Nozzle structure and mounting base

Abstract

The nozzle structure comprises a base and a bearing seat, a first clamping groove is formed in the peripheral face of the base, a clamping part is formed by the bottom face of the first clamping groove and the bottom face of the base, an annular groove is formed in the top face of the first clamping groove, an air hole is formed in the center of the base in a penetrating mode, and the bearing seat is located at the upper end of the base. At least one annular protrusion is arranged on the end face, away from the base, of the bearing seat, and a first through hole is formed in the innermost annular protrusion and communicated with the air hole. According to the utility model, the at least one annular projection is arranged on the upper surface of the bearing seat, so that the gap between the bearing seat and the wafer box is sealed through the annular projection, air leakage is prevented from occurring when the wafer box is inflated, and the inner top wall of the first clamping groove is provided with the annular groove, so that the wafer box is prevented from being inflated. Therefore, the area of the inner top wall of the first clamping groove is reduced, the pressure between the inner top wall of the first clamping groove and the mounting seat is increased, the sealing performance during mounting with the mounting seat is improved, and the air leakage phenomenon is prevented.

Description

Technical Field

[0001] This utility model relates to the field of inflatable equipment technology, and in particular to a nozzle structure and mounting base. Background Technology

[0002] In the semiconductor manufacturing field, the wafer cassette (Foup) serves as a crucial tool for wafer storage and transport, and the stability and cleanliness of its internal environment are vital to wafer processing. To ensure wafers are protected from external environmental interference, the wafer cassette design must maintain a stable environment within the sealed cavity to prevent wafer oxidation and meet the requirements of high-precision chip manufacturing. However, existing wafer transport carriers face challenges during nitrogen-filled protection: on the one hand, tiny gaps between the filling port and the filling seal can lead to nitrogen leakage, severely affecting filling efficiency and internal environment control; on the other hand, the design limitations of the wafer cassette filling port restrict the possibility of applying additional force, which not only affects the balance and stability of the wafer cassette during transport but may also jeopardize wafer quality due to insufficient filling. Therefore, we provide a nozzle structure and mounting base to address these issues. Utility Model Content

[0003] The purpose of this invention is to overcome the shortcomings of the prior art and provide a nozzle structure and mounting base.

[0004] The objective of this utility model is achieved through the following technical solution:

[0005] A nozzle structure comprising:

[0006] The base has a first slot on its outer peripheral surface, the bottom surface of the first slot and the bottom surface of the base form a snap-fit ​​part, the top surface of the first slot has an annular groove, and the center of the base has a through-hole.

[0007] A support base is located at the upper end of the base. At least one annular protrusion is provided on the end face of the support base away from the base. The innermost annular protrusion forms a first through hole, which communicates with the air hole.

[0008] Preferably, when the number of annular protrusions is greater than 2, a recess is formed between two adjacent annular protrusions, and the recess is coaxial with the first through hole.

[0009] Preferably, the base and the support are integrally formed, the maximum diameter of the support is D1, the maximum diameter of the base is D2, satisfying: D1 > D2, and the support and the base are connected to form a transition surface.

[0010] Preferably, the transition surface is an inclined surface or an arc surface.

[0011] Preferably, the cross-section of the annular groove is rectangular, trapezoidal, triangular, or semi-circular.

[0012] Preferably, the inner top surface and / or inner bottom surface of the first card slot forms a connecting surface with the peripheral surface, and the inner top surface and / or inner bottom surface of the first card slot is connected to the peripheral surface through the connecting surface, which is an inclined surface or an arc surface.

[0013] Preferably, the groove depth of the first slot is N, the wall thickness of the base is L, and the minimum thickness of the base is M, satisfying: M = L - N, and N > M.

[0014] This application also provides a mounting base, the mounting base comprising:

[0015] The base has an air intake channel at its center, and a second slot is provided on the inner side wall of the air intake channel. The second slot is connected to the air intake channel. An air inlet is provided on the outer wall of the base and is connected to the air intake channel. The snap-fit ​​part in the nozzle structure described above extends into the second slot.

[0016] A protrusion is located at the upper end of the base, and a second through hole is provided at the center of the protrusion, which communicates with the second slot.

[0017] Preferably, the air inlet is detachably connected to an air inlet pipe.

[0018] Preferably, the corner between the inner wall of the second through hole and the upper surface of the protrusion is a right angle, an oblique angle, or a rounded corner.

[0019] This utility model has the following advantages:

[0020] 1. This utility model provides at least one annular protrusion on the upper surface of the support base, thereby sealing the gap between the support base and the wafer cassette and preventing air leakage when the wafer cassette is inflated. Furthermore, by providing an annular groove on the inner top wall of the first slot, the area of ​​the inner top wall of the first slot is reduced, increasing the pressure between the inner top wall of the first slot and the mounting base, thereby improving the sealing performance during installation with the mounting base and preventing air leakage.

[0021] 2. This utility model improves the sealing performance between the upper surface of the support and the gas inlet of the wafer cassette by setting multiple annular protrusions on the upper surface of the support.

[0022] 3. The base and the support seat of this utility model are integrally formed. The diameter of the support seat is larger than that of the base and there is a transition between them. This can better transfer the weight of the wafer box above the support seat to the base, making the installation of the base and the mounting seat more secure. Attached Figure Description

[0023] Figure 1 This is a three-dimensional structural diagram of the nozzle of this utility model.

[0024] Figure 2 This is a cross-sectional view of the nozzle structure of this utility model.

[0025] Figure 3 This is a three-dimensional structural diagram of the mounting base of this utility model.

[0026] Figure 4 This is a cross-sectional view of the mounting base of this utility model.

[0027] Figure 5 This is a schematic diagram of the assembly state of the nozzle and mounting base of this utility model.

[0028] Figure 6 This is a cross-sectional view of the nozzle and mounting base of this utility model in their assembled state.

[0029] In the figure, 110 is the base; 111 is the first slot; 112 is the annular groove; 113 is the connecting surface; 120 is the bearing seat; 121 is the transition surface; 130 is the annular protrusion; 131 is the first through hole; 140 is the air hole; 150 is the groove; 210 is the base; 211 is the air intake channel; 212 is the second slot; 220 is the protrusion; 221 is the second through hole; 230 is the air intake pipe; and A is the snap-fit ​​part. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can typically be arranged and designed in various different configurations.

[0031] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0032] like Figure 1 —An example shown in the figure.

[0033] A nozzle structure includes a base 110 and a support 120. The outer peripheral surface of the base 110 is provided with a first slot 111. The bottom surface of the first slot 111 and the bottom surface of the base 110 form a snap-fit ​​portion A. The top surface of the first slot 111 is provided with an annular groove 112. An air hole 140 is provided through the center of the base 110. The support 120 is located at the upper end of the base 110. At least one annular protrusion 130 is provided on the end face of the support 120 away from the base 110. The innermost annular protrusion 130 forms a first through hole 131, which communicates with the air hole 140.

[0034] See Figure 1 and Figure 2 As shown, the base 110 is directly below the support 120, and both the base 110 and the support 120 are rotating bodies and are coaxially arranged. Furthermore, in this embodiment, the vent 140 is connected to the first through hole 131 to form a gas channel for inflating the wafer cassette. It can be understood that the wafer cassette is located directly above the support 120, and the first through hole 131 is connected to the air inlet of the wafer cassette, thereby realizing the inflation of the wafer cassette.

[0035] Specifically, in this embodiment, an annular protrusion 130 is provided on the upper surface of the support 120 away from the base 110. The annular protrusion 130 is used to seal the gap between the support 120 and the wafer cassette, preventing air leakage when the wafer cassette is filled with gas through the gas channel formed by the vent 140 and the first through hole 131.

[0036] Please continue reading. Figure 1 and Figure 2 As shown, the vent 140 is a cylindrical through hole, and the inner diameter of the innermost annular protrusion 130 is larger than the inner diameter of the vent 140, that is, the inner diameter of the first through hole 131 is larger than the inner diameter of the vent 140.

[0037] Furthermore, the first slot 111 engages with the mounting base. It can be understood that when the annular groove 112 is opened on the inner top wall of the first slot 111, the contact area between the inner top wall of the first slot 111 and the mounting base is reduced, thereby increasing the force per unit area acting on the inner top wall of the first slot 111 (the smaller the area, the greater the pressure if the pressure remains constant). As a result, the deformation of the inner top wall of the first slot 111 will also increase, forming a better sealing effect. Therefore, the sealing between the inner top wall of the first slot 111 and the mounting base is achieved, preventing air leakage.

[0038] When the number of the annular protrusions 130 is greater than 2, a recessed groove 150 is formed between two adjacent annular protrusions 130, and the recessed groove 150 is coaxial with the first through hole 131.

[0039] See Figure 2As shown, the number of annular protrusions 130 on the upper surface of the carrier 120 is not limited. When the number of annular protrusions 130 is greater than 2, a groove 150 is formed between two adjacent annular protrusions 130. When the sealing effect of the innermost annular protrusion 130 fails, the outer annular protrusion 130 will achieve the seal. In this way, by setting multiple annular protrusions 130 on the upper surface of the carrier 120, the sealing performance at the connection between the carrier 120 and the wafer cassette is improved, and air leakage is prevented.

[0040] The base 110 and the support 120 are integrally formed. The maximum diameter of the support 120 is D1 and the maximum diameter of the base 110 is D2, satisfying that D1 > D2. The support 120 and the base 110 are connected to form a transition surface 121.

[0041] Please continue reading. Figure 1 and Figure 2 As shown, the base 110 and the support seat 120 are integrally molded to improve the overall strength. Specifically, the base 110 and the support seat 120 can undergo a certain deformation so that they can be snapped into the mounting base. For example, the base 110 and the support seat 120 can be integrally molded from materials that can deform, such as rubber or silicone. Injection molding can be selected to achieve integral molding, and other molding types can also be selected. No limitation is made here.

[0042] The diameter of the carrier 120 is larger than that of the base 110, and the connection between the carrier 120 and the base 110 gradually transitions from large to small, forming a transition surface 121, thereby enabling the pressure applied by the wafer cell to the upper surface of the carrier 120 to be uniformly transmitted to the base 110.

[0043] For example, the transition surface 121 is an inclined surface or an arc surface. In practice, the transition surface 121 can also be other curved surfaces as needed. It is not limited here. In this embodiment, refer to Figure 2 As shown, the transition surface 121 is an inclined surface. The angle of inclination of the inclined surface is not limited and can be designed according to the relationship between the diameter of the bearing seat 120 and the base 110.

[0044] For example, the cross-section of the annular groove 112 is rectangular, trapezoidal, triangular, or semi-circular, see reference. Figure 2 As shown, the cross-section of the annular groove 112 is rectangular.

[0045] The inner top surface and / or inner bottom surface of the first slot 111 forms a connecting surface 113 with the peripheral surface. The inner top surface and / or inner bottom surface of the first slot 111 is connected to the peripheral surface through the connecting surface 113, which is an inclined surface or an arc surface.

[0046] See Figure 2As shown, the purpose of setting the connecting surface 113 as a slope or arc surface is that the mounting base can contact the connecting surface 113 at the engagement position with the first slot 111, and apply a certain radial force to the connecting surface 113, so that the mounting base can fully contact the surface of the connecting surface 113 to form a good seal and prevent air leakage. In this embodiment, the connecting surface 113 is an arc surface. Similarly, the connecting surface 113 can also be formed at the connection between the inner bottom surface and the peripheral surface of the first slot 111, which can also achieve a good seal.

[0047] The groove depth of the first slot 111 is N, the wall thickness of the base 110 is L, and the minimum thickness of the base 110 is M, satisfying: M = L - N, and N > M.

[0048] Continue reading Figure 2 As shown, in order to ensure the connection strength between the base 110 and the mounting base, the engagement depth between the first slot 111 and the mounting base is increased. Specifically, the slot depth of the first slot 111 is denoted as N, and the wall thickness of the base 110 is L. Therefore, the distance M between the inner wall of the vent 140 and the first slot 111 is M = L - N, and N > M is made to increase the engagement strength between the first slot 111 and the mounting base. That is, the higher the engagement depth between the first slot 111 and the mounting base, the greater the engagement strength between the two. It should be noted that the axial height of the first slot 111 is not limited and can be designed according to the relationship between the flexibility strength of the material and the depth of the first slot 111.

[0049] For nozzle installation, this application embodiment also provides a mounting base for nozzle installation. Specifically, the mounting base includes a base 210 and a protrusion 220. Further, an air inlet channel 211 is provided at the center of the base 210, and a second slot 212 is provided on the inner side wall of the air inlet channel 211, which communicates with the air inlet channel 211. An air inlet is provided on the outer wall of the base 210, which communicates with the air inlet channel 211. The snap-fit ​​portion A in any of the above-described nozzle structures extends into the second slot 212. The protrusion 220 is located at the upper end of the base 210, and a second through hole 221 is provided at the center of the protrusion 220, which communicates with the second slot 212.

[0050] See Figure 3 , Figure 4 , Figure 5 as well as Figure 6As shown, the protrusion 220 and the base 210 are integrally molded, and the base 210 and the protrusion 220 can be made of metal. The snap-fit ​​part A snaps into the second slot 212. At this time, the protrusion 220 extends into the first slot 111 to achieve snap-fit, realizing the snap-fit ​​installation of the base 110 and the support seat 120. At this time, the air intake channel 211, the air hole 140 and the first through hole 131 are connected to form a gas channel. It can be understood that due to the size limitation of the components such as the second through hole 221 and the first slot 111, the inner sidewall of the second through hole 221 abuts against the connecting surface 113, so that the inner sidewall of the second through hole 221 is tightly attached to the connecting surface 113, and a certain radial force is applied to the connecting surface 113, causing a certain deformation at the position of the connecting surface 113, sealing the gap at the snap-fit ​​position of the base 110, the base 210 and the protrusion 220, forming a good sealing effect.

[0051] Please see Figure 6 As shown, the inner top wall of the base 110 abuts against the upper surface of the protrusion 220. When the wafer cassette is inflated, the weight of the wafer cassette is transferred to the base 110 through the support seat 120, causing the inner top wall of the first slot 111 to apply force to the upper surface of the protrusion 220. Since the inner top wall of the first slot 111 has an annular groove 112, the area of ​​the inner top wall of the annular groove 112 is reduced, making it easier to deform, increasing the contact force with the upper surface of the protrusion 220, and forming a better sealing effect.

[0052] For example, the corner between the inner wall of the second through hole 221 and the upper surface of the protrusion 220 is a right angle, an oblique angle, or a rounded corner. That is, the corner between the second through hole 221 and the upper surface of the protrusion 220 can contact the connecting surface 113 to achieve a good sealing effect. In this embodiment, in order to make the connecting surface 113 more easily deformed and improve the sealing effect, the corner between the inner wall of the second through hole 221 and the upper surface of the protrusion 220 is a right angle. It can be understood that because the contact area between the right angle and the connecting surface 113 is smaller, it is easier to deform the connecting surface 113 and achieve a sealing effect.

[0053] See Figure 6 As shown, the air inlet is detachably connected to an air inlet pipe 230, which is connected to an external air source. The air inlet pipe 230 delivers the external gas to the air inlet channel 211, and then delivers the gas to the wafer cassette through the channel formed by the air inlet channel 211, the air hole 140, and the first through hole 131, thereby filling the wafer cassette with gas.

[0054] The working process of this utility model is as follows: (See reference) Figure 6As shown, when the wafer cassette needs to be inflated, it is placed on the annular protrusion 130 on the upper surface of the support 120. At this time, the first through hole 131 is connected to the air inlet of the wafer cassette. The weight of the recess 150 will act on the annular protrusion 130, causing it to deform to a certain extent, thereby sealing the gap between the support 120 and the wafer cassette and preventing air leakage. Furthermore, the weight of the wafer cassette will be transferred to the base 110, causing the inner top wall of the first slot 111 to be tightly attached to the upper surface of the protrusion 220, improving the sealing between the base 110 and the protrusion 220 and preventing gas from leaking from the connection between the two.

[0055] External gas is transported to the intake channel 211 through the intake pipe 230. The gas is then transported to the wafer cassette through the channel formed by the intake channel 211, the vent 140, and the first through hole 131, thereby filling the wafer cassette with gas.

[0056] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A nozzle structure, characterized in that, include: The base (110) has a first slot (111) on its outer peripheral surface. The bottom surface of the first slot (111) and the bottom surface of the base (110) form a snap-fit ​​part (A). The top surface of the first slot (111) has an annular groove (112). The center of the base (110) has a through-hole (140). The support (120) is located at the upper end of the base (110). At least one annular protrusion (130) is provided on the end face of the support (120) away from the base (110). The innermost annular protrusion (130) forms a first through hole (131), which is connected to the air hole (140).

2. The nozzle structure according to claim 1, characterized in that: When the number of the annular protrusions (130) is greater than 2, a groove (150) is formed between two adjacent annular protrusions (130), and the groove (150) is coaxial with the first through hole (131).

3. The nozzle structure according to claim 1, characterized in that: The base (110) and the support (120) are integrally formed. The maximum diameter of the support (120) is D1, and the maximum diameter of the base (110) is D2, satisfying that D1 > D2. The support (120) and the base (110) are connected to form a transition surface (121).

4. The nozzle structure according to claim 3, characterized in that: The transition surface (121) is an inclined surface or an arc surface.

5. A nozzle structure according to claim 1, characterized in that: The cross-section of the annular groove (112) is rectangular, trapezoidal, triangular, or semi-circular.

6. The nozzle structure according to claim 1, characterized in that: The inner top surface and / or inner bottom surface of the first slot (111) forms a connecting surface (113) with the peripheral surface. The inner top surface and / or inner bottom surface of the first slot (111) are connected to the peripheral surface through the connecting surface (113), and the connecting surface (113) is an inclined surface or an arc surface.

7. A nozzle structure according to claim 1, characterized in that: The groove depth of the first slot (111) is N, the wall thickness of the base (110) is L, and the minimum thickness of the base (110) is M, satisfying: M = L - N, and N > M.

8. A mounting base, characterized in that, include: The base (210) has an air intake channel (211) at its center. The inner sidewall of the air intake channel (211) has a second slot (212) that communicates with the air intake channel (211). The outer wall of the base (210) has an air inlet that communicates with the air intake channel (211). The snap-fit ​​part (A) in the nozzle structure according to any one of claims 1 to 7 extends into the second slot (212). The protrusion (220) is located at the upper end of the base (210). A second through hole (221) is provided at the center of the protrusion (220), and the second through hole (221) is connected to the second slot (212).

9. A mounting base according to claim 8, characterized in that: The air inlet is detachably connected to an air inlet pipe (230).

10. A mounting base according to claim 8, characterized in that: The corner between the inner wall of the second through hole (221) and the upper surface of the protrusion (220) is a right angle, an oblique angle, or a rounded corner.

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