Three-degree-of-freedom manipulator and grabbing system

Abstract

The utility model relates to a three-degree-of-freedom manipulator and a grabbing system, and the three-degree-of-freedom manipulator comprises a rotating part which comprises a servo motor capable of being driven to rotate; the connecting part is connected with the driving end of the rotating part, and an electric clamping jaw is arranged in the connecting part; the clamping part comprises two clamping jaws which are connected to the driving end of the electric clamping jaw and move relatively, and clamping fingers capable of rotating are connected to the opposite sides of the two clamping jaws; and the clamping finger driving part comprises a rotating air cylinder fixed to the connecting part, a rotating shaft of the rotating air cylinder extends to the position over the clamping fingers from the two ends correspondingly, and the rotating shaft and the clamping fingers are connected and driven through a synchronous belt assembly. The system is compact and reasonable in structure and convenient to operate, and through the unique design and the innovative technology, the working efficiency is remarkably improved, the labor intensity is reduced, the flexibility and the expansibility of the system are greatly enhanced, and the diversified requirements of semiconductor device production are met.

Description

Technical Field

[0001] This utility model relates to the field of gripping device technology, and in particular to a three-degree-of-freedom manipulator and gripping system. Background Technology

[0002] In the semiconductor device manufacturing industry, chip robotic arms play a crucial role, responsible for the high-precision and high-efficiency handling and assembly of tiny electronic chips or other components. While traditional chip robotic arm technology has achieved a degree of automated assembly, high-precision operation, and high-speed processing, it still has many limitations, especially in the testing and handling of power semiconductor devices.

[0003] Currently, the main methods used in the industry for handling power semiconductor devices during testing include manual loading and unloading operations and standard robotic arm handling. However, both methods have significant technical problems.

[0004] While manual loading and unloading operations offer some flexibility, they are labor-intensive. Operators must frequently place and remove components from the testing station, especially when managing multiple testing machines, where the workload increases exponentially. Furthermore, this method is inefficient; operators must make judgments before placing components, making it susceptible to human error, leading to longer operation times and the risk of component mix-ups. More importantly, manual operation increases labor and management costs, which, in the long run, will significantly reduce the company's overall efficiency.

[0005] On the other hand, while standard robotic arms achieve a degree of automation, they are costly and limited by their load capacity and travel range, allowing them to support only a small number of test stations simultaneously, resulting in low flexibility. Standard robotic arms often cannot reach certain confined or specialized test stations, limiting their application scope. Furthermore, standard robotic arms have limited scalability; their relatively fixed travel range makes them difficult to adapt to testing systems operating under diverse conditions, failing to meet the ever-increasing and diverse demands.

[0006] In summary, existing power semiconductor device testing and handling methods suffer from technical problems such as high labor intensity, low efficiency, high cost, low flexibility, and low scalability.

[0007] Therefore, we propose a three-degree-of-freedom robotic arm and gripping system. Utility Model Content

[0008] In response to the shortcomings of the existing production technologies, the applicant provides a three-degree-of-freedom robotic arm and gripping system. Through its unique design and innovative technology, it not only significantly improves work efficiency and reduces labor intensity, but also greatly enhances the system's flexibility and scalability, meeting the diverse needs of semiconductor device production.

[0009] The technical solution adopted in this utility model is as follows:

[0010] A three-degree-of-freedom robotic arm includes:

[0011] The rotating part includes a servo motor capable of driving rotation;

[0012] A connecting part is connected to the drive end of the rotating part, and an electric gripper is provided inside the connecting part;

[0013] The clamping part includes two jaws connected to the electric jaw drive end and moving relative to each other, and each jaw has a rotatable gripper finger connected to one of the opposite sides of the two jaws.

[0014] The finger clamping drive unit includes a rotary cylinder fixed on the connecting part, and the rotating shaft of the rotary cylinder extends from both ends to directly above the finger clamp, and the rotating shaft is connected to the finger clamping via a timing belt assembly for driving.

[0015] In one embodiment, the rotating part further includes a central control rotating platform, and a servo motor is connected to the central control rotating platform.

[0016] In one embodiment, the connecting part further includes a connecting frame connected to the drive shaft of the servo motor, and the rotary cylinder is fixed on the connecting frame.

[0017] In one embodiment, the timing belt assembly includes a timing belt and a pulley, with at least one pulley provided on the shaft and the gripper, and also includes a pulley connected to the gripper to drive the timing belt to tension.

[0018] In one embodiment, the two ends of the rotating shaft are respectively connected to the grippers on the corresponding sides, and the rotating shaft is capable of axial extension and retraction.

[0019] A grasping system, comprising the aforementioned three-degree-of-freedom manipulator.

[0020] In one embodiment, it also includes a Y-axis module, a Z-axis module, and an X-axis module that drive the three-degree-of-freedom manipulator to move along the Y-axis, Z-axis, and X-axis.

[0021] In one embodiment, the connecting bracket is connected to the Y-axis module via a mounting plate.

[0022] The beneficial effects of this utility model are as follows:

[0023] This utility model features a compact and rational structure, and is easy to operate. Through its unique design and innovative technology, it not only significantly improves work efficiency and reduces labor intensity, but also greatly enhances the system's flexibility and scalability, meeting the diverse needs of semiconductor device production. Simultaneously, its high-precision gripping and placement capabilities ensure the stability and reliability of product quality. These beneficial effects collectively constitute the core competitiveness of this embodiment, making the system widely applicable and of significant practical value in the field of power semiconductor device testing and handling. By replacing different device grippers and trays, the system can easily adapt to various types of devices, achieving an efficient, flexible, and precise automated production process, providing strong technical support for the upgrading and development of the semiconductor manufacturing industry.

[0024] In addition, this utility model also has the following advantages:

[0025] Significantly Improved Work Efficiency and Reduced Labor Intensity: This embodiment introduces a three-degree-of-freedom robotic arm, achieving fully automated operation from grasping and flipping to placement. Compared to manual loading and unloading, the robotic arm can perform precise and rapid operations continuously, greatly improving work efficiency. Simultaneously, automated operation completely frees up manpower, reducing the labor intensity of operators, especially when managing multiple testing machines simultaneously. The precise control and efficient execution of the robotic arm ensure the continuity and stability of the production process, saving enterprises substantial manpower and time costs.

[0026] Enhanced flexibility and scalability to adapt to diverse production needs: This robotic arm system features a central control rotary platform, servo motors, and a retractable shaft structure. These design elements collectively endow the robotic arm with exceptional flexibility and adaptability. It can easily handle device gripping needs at different angles and positions, and even operate flexibly in confined or complex testing environments. Furthermore, the system's modular design (such as Y-axis, Z-axis, and X-axis modules) makes the entire gripping system easy to expand and upgrade, readily interfacing with testing systems operating under various conditions, thus meeting the increasingly diverse needs of semiconductor device production.

[0027] Enhancing gripping accuracy and stability to ensure product quality: The design of the electric gripper and fingers, combined with servo motor control based on high-precision encoder feedback, enables the robotic arm in this embodiment to achieve extremely high precision and stability when gripping and placing devices. The gripper is made of wear-resistant material, while the fingers are elastic, allowing them to closely conform to the surface of the device and prevent slippage or damage during handling. Simultaneously, the 360° rotation function of the fingers ensures accurate alignment of the device before testing, improving the accuracy and reliability of the test, thereby guaranteeing the final product quality. Attached Figure Description

[0028] Figure 1 This is a three-dimensional structural diagram of the robotic arm body in this utility model.

[0029] Figure 2 This is a three-dimensional structural diagram of the robotic arm body in the finger-gripping rotation state of this utility model.

[0030] Figure 3 This is a schematic diagram of the grasping system structure in this utility model.

[0031] The components are as follows: 100, robot body; 200, Y-axis module; 300, Z-axis module; 400, X-axis module; 101, central control rotary platform; 102, servo motor; 103, connecting frame; 104, electric gripper; 105, gripper; 1051, slide rail assembly; 106, rotary cylinder; 1061, rotating shaft; 107, synchronous belt assembly; 108, gripping finger. Detailed Implementation

[0032] The specific embodiments of this utility model are described below with reference to the accompanying drawings.

[0033] Example 1: As Figures 1-2 As shown, this embodiment discloses a three-degree-of-freedom manipulator, which aims to solve the problems of high labor intensity, low efficiency, high cost, low flexibility and low scalability in the existing power semiconductor device testing and handling methods.

[0034] Specifically, such as Figures 1-2 As shown, the main function of the rotating part is to drive the robot arm to rotate. The rotating part includes a servo motor 102 capable of driving the rotation, and a central control rotating platform 101. The servo motor 102 is connected to the central control rotating platform 101. By precisely controlling the rotation angle and speed of the servo motor 102, the robot arm can rotate at any angle in the horizontal plane. This design not only improves the robot arm's flexibility but also enables it to accurately align and grip devices placed at various angles on the synchronous belt conveyor line.

[0035] In another embodiment, the servo motor 102 employs a high-precision encoder feedback to ensure precise control of the rotation angle. The central control rotary platform 101 is made of high-strength materials, possessing excellent load-bearing capacity and stability.

[0036] In this embodiment, the connecting part is the transition between the rotating part and the clamping part. Its main function is to connect the drive end of the rotating part and the clamping part, while also supporting components such as the electric gripper. The connecting part includes a connecting frame 103, which is connected to the drive shaft of the servo motor 102. The rotational motion of the rotating part drives the entire connecting part and the clamping part to rotate. In addition, a rotary cylinder 106 is fixed on the connecting frame. The rotating shaft 1061 of the rotary cylinder 106 extends from both ends to directly above the gripper finger, and is used to drive the gripper finger to rotate.

[0037] The connecting frame 103 adopts a lightweight design to reduce inertial forces during movement and improve the response speed of the robot. The rotary cylinder 106 uses high-performance pneumatic components, featuring fast response and stable reliability. Additionally, the connecting plate 103 is equipped with a mounting plate for easy connection to other drive devices.

[0038] The clamping unit in this embodiment primarily functions to grip and release the device under test. The clamping unit includes two grippers 105 connected to the drive end of the electric gripper 104 and moving relative to each other, and rotatable gripping fingers 108 connected to opposite sides of the two grippers. The electric gripper 104 drives the relative movement of the grippers 105 to grip and release the device. The gripping fingers 108, driven by the rotary cylinder 106, allow for rotational adjustment of the device during gripping to accommodate the mounting angle in front of the testing system.

[0039] The electric gripper 104 is driven by a high-precision servo motor, featuring large gripping force and high gripping accuracy. The gripper 105 is made of wear-resistant material, exhibiting good wear resistance and service life. The gripping fingers 108 are made of elastic material, providing good gripping stability and adaptability.

[0040] The finger-clamping drive unit in this embodiment is a key component for driving the finger-clamping mechanism to rotate. The finger-clamping drive unit includes a rotary cylinder 106 fixed to the connecting part, and a timing belt assembly 107 connecting the rotary cylinder shaft 1061 and the finger-clamping mechanism 108. The timing belt assembly 107 includes a timing belt and pulleys. At least one pulley is provided on both the shaft 1061 and the finger-clamping mechanism 108, transmitting the rotational motion of the shaft 1061 to the finger-clamping mechanism 108 via the timing belt. Furthermore, it includes a pulley connected to the gripper 105 to tension the timing belt, ensuring the tension and transmission efficiency of the timing belt. This design allows the finger-clamping mechanism 108 to rotate 360° under the drive of the rotary cylinder 106, adapting to the installation angle requirements before testing the system.

[0041] In this embodiment, the synchronous belt assembly 107 uses a high-strength, high-wear-resistant synchronous belt and pulleys to ensure stability and reliability during transmission. The pulley tension adjustment mechanism adopts a fine-tuning design, which can easily adjust the tension of the synchronous belt to meet the needs of different working conditions.

[0042] The two ends of the rotating shaft 1061 are respectively connected to the corresponding jaws 105, and the rotating shaft 1061 can extend and retract axially. Since the rotating shaft 1061 can extend and retract axially, it does not affect the clamping function of the jaws 105, and at the same time, it can ensure that each pulley on the synchronous belt assembly 107 is always on the same plane.

[0043] In this embodiment, the rotating shaft 1061 adopts a nested telescopic rod structure, that is, it includes a telescopic rod and a cylinder movably sleeved on the rod. The pulley is fixedly connected to the rod. The rod and the cylinder move axially relative to each other and rotate synchronously.

[0044] Example 2: Figure 2 As shown, this embodiment discloses a grasping system, which includes the three-degree-of-freedom manipulator body 100 as in Embodiment 1, and also comprises a Y-axis module 200, a Z-axis module 300, and an X-axis module 400. The manipulator body 100 is the core component of the system, responsible for grasping, flipping, and placing actions; the Y-axis module 200, Z-axis module 300, and X-axis module 400 are respectively responsible for the movement of the manipulator in the Y-axis, Z-axis, and X-axis directions to achieve precise positioning in three-dimensional space.

[0045] The finger gripper drive unit mainly consists of a rotary cylinder 106 and a timing belt assembly. The rotating shaft 1061 of the rotary cylinder 106 extends from both ends directly above the finger gripper 108 and is connected to and driven by the timing belt assembly. The timing belt assembly includes a timing belt 107 and pulleys (not shown in the figure). At least one pulley is provided on the rotating shaft 1061 and the finger gripper 108. The pulley connected to the gripper 105 is used to drive the timing belt 107 to tighten, ensuring stable transmission of driving force.

[0046] The specific working process of the gripping system mainly includes three stages: gripping action, flipping action, and releasing action. In the gripping action stage, the electric gripper 104 closes the gripper 105 under electric drive to grasp the device; in the flipping action stage, the rotary cylinder 106 drives the gripper finger 108 to rotate to a specified angle via a synchronous belt assembly; in the releasing action stage, the gripper 105 opens and releases the device to the specified position. Throughout the process, the Y-axis module 200, Z-axis module 300, and X-axis module 400 work together to achieve precise positioning and movement of the robot body 100 in three-dimensional space.

[0047] The capture system in this embodiment has the following effects in actual use:

[0048] (1) Multi-degree-of-freedom transmission method: The robot body 100 achieves a three-degree-of-freedom transmission method through the cooperation of components such as the central control rotating platform 101, servo motor 102, connecting frame 103, electric gripper 104 and rotary cylinder 106. This design enables the robot to flexibly adapt to the needs of various installation directions and angles, improving the adaptability and flexibility of the system.

[0049] (2) High-precision gripping and placement: The design of the electric gripper 104 and gripper 105 enables the gripping system to accurately grip and place the device in the designated position. At the same time, the 360° rotation function of the gripper finger 108 further improves the gripping accuracy and stability of the system.

[0050] (3) High adjustability: The rotary cylinder 106 is driven by a synchronous belt, and the position of the tensioner and the belt length are adjustable, which improves the adjustability of the gripper 108 and the gripper 105 structure. This design enables the gripping system to better adapt to the needs of changing working conditions and improves the scalability and flexibility of the system.

[0051] (4) Cost savings: The device type can be switched by changing the device grippers and trays, enabling the gripping system to handle various types of devices. At the same time, the trays are stored on a mobile platform during the testing process, saving equipment costs and reducing the footprint of the equipment plant.

[0052] (5) Elimination of human interference: The automated operation of the grasping system eliminates human interference, ensuring the accuracy of test results. At the same time, due to the high adjustability of the system structure, it avoids the dangers of device installation caused by space constraints, thus ensuring worker safety to a certain extent.

[0053] In summary, the gripping system in this specific embodiment, through the design of a three-degree-of-freedom robotic arm and Y-axis, Z-axis, and X-axis modules, achieves high-precision and high-efficiency device gripping, flipping, and placement functions. Simultaneously, the system possesses strong adjustability and expandability, flexibly adapting to various working conditions. Furthermore, the system's automated operation eliminates human interference, ensuring the accuracy of test results and improving worker safety. Therefore, this gripping system has broad application prospects and significant practical value.

[0054] The above description is an explanation of the present utility model and not a limitation thereof. The scope of the present utility model is defined by the claims. Within the protection scope of the present utility model, any form of modification may be made.

Claims

1. A three-degree-of-freedom manipulator, characterized in that, include: The rotating part includes a servo motor capable of driving rotation; A connecting part is connected to the drive end of the rotating part, and an electric gripper is provided inside the connecting part; The clamping part includes two jaws connected to the electric jaw drive end and moving relative to each other, and each jaw has a rotatable gripper finger connected to one of the opposite sides of the two jaws. The finger clamping drive unit includes a rotary cylinder fixed on the connecting part, and the rotating shaft of the rotary cylinder extends from both ends to directly above the finger clamp, and the rotating shaft is connected to the finger clamp via a timing belt assembly (107).

2. A three-degree-of-freedom manipulator as described in claim 1, characterized in that: The rotating part also includes a central control rotating platform, and a servo motor is connected to the central control rotating platform.

3. A three-degree-of-freedom manipulator as described in claim 1, characterized in that: The connecting part also includes a connecting frame, which is connected to the drive shaft of the servo motor, and the rotary cylinder is fixed on the connecting frame.

4. A three-degree-of-freedom manipulator as described in claim 1, characterized in that: The timing belt assembly (107) includes a timing belt and a pulley, with at least one pulley provided on the shaft and the gripper, and also includes a pulley connected to the gripper to drive the timing belt to tension.

5. A three-degree-of-freedom manipulator as described in claim 1, characterized in that: The two ends of the rotating shaft are respectively connected to the corresponding grippers, and the rotating shaft can extend and retract axially.

6. A grasping system, characterized in that: Including the three-degree-of-freedom manipulator according to any one of claims 1-5.

7. The grasping system as described in claim 6, characterized in that: It also includes a Y-axis module, a Z-axis module, and an X-axis module that drive the three-degree-of-freedom robot to move along the Y, Z, and X axes.

8. A grasping system as described in claim 6, characterized in that: The connecting bracket is connected to the Y-axis module via a mounting plate.

Images