Optical fiber adjusting mechanism and lighting device

Abstract

The utility model discloses an optical fiber adjusting mechanism and a lighting device, and relates to the technical field of semiconductors. A first adjusting mechanism and a second adjusting mechanism are arranged on the adjusting seat, and the first adjusting mechanism is used for adjusting the assembling position of the adjusting seat on the horizontal plane; the optical fiber assembly is installed on the adjusting seat, and the second adjusting mechanism is used for adjusting the assembling angle of the optical fiber assembly on the vertical plane. According to the optical fiber adjusting mechanism provided by the invention, multi-degree-of-freedom independent adjustment of the optical fiber assembly can be realized through the first adjusting mechanism and the second adjusting mechanism, so that the crosstalk problem of the optical fiber in the multi-degree-of-freedom installation and adjustment process can be solved, and the convenience of optical fiber installation and adjustment is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor, more particularly, to a fiber adjusting mechanism and a lighting device. BACKGROUND

[0002] In the field of semiconductor manufacturing, optical fibers play a vital role in the optical lighting device of overlay measurement equipment. The optical fibers can be flexibly arranged in the lighting device to adjust the angle and intensity of light according to requirements to meet different wafer sizes, shapes and measurement requirements. However, when the optical fibers are adjusted, there is a problem of multi-degree-of-freedom adjustment crosstalk, which makes it difficult to adjust the optical fibers in multiple degrees of freedom during adjustment, and the adjustment time is long, resulting in low adjustment efficiency.

[0003] Therefore, how to improve the convenience of optical fiber adjustment has become a technical problem to be solved by those skilled in the art. CONTENT OF THE UTILITY MODEL

[0004] Therefore, the purpose of the present application is to provide a fiber adjusting mechanism to improve the convenience of optical fiber adjustment.

[0005] Another purpose of the present application is to provide a lighting device with the above-mentioned fiber adjusting mechanism.

[0006] To achieve the above-mentioned purpose, the present application provides the following technical solutions:

[0007] A fiber adjusting mechanism, comprising:

[0008] An adjusting seat, wherein a first adjusting mechanism and a second adjusting mechanism are arranged on the adjusting seat, the first adjusting mechanism is used to adjust the assembly position of the adjusting seat in a horizontal plane;

[0009] An optical fiber assembly is installed on the adjusting seat, and the second adjusting mechanism is used to adjust the assembly angle of the optical fiber assembly in a vertical plane.

[0010] Optionally, in the above-mentioned fiber adjusting mechanism, the first adjusting mechanism comprises an adjusting waist hole and a locking piece, the length direction of the adjusting waist hole is parallel to the adjusting direction of the adjusting seat, and the locking piece is used to lock the adjusting seat.

[0011] Optionally, in the above-mentioned fiber adjusting mechanism, the optical fiber assembly comprises an optical fiber and a flange seat, the optical fiber is installed on the adjusting seat through the flange seat, and the second adjusting mechanism is used to adjust the assembly position of the flange seat in a vertical plane.

[0012] Optionally, in the above-mentioned fiber adjusting mechanism, the adjusting seat is provided with a mounting groove for accommodating the flange seat, and the mounting groove limits an adjusting space for adjusting the flange seat.

[0013] Optionally, in the above optical fiber adjusting mechanism, a pressing plate is arranged at the opening of the mounting groove, the pressing plate is connected with the adjusting seat through a fastener, and the pressing plate is used to limit the axial movement of the flange seat.

[0014] Optionally, in the above optical fiber adjusting mechanism, a through hole is arranged on the pressing plate for the optical fiber to pass through, and the aperture of the through hole is smaller than the outer diameter of the flange seat.

[0015] Optionally, in the above optical fiber adjusting mechanism, the second adjusting mechanism comprises an adjusting jackscrew, and the adjusting jackscrew is used to push the flange seat to deflect the optical fiber.

[0016] Optionally, in the above optical fiber adjusting mechanism, the adjusting seat has two deflection base lines arranged perpendicularly to each other, and at least one adjusting jackscrew is arranged on each side of each deflection base line.

[0017] Optionally, in the above optical fiber adjusting mechanism, the adjusting seat comprises a first adjusting part and a second adjusting part arranged intersectingly;

[0018] The first adjusting mechanism is arranged on the first adjusting part to adjust the assembly position of the adjusting seat in the horizontal plane.

[0019] The optical fiber assembly is arranged on the second adjusting part, and the second adjusting mechanism is arranged on the second adjusting part to adjust the assembly angle of the optical fiber assembly in the vertical plane.

[0020] The illumination device comprises the optical fiber adjusting mechanism according to any one of the above.

[0021] The optical fiber adjusting mechanism provided by the present application comprises an adjusting seat, a first adjusting mechanism and a second adjusting mechanism arranged on the adjusting seat. When the optical fiber assembly is adjusted, the first adjusting mechanism is used to adjust the assembly position of the adjusting seat in the horizontal plane, and the optical fiber assembly is arranged on the adjusting seat, so that the assembly position of the optical fiber assembly in the horizontal plane can be adjusted. The second adjusting mechanism is used to adjust the assembly angle of the optical fiber assembly in the vertical plane until the optical fiber assembly is adjusted to the assembly position meeting the measurement requirements. As can be seen from the above example, the optical fiber adjusting mechanism provided by the present application can realize the independent adjustment of the multiple degrees of freedom of the optical fiber assembly through the first adjusting mechanism and the second adjusting mechanism, so that the crosstalk problem of the optical fiber in the multiple degrees of freedom adjustment process can be solved, and the convenience of the optical fiber adjustment is improved.

[0022] The technical features mentioned above, the technical features mentioned below, and the technical features shown in the drawings alone can be combined with each other arbitrarily, as long as the combined technical features are not contradictory to each other. All feasible combinations of features are explicitly described herein. Any one of the multiple sub-features included in the same sentence can be applied independently, and does not have to be applied together with other sub-features. BRIEF DESCRIPTION OF DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings required to be used in the embodiments or prior art description will be briefly introduced as follows. Obviously, the drawings in the following description are only embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative effort on the basis of the provided drawings.

[0024] Figure 1 Structure diagram of the optical fiber adjusting mechanism provided by the embodiment of the present application Figure 1 ;

[0025] Figure 2 Structure diagram of the optical fiber adjusting mechanism provided by the embodiment of the present application Figure 2 ;

[0026] Figure 3 Adjusting diagram of the second adjusting mechanism provided by the embodiment of the present application.

[0027] Among them, 100 is an adjusting seat, 101 is a first adjusting mechanism, 1011 is an adjusting waist hole, 102 is a second adjusting mechanism, 1021 is an adjusting top wire, 1022 is a first top wire, 1023 is a second top wire, 1024 is a third top wire, 1025 is a fourth top wire, 1026 is a fifth top wire, 1027 is a sixth top wire, 103 is a deflection base line, 1031 is a first deflection base line, 1032 is a second deflection base line, 104 is a mounting groove, 105 is a pressing plate, 1051 is a through hole, 106 is a first adjusting part, 107 is a second adjusting part;

[0028] 200 is an optical fiber assembly, 201 is an optical fiber, 202 is a flange seat, 2021 is a mounting part, and 2022 is a connecting part. DETAILED DESCRIPTION

[0029] The core of the present application is to provide an optical fiber adjusting mechanism to improve the convenience of optical fiber installation and adjustment.

[0030] Another core of the present application is to provide a lighting device with the above optical fiber adjusting mechanism.

[0031] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0032] In the semiconductor manufacturing industry, optical fibers play a crucial role in the optical illumination devices of overlay measurement equipment. Optical fibers can be flexibly arranged within the illumination device, and the angle and intensity of the illumination can be adjusted as needed to meet different wafer sizes, shapes, and measurement requirements. However, during the assembly and adjustment of optical fibers, there is a problem of crosstalk in multi-degree-of-freedom adjustment, making the assembly and adjustment of multiple degrees of freedom difficult and time-consuming, resulting in low assembly and adjustment efficiency.

[0033] Therefore, such as Figure 1 As shown in the figure, this application discloses an optical fiber adjustment mechanism, including an adjustment base 100 and an optical fiber assembly 200. The first adjustment mechanism 101 and the second adjustment mechanism 102 enable independent adjustment of the optical fiber assembly 200 across multiple degrees of freedom, thereby solving the crosstalk problem in the multi-degree-of-freedom assembly and adjustment process of the optical fiber 201 and improving the convenience of assembling and adjusting the optical fiber 201.

[0034] The following will combine Figures 1 to 3 The optical fiber adjustment mechanism disclosed in the embodiments of this application will be explained and described in detail.

[0035] Among them, such as Figure 1 and Figure 2 As shown, the fiber optic assembly 200 is mounted on the adjustment base 100, and a first adjustment mechanism 101 and a second adjustment mechanism 102 are respectively provided on the adjustment base 100. When assembling and adjusting the fiber optic assembly 200, the assembly position of the adjustment base 100 in the horizontal plane can be adjusted by the first adjustment mechanism 101. Since the fiber optic assembly 200 is mounted on the adjustment base 100, the assembly position of the fiber optic assembly 200 in the horizontal plane can be adjusted. Furthermore, the assembly angle of the fiber optic assembly 200 in the vertical plane can be adjusted by the second adjustment mechanism 102 until the fiber optic assembly 200 is adjusted to the assembly position that meets the measurement requirements. Thus, the independent adjustment of the fiber optic assembly 200 in multiple degrees of freedom can be achieved by the first adjustment mechanism 101 and the second adjustment mechanism 102, which solves the crosstalk problem of the fiber optic assembly 201 in the multi-degree-of-freedom assembly and adjustment process and improves the convenience of the fiber optic assembly 201.

[0036] In some embodiments, such as Figure 1 and Figure 2As shown, the fiber assembly 200 can include a fiber 201 and a flange seat 202. Wherein the fiber 201 is mounted on the adjusting seat 100 through the flange seat 202, so that the assembly position of the flange seat 202 in the vertical plane can be adjusted by the second adjusting mechanism 102, so that the flange seat 202 drives the fiber 201 to deflect, and then the assembly angle of the fiber 201 in the vertical plane can be adjusted.

[0037] In some embodiments, as shown in Figure 2 The flange seat 202 can include a mounting portion 2021 and a connecting portion 2022. Wherein the connecting portion 2022 can be inserted into the end of the fiber 201 and connected with the fiber 201 in interference fit, so as to ensure the reliability of the connection between the flange seat 202 and the fiber 201. Meanwhile, as shown in Figure 3 The adjusting seat 100 is provided with a mounting groove 104 for accommodating the flange seat 202, so that the mounting portion 2021 of the flange seat 202 can be mounted in the mounting groove 104, and the mounting groove 104 has an adjusting space for adjusting the flange seat 202, so that the assembly position of the flange seat 202 in the vertical plane can be adjusted by the second adjusting mechanism 102, so that the flange seat 202 drives the fiber 201 to deflect.

[0038] In some embodiments, as shown in Figure 1 And Figure 2 In order to mount the mounting portion 2021 of the flange seat 202 in the mounting groove 104, a pressing plate 105 is provided at the opening of the mounting groove 104, and the pressing plate 105 has a through hole 1051 for the fiber 201 to pass through, and the aperture of the through hole 1051 is smaller than the outer diameter of the flange seat 202, so as to limit the axial movement of the flange seat 202, and prevent the mounting portion 2021 of the flange seat 202 from being pulled out of the opening of the mounting groove 104. Wherein the pressing plate 105 and the adjusting seat 100 can be connected and fixed by bolts and other fasteners, so as to ensure the reliability of the mounting of the flange seat 202.

[0039] In some embodiments, as shown in Figure 1 And Figure 2As shown, the adjusting seat 100 can include a first adjusting part 106 and a second adjusting part 107, and the first adjusting part 106 and the second adjusting part 107 are arranged to intersect each other to form an included angle between the first adjusting part 106 and the second adjusting part 107. In order to facilitate the adjustment of the adjusting seat 100, the first adjusting part 106 and the second adjusting part 107 can be arranged perpendicular to each other, that is, the adjusting seat 100 can adopt an L-shaped structure, and the first adjusting mechanism 101 can be arranged on the first adjusting part 106 to adjust the installation position of the adjusting seat 100 in the horizontal plane. Moreover, the optical fiber assembly 200 can be installed on the second adjusting part 107, that is, the installation groove 104 can be arranged on the second adjusting part 107, so that the mounting part 2021 of the flange seat 202 is located in the installation groove 104, so that the optical fiber 201 can be arranged perpendicular to the second adjusting part 107 of the adjusting seat 100 in the initial state, and the second adjusting mechanism 102 can be arranged on the second adjusting part 107 to adjust the installation angle of the optical fiber assembly 200 in the vertical plane.

[0040] In some embodiments, as shown in Figure 1 The first adjusting mechanism 101 can include an adjusting waist hole 1011 and a locking piece, the length direction of the adjusting waist hole 1011 is parallel to the adjusting direction of the adjusting seat 100, and the adjusting direction of the adjusting seat 100 is the direction perpendicular to the optical fiber 201 in the horizontal plane. The locking piece can adopt a fastener such as a bolt to connect and fix the adjusted adjusting seat 100 and the connecting hole on the lighting device, so as to lock the adjusting position of the adjusting seat 100, thereby preventing the adjusting seat 100 from being dislocated when adjusting the optical fiber assembly 200, resulting in adjusting failure of the adjusting seat 100.

[0041] In some embodiments, as shown in Figure 1 and Figure 2 The second adjusting mechanism 102 can include an adjusting top screw 1021, and a threaded hole adapted to the adjusting top screw 1021 is arranged on the outer peripheral wall of the second adjusting part 107 of the adjusting seat 100, that is, the threaded hole is arranged one by one corresponding to the adjusting top screw 1021, and the threaded hole is through the installation groove 104 of the second adjusting part 107, so that the length of the adjusting top screw 1021 protruding out of the threaded hole can be adjusted by screwing the adjusting top screw 1021, and the adjusting top screw 1021 pushes the mounting part 2021 of the flange seat 202, so that the mounting part 2021 of the flange seat 202 is offset, and then the optical fiber 201 is deflected to adjust the installation angle of the optical fiber 201 until it is adjusted to the installation position meeting the measurement requirements.

[0042] In some embodiments, as shown in Figure 3As shown, the adjusting seat 100 has two deflection base lines 103 arranged perpendicularly to each other, so that the optical fiber 201 can be deflected around the two deflection base lines 103 respectively, thereby realizing the adjustment of the assembly angle of the optical fiber 201. In order to realize the deflection of the optical fiber 201 around the two deflection base lines 103 respectively, at least one adjusting top screw 1021 can be arranged on each side of each deflection base line 103. For the convenience of understanding, the two deflection base lines 103 are defined as a first deflection base line 1031 and a second deflection base line 1032 respectively, and the first deflection base line 1031 and the second deflection base line 1032 are arranged perpendicularly to each other.

[0043] In some embodiments, one adjusting top screw 1021 can be arranged on each side of the first deflection base line 1031, and two adjusting top screws 1021 can be arranged on the second deflection base line 1032, and the extensions of the two adjusting top screws 1021 pass through the center of the mounting portion 2021 of the flange seat 202, so that by screwing the adjusting top screws 1021 on both sides of the first deflection base line 1031, the mounting portion 2021 of the flange seat 202 can be offset along the second deflection base line 1032, thereby driving the optical fiber 201 to deflect around the first deflection base line 1031, realizing the yaw adjustment of the optical fiber 201. At the same time, since the two adjusting top screws 1021 are both located on the second deflection base line 1032, and the extensions of the two adjusting top screws 1021 pass through the center of the mounting portion 2021 of the flange seat 202, the stability of the offset of the mounting portion 2021 of the flange seat 202 along the second deflection base line 1032 can be ensured, thereby ensuring the stability of the yaw adjustment of the optical fiber 201. Similarly, one adjusting top screw 1021 can be arranged on each side of the second deflection base line 1032, and two adjusting top screws 1021 can be arranged on the first deflection base line 1031, and the extensions of the two adjusting top screws 1021 pass through the center of the mounting portion 2021 of the flange seat 202, so that by rotating the adjusting top screws 1021 on both sides of the second deflection base line 1032, the mounting portion 2021 of the flange seat 202 can be offset along the first deflection base line 1031, thereby driving the optical fiber 201 to deflect around the second deflection base line 1032, realizing the pitch adjustment of the optical fiber 201. At the same time, since the two adjusting top screws 1021 are both located on the first deflection base line 1031, and the extensions of the two adjusting top screws 1021 pass through the center of the mounting portion 2021 of the flange seat 202, the stability of the offset of the mounting portion 2021 of the flange seat 202 along the first deflection base line 1031 can be ensured, thereby ensuring the stability of the pitch adjustment of the optical fiber 201.

[0044] In some embodiments, as Figure 3As shown, the second adjusting part 107 of the adjusting seat 100 can adopt an approximately rectangular cross section, the first deflection baseline 1031 and the second deflection baseline 1032 are respectively parallel to two adjacent sides of the second adjusting part 107, and the first deflection baseline 1031 and the second deflection baseline 1032 are arranged perpendicular to each other. Meanwhile, the adjusting top pin 1021 can include six. For the convenience of understanding, the six adjusting top pins 1021 are respectively defined as a first top pin 1022, a second top pin 1023, a third top pin 1024, a fourth top pin 1025, a fifth top pin 1026 and a sixth top pin 1027. Among them, the first top pin 1022 and the third top pin 1024 can be symmetrically arranged about the first deflection baseline 1031, the fourth top pin 1025 and the sixth top pin 1027 can be symmetrically arranged about the first deflection baseline 1031, and the first top pin 1022 and the sixth top pin 1027 can be symmetrically arranged about the second deflection baseline 1032, the third top pin 1024 and the fourth top pin 1025 can be symmetrically arranged about the second deflection baseline 1032, and the second top pin 1023 and the fifth top pin 1026 can be located on the first deflection baseline 1031 and can be symmetrically arranged about the second deflection baseline 1032, in addition, the extension line of each adjusting top pin 1021 can pass through the center of the mounting part 2021 of the flange seat 202, which can ensure the stability of the offset of the mounting part 2021 of the flange seat 202, and further ensure the stability of the assembly angle adjustment of the optical fiber 201.

[0045] When it is necessary to deflect the optical fiber 201 around the first deflection baseline 1031 to realize the yaw adjustment of the optical fiber 201, the second top pin 1023 and the fifth top pin 1026 can be screwed away from the mounting part 2021 of the flange seat 202, then the first top pin 1022 and the sixth top pin 1027 are screwed in the same direction, and the third top pin 1024 and the fourth top pin 1025 are screwed in opposite directions, that is, the third top pin 1024 and the fourth top pin 1025 are screwed in the same direction, and the third top pin 1024 and the fourth top pin 1025 are screwed in the opposite direction of the first top pin 1022 and the sixth top pin 1027, so that the mounting part 2021 of the flange seat 202 can be offset along the second deflection baseline 1032, and the optical fiber 201 can be deflected around the first deflection baseline 1031, thereby realizing the yaw adjustment of the optical fiber 201.

[0046] When the fiber 201 needs to be deflected around the second deflection baseline 1032 to achieve the pitch adjustment of the fiber 201, the first top screw 1022, the second top screw 1023 and the third top screw 1024 can be screwed in the same direction, and the fourth top screw 1025, the fifth top screw 1026 and the sixth top screw 1027 can be screwed in the opposite direction, that is, the fourth top screw 1025, the fifth top screw 1026 and the sixth top screw 1027 are screwed in the same direction, and the screwing direction of the fourth top screw 1025, the fifth top screw 1026 and the sixth top screw 1027 is opposite to the screwing direction of the first top screw 1022, the second top screw 1023 and the third top screw 1024, so that the mounting portion 2021 of the flange seat 202 can be offset along the first deflection baseline 1031, and then the fiber 201 can be deflected around the second deflection baseline 1032, and the pitch adjustment of the fiber 201 can be achieved.

[0047] In the above embodiment, two, four or more adjustment top screws 1021 can also be arranged on both sides of each deflection baseline 103, which is not limited herein.

[0048] The embodiment of the present application also discloses a lighting device comprising the fiber adjustment mechanism disclosed in the above embodiment, so as to have all the technical effects of the above fiber adjustment mechanism, which is not described herein again.

[0049] The terms "first" and "second" and the like in the specification and claims of the present application and the above drawings are used to distinguish different objects, and are not used to describe a specific order. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device including a series of steps or units is not set to the listed steps or units, but can include steps or units not listed.

[0050] The above description of the disclosed embodiments enables a person skilled in the art to implement or use the present application. Various modifications to the embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An optical fiber adjustment mechanism, characterized in that, include: An adjusting seat (100) is provided with a first adjusting mechanism (101) and a second adjusting mechanism (102). The first adjusting mechanism (101) is used to adjust the assembly position of the adjusting seat (100) on the horizontal plane. An optical fiber assembly (200) is mounted on the adjustment seat (100), and the second adjustment mechanism (102) is used to adjust the assembly angle of the optical fiber assembly (200) in the vertical plane.

2. The fiber optic adjustment mechanism according to claim 1, characterized in that, The first adjustment mechanism (101) includes an adjustment waist hole (1011) and a locking member. The length direction of the adjustment waist hole (1011) is parallel to the adjustment direction of the adjustment seat (100), and the locking member is used to lock the adjustment seat (100).

3. The fiber optic adjustment mechanism according to claim 1, characterized in that, The optical fiber assembly (200) includes an optical fiber (201) and a flange seat (202). The optical fiber (201) is mounted on the adjusting seat (100) through the flange seat (202). The second adjusting mechanism (102) is used to adjust the assembly position of the flange seat (202) in the vertical plane.

4. The fiber optic adjustment mechanism according to claim 3, characterized in that, The adjusting seat (100) is provided with a mounting groove (104) for accommodating the flange seat (202), and the mounting groove (104) restricts an adjustment space for adjusting the flange seat (202).

5. The fiber optic adjustment mechanism according to claim 4, characterized in that, A pressure plate (105) is provided at the opening of the mounting groove (104). The pressure plate (105) is connected to the adjusting seat (100) by fasteners. The pressure plate (105) is used to restrict the axial movement of the flange seat (202).

6. The fiber optic adjustment mechanism according to claim 5, characterized in that, The pressure plate (105) has a through hole (1051) for the optical fiber (201) to pass through, and the diameter of the through hole (1051) is smaller than the outer diameter of the flange seat (202).

7. The fiber optic adjustment mechanism according to claim 3, characterized in that, The second adjustment mechanism (102) includes an adjustment set screw (1021) for pushing the flange seat (202) to deflect the optical fiber (201).

8. The fiber optic adjustment mechanism according to claim 7, characterized in that, The adjustment seat (100) has two deflection baselines (103) arranged perpendicularly to each other, and at least one adjustment set screw (1021) is provided on both sides of each deflection baseline (103).

9. The fiber optic adjustment mechanism according to any one of claims 1 to 8, characterized in that, The adjusting seat (100) includes a first adjusting part (106) and a second adjusting part (107) arranged intersecting each other. The first adjustment mechanism (101) is disposed on the first adjustment part (106) to adjust the assembly position of the adjustment seat (100) on the horizontal plane; The optical fiber assembly (200) is mounted on the second adjustment part (107), and the second adjustment mechanism (102) is disposed on the second adjustment part (107) to adjust the assembly angle of the optical fiber assembly (200) in the vertical plane.

10. A lighting device, characterized in that, Includes the fiber optic adjustment mechanism as described in any one of claims 1 to 9.

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