Refrigerating system and testing equipment

Abstract

The utility model relates to a refrigeration system and test equipment, the refrigeration system comprises a first refrigeration module, and the first refrigeration module comprises a first compressor, an oil separator, a condensation heat exchanger, a first expansion valve and a load evaporator which are connected in sequence to form a first refrigeration loop, an oil filling flow path, a first valve, an oil discharging flow path and a second valve. The oil filling flow path is communicated with an air return opening of the first compressor, the first valve is arranged on the oil filling flow path and used for controlling whether the oil filling flow path supplements new oil to the first compressor or not, the oil discharging flow path is communicated with an oil return opening of the oil separator, and the second valve is arranged on the oil discharging flow path and used for controlling whether the oil discharging flow path discharges old oil flowing out of the oil return opening or not. According to the technical scheme, the first compressor can change oil efficiently, the first refrigeration module does not need to be started and stopped frequently in the oil change process, refrigerant does not need to be injected repeatedly, normal refrigeration work of the first refrigeration module is not affected, and the working efficiency of the refrigeration system can be improved.

Description

Technical Field

[0001] This application relates to the field of refrigeration technology, and in particular to refrigeration systems and testing equipment. Background Technology

[0002] As the environmental requirements for semiconductor chip packaging and testing become increasingly stringent, testing equipment is now needed to provide testing environments ranging from -65℃ to 150℃ or even wider to test and verify the stability and reliability of chips operating under high and low temperature conditions. Currently, the industry mainstream approach is to use a cooling system in conjunction with a heater to control the temperature of the testing environment.

[0003] Under high-temperature testing conditions, the lubricating oil that enters the evaporator with the refrigerant during operation is prone to deterioration due to prolonged exposure to high temperatures. This reduces the oil's viscosity, impairs its lubrication effect, and fails to provide effective lubrication protection, increasing the risk of compressor wear. In related technologies, changing the compressor oil requires repeated starting and stopping of the compressor and multiple refrigerant refills, which not only results in low oil change efficiency but also disrupts the normal operation of the refrigeration system. Utility Model Content

[0004] Therefore, it is necessary to provide a refrigeration system and testing equipment to address the problem of low compressor oil change efficiency in refrigeration systems, which affects the normal operation of the refrigeration system.

[0005] In a first aspect, this application provides a refrigeration system, comprising:

[0006] The first refrigeration module includes:

[0007] The first compressor, oil separator, condenser heat exchanger, first expansion valve, and load evaporator are connected in sequence to form the first refrigeration circuit; and

[0008] An oil filling path and a first valve are provided. The oil filling path is connected to the return port of the first compressor. The first valve is provided in the oil filling path and is used to control whether the oil filling path replenishes new oil to the first compressor.

[0009] An oil drain path and a second valve are provided. The oil drain path is connected to the oil return port of the oil separator. The second valve is provided in the oil drain path and is used to control whether the oil drain path discharges the old oil flowing out through the oil return port.

[0010] In some embodiments, the refrigeration system further includes an oil return path and a third valve, wherein the oil return port of the oil separator is connected to the gas return port of the first compressor via the oil return path, and the third valve is disposed in the oil return path;

[0011] The refrigeration system has an oil return mode and an oil change mode. The third valve is used to open in the oil return mode to return oil to the first compressor. The first valve and the second valve are used to open in the oil change mode to change the oil in the first compressor.

[0012] In some embodiments, the first refrigeration module further includes an oil storage tank and / or an oil collection tank;

[0013] The oil storage tank is used to store new oil, and the oil filling flow path connects the oil outlet of the oil storage tank with the return gas port of the first compressor; the oil storage tank has an oil filling port and an oil filling valve for opening and closing the oil filling port.

[0014] The oil collection tank is used to store old oil. The oil discharge path connects the oil return port (h) of the oil separator with the oil inlet of the oil collection tank. The oil collection tank has an oil discharge port and an oil discharge valve for opening and closing the oil discharge port.

[0015] In some embodiments, the oil storage tank has a vent, which is located above the oil outlet of the oil storage tank and is connected to the return air port of the first compressor.

[0016] The oil collection tank has an air extraction port and is connected to the air return port of the first compressor.

[0017] In some embodiments, the first refrigeration module further includes an oil filling monitor, the oil filling monitor being used to acquire oil filling amount information characterizing the amount of new oil replenished to the first compressor via the oil filling flow path; and / or,

[0018] The first refrigeration module also includes an oil drain monitor, which is used to acquire oil drain information that represents the amount of old oil discharged outward through the oil drain path.

[0019] In some embodiments, the oil filling monitor includes an oil filling level gauge and / or an oil filling flow meter; the oil filling level gauge is disposed on an oil storage tank connected to the oil filling flow path, and the oil filling amount information includes the oil level information of the new oil in the oil storage tank obtained by the oil filling level gauge; the oil filling flow meter is disposed on the oil filling flow path, and the oil filling amount information includes the oil flow rate information of the new oil in the oil filling flow path obtained by the oil filling flow meter;

[0020] The oil discharge monitor includes an oil discharge level gauge and / or an oil discharge flow meter; the oil discharge level gauge is installed on an oil collection tank connected to the oil discharge path, and the oil discharge amount information includes the oil level information of the old oil in the oil collection tank obtained by the oil discharge level gauge; the oil discharge flow meter is installed in the oil discharge path, and the oil discharge amount information includes the oil flow rate information of the old oil in the oil discharge path obtained by the oil discharge flow meter.

[0021] In some embodiments, the first refrigeration module further includes an oil quality monitor, which is used to monitor whether the quality of the oil separated by the oil separator is up to standard;

[0022] The oil quality monitor is arranged on the flow path connected to the oil return port of the oil separator.

[0023] In some embodiments, the oil quality monitor includes a sight glass for displaying the color of the oil separated by the oil separator.

[0024] In some embodiments, the refrigeration system further includes a second refrigeration module, which includes a second compressor, a condenser, and a second expansion valve connected in sequence to form a second refrigeration circuit. The condenser heat exchanger exchanges heat between the first refrigeration circuit and the second refrigeration circuit, and is located between the second expansion valve and the second compressor in the second refrigeration circuit.

[0025] Secondly, this application provides a testing device, including a refrigeration system, a heater, and a testing terminal as described in any of the above embodiments, wherein the refrigeration system and the heater are used together to adjust the temperature of the testing terminal.

[0026] In practical applications, after starting the refrigeration system and testing equipment, the first compressor operates, and the refrigerant circulates in the first refrigeration circuit for cooling. If an oil change is needed for the first compressor, the first and second valves are opened, and the refrigeration system enters oil change mode. New oil is added to the first compressor through the oil filling path, and the old oil remaining in the oil separator is discharged through the oil drain path. At this time, the injection of new oil and the discharge of old oil occur simultaneously, achieving an oil change for the first compressor. Furthermore, when changing the oil in the first compressor, it is not necessary to shut it down; the first refrigeration module remains in a cooling-capable operating state, and the refrigerant maintains its circulation volume in the first refrigeration circuit without the need for re-injection of refrigerant.

[0027] In this way, the first compressor can not only change the oil efficiently, but also does not need to frequently start and stop the first refrigeration module during the oil change process, nor does it need to repeatedly inject refrigerant, thus not affecting the normal refrigeration operation of the first refrigeration module and improving the working efficiency of the refrigeration system. Attached Figure Description

[0028] Various other advantages and benefits will become apparent to those skilled in the art upon reading the detailed description of the preferred embodiments below. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, the same reference numerals denote the same parts throughout the drawings. In the drawings:

[0029] Figure 1 This is a schematic diagram of a refrigeration system according to some embodiments.

[0030] Figure 2 This is a schematic diagram of a refrigeration system according to other embodiments.

[0031] The reference numerals in the detailed embodiments are as follows:

[0032] 100. Refrigeration system; 10. First refrigeration module; L1. First refrigeration circuit; 11. First compressor; 12. Oil separator; h. Oil return port; 13. Condenser heat exchanger; 14. First expansion valve; 15. Load evaporator; 16. Oil tank; y1. Oil outlet; q1. Vent; y2. Oil filling port; 16a. Oil filling valve; 17. Oil collection tank; y3. Oil inlet; q2. Vacuum port; y4. Oil drain port; 17a. Oil drain valve; 18. Sight glass; S1. Oil filling path; f1. First valve; S2. Oil drain path; f2. Second valve; S3. Oil return path; f3. Third valve; 20. Second refrigeration module; L2. Second refrigeration circuit; 21. Second compressor; 22. Condenser; 23. Second expansion valve. Detailed Implementation

[0033] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0034] In the description of this application, it should be understood that, where they appear, the terms “center,” “longitudinal,” “lateral,” “length,” “width,” “thickness,” “upper,” “lower,” “front,” “rear,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” “inner,” “outer,” “clockwise,” “counterclockwise,” “axial,” “radial,” and “circumferential” indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0035] Furthermore, where applicable, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0036] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," "fixing," etc., shall be interpreted broadly. For example, they may refer to a fixed connection, a detachable connection, or an integral part; they may refer to a mechanical connection or an electrical connection; they may refer to a direct connection or an indirect connection through an intermediate medium; they may refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0037] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0038] It should be noted that, if an element is described as "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is described as "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0039] To address the problem of low compressor oil change efficiency in refrigeration systems, which affects the normal operation of the refrigeration system, as mentioned in the background art, a refrigeration system is first proposed.

[0040] Figure 1 This is a schematic diagram of a cooling system 100 according to some embodiments. (Refer to...) Figure 1The refrigeration system 100 proposed in this application includes a first refrigeration module 10. The first refrigeration module 10 includes a first compressor 11, an oil separator 12, a condenser heat exchanger 13, a first expansion valve 14, and a load evaporator 15, which are connected in sequence to form a first refrigeration circuit L1, as well as an oil filling path S1, a first valve f1, an oil draining path S2, and a second valve f2. The oil filling path S1 is connected to the return port of the first compressor 11. The first valve f1 is located in the oil filling path S1 and is used to control whether the oil filling path S1 replenishes new oil to the first compressor 11. The oil draining path S2 is connected to the return port h of the oil separator 12. The second valve f2 is located in the oil draining path S2 and is used to control whether the oil draining path S2 discharges the old oil flowing out through the return port h.

[0041] In the first refrigeration module 10, the first compressor 11, oil separator 12, condenser heat exchanger 13, first expansion valve 14, and load evaporator 15 are connected in sequence to form the first refrigeration circuit L1. The load evaporator 15 can be used directly or indirectly to exchange heat with the test terminal of the test equipment to regulate the temperature of the test terminal. When the first refrigeration module 10 is started, the high-temperature gaseous refrigerant generated by the first compressor 11 flows to the condenser heat exchanger 13 for cooling after passing through the oil separator 12, resulting in a medium-temperature liquid refrigerant. The medium-temperature liquid refrigerant then passes through the first expansion valve 14 for cooling and depressurization, becoming a low-temperature, low-pressure liquid refrigerant. The low-temperature, low-pressure liquid refrigerant absorbs external heat through the load evaporator 15, becoming a low-pressure gaseous refrigerant. Finally, the low-pressure gaseous refrigerant flows back to the first compressor 11, where it is converted back into a high-temperature, high-pressure gaseous refrigerant for output, and so on.

[0042] When the refrigerant is discharged from the first compressor 11, it carries lubricating oil. When it flows through the oil separator 12, the lubricating oil separates from the refrigerant and remains in the oil separator 12. As the refrigerant circulates in the first refrigeration circuit L1, the deteriorated lubricating oil (referred to here as old oil) can remain in the oil separator 12.

[0043] The oil filling path S1 is connected to the return port of the first compressor 11 and is used to fill the first compressor 11 with new oil (i.e., qualified lubricating oil). The first valve f1 is used to control the conduction of the oil filling path S1. The oil draining path S2 is connected to the return port h of the oil separator 12. The old oil remaining in the oil separator 12 can flow to the oil draining path S2 through the return port h. The second valve f2 is used to control the conduction of the oil draining path S2 to control whether the oil draining path S2 discharges old oil.

[0044] In practical applications, after the refrigeration system 100 is started, the first compressor 11 operates, and the refrigerant circulates in the first refrigeration circuit L1 for cooling. If an oil change is needed for the first compressor 11, the first valve f1 and the second valve f2 are opened, and the refrigeration system 100 enters the oil change mode. New oil is added to the first compressor 11 through the oil filling path S1, and the old oil remaining in the oil separator 12 is discharged through the oil draining path S2. At this time, the injection of new oil and the discharge of old oil are carried out simultaneously, realizing the oil change of the first compressor 11. Moreover, when changing the oil of the first compressor 11, it is not necessary to shut down the first compressor 11. The first refrigeration module 10 is still in a cooling working state, and the refrigerant can maintain its circulation in the first refrigeration circuit L1 without the need to re-inject refrigerant.

[0045] In this way, the first compressor 11 can not only change the oil efficiently, but also does not need to frequently start and stop the first refrigeration module 10 during the oil change process, nor does it need to repeatedly inject refrigerant, so as not to affect the normal refrigeration operation of the first refrigeration module 10, thereby improving the working efficiency of the refrigeration system 100.

[0046] In some embodiments, please refer to Figure 1 The refrigeration system 100 also includes an oil return path S3 and a third valve f3. The oil return port h of the oil separator 12 is connected to the gas return port of the first compressor 11 via the oil return path S3, and the third valve f3 is located in the oil return path S3. The refrigeration system 100 has an oil return mode and an oil change mode. The third valve f3 is used to open in the oil return mode to return oil to the first compressor 11, and the first valve f1 and the second valve f2 are used to open in the oil change mode to change the oil in the first compressor 11.

[0047] When the refrigeration system 100 is in oil change mode, it means that the oil in the first compressor 11 needs to be changed. When the refrigeration system 100 is in oil return mode, it means that the oil in the first compressor 11 does not need to be changed; the undeteriorated lubricating oil separated by the oil separator 12 can simply be returned to the first compressor 11 through the oil return flow path S3.

[0048] In practical applications, after the refrigeration system 100 is started, the first compressor 11 operates, and the refrigerant circulates in the first refrigeration circuit L1 for cooling. When the lubricating oil is not deteriorated and there is no need to change the oil in the first compressor 11, the refrigerant carries the lubricating oil out of the first compressor 11. To ensure the lubricating oil content in the first compressor 11, the third valve f3 is opened, entering the oil return mode, and the lubricating oil remaining in the oil separator 12 is returned to the first compressor 11 to replenish its oil level. When the lubricating oil deteriorates and the first compressor 11 needs to be changed, the lubricating oil remaining in the oil separator 12 is deteriorated oil. In this case, the first valve f1 and the second valve f2 are opened, entering the oil change mode.

[0049] Understandably, in oil change mode, the third valve f3 is closed. In oil return mode, the first valve f1 and the second valve f2 are closed. The entry and exit of the oil return mode can be based on the start-up time of the refrigeration system 100. For example, in normal operating mode, the refrigeration system 100 enters the oil return mode every 10 minutes. The entry and exit of the oil return mode can also be based on the lubricating oil level in the compressor, etc., entering the oil return mode when the lubricating oil is insufficient.

[0050] In this way, lubricating oil can be added to the first compressor 11 whether the lubricating oil has deteriorated or not, so as to ensure the lubricating oil content in the first compressor 11 and facilitate the normal operation of the first compressor 11.

[0051] In some embodiments, please refer to Figure 1 The first refrigeration module 10 also includes an oil storage tank 16 and / or an oil collection tank 17. The oil storage tank 16 stores new oil, and an oil filling path S1 connects the oil outlet y1 of the oil storage tank 16 to the return gas port of the first compressor 11. The oil storage tank 16 has an oil filling port y2 and an oil filling valve 16a for opening and closing the oil filling port y2. The oil collection tank 17 stores old oil, and an oil draining path S2 connects the return oil port h of the oil separator 12 to the oil inlet y3 of the oil collection tank 17. The oil collection tank 17 has an oil drain port y4 and an oil drain valve 17a for opening and closing the oil drain port y4.

[0052] The oil outlet y1 of the oil tank 16 is connected to the return port of the first compressor 11 via the oil filling flow path S1. When the refrigeration system 100 enters the oil change mode, the first valve f1 opens, and the new oil in the oil tank 16 flows to the first compressor 11 through the oil filling flow path S1, thereby replenishing the first compressor 11 with new oil. The configuration of the oil tank 16 allows the refrigeration system 100 to store a certain amount of new oil without the need for frequent manual refilling, shortening the oil change time and improving oil change efficiency.

[0053] The oil inlet y3 of the oil collection tank 17 is connected to the oil return port h of the oil separator 12 through the oil discharge path S2. When the refrigeration system 100 enters the oil change mode, the second valve f2 is opened, and the old oil in the oil separator 12 flows to the oil collection tank 17 through the oil discharge path S2 and is stored in the oil collection tank 17. The oil collection tank 17 can recycle the old oil while the refrigeration system 100 is running continuously, which can improve the oil change efficiency.

[0054] In a further embodiment, please refer to Figure 1 The oil storage tank 16 has a vent q1, which is located above the oil outlet y1 of the oil storage tank 16 and is connected to the return air port of the first compressor 11.

[0055] The vent q1 is connected to the gas in the first compressor 11, which allows the gas pressure in the oil storage tank 16 to be balanced with the gas pressure in the first compressor 11, which helps the new oil in the oil storage tank 16 to flow smoothly into the first compressor 11.

[0056] Specifically, the vent q1 of the oil storage tank 16 can be set higher than the return vent of the first compressor 11 to prevent the lubricating oil entering from the return vent from flowing back to the oil storage tank 16 through the vent q1 under the action of gravity.

[0057] In a further embodiment, please refer to Figure 1 The oil collection tank 17 has an air extraction port q2, which is connected to the air return port of the first compressor 11.

[0058] Specifically, the suction port q2 of the oil collection tank 17 can be set higher than its discharge port y4. The suction port q2 is connected to the return port of the first compressor 11. Under the suction pressure of the first compressor 11, the old oil in the oil separator 12 can flow faster through the oil inlet y3 into the oil collection tank 17, making the old oil recovery smoother.

[0059] Can the first refrigeration circuit L1 have a flow path connecting the load evaporator 15 and the return port of the first compressor 11, and the oil-filled flow path S1 can be connected to the return port of the first compressor 11 through this flow path. The suction port q2 of the oil collection tank 17 can be connected to the return port of the first compressor 11 through this flow path, and the connection position of the suction port q2 of the oil collection tank 17 with this flow path is closer to the load evaporator 15 than the connection position of the oil-filled flow path S1 with this flow path.

[0060] In some embodiments, the first refrigeration module 10 further includes an oil filling monitor (not shown), which is used to acquire oil filling amount information representing the amount of new oil added to the first compressor 11 via the oil filling flow path S1; and / or, the first refrigeration module 10 further includes an oil draining monitor (not shown), which is used to acquire oil draining amount information representing the amount of old oil discharged outward via the oil draining flow path S2.

[0061] The oil filling monitor can be a device that measures and monitors the oil flow rate and oil velocity flowing through the oil filling path S1, or it can be a device that measures and monitors the oil level and total oil volume in the oil storage tank 16 connected to the oil filling path S1. That is, the oil filling information can be oil level information, oil flow rate information, oil velocity information, total oil volume information, etc., depending on the specific type of oil filling monitor, as long as the oil filling information can directly or indirectly reflect the amount of new oil supplied by the oil filling path S1 to the first compressor 11.

[0062] Similarly, the oil drain monitor can be a device that measures and monitors the oil flow rate and velocity flowing through the oil drain path S2, or it can be a device that measures and monitors the oil level and total oil volume in the oil collection tank 17 connected to the oil drain path S2. That is, the oil drain information can be oil level information, oil flow rate information, oil velocity information, total oil volume information, etc., depending on the specific type of oil drain monitor, as long as the oil drain information can directly or indirectly reflect the amount of old oil discharged by the oil drain path S2.

[0063] In practical applications, the oil change process can be fed back based on the filling flow rate information obtained by the oil filling monitor and / or the oil draining amount information obtained by the oil draining monitor. This can be used to control whether the oil change mode has ended, and can also be used to control the oil change process. For example, by comparing the filling flow rate information and the oil draining amount information, the duty cycle of the first valve f1 and the second valve f2 can be controlled so that the amount of new oil added to the refrigeration system 100 and the amount of old oil discharged are balanced within the allowable range.

[0064] Specifically, in this embodiment, the oil filling monitor includes an oil level gauge (not shown) and / or an oil flow meter (not shown). The oil level gauge is installed on the oil storage tank 16, which is connected to the oil filling flow path S1, and the oil filling quantity information includes the oil level information of the new oil in the oil storage tank 16 obtained by the oil level gauge. The oil filling flow meter is installed on the oil filling flow path S1, and the oil filling quantity information includes the oil flow rate information of the new oil in the oil filling flow path S1 obtained by the oil flow meter.

[0065] Specifically, the oil level gauge can obtain the oil level information of the oil storage tank 16. Based on the oil level information of the oil storage tank 16, the change in oil volume discharged from the oil storage tank 16 can be known. The change in oil volume is the amount of new oil flowing through the oil filling path S1. In other words, the amount of new oil replenished to the first compressor 11 through the oil level information of the oil storage tank 16 can be indirectly fed back.

[0066] Specifically, the oil flow meter can acquire the instantaneous flow rate or cumulative flow rate of the oil filling flow path S1. That is, the oil flow rate information includes instantaneous or cumulative oil flow rate information. Based on the instantaneous and cumulative flow rates, the amount of new oil flowing through the oil filling flow path S1 in oil-changing mode can be calculated. In other words, the amount of new oil replenished to the first compressor 11 via the oil filling oil path can be directly or indirectly fed back based on the oil flow rate information acquired by the oil flow meter. Those skilled in the art can conventionally select the oil filling flow meter and oil filling level gauge; no limitations are imposed here.

[0067] At this point, the oil filling volume information can be obtained through an oil filling level gauge and / or an oil filling flow meter, which is simple to configure and easy to implement.

[0068] Of course, in other embodiments, the oil filling monitor may also include an oil filling velocity meter disposed in the oil filling flow path S1. The oil filling velocity meter is used to monitor the flow velocity of new oil in the oil filling flow path S1. The oil filling flow rate can be calculated based on the oil filling velocity and the oil filling time, thereby indirectly feeding back the amount of new oil added to the oil filling flow path S1.

[0069] Specifically, in this embodiment, the oil drain monitoring device includes an oil level gauge (not shown) and / or an oil flow meter (not shown). The oil level gauge is installed on the oil collection tank 17, which is connected to the oil drain flow path S2, and the oil drain quantity information includes the oil level information of the old oil in the oil collection tank 17 obtained by the oil level gauge. The oil flow meter is installed on the oil drain flow path S2, and the oil drain quantity information includes the oil flow rate information of the old oil in the oil drain flow path S2 obtained by the oil flow meter.

[0070] Specifically, the oil level gauge can obtain the oil level information of the oil collection tank 17. Based on the oil level information of the oil collection tank 17, the change in the volume of oil collected in the oil collection tank 17 can be known. The change in oil volume is the amount of old oil discharged by the oil discharge path S2. That is, based on the oil level information of the oil collection tank 17, the amount of old oil discharged to the oil collection tank 17 through the oil discharge path S2 can be indirectly fed back.

[0071] Specifically, the oil drain flow meter can obtain the instantaneous flow rate or cumulative flow rate of the oil drain path S2. Based on the instantaneous flow rate and cumulative flow rate, the amount of old oil flowing through the oil drain path S2 in oil change mode can be calculated. That is, the amount of old oil discharged to the oil collection tank 17 through the oil drain path can be directly or indirectly fed back based on the oil flow rate information obtained by the oil drain flow meter. Those skilled in the art can make conventional selections for the oil drain flow meter and the oil drain level gauge, and no limitations are made here.

[0072] At this point, the oil discharge volume information can be obtained through the oil discharge level gauge and / or oil discharge flow meter, which is simple to configure and easy to implement.

[0073] Of course, in other embodiments, the oil drain monitor may also include an oil drain velocity meter installed in the oil drain flow path S2. The oil drain velocity meter is used to monitor the flow velocity of the old oil in the oil drain flow path S2. The oil drain flow rate can be calculated based on the oil drain velocity and the oil drain time, thereby indirectly reflecting the amount of old oil discharged from the oil drain flow path S2.

[0074] In some embodiments, the first refrigeration module 10 further includes an oil quality monitor, which is used to monitor whether the quality of the oil separated by the oil separator 12 is up to standard.

[0075] Specifically, the oil quality monitor may include an optical sensor to determine the quality of the lubricating oil by measuring its light transmittance; generally, the lower the light transmittance, the lower the quality. The oil quality monitor may also include a viscometer to measure the viscosity of the lubricating oil, thus determining its quality; generally, higher viscosity indicates lower quality. Furthermore, the oil quality monitor may include a pH meter to measure the acidity or alkalinity of the lubricating oil, thus determining its quality; generally, higher acidity indicates lower quality. The specific choice of oil quality monitor is not limited here; those skilled in the art can configure it based on commonly used methods for determining whether lubricating oil has deteriorated.

[0076] As the refrigeration system 100 operates, deteriorated lubricating oil continuously remains in the oil separator 12. If the lubricating oil in the oil separator 12 has not deteriorated, it can be returned to the first compressor 11 through the oil return flow path S3 in the oil return mode. If the lubricating oil in the oil separator 12 deteriorates, the old oil in the oil separator 12 can be discharged in the oil change mode, and new oil can be added to the compressor to realize the oil change of the first compressor 11.

[0077] At this time, the quality of the lubricating oil can be directly monitored through the oil quality monitor, thereby controlling whether the refrigeration system 100 enters the oil change mode. This allows for more accurate control of the oil change process and is more conducive to the healthy operation of the first compressor 11.

[0078] In one embodiment, the oil quality monitor is arranged in a flow path connected to the oil return port h of the oil separator 12, which facilitates the installation and maintenance of the oil quality monitor. Specifically, the oil quality monitor can be arranged on the oil return flow path S3 or on the oil drain flow path S2. In one example, the oil return flow path S3 and the oil drain flow path S2 are connected to the oil return port h through a transition flow path, and the oil quality monitor can be arranged on the transition flow path. Of course, in other embodiments, the oil quality monitor can be located inside the oil separator 12.

[0079] In one embodiment, reference is made to Figure 1 The oil quality monitor includes a sight glass 18, which displays the color of the oil separated during oil separation. When lubricating oil deteriorates, its color typically becomes darker and more cloudy. Workers can observe the color of the lubricating oil through the sight glass 18 and judge whether the lubricating oil has deteriorated based on experience. This method of identifying lubricating oil deterioration is simple and economical. Alternatively, a photographic device can be used to capture images of the lubricating oil through the sight glass 18, and then image analysis can be used to determine whether the lubricating oil has deteriorated.

[0080] Figure 2 This is a schematic diagram of a refrigeration system 100 according to other embodiments.

[0081] In some embodiments, refer to Figure 2The refrigeration system 100 also includes a second refrigeration module 20. The second refrigeration module 20 includes a second compressor 21, a condenser 22 and a second expansion valve 23 connected in sequence to form a second refrigeration circuit L2. A condensing heat exchanger 13 exchanges heat between the first refrigeration circuit L1 and the second refrigeration circuit L2, and is located between the second expansion valve 23 and the second compressor 21 on the second refrigeration circuit L2.

[0082] The first refrigeration module 10 and the second refrigeration module 20 exchange heat through a condenser heat exchanger 13, which is located in both the first refrigeration circuit L1 and the second refrigeration circuit L2. In the second refrigeration circuit L2, the condenser heat exchanger 13 acts as an evaporator to cool the refrigerant in the first refrigeration circuit L1, and it is arranged between the second expansion valve 23 and the suction end of the second compressor 21.

[0083] At this time, the refrigeration system 100 is a cascade system, which uses the load evaporator 15 of the first refrigeration module 10 to refrigerate the test terminal of the test equipment. The refrigeration system 100 has a strong refrigeration capacity and can provide a lower test temperature for the test terminal.

[0084] In addition, this application embodiment also provides a testing device, including the refrigeration system 100, heater and testing terminal in any of the above embodiments, wherein the refrigeration system 100 and heater are used together to adjust the temperature of the testing terminal.

[0085] This testing equipment has all the beneficial effects described in the above embodiments.

[0086] The testing equipment can be sorting testing equipment, probe station equipment, aging testing equipment, packaging testing equipment, etc., used for performance testing of semiconductor devices such as chips or wafers. The testing terminals can be test heads, test chambers, preheating trays, feed shuttles, wafer carrier trays, etc. A test chamber is a cavity structure that provides testing space, and multiple chips or wafers can be stored within it. The load evaporator 15 of the cooling system 100 can be arranged within the test space to regulate the test temperature. A test head is a pressure head structure that can press down against the chip, directly contacting it to regulate its temperature. A refrigerant flow path can be provided within the load evaporator 15 of the cooling system 100. The refrigerant flowing through the load evaporator 15 cools the refrigerant in the refrigerant flow path. This refrigerant flow path connects to a pipe inside the test head, regulating the temperature of the test head through the refrigerant. A preheating tray is a structure that holds the chip and regulates its temperature. A refrigerant flow path connects to a pipe inside the preheating tray, regulating its temperature through the refrigerant. The feed shuttle refers to the structure that transports the chip. A coolant flow path can be connected to the piping within the feed shuttle, allowing the temperature of the feed shuttle to be regulated by the coolant. The wafer carrier tray is a structure that holds the wafer by adsorption. A coolant flow path can be connected to the piping within the wafer carrier tray, allowing the test temperature of the wafer to be regulated by the coolant. Heaters can be directly installed at each test terminal, working in conjunction with the cooling system 100 to achieve precise temperature regulation of the test terminal.

[0087] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0088] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of this patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A refrigeration system, characterized in that, include: The first refrigeration module (10) includes: A first compressor (11), an oil separator (12), a condenser heat exchanger (13), a first expansion valve (14), and a load evaporator (15) are sequentially connected to form a first refrigeration circuit (L1); and An oil filling path (S1) and a first valve (f1) are provided. The oil filling path (S1) is connected to the return port of the first compressor (11). The first valve (f1) is provided in the oil filling path (S1) and is used to control whether the oil filling path (S1) replenishes new oil to the first compressor (11). The oil drain path (S2) and the second valve (f2) are provided. The oil drain path (S2) is connected to the oil return port (h) of the oil separator (12). The second valve (f2) is provided in the oil drain path (S2) and is used to control whether the oil drain path (S2) discharges the old oil flowing out through the oil return port (h).

2. The refrigeration system according to claim 1, characterized in that, The refrigeration system also includes an oil return path (S3) and a third valve (f3). The oil return port (h) of the oil separator (12) is connected to the gas return port of the first compressor (11) via the oil return path (S3). The third valve (f3) is located in the oil return path (S3). The refrigeration system has an oil return mode and an oil change mode. The third valve (f3) is used to open in the oil return mode to return oil to the first compressor (11); the first valve (f1) and the second valve (f2) are used to open in the oil change mode to change the oil in the first compressor (11).

3. The refrigeration system according to claim 1, characterized in that, The first refrigeration module (10) further includes an oil storage tank (16) and / or an oil collection tank (17); The oil storage tank (16) is used to store new oil, and the oil filling flow path (S1) connects the oil outlet (y1) of the oil storage tank (16) with the return air port of the first compressor (11); the oil storage tank (16) has an oil filling port (y2) and an oil filling valve (16a) for opening and closing the oil filling port (y2); The oil collection tank (17) is used to store old oil. The oil discharge path (S2) connects the oil return port (h) of the oil separator (12) with the oil inlet (y3) of the oil collection tank (17). The oil collection tank (17) has an oil discharge port (y4) and an oil discharge valve (17a) for opening and closing the oil discharge port (y4).

4. The refrigeration system according to claim 3, characterized in that, The oil storage tank (16) has a vent (q1), which is located above the oil outlet (y1) of the oil storage tank (16) and is connected to the return air port of the first compressor (11). The oil collection tank (17) has an air extraction port (q2) and is connected to the air return port of the first compressor (11).

5. The refrigeration system according to any one of claims 1 to 4, characterized in that, The first refrigeration module (10) further includes an oil filling monitor, which is used to acquire oil filling information characterizing the amount of new oil supplied to the first compressor (11) via the oil filling flow path (S1); and / or, The first refrigeration module (10) also includes an oil drain monitor, which is used to obtain oil drain information that represents the amount of old oil discharged outward through the oil drain path (S2).

6. The refrigeration system according to claim 5, characterized in that, The oil filling monitor includes an oil filling level gauge and / or an oil filling flow meter; the oil filling level gauge is installed on an oil storage tank (16) connected to the oil filling flow path (S1), and the oil filling amount information includes the oil level information of the new oil in the oil storage tank (16) obtained by the oil filling level gauge; the oil filling flow meter is installed on the oil filling flow path (S1), and the oil filling amount information includes the oil flow rate information of the new oil in the oil filling flow path (S1) obtained by the oil filling flow meter; The oil discharge monitor includes an oil discharge level gauge and / or an oil discharge flow meter; the oil discharge level gauge is installed on an oil collection tank (17) connected to the oil discharge path (S2), and the oil discharge amount information includes the oil level information of the old oil in the oil collection tank (17) obtained by the oil discharge level gauge; the oil discharge flow meter is installed on the oil discharge path (S2), and the oil discharge amount information includes the oil flow information of the old oil in the oil discharge path (S2) obtained by the oil discharge flow meter.

7. The refrigeration system according to any one of claims 1 to 4, characterized in that, The first refrigeration module (10) also includes an oil quality monitor, which is used to monitor whether the quality of the oil separated by the oil separator (12) is up to standard; The oil quality monitor is arranged on the flow path connected to the oil return port (h) of the oil separator (12).

8. The refrigeration system according to claim 7, characterized in that, The oil quality monitor includes a sight glass (18) for displaying the color of the oil separated by the oil separator (12).

9. The refrigeration system according to any one of claims 1 to 4, characterized in that, The refrigeration system further includes a second refrigeration module (20), which includes a second compressor (21), a condenser (22), and a second expansion valve (23) connected in sequence to form a second refrigeration circuit (L2). The condenser heat exchanger (13) exchanges heat between the first refrigeration circuit (L1) and the second refrigeration circuit (L2), and is located between the second expansion valve (23) and the second compressor (21) on the second refrigeration circuit (L2).

10. A testing device, characterized in that, include: The refrigeration system as described in any one of claims 1 to 9; A heater and a test terminal, wherein the cooling system and the heater are used together to adjust the temperature of the test terminal.

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