3 Structure diagram of the deflection adjusting seat provided by the embodiment of the present application.

[0032] Among them, 100 is a fixed seat, 101 is an axial adjusting mechanism, 1011 is an axial adjusting screw, 1012 is an opening, 102 is a guide assembly, 1021 is a guide waist hole, and 1022 is a guide shaft;

[0033] 200 is a deflection adjusting seat, 201 is a top-pulling mechanism, 2011 is a top-pulling adjusting screw, 2012 is a first locking piece, 2013 is a first rotation axis, 2014 is a second rotation axis, 2015 is a third rotation axis, 2016 is a first screw, 2017 is a second screw, 2018 is a third screw, 2019 is a fourth screw, 202 is a deflection adjusting mechanism, 2021 is a deflection adjusting screw, 2022 is a second locking piece, 203 is a base, 2031 is a first connecting part, 2032 is a second connecting part, 204 is a deflection support, and 205 is a mounting space;

[0034] 300 is a driving seat;

[0035] 400 is a light barrier assembly, 401 is a mounting seat, 4011 is a connecting part, 4012 is a mounting part, 4013 is a mounting groove, 402 is a light barrier sheet, and 4021 is a light passing hole. DETAILED DESCRIPTION

[0036] The core of the present application is to provide a light barrier adjusting device to realize the adjustability of the light barrier sheet and ensure the optical effect.

[0037] Another core of the present application is to provide a detection device with the above light barrier adjusting device.

[0038] ​​With reference to the accompanying drawings, the technical solutions in the embodiments of the present application will be described clearly and completely. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all the other embodiments obtained by those of ordinary skill in the art without creative effort belong to the scope of the present application.

[0039] In the field of semiconductor manufacturing, the diaphragm sheet plays a vital role in the semiconductor manufacturing process. As one of the key components to ensure the stability and accuracy of the measurement system, the diaphragm sheet plays an important role in controlling the propagation of light, adjusting the range of incident light, controlling the intensity and distribution of light, determining the image plane illumination and field of view, and meeting the high-precision measurement requirements. The attitude position of the diaphragm sheet is one of the most important factors to ensure the optical effect.

[0040] Therefore, as shown in Figure 1 The diaphragm adjusting device disclosed in the embodiments of the present application comprises a fixing seat 100, a deflection adjusting seat 200, a driving seat 300 and a diaphragm assembly 400. The diaphragm assembly 400 can be adjusted in multiple degrees of freedom through the top-pulling mechanism 201, the deflection adjusting mechanism 202 and the axial adjusting mechanism 101, so that the diaphragm sheet 402 can be adjusted to the appropriate attitude position, thereby ensuring the optical effect.

[0041] The diaphragm adjusting device disclosed in the embodiments of the present application will be explained and described in detail below. Figure 1 Figure 3 The diaphragm adjusting device disclosed in the embodiments of the present application will be explained and described in detail below.

[0042] The diaphragm adjusting device disclosed in the embodiments of the present application will be explained and described in detail below. Figure 1 Figure 2 ​​As shown, the fixing base 100 can be fixedly connected with a mounting plate of the detection device, the diaphragm assembly 400 is installed on the driving base 300, so that the driving base 300 can drive the diaphragm assembly 400 to move linearly, and the driving base 300 is installed on the deflection adjusting base 200, and the deflection adjusting base 200 is connected with the fixing base 100. In addition, an axial adjusting mechanism 101 can be arranged on the fixing base 100, so that the assembly distance between the deflection adjusting base 200 and the fixing base 100 can be adjusted through the axial adjusting mechanism 101. Meanwhile, a top-pulling mechanism 201 is arranged on the deflection adjusting base 200, so that the assembly angle of the driving base 300 in a first direction of the vertical plane can be adjusted through the top-pulling mechanism 201. Moreover, a deflection adjusting mechanism 202 is arranged on the deflection adjusting base 200, so that the assembly angle of the diaphragm assembly 400 in a second direction of the vertical plane can be adjusted through the deflection adjusting mechanism 202, and the second direction is perpendicular to the first direction, so as to realize multi-degree-of-freedom adjustment of the diaphragm assembly 400, and further realize the adjustability of the diaphragm sheet 402, so that the diaphragm sheet 402 can be adjusted to a suitable attitude position and optical effect is ensured. It should be noted that the driving base 300 can adopt a linear motor, so that the diaphragm assembly 400 can be driven by the driving base 300 to move linearly.

[0043] When the diaphragm assembly 400 is assembled and adjusted, the assembly angle of the driving base 300 in a first direction of the vertical plane can be adjusted through the top-pulling mechanism 201 on the deflection adjusting base 200, that is, the driving base 300 can be adjusted through the top-pulling mechanism 201 in RX roll adjustment or RY pitch adjustment. Since the diaphragm assembly 400 is installed on the driving base 300, the diaphragm assembly 400 can be driven by the driving base 300 to be adjusted in RX roll adjustment or RY pitch adjustment, so as to realize the adjustment of the assembly angle of the diaphragm assembly 400 in the first direction of the vertical plane. Moreover, the assembly angle of the diaphragm assembly 400 in a second direction of the vertical plane can be adjusted through the deflection adjusting mechanism 202 on the deflection adjusting base 200, that is, the diaphragm assembly 400 can be adjusted through the deflection adjusting mechanism 202 in RZ yaw adjustment, so as to realize the adjustment of the assembly angle of the diaphragm assembly 400 in the second direction of the vertical plane. The assembly distance between the deflection adjusting base 200 and the fixing base 100 can be adjusted through the axial adjusting mechanism 101 on the fixing base 100, that is, the deflection adjusting base 200 can be adjusted along the Z axis through the axial adjusting mechanism 101, so as to realize the axial adjustment of the diaphragm assembly 400, until the diaphragm assembly 400 is adjusted to a suitable attitude position and optical effect is ensured. It should be noted that “RX” refers to rotation around the X axis, and similarly, “RY” refers to rotation around the Y axis, and “RZ” refers to rotation around the Z axis.

[0044] From the above embodiments, it can be seen that the RX, RY, RZ and Z multi-degree of freedom adjustment of the diaphragm assembly 400 can be realized through the top-pulling mechanism 201, the deflection adjustment mechanism 202 and the axial adjustment mechanism 101, so as to realize the adjustability of the diaphragm sheet 402, and the diaphragm sheet 402 can be adjusted to a suitable attitude position, thereby ensuring the optical effect.

[0045] In some embodiments, as shown in Figures 1 to 3 The deflection adjustment seat 200 can include a base 203 and a deflection bracket 204. The deflection bracket 204 is fixed to the base 203 by fasteners such as bolts and extends out of one side of the base 203. The fixing seat 100 and the deflection bracket 204 are located on the same side of the base 203, so that the fixing seat 100, the base 203 and the deflection bracket 204 form an installation space 205 for accommodating the driving seat 300 and the diaphragm assembly 400. The driving seat 300 and the diaphragm assembly 400 can be installed in the installation space 205. In addition, the top-pulling mechanism 201 is arranged on the side of the base 203 away from the fixing seat 100, so as to adjust the assembly angle of the driving seat 300 in the first direction of the vertical plane. The deflection adjustment mechanism 202 is arranged on the deflection bracket 204, so as to adjust the assembly angle of the diaphragm assembly 400 in the second direction of the vertical plane.

[0046] In some embodiments, as shown in Figure 1 and Figure 2 The base 203 can adopt an L-shaped structure. For the convenience of understanding, the two connecting parts of the base 203 are defined as a first connecting part 2031 and a second connecting part 2032, and the first connecting part 2031 and the second connecting part 2032 are arranged perpendicular to each other. The deflection bracket 204 is fixed to the end of the first connecting part 2031 of the base 203 away from the second connecting part 2032 by fasteners such as bolts, and the deflection bracket 204 extends out of the side of the first connecting part 2031 away from the second connecting part 2032. At the same time, the fixing seat 100 and the deflection bracket 204 are located on the same side of the first connecting part 2031. The driving seat 300 and the diaphragm assembly 400 are located between the fixing seat 100 and the deflection bracket 204 on the same side of the fixing seat 100. The top-pulling mechanism 201 is arranged on the side of the first connecting part 2031 away from the fixing seat 100, i.e. the top-pulling mechanism 201 is arranged on the first connecting part 2031 and located on the same side of the second connecting part 2032, so as to adjust the assembly angle of the driving seat 300 in the first direction of the vertical plane. The deflection adjustment mechanism 202 is arranged on the deflection bracket 204, so as to adjust the assembly angle of the diaphragm assembly 400 in the second direction of the vertical plane.

[0047] In some embodiments, in order to facilitate the top-pulling mechanism 201 to adjust the assembly angle of the driving seat 300 in the first direction of the vertical plane, as shown in Figure 2 andFigure 3 As shown, the top-pull mechanism 201 may include a top-pull adjusting screw 2011 and a first locking member 2012. The top-pull adjusting screw 2011 passes through the deflection adjusting seat 200 and is threadedly connected to the drive seat 300. By rotating the top-pull adjusting screw 2011, the length by which the top-pull adjusting screw 2011 is screwed into the drive seat 300 can be adjusted, thereby adjusting the distance between the drive seat 300 and the first connecting portion 2031 of the base 203 at that position, thus adjusting the assembly angle of the drive seat 300 in the first direction of the vertical plane. Simultaneously, the first locking member 2012 may be a bolt or other fastener to lock the adjusted drive seat 300.

[0048] like Figure 3 As shown, the deflection adjustment seat 200 may have two mutually perpendicular rotating axes 2013, so that the drive seat 300 can be rotated and adjusted around the two rotating axes 2013 respectively, thereby realizing the adjustment of the assembly angle of the drive seat 300 in the first direction of the vertical plane. In order to realize the rotation adjustment of the drive seat 300 around the two rotating axes 2013 in the vertical plane, at least one top-pull adjusting screw 2011 is provided on both sides of each rotating axis 2013. For ease of understanding, the two rotating axes 2013 are defined as the first rotating axis 2014 and the second rotating axis 2015 respectively, and the first rotating axis 2014 and the second rotating axis 2015 are perpendicular to each other.

[0049] In some embodiments, a top-pull adjusting screw 2011 may be respectively provided on both sides of the first rotating axis 2014. The two top-pull adjusting screws 2011 may be provided on the second rotating axis 2015, so that by rotating the top-pull adjusting screws 2011 on both sides of the first rotating axis 2014, the drive seat 300 can be rotated around the first rotating axis 2014, that is, the drive seat 300 rotates around the X-axis. At the same time, since both top-pull adjusting screws 2011 are located on the second rotating axis 2015, the stability of the assembly angle adjustment of the drive seat 300 around the first rotating axis 2014 can be guaranteed. Similarly, a top-pull adjusting screw 2011 can be respectively provided on both sides of the second rotating axis 2015, and the two top-pull adjusting screws 2011 can be set on the first rotating axis 2014. Thus, by rotating the top-pull adjusting screws 2011 on both sides of the second rotating axis 2015, the drive seat 300 can be rotated around the second rotating axis 2015, that is, the drive seat 300 rotates around the Y-axis. At the same time, since the two top-pull adjusting screws 2011 are both located on the first rotating axis 2014, the stability of the assembly angle adjustment of the drive seat 300 around the second rotating axis 2015 can be guaranteed.

[0050] In some embodiments, such as Figure 3As shown, the first connecting portion 2031 of the base 203 can adopt a structure similar to a rectangle, the first rotation axis 2014 and the second rotation axis 2015 can be parallel to two adjacent sides of the first connecting portion 2031 respectively, the top-pulling adjusting screw 2011 can include four, and the four top-pulling adjusting screws 2011 can be arranged at four corners of the first connecting portion 2031 respectively. For the convenience of understanding, the four top-pulling adjusting screws 2011 are defined as a first screw 2016, a second screw 2017, a third screw 2018 and a fourth screw 2019 respectively. Among them, the first screw 2016 and the second screw 2017 can be symmetrically arranged about the first rotation axis 2014, and the third screw 2018 and the fourth screw 2019 can be symmetrically arranged about the first rotation axis 2014, and the first screw 2016 and the fourth screw 2019 can be symmetrically arranged about the second rotation axis 2015, and the second screw 2017 and the third screw 2018 can be symmetrically arranged about the second rotation axis 2015.

[0051] When it is necessary to adjust the assembly angle of the driving seat 300 about the first rotation axis 2014, i.e. about the X-axis, the first screw 2016 and the fourth screw 2019 can be screwed in the same direction, i.e. the screwing directions of the first screw 2016 and the fourth screw 2019 are the same, and the second screw 2017 and the third screw 2018 are screwed in opposite directions, i.e. the screwing directions of the second screw 2017 and the third screw 2018 are the same, and the screwing directions of the second screw 2017 and the third screw 2018 are opposite to those of the first screw 2016 and the fourth screw 2019, so that the driving seat 300 can be rotated about the first rotation axis 2014, so as to adjust the assembly angle of the driving seat 300 about the first rotation axis 2014.

[0052] When it is necessary to adjust the assembly angle of the driving seat 300 about the second rotation axis 2015, i.e. about the Y-axis, the first screw 2016 and the second screw 2017 can be screwed in the same direction, i.e. the screwing directions of the first screw 2016 and the second screw 2017 are the same, and the third screw 2018 and the fourth screw 2019 are screwed in opposite directions, i.e. the screwing directions of the third screw 2018 and the fourth screw 2019 are the same, and the screwing directions of the third screw 2018 and the fourth screw 2019 are opposite to those of the first screw 2016 and the second screw 2017, so that the driving seat 300 can be rotated about the second rotation axis 2015, so as to adjust the assembly angle of the driving seat 300 about the second rotation axis 2015.

[0053] It should be noted that in the above embodiment, only the top-pulling adjusting screw 2011 on one side of the first rotation axis 2014 can be screwed to adjust the assembly angle of the driving seat 300 around the first rotation axis 2014, and only the top-pulling adjusting screw 2011 on one side of the second rotation axis 2015 can be screwed to adjust the assembly angle of the driving seat 300 around the second rotation axis 2015. Of course, the four top-pulling adjusting screws 2011 can be screwed simultaneously in the same direction to adjust the assembly distance between the driving seat 300 and the first connecting part 2031 of the base 203, that is, the driving seat 300 can be adjusted along the Z-axis direction. Alternatively, the first screw 2016 and the third screw 2018 can be adjusted simultaneously to adjust the deflection of the driving seat 300, and the second screw 2017 and the fourth screw 2019 can be adjusted simultaneously to adjust the deflection of the driving seat 300. The specific adjustment mode of the driving seat 300 can be determined according to the actual assembly situation.

[0054] In the above embodiment, three or more top-pulling adjusting screws 2011 can be arranged on each side of the rotation axis 2013, which is not limited herein.

[0055] In some embodiments, in order to facilitate the deflection adjustment mechanism 202 to adjust the assembly angle of the diaphragm assembly 400 in the second direction of the vertical plane, as shown in Figure 1 The deflection adjustment mechanism 202 can include a deflection adjustment screw 2021 and a second locking member 2022. The deflection adjustment screw 2021 can pass through the deflection support 204 of the deflection adjustment seat 200 and be threadedly connected with the diaphragm assembly 400 between the deflection support 204 and the fixed seat 100, so that the length of the deflection adjustment screw 2021 screwed into the diaphragm assembly 400 can be adjusted by rotating the deflection adjustment screw 2021, and the distance between the diaphragm assembly 400 and the deflection support 204 at this position can be adjusted to adjust the assembly angle of the diaphragm assembly 400 in the second direction of the vertical plane. At the same time, the second locking member 2022 can be a fastener such as a bolt to lock the adjusted diaphragm assembly 400.

[0056] In some embodiments, as shown in Figure 1 The deflection adjustment screw 2021 can include at least two, and each deflection adjustment screw 2021 can be arranged on the deflection support 204 of the deflection adjustment seat 200 to rotate the deflection adjustment screw 2021 to rotate the diaphragm assembly 400 around the Z-axis, thereby adjusting the assembly angle of the diaphragm assembly 400 in the second direction of the vertical plane.

[0057] In some embodiments, as shown in Figure 1As shown, two deflection adjusting screws 2021 can be adopted, and the two deflection adjusting screws 2021 pass through the deflection support 204 of the deflection adjusting seat 200 and are threadedly connected with the diaphragm assembly 400 between the deflection support 204 and the fixed seat 100, so that the length of the deflection adjusting screw 2021 screwed into the diaphragm assembly 400 can be adjusted by rotating the deflection adjusting screw 2021, and then the distance between the diaphragm assembly 400 and the deflection support 204 at the position of the deflection adjusting screw 2021 can be adjusted, so as to adjust the assembly angle of the diaphragm assembly 400 in the second direction of the vertical plane.

[0058] When it is necessary to adjust the assembly angle of the diaphragm assembly 400 in the second direction of the vertical plane, the connecting bolt between the diaphragm assembly 400 and the driving seat 300 is loosened, and then the deflection adjusting screw 2021 is rotated, so that the diaphragm assembly 400 can be deflected around the Z axis until the diaphragm assembly 400 is adjusted to the appropriate position, the second locking part 2022 is locked, and finally the diaphragm assembly 400 and the driving seat 300 are connected and fixed by the connecting bolt. It should be noted that the adjusting waist hole matched with the connecting bolt is arranged on the driving seat 300, so as to connect and fix the diaphragm assembly 400 and the driving seat 300 by the connecting bolt.

[0059] In the above embodiment, the deflection adjusting screw 2021 can also be three, four or more, which is not limited herein.

[0060] In some embodiments, in order to facilitate the axial adjusting mechanism 101 to adjust the assembly distance between the deflection adjusting seat 200 and the fixed seat 100, as shown in Figure 1 As shown, the axial adjusting mechanism 101 can include an axial adjusting screw 1011. The axial adjusting screw 1011 passes through the fixed seat 100 and is threadedly connected with the deflection adjusting seat 200, so that the length of the axial adjusting screw 1011 screwed into the first connecting part 2031 of the deflection adjusting seat 200 can be adjusted by rotating the axial adjusting screw 1011, so as to adjust the assembly distance between the deflection adjusting seat 200 and the fixed seat 100.

[0061] In some embodiments, as shown in Figure 1 In order to facilitate the installation of the axial adjusting screw 1011, an installation hole for installing the axial adjusting screw 1011 is arranged on the fixed seat 100, and an opening 1012 for facilitating the installation of the axial adjusting screw 1011 is arranged on the peripheral wall of the installation hole, so that the axial adjusting screw 1011 can be installed in the installation hole from the opening 1012 of the installation hole and screwed into the first connecting part 2031 of the deflection adjusting seat 200.

[0062] In some embodiments, as shown in Figure 2As shown, in order to ensure the stability of the axial adjustment mechanism 101 adjusting the assembly distance between the deflection adjustment seat 200 and the fixed seat 100, the axial adjustment mechanism 101 can further include a guide assembly 102, the guide assembly 102 includes a guide waist hole 1021 arranged on the deflection adjustment seat 200 and a guide shaft 1022 matched with the guide waist hole 1021, and the length direction of the guide waist hole 1021 is parallel to the adjustment direction of the axial adjustment screw 1011, that is, the length direction of the guide waist hole 1021 is parallel to the Z-axis direction, and the guide shaft 1022 can be arranged on the mounting plate of the detection equipment, so as to guide the axial adjustment mechanism 101 adjusting the assembly distance between the deflection adjustment seat 200 and the fixed seat 100, and ensure the stability of the axial adjustment mechanism 101 adjusting the assembly distance between the deflection adjustment seat 200 and the fixed seat 100. It should be noted that the guide assembly 102 can be one, two, three or more, which is not limited herein.

[0063] In some embodiments, as Figure 1 As shown, the diaphragm assembly 400 can include a mounting seat 401 and a diaphragm sheet 402 arranged on the mounting seat 401. Wherein, the mounting seat 401 is mounted on the driving seat 300, and the deflection adjustment mechanism 202 can adjust the assembly angle of the mounting seat 401 in the second direction of the vertical plane. Specifically, the mounting seat 401 can include a connecting part 4011 and a mounting part 4012, the mounting part 4012 is located on one side of the connecting part 4011, the connecting part 4011 can be connected with the driving seat 300 through connecting bolts or other fasteners, and the mounting part 4012 is provided with a mounting groove 4013 for mounting the diaphragm sheet 402, and the diaphragm sheet 402 can be adhered in the mounting groove 4013 through UV glue, so as to fix the diaphragm sheet 402 on the mounting seat 401.

[0064] In the above embodiment, the diaphragm sheet 402 can be provided with a plurality of light passing holes 4021 with different diameters, and the center lines of the light passing holes 4021 are parallel to the movement direction of the driving seat 300. Alternatively, the light passing holes 4021 can be three, and the diameters of the three light passing holes 4021 decrease from the side close to the connecting part 4011 to the side of the mounting part 4012, so as to drive the diaphragm sheet 402 to move along a straight line through the driving seat 300, thereby adjusting the light passing holes 4021 with different diameters of the diaphragm sheet 402.

[0065] The embodiment of the present application also discloses a detection equipment including the diaphragm adjustment device disclosed in the above embodiment, so that the diaphragm adjustment device has all the technical effects of the above diaphragm adjustment device, which will not be repeated herein.

[0066] The terms "first" and "second" and the like, in the description and in the claims of the present application and in the above figures, are used for distinguishing between similar elements and not necessarily for describing a specific sequential or chronological order. Descriptions using the terms "including", "containing" or "comprising" and variations thereof, are meant not to be limiting. For example, a process, method, object, or apparatus that comprises a list of steps or elements is not necessarily limited to the listed steps or elements, but can include additional steps or elements not expressly listed or inherent to such process, method, object, or apparatus.

[0067] The above description of disclosed embodiments is intended to be illustrative and not restrictive. Many modifications of the embodiments described herein will obvious to those with skill and other embodiments that incorporate the general principles described herein can be used without departing from the spirit and scope of the present application. Thus, the present application is not to be limited to the embodiments described herein but rather can be practiced with modification and alteration within the scope and spirit of the appended claims. Accordingly, the specification and drawings are to be regarded in an illustrative, rather than a restrictive, sense.

Claims

1. An aperture adjustment device, characterized by The utility model relates to a light curtain device, including: Fixed seat (100); Deflection adjustment seat (200), deflection adjustment seat (200) is connected with fixed seat (100), and axial adjustment mechanism (101) is provided on fixed seat (100), and axial adjustment mechanism (101) is used to adjust the assembly distance between deflection adjustment seat (200) and fixed seat (100); Drive seat (300), drive seat (300) is installed on deflection adjustment seat (200), and top pull mechanism (201) is provided on deflection adjustment seat (200), and top pull mechanism (201) is used to adjust the assembly angle of drive seat (300) in the first direction of vertical plane; Shutter assembly (400), shutter assembly (400) is installed on drive seat (300), so that drive seat (300) drives shutter assembly (400) to move along a straight line, and deflection adjustment mechanism (202) is provided on deflection adjustment seat (200), and deflection adjustment mechanism (202) is used to adjust the assembly angle of shutter assembly (400) in the second direction of vertical plane, and the second direction is perpendicular to the first direction.

2. The aperture adjustment device of claim 1, wherein, The top pull mechanism (201) includes a top pull adjusting screw (2011) and a first locking member (2012), the top pull adjusting screw (2011) passes through the deflection adjustment seat (200) and is threadedly connected with the drive seat (300) to adjust the assembly angle of the drive seat (300) in the first direction of the vertical plane, and the first locking member (2012) is used to lock the adjustment position of the drive seat (300).

3. The aperture adjustment device of claim 2, wherein, The deflection adjustment seat (200) has two rotation axis lines (2013) arranged perpendicularly to each other, and at least one top pull adjusting screw (2011) is arranged on each side of each rotation axis line (2013).

4. The aperture adjustment device of claim 1, wherein, The deflection adjustment mechanism (202) includes a deflection adjustment screw (2021) and a second locking member (2022), the deflection adjustment screw (2021) passes through the deflection adjustment seat (200) and is threadedly connected with the shutter assembly (400) to adjust the assembly angle of the shutter assembly (400) in the second direction of the vertical plane, and the second locking member (2022) is used to lock the adjustment position of the shutter assembly (400).

5. The aperture adjustment device of claim 4, wherein, The deflection adjustment screw (2021) includes at least two, and each deflection adjustment screw (2021) is arranged on the deflection adjustment seat (200) at intervals.

6. The aperture adjustment device of claim 1, wherein, The axial adjustment mechanism (101) includes an axial adjustment screw (1011), and the axial adjustment screw (1011) passes through the fixed seat (100) and is threadedly connected with the deflection adjustment seat (200) to adjust the assembly distance between the deflection adjustment seat (200) and the fixed seat (100).

7. The aperture adjustment device of claim 6, wherein, The fixed seat (100) is provided with a mounting hole for mounting the axial adjustment screw (1011), and an opening (1012) for facilitating the mounting of the axial adjustment screw (1011) is arranged on the peripheral wall of the mounting hole.

8. The aperture adjustment device of claim 6, wherein, The axial adjusting mechanism (101) further comprises a guide assembly (102), the guide assembly (102) comprises a guide waist hole (1021) arranged on the deflection adjusting base (200) and a guide shaft (1022) matched with the guide waist hole (1021), the length direction of the guide waist hole (1021) is parallel to the adjusting direction of the axial adjusting screw rod (1011).

9. The aperture adjustment device of claim 1, wherein, The diaphragm assembly (400) comprises a mounting base (401) and a diaphragm sheet (402) arranged on the mounting base (401), the mounting base (401) is mounted on the driving base (300), and the deflection adjusting mechanism (202) is used for adjusting the assembly angle of the mounting base (401) in the second direction of the vertical plane.

10. The aperture adjustment device of claim 9, wherein, The mounting base (401) comprises a connecting part (4011) and a mounting part (4012), the mounting part (4012) is located on one side of the connecting part (4011), the connecting part (4011) is connected with the driving base (300) through a fastener, and the mounting part (4012) is provided with a mounting groove (4013) for mounting the diaphragm sheet (402), and the diaphragm sheet (402) is bonded in the mounting groove (4013).

11. The aperture adjustment device of claim 9, wherein, The diaphragm sheet (402) is provided with a plurality of light passing holes (4021) with different diameters, and the center connecting line of each light passing hole (4021) is parallel to the movement direction of the driving base (300).

12. The aperture adjustment device according to any one of claims 1 to 11, characterized in that The deflection adjusting base (200) comprises a base (203) and a deflection support (204); The deflection support (204) is fixed on the base (203) through a fastener and protrudes from one side of the base (203), the fixing base (100) and the deflection support (204) are located on the same side of the base (203), so that the fixing base (100), the base (203) and the deflection support (204) form an installation space (205) for accommodating the driving base (300) and the diaphragm assembly (400); The top pulling mechanism (201) is arranged on the side of the base (203) away from the fixing base (100), and the deflection adjusting mechanism (202) is arranged on the deflection support (204).

13. A detection device, characterized by The diaphragm adjusting device comprises the diaphragm adjusting device according to any one of claims 1-12.

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