Rapid detection equipment for fluorine-containing sludge in generic semiconductor industry

Abstract

The utility model provides rapid detection equipment for fluorine-containing sludge in the generic semiconductor industry. The equipment comprises a shell, a sample table and a detection system, the shell comprises a top opening and a sealing end cover; the sample table comprises a bearing assembly and a second driving part; the bearing assembly is movably connected in the shell, and the bearing assembly comprises a first bearing piece with a bearing cavity and a second bearing piece with a first mounting cavity; the first bearing part is mounted in the first mounting cavity through a first driving part, and the first driving part is used for driving the first bearing part to rotate around a first central shaft of the first bearing part; the first center shaft extends in the direction perpendicular to the second bearing piece. The second driving piece is arranged on the second bearing piece, and the output end of the second driving piece is connected with the first driving piece; the second driving part is used for driving the first bearing part to perform eccentric motion within 1-5 degrees relative to the first central shaft; the detection system is arranged in the shell. The method can be used for quantitatively detecting the light elements, and has relatively high detection sensitivity.

Description

Technical Field

[0001] This application relates to the technical field of fluoride-containing sludge treatment in the semiconductor industry, and in particular to a rapid detection device for fluoride-containing sludge in the semiconductor industry. Background Technology

[0002] In recent years, the information technology and new energy industries, as well as the semiconductor, microelectronics, photovoltaic, and optoelectronic industries, have developed rapidly. Within these industries, hydrofluoric acid (HF) is used for etching, processing, and cleaning components, generating a large amount of fluoride-containing wastewater. During the treatment of this wastewater, calcium ions react with fluoride ions in the wastewater to precipitate a large amount of fluoride-containing sludge. Analysis has shown that calcium fluoride (CaF2) constitutes a high proportion of this sludge, making it a viable substitute for natural fluorite.

[0003] Natural fluorite is a non-renewable resource, and my country's current reserves can only meet its development needs for 10 years. As a byproduct of emerging industries, the production of fluoride-containing sludge from the semiconductor industry is increasing year by year, necessitating the establishment of a differentiated recycling and resource utilization system. However, the industry lacks a basic method for quality assessment of fluoride-containing sludge from the semiconductor industry. Because the composition of fluoride-containing sludge from the semiconductor industry fluctuates more significantly and its quality changes more rapidly than that of natural fluorite, the requirements for testing frequency and timeliness are extremely high. Existing analytical methods for fluoride-containing sludge from the semiconductor industry suffer from cumbersome analytical steps, long testing times, and expensive and bulky equipment. Therefore, a large amount of synthetic fluorite cannot be effectively identified and is treated as ordinary solid waste, primarily disposed of through low-end disposal methods. Due to the large volume of sludge, severe environmental incidents such as landfilling are frequent.

[0004] X-ray fluorescence spectroscopy is increasingly widely used in geology, mineralogy, metallurgy, building materials and other fields. It utilizes X-rays emitted from an X-ray tube to irradiate the sample surface. After the elements in the sample absorb the X-rays, they produce X-ray fluorescence of specific wavelengths. By measuring the wavelength and energy of these X-ray fluorescences, qualitative and quantitative analysis of the sample can be achieved.

[0005] However, X-ray fluorescence spectroscopy is not capable of analyzing light elements and has low detection accuracy for light elements (C, N, O, F, etc.) in samples. Utility Model Content

[0006] This application provides a rapid detection device for fluoride-containing sludge in the semiconductor industry, which can quantitatively detect light elements and has high detection sensitivity.

[0007] This application provides a rapid detection device for fluoride-containing sludge in the semiconductor industry, comprising:

[0008] A housing, the housing including a top opening and a sealing end cap covering the top opening;

[0009] A sample stage includes a support assembly and a second drive component. The support assembly is movably connected within a housing and includes a first support member and a second support member having a first mounting chamber. The first support member includes a mounting chamber for fixing a sample to be tested. The first support member is mounted in the first mounting chamber via a first drive component, which drives the first support member to rotate around its first central axis at a rotational speed of 1 rpm to 2.5 rpm. The first central axis extends in a direction perpendicular to the second support member. The second drive component is disposed on the second support member, and its output end is connected to the first drive component. The second drive component drives the first support member to perform eccentric movement relative to the first central axis within a preset range, wherein the preset range is 1° to 5°.

[0010] A detection system, disposed within the housing, is used to detect the light element content of the sample to be tested. The detection system includes an optical path assembly disposed within the housing. The optical path assembly includes a first optical element and a second optical element arranged at intervals. On a cross-section parallel to the housing, the orthographic projection of the sample stage is located on one side of the line connecting the orthographic projections of the first and second optical elements. Both the first and second optical elements include a curved crystal support and a first and a second curved crystal rotatably connected to the curved crystal support. The orientations of the first and second curved crystals are opposite, and they are made of different materials. Both the first and second curved crystals include a first radius of curvature and a second radius of curvature, which are different.

[0011] In one possible implementation, the first bent crystal is used to detect fluorine in the fluorinated sludge, and the material of the first bent crystal includes lithium fluoride, thallium hydrogen phthalate, or pentaerythritol.

[0012] The second curved crystal is used to detect calcium in the fluorinated sludge, and the material of the second curved crystal includes lithium fluoride or germanium.

[0013] In one possible implementation, the carrier assembly further includes a third carrier having a second mounting chamber; the second carrier is disposed within the second mounting chamber, and the second drive member is at least partially accommodated within the second mounting chamber.

[0014] In one possible implementation, the sample stage further includes a rotating device connected to the support assembly, which drives the support assembly to rotate along a second central axis; the second central axis is perpendicular to the first central axis.

[0015] The sample stage also includes a lifting device, which is connected to the inner wall of the housing and extends along the first central axis;

[0016] The rotating device of the sample stage is connected to the lifting device.

[0017] In one possible implementation, the sample to be tested includes a sample cup with an opening and a transparent film sealing the opening; the sample cup has an inner diameter of 3cm to 5cm and a height of 0.6cm to 1.0cm.

[0018] The bearing chamber is provided with a telescopic fixing component, which is configured to connect to the sample cup and fix the transparent membrane.

[0019] In one possible implementation, the detection system further includes a light source, a filter exchanger, and a detector. The light source is disposed on one side of the first optical element, the filter exchanger is disposed between the light source and the first optical element, and the filter exchanger includes an aluminum filter and a beryllium filter; the detector is disposed on one side of the second optical element.

[0020] The X-rays emitted by the light source are filtered by the filter exchanger and then focused and reflected by the first optical element to the sample to be tested; wherein, when the detection device is used to detect fluorine, the filter of the filter exchanger is a beryllium filter; when the detection device is used to detect calcium, the filter of the filter exchanger is an aluminum filter;

[0021] The X-rays excite the test elements in the sample to generate X-ray fluorescence;

[0022] The X-ray fluorescence is focused and reflected by the second optical element to the detector.

[0023] In one possible implementation, the detection device further includes a temperature control system, which includes a heating element, at least one temperature sensor, and a temperature controller; the heating element and at least one temperature sensor are respectively disposed on the housing.

[0024] The thermostat is connected to the heating element and the temperature sensor respectively; the thermostat is used to control the working state of the heating element according to the temperature sensor.

[0025] The constant temperature system also includes at least one fan, which is disposed on the housing and spaced apart from the temperature sensor.

[0026] At least one of the fans is connected to the thermostat.

[0027] In one possible implementation, the housing includes a first housing and a second housing, wherein the second housing is fitted onto the first housing and together with the first housing form a cavity;

[0028] The heating element is a resistance wire, which is wound around the first housing and housed in the cavity;

[0029] The temperature sensor is embedded in the first housing, and the fan is embedded in the second housing.

[0030] In one possible implementation, the detection device further includes a vacuum system, which includes a vacuum pressure sensor, a vacuum generator, and a vacuum controller; the vacuum pressure sensor is disposed on the housing and is used to detect the vacuum level inside the housing.

[0031] The vacuum generator is connected to the inner cavity of the housing; wherein, the vacuum generator includes a vacuum pump, a solenoid valve, a vacuum valve, a frequency converter, and connecting pipes; the vacuum pump, the solenoid valve, and the vacuum valve are all disposed on the connecting pipes, and the frequency converter is connected to the vacuum pump;

[0032] The vacuum controller is connected to the vacuum pressure sensor, the solenoid valve, the vacuum valve, the frequency converter, and the pressure relief valve, respectively.

[0033] The vacuum controller is used to control the operating state of the vacuum generator and the operating state of the pressure relief valve based on the vacuum pressure sensor.

[0034] In one possible implementation, the detection device further includes a control system, which is connected to the thermostat and the vacuum controller, respectively.

[0035] In the rapid detection device for fluoride-containing sludge in the semiconductor industry provided in this application embodiment, a first driving component can drive a first carrier component to rotate around its first central axis, while a second driving component can drive the first carrier component to rotate eccentrically. In this way, while ensuring that the parameters of the detection system remain unchanged during the detection process, the surface of the sample to be tested can be irradiated at multiple points, thereby enabling the detection system to acquire more test data, reducing the impact of the surface morphology and internal particle distribution inhomogeneity of the sample on the test accuracy, and thus improving the detection accuracy of the testing device. Attached Figure Description

[0036] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0037] Figure 1 A schematic diagram of the structure of the rapid detection device for fluoride-containing sludge in the semiconductor industry provided in this application;

[0038] Figure 2 for Figure 1 Enlarged view of region A in the middle;

[0039] Figure 3 This is a partial structural schematic diagram of the rapid detection equipment for fluoride-containing sludge in the semiconductor industry provided in this application.

[0040] Explanation of reference numerals in the attached figures:

[0041] 100: Housing; 110: First housing; 120: Second housing; 130: Chamber; 140: Sealing end cap;

[0042] 200: Sample stage; 210: Support assembly; 211: First support member; 2111: Support chamber; 212: Second support member; 2121: First mounting chamber; 213: Third support member; 2131: Second mounting chamber; 214: Telescopic fixing member; 215: First driving member;

[0043] 220: Second drive unit;

[0044] 230: Rotating device;

[0045] 240: Lifting device; 241: Transmission component; 242: Connecting component;

[0046] 300: Detection system;

[0047] 310: Optical path assembly; 311: First optical element; 312: Second optical element; 3111: First curved crystal; 3112: Second curved crystal; 3113: Curved crystal support; 313: Filter exchanger; 314: First collimator; 315: Aperture; 316: Second collimator;

[0048] 320: Light source;

[0049] 330: Detector;

[0050] 400: Sample to be tested;

[0051] 500: Constant temperature system;

[0052] 510: Heating element; 520: Temperature sensor; 530: Thermostat; 540: Fan;

[0053] 600: Vacuum system;

[0054] 610: Vacuum pressure sensor; 620: Vacuum generator; 621: Vacuum pump; 622: Solenoid valve; 623: Vacuum valve; 624: Frequency converter; 625: Connecting pipeline; 630: Vacuum controller; 640: Pressure relief valve;

[0055] 700: Control system.

[0056] The accompanying drawings illustrate specific embodiments of this application, which will be described in more detail below. These drawings and descriptions are not intended to limit the scope of the concept in any way, but rather to illustrate the concept of this application to those skilled in the art through reference to particular embodiments. Detailed Implementation

[0057] As described in the background section, X-ray fluorescence spectroscopy in related technologies has insufficient ability to analyze light elements and low detection accuracy of light elements (C, N, O, F, etc.) in the sample to be tested. The inventors have found that the reason for this problem is that the primary rays generated by the testing equipment can only excite a specific area of ​​the sample to be tested. The test data obtained by the testing equipment is affected by the morphology of the specific area, resulting in low detection accuracy.

[0058] To address the aforementioned technical problems, this application provides a rapid detection device for fluorinated sludge in the semiconductor industry. A first driving component drives a first carrier component to rotate around its first central axis. Simultaneously, a second driving component drives the first carrier component to rotate eccentrically. Thus, while ensuring the parameters of the detection system remain constant during the detection process, multiple points on the surface of the sample can be irradiated, enabling the detection system to acquire more test data. This reduces the impact of the surface morphology and internal particle distribution inhomogeneity of the sample on the testing accuracy, thereby improving the detection precision of the testing device.

[0059] To make the above-mentioned objectives, features, and advantages of the embodiments of this application more apparent and understandable, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0060] Please refer to the attached document. Figure 1This application provides a rapid detection device for fluoride-containing sludge in the semiconductor industry, used to detect fluoride-containing sludge. It should be noted that fluoride-containing sludge contains not only fluorine but also calcium or other elements; therefore, in this application, fluorine, calcium, and other elements are collectively referred to as hydrogen. It should also be noted that other elements may include oxygen and / or carbon.

[0061] The testing equipment includes a housing 100, which serves as the supporting component for the testing equipment and provides a mounting platform for the sample stage 200 and the testing system 300. It should be noted that the housing 100 can be a single-layer structure or a double-layer structure.

[0062] For example, the housing 100 includes a first housing 110 and a second housing 120. The second housing 120 is sleeved on the first housing 110 and together with the first housing 110 forms a cavity 130. Thus, the housing 100 has a double-layer structure. The cavity 130 can provide an installation area for some components of the testing equipment and also serve as an isolation function. For example, the cavity can provide good heat insulation. When the testing equipment is working in a high-temperature or low-temperature environment, the cavity 130 can reduce heat transfer and maintain a stable internal temperature. This is especially important for testing equipment that requires precise temperature control, as it can ensure the accuracy and stability of the test results.

[0063] The sample stage 200 and the detection system 300 are installed within the housing 100. For example, the sample stage 200 and the detection system 300 can be installed within the first housing 110. In this embodiment, the housing 100 also includes a top opening and a sealing end cap 140 that covers the top opening. Thus, the top opening facilitates the installation of the sample to be tested within the housing 100. The sealing end cap 140 seals the top opening to prevent radiation leakage from the detection system during testing and to maintain a constant temperature vacuum environment. It should be noted that when the housing 100 includes a first housing 110 and a second housing 120, both the first housing 110 and the second housing 120 can be cylindrical, and both the first housing 110 and the second housing 120 have a top opening.

[0064] The testing equipment also includes a sample stage 200, which is disposed within the housing 100. The sample stage 200 includes a support component 210, which is movably connected within the housing 100, that is, the support component 210 is movably connected within the first housing 110.

[0065] The carrier assembly 210 includes a first carrier 211 and a second carrier 212. The second carrier 212 has a first mounting chamber 2121. The first carrier 211 includes a carrier chamber 2111, which is used to accommodate the sample to be tested so as to fix the sample to be tested in the sample stage 200.

[0066] It should be noted that there are multiple options for the connection between the sample to be tested and the first carrier 211, which can be specifically set according to the structure of the sample to be tested. For example, the sample to be tested includes a sample cup with an opening and a transparent film sealing the opening; wherein, the transparent film not only seals the opening but can also cover part of the outer peripheral surface of the sample cup, reducing the risk of the transparent film detaching. The sample cup is cylindrical in shape, with an inner diameter of 3cm to 5cm and a height of 0.6cm to 1.0cm.

[0067] At this time, a telescopic fixing member 214 is provided inside the bearing chamber 2111. The telescopic fixing member 214 is configured to connect with the sample cup and fix the transparent film. Exemplarily, the telescopic fixing member 214 can move in a direction toward or away from the center of the bearing chamber 2111 to clamp or release the sample to be tested. In addition to fixing the sample cup, the telescopic fixing member also fixes the transparent film, which prevents the transparent film from detaching from the sample cup, thereby avoiding spillage of the sample to be tested and improving safety during the testing process.

[0068] In this example, the telescopic fastener 214 can be selected in various ways. For example, there can be multiple telescopic fasteners 214. Each telescopic fastener 214 can also include a spring and a rubber fixing block. One end of the spring can be connected to the inner wall of the bearing chamber 2111, and the other end can be connected to the rubber fixing block.

[0069] Multiple telescopic fasteners 214 can form a space to accommodate the sample to be tested. When the sample to be tested is installed into the bearing chamber 2111, the sample to be tested will squeeze the rubber fixing block and compress the spring. In this way, the elastic force of the spring can be used to fix the sample to be tested.

[0070] For example, there may be multiple telescopic fasteners 214. Each telescopic fastener may include a drive component and a rubber fixing block. The drive component is fixed to the inner wall of the bearing chamber 2111. The output shaft of the drive component is connected to the rubber fixing block and is used to drive the rubber fixing block to move in a direction toward or away from the center of the bearing chamber 2111 in order to clamp or release the sample to be tested.

[0071] It should be noted that the surface shape of the rubber fixing block facing the center of the bearing chamber 2111 can be freely set according to the shape of the sample to be tested, which improves the design flexibility of the telescopic fixing component 214.

[0072] Please continue to refer to the appendix. Figure 1 The first carrier 211 is mounted in the first mounting chamber 2121 via a first driving member 215, which drives the first carrier 211 to rotate around its first central axis. The first central axis extends in a direction perpendicular to the second carrier 212, i.e., attached... Figure 1 The dashed line S1.

[0073] As one possible implementation of the first driving member 215, the first driving member 215 includes a first motor, the output of which is directly connected to the first carrier member 211. Thus, when the first motor starts, it drives the first carrier member 211 to rotate around its first central axis S1. Specifically, the first driving member 215 drives the first carrier member 211 to rotate at a speed ranging from 1 rpm to 2.5 rpm.

[0074] The second driving member 220 is disposed on the second bearing member 212, and the output end of the second driving member 220 is connected to the first driving member 215. The second driving member 220 is used to drive the first bearing member 211 to perform eccentric movement relative to the first central axis S1 within a preset range; wherein, the preset range is 1° to 5°. The second driving member 220 can drive the first bearing member 211 to perform eccentric rotation at a rotational speed of 0.5 rpm to 1.5 rpm.

[0075] It should be understood that the second drive component 220 can be disposed on the bottom surface of the second support component 212 or disposed within the first mounting chamber 2121.

[0076] As one possible implementation of the second drive member 220, the second drive member 220 may include a second motor and an eccentric wheel. The output end of the second motor is connected to the eccentric wheel, which is connected to the motor housing of the first drive member via a connecting shaft. Thus, when the first drive member 215 is started independently, it directly drives the first support member 211 to rotate. When the second motor is started, it drives the eccentric wheel to rotate. Since the eccentric wheel is connected to the first support member 211 (or indirectly to the first motor) via a connecting shaft, this rotation causes the first support member 211 to produce an eccentric motion relative to its first central axis. It should be noted that the connecting shaft here may be flexible (such as a universal joint) or rigid, depending on the required range of motion and precision. Furthermore, the second drive member 220 may also employ a combination of an eccentric gear and a motor.

[0077] The testing equipment also includes a testing system 300, which is housed within the housing 100 and is used to detect the light element content of the sample to be tested. The testing system 300 is a conventional X-ray spectrometer.

[0078] This embodiment improves the sample stage 200 so that it can both rotate on its own axis and rotate eccentrically. For example, the first driving member 215 can drive the first bearing member 211 to rotate around its first central axis, while the second driving member can drive the first bearing member 211 to rotate eccentrically. Thus, during the detection process, under the premise that the parameters of the detection system 300 remain unchanged, the surface of the sample to be tested can be irradiated at multiple points, thereby enabling the detection system 300 to acquire more test data, reducing the impact of the surface morphology and internal particle distribution inhomogeneity of the sample on the test accuracy, and thus improving the detection accuracy of the testing equipment.

[0079] It should be noted that the parameters of the detection system 300 remain unchanged, including but not limited to the incident angle and incident point of a single ray (X-ray).

[0080] In one possible implementation, the support assembly 210 further includes a third support member 213, which has a second mounting chamber 2131; the second support member 212 is disposed within the second mounting chamber 2131. This allows the support assembly 210 to form a three-layer structure, enabling more efficient layout of components within a limited space, thereby optimizing the space utilization of the device and making the entire device more compact and lightweight. Furthermore, the third support member 213 can also serve as a connecting component, facilitating the installation of the sample stage 200 within the housing 100.

[0081] The second drive component 220 is at least partially housed within the second mounting chamber 2131, which helps reduce vibration and noise during the drive process and improves drive efficiency. Simultaneously, this arrangement also helps protect the second drive component 220 from external environmental interference and damage, thereby extending its service life.

[0082] Please continue to refer to the appendix. Figure 1 and attached Figure 2 The sample stage 200 also includes a rotating device 230, which is connected to the support assembly 210 and is used to drive the support assembly to rotate along a second central axis; the second central axis is perpendicular to the first central axis. The second central axis is an auxiliary... Figure 2 The dashed line S2.

[0083] With attachment Figure 1 and attached Figure 2 Taking the orientation shown as an example, in the initial state, the opening of the bearing chamber 2111 faces upward. When the sample to be tested is installed into the bearing chamber 2111, the rotating device 230 is activated. The rotating device 230 drives the bearing assembly 210 to rotate around the second central axis. That is, the rotating device 230 drives the bearing assembly 210 along the attached axis. Figure 2Rotate 180 degrees in the direction of the middle arrow so that the opening of the bearing chamber 2111 faces downward, so that the detection system 300 can detect the sample to be tested.

[0084] The rotating device 230 only needs to be able to drive the bearing component 210 to rotate. Its structure is existing technology and will not be described in detail here.

[0085] This embodiment, through the setting of the rotating device 230, facilitates the installation and removal of the sample to be tested, thereby improving the testing efficiency.

[0086] In one possible implementation, the sample stage 200 further includes a lifting device 240, which is connected to the inner wall of the housing 100 and extends along the first central axis; the rotating device 230 of the sample stage 200 is connected to the lifting device 240. Thus, the lifting device 240 can drive the rotating device (indirectly driving the bearing assembly 210) to reciprocate along the extension direction of the first central axis, thereby adjusting the relative position of the bearing assembly 210.

[0087] Thus, the introduction of the lifting device 240 enables the bearing component 210 to not only rotate and adjust in the horizontal plane via the rotating device 230, but also to adjust its position in the vertical direction. This three-dimensional position adjustment capability greatly enhances the flexibility of the sample stage, allowing the detection system 300 to more accurately position the sample to be detected, thereby optimizing the detection effect.

[0088] The structure of the lifting device 240 can be selected in various ways. For example, the lifting device 240 may include a drive mechanism, a transmission component and a connecting component. The output end of the drive mechanism is connected to the connecting component 242 through the transmission component 241. The end of the connecting component 242 away from the transmission component 241 is connected to the rotating device 230. In this way, the rotating device 230 and the bearing assembly 210 can be driven to reciprocate synchronously along the extension direction of the first central axis.

[0089] The type of transmission component 241 is selected according to the drive mechanism. For example, if the drive mechanism is a motor, the transmission component 241 may include a lead screw and a nut threaded onto the lead screw; while the connecting component 242 may be a connecting rod.

[0090] Please refer to the attached document. Figure 1 and attached Figure 3 In one possible implementation, the detection system 300 includes an optical path assembly 310 disposed within the housing 100.

[0091] The optical path assembly 310 includes a first optical element 311 and a second optical element 312 arranged at intervals. On a cross-section parallel to the housing, the orthographic projection of the sample stage 200 lies on one side of the line connecting the orthographic projections of the first optical element 311 and the second optical element 312. This ensures that the rays generated by the detection system 300 can form a transmission path between the first optical element 311, the second optical element 312, and the sample 400. This arrangement effectively utilizes the refraction, reflection, or transmission characteristics of the optical elements, allowing the light to be guided and focused more efficiently onto the sample 400. It should be noted that the transmission path formed between the first optical element 311, the second optical element 312, and the sample 400 can be V-shaped or multiple broken lines, as long as the rays generated by the detection system 300 can be received by the detector 330.

[0092] In this embodiment, both the first optical element 311 and the second optical element 312 include a curved crystal support 3113 and a first curved crystal 3111 and a second curved crystal 3112 rotatably connected to the curved crystal support 3113. The orientation of the first curved crystal 3111 and the second curved crystal 3112 are opposite, and they are made of different materials. For example, the first curved crystal 3111 is used to detect fluorine (F) in sludge, and the material of the first curved crystal includes lithium fluoride (LiF), thallium hydrogen phthalate (TAP), or pentaerythritol (PET).

[0093] The lithium fluoride and / or pentaerythritol also employ specific crystal planes. For example, the first curved crystal 311 is made of lithium fluoride (200); or, the first curved crystal 311 is made of pentaerythritol (PET) (002). In the case of lithium fluoride (200), 200 represents a specific orientation or crystal plane of the crystal.

[0094] The second curved crystal 3112 is used to detect calcium (Ca) or other elements in sludge, and its material includes lithium fluoride (LiF) or germanium (Ge). Specifically, the material of the second curved crystal 312 is lithium fluoride (200) or lithium fluoride (220); or, the material of the second curved crystal 312 is germanium (111).

[0095] When it is necessary to detect the fluorine content in the sample 400, the first curved crystal 3111 can be rotated so that the curved surface of the first curved crystal 3111 faces the light source of the detection system 300. At the same time, when it is necessary to detect the calcium content in the sample 400, the second curved crystal 3112 can be rotated so that the curved surface of the second curved crystal 3112 faces the light source of the detection system 300. In this way, the same detection equipment can detect different elements, which improves the flexibility of the detection equipment, reduces the detection cost, improves the detection efficiency, enhances the detection accuracy, and simplifies the operation process.

[0096] It should be understood that the rotation of the first curved crystal 3111 and the second curved crystal 3112 can be achieved by a conventional rotating device.

[0097] Both the first bent crystal 3111 and the second bent crystal 3112 include a first radius of curvature and a second radius of curvature, which are different. The first radius of curvature is R, and the second radius of curvature is r. The area of ​​the first bent crystal 3111 and the second bent crystal 3112 is 30-45mm × 15-30mm, and the thickness is 0.2-0.4mm. The first radius of curvature R = 60-150mm; the second radius of curvature r = 30-90mm.

[0098] In this way, the hyperboloid curved crystal design monochromates and fully focuses the X-rays irradiated onto the first curved crystal 3111 onto a focal point centered on the radius of curvature R, focusing them onto the detection surface of the sample 400, thus better exciting the fluorine element. Utilizing the spatial arrangement of multiple hyperboloid curved crystals, a fixed-channel energy spectrum for monochromatic single-channel excitation and reception of the analyte is formed, eliminating the particle size and mineral effects of photovoltaic sludge, improving the detection limit of F in X-ray fluorescence spectroscopy, and enhancing the instrument's resolution.

[0099] Particle size effect: The intensity of X-rays may vary with the particle size and inhomogeneity of the sample; Mineral effect: The intensity of X-rays varies with the chemical structure and mineral crystal morphology of the analyte.

[0100] To better describe the first radius of curvature R and the second radius of curvature r, this embodiment is explained using a light source and a detector.

[0101] For example, the detection system 300 also includes a light source 320 and a detector 330, with the light source 320 disposed on one side of the first optical element 311 and the detector 330 disposed on one side of the second optical element 312.

[0102] The X-rays emitted by the light source 320 are focused and reflected by the first optical element 311 to the sample 400 to be tested; the X-rays excite the elements to be tested in the sample 400 to form X-ray fluorescence; the X-ray fluorescence is focused and reflected by the second optical element 312 to the detector 330.

[0103] This embodiment improves the sample stage 200 that supports the sample 400 to be tested, the first optical element 311, and the second optical element 312, thereby ensuring the accuracy and precision of the analysis of F and Ca elements in photovoltaic sludge, with a detection limit of 0.001%, thus promoting the development of photovoltaic sludge as a substitute for natural fluorite ore.

[0104] The X-ray target of the light source 320 is molybdenum (Mo), silver (Ag), rhodium (Rh), or chromium (Cr), with a power of 15-80W and a diffraction energy of 5.40-22.16keV. The detector 330 is a solid-state detector, which is not limited to silicon drift detectors (SSD), SDD high-purity silicon detectors, high-purity germanium detectors, etc.

[0105] In this embodiment, the sample stage 200 is located on the center line of the line connecting the light source 320 and the detector 330, and is equidistant from the straight line distance between the light source 320 and the detector 330. Thus, the sample stage 200, the light source 320 and the detector 330 form an isosceles triangle.

[0106] The centers of the light source 320, the first optical element 311, and the sample stage 200 are located on a circle of radius R; the centers of the detector 330, the second optical element 312, and the sample stage 200 are located on another circle of radius R. The X-rays generated by the light source 320 are refracted at an incident angle θ by the first optical element 311 to the sample stage 200, and the excited X-ray fluorescence can enter the second optical element 312 at an angle θ and then be refracted to the detector 330.

[0107] Wherein, the first radius of curvature is R, and the second radius of curvature r is the radius of the circle obtained by rotating the first optical element 311 with the center of the line connecting the light source 320 and the sample stage 200 as the center; the radius of curvature R and the radius of rotation r satisfy r=RR*COS2θ. In this embodiment, the incident angle θ ranges from 20° to 30°.

[0108] It should be noted that the optical path assembly 310 provided in this application embodiment also includes a filter exchanger 313, a first collimator 314, an aperture 315, and a second collimator 316; the filter exchanger 313, the first collimator 314, and the first optical element 311 are disposed on the transmission path of the X-rays formed by the light source 320, and the filter exchanger 313 is disposed between the light source 320 and the first collimator 314;

[0109] Aperture 315, second collimator 316 and detector 330 are disposed on the transmission path of X-ray fluorescence, and aperture 315 is located between second collimator 316 and second optical element 312.

[0110] The filter exchanger 313 includes an aluminum filter and a beryllium filter. When detecting fluorine (F), a beryllium filter is selected; when detecting calcium (Ca) and other impurity elements, an aluminum filter is selected.

[0111] The first collimator 314 is located on the side of the filter exchanger 313 away from the light source 320, and the distance between the light source 320 and the first collimator 314 is 15-25mm.

[0112] The aperture of the aperture 315 is 1-5mm. The first collimator 314 and the second collimator 316 are both made of copper as the main material and lined with aluminum, with an aperture of 3-5mm, to reduce stray lines and interference introduced by the collimator material.

[0113] In one possible implementation, the detection device further includes a constant temperature system 500, which includes a heating element 510, at least one temperature sensor 520, and a constant temperature controller 530; the heating element 510 and at least one temperature sensor 520 are respectively disposed on the housing 100; it should be understood that the location of the heating element 510 and the temperature sensor 520 on the housing 100 is related to the structure of the housing 100 itself.

[0114] For example, when the housing 100 includes a first housing 110 and a second housing 120, the heating element 510 is a resistance wire wound around the first housing 110 and housed within the chamber 130; in this case, the chamber 130 provides installation space for the layout of the resistance wire. Meanwhile, a temperature sensor 520 is embedded in the first housing 110, enabling better detection of the temperature within the first housing 110.

[0115] The thermostat 530 is connected to the heating element 510 and the temperature sensor 520 respectively; the thermostat 530 is used to control the working state of the heating element 510 according to the temperature sensor 520.

[0116] Given that the first optical element 311 and the second optical element 312 have a certain coefficient of thermal expansion, temperature changes inside the first housing 110 will cause changes in the interfacial distance between the first optical element 311 and the second optical element 312, thereby causing changes in the detection angle and introducing errors into the measurement.

[0117] Therefore, in this embodiment, through the setting of the constant temperature system 500, the constant temperature controller 530 is used to control the working state of the heating element 510 according to the temperature sensor 520. For example, when the temperature inside the first housing 110 is lower than a suitable temperature, the constant temperature controller 530 can control the heating element 510 to work, thereby heating the first housing 110. Alternatively, when the temperature inside the first housing 110 is higher than a suitable temperature, the constant temperature controller 530 can control the heating element 510 to stop working. This helps to maintain a stable interfacial distance between the first optical element 311 and the second optical element 312, thereby ensuring the accuracy of the detection angle and improving the overall measurement accuracy.

[0118] Please continue to refer to the appendix. Figure 1 The temperature control system 500 also includes at least one fan 540, which is disposed on the housing and spaced apart from the temperature sensor 520. The at least one fan 540 is also connected to the temperature controller 530. Exemplarily, the fan 540 is embedded in the second housing 120.

[0119] The thermostat 530 can control the start and stop of the fan 540 and its speed. This allows the fan 540 to evenly distribute the temperature of the housing 100, thus accelerating heat transfer and improving temperature uniformity. This, in turn, helps to further reduce measurement errors caused by uneven temperature distribution and improve measurement accuracy.

[0120] It should be noted that the number of temperature sensors 520 and fans 540 can be multiple or single. For example, both the number of temperature sensors 520 and fans 540 can be multiple; each temperature sensor 520 is spaced apart from each fan 540. Alternatively, multiple temperature sensors 520 and multiple fans 540 can be arranged alternately. For instance, one temperature sensor 520 is embedded every 4-8 cm², and one fan 540 is embedded every 6-10 cm².

[0121] In this way, multiple temperature sensors 520 can collect data at multiple points and at multiple frequencies. An Adaptive Neural Fuzzy Inference Algorithm (ANFIS) is employed, with the model taking multi-point temperature information and temperature change rate as input, and outputting the power adjustment value of the heating element 510 and the speed adjustment value of the fan 540. Simultaneously, to efficiently train the algorithm, a particle swarm optimization algorithm is used to perform a global search of the parameter space of the ANFIS model. After obtaining the target control values, a PID algorithm is used to implement specific parameter control, thereby adjusting the heat output of the heating element 510 and the start-up and ventilation rate of the fan 540, effectively controlling temperature fluctuations with a temperature control accuracy of ±0.1℃.

[0122] In one possible implementation, the detection device further includes a vacuum system 600, which includes a vacuum pressure sensor 610, a vacuum generator 620, a vacuum controller 630, and a pressure relief valve 640. The vacuum pressure sensor 610 is mounted on the housing 100 and is used to detect the vacuum level inside the housing 100. The pressure relief valve 640 is mounted on the housing 100 and connected to the vacuum controller 630. When the housing 100 includes a first housing 110 and a second housing 120, the pressure relief valve 640 is mounted on the first housing 110.

[0123] Among them, the vacuum pressure sensor 610 can be a resistive vacuum gauge tube. The resistive vacuum gauge tube affects the element temperature by the thermal conductivity of the gas in the space, and changes the resistivity of the sensitive element by the vacuum degree, thereby enabling the calculation and measurement of the vacuum degree. Combined with precise internal temperature control, it can accurately control the detection performance of the detection equipment.

[0124] The vacuum generator 620 communicates with the inner cavity of the housing 100 and is connected to it. The vacuum pressure sensor 610 provides the theoretical basis for controlling the operating state of the vacuum generator 620, so as to adjust the vacuum level inside the housing 100. It should be noted that when the housing 100 includes a first housing 110 and a second housing 120, the vacuum pressure sensor 610 is disposed on the first housing 110 and is used to detect the vacuum level inside the first housing 110. The vacuum generator 620 communicates with the inner cavity of the first housing 110 and is used to adjust the vacuum level inside the first housing 110.

[0125] The vacuum generator 620 includes a vacuum pump 621, a solenoid valve 622, a vacuum valve 623, a frequency converter 624, and a connecting pipe 625. The vacuum pump 621, the solenoid valve 622, and the vacuum valve 623 are all mounted on the connecting pipe 625. The frequency converter 624 is connected to the vacuum pump 621 and is used to adjust the speed of the vacuum pump 621.

[0126] The vacuum controller 630 is connected to the vacuum pressure sensor 610, the solenoid valve 622, the vacuum valve 623, the frequency converter 624, and the pressure relief valve 640.

[0127] When the vacuum pressure sensor 610 detects that the vacuum level has reached the set value, the vacuum controller 630 receives the test signal from the vacuum pressure sensor 610 and processes it to generate corresponding action commands. For example, the vacuum controller 630 can control the solenoid valve 622 to adjust the start and stop of the vacuum pump 621; it can also adjust the speed of the vacuum pump 621 through the frequency converter 624, thereby meeting the pressure value inside the first housing 110 and applying different strategies at different stages. During the vacuuming stage, the frequency converter uses a fuzzy inference algorithm to quickly obtain the target speed based on the current pressure value; when approaching the target vacuum value, it dynamically adjusts through a PID algorithm to avoid overshoot or oscillation; during the vacuum holding stage, it runs at a low speed to reduce energy consumption and maintain a stable vacuum level. In this way, a suitable vacuum level can be ensured inside the first housing 110. A suitable vacuum level can reduce the absorption of X-rays by the air and prevent water vapor and carbon dioxide in the air from producing fluorescence under the action of X-rays, thereby avoiding interference with the X-ray fluorescence signal of the sample 400 to be tested.

[0128] After the test is completed, the vacuum controller 630 can also control the opening of the pressure relief valve 640 to release pressure through the housing.

[0129] In one possible implementation, the testing equipment also includes a control system 700, which is connected to the thermostat 530 and the vacuum controller 630, respectively. The signal processing and control system 700 for both the thermostat 530 and the vacuum controller 630 are located on the same host unit. This simplifies the testing equipment.

[0130] The control system 700, through a high-performance processing unit combined with various optimization algorithms, achieves precise analysis and processing of signals acquired by the detector 330. First, an adaptive filtering algorithm is used to remove signal noise, and calibration is performed using a standard sample calibration curve to ensure an accurate correspondence between signal intensity and elemental content. Then, principal component analysis is used to extract spectral characteristic peaks, enabling quantitative analysis of F and Ca elements. Furthermore, to improve adaptability to complex samples, the system uses particle swarm optimization to globally optimize model parameters, and combines this with PID algorithm to control the isothermal and vacuum modules, ensuring environmental stability and ultimately generating reliable detection results and analysis reports.

[0131] This application also provides a rapid detection method for fluoride-containing sludge in the semiconductor industry, which is applied in a rapid detection device for fluoride-containing sludge in the semiconductor industry as described in any of the above embodiments.

[0132] The detection methods include:

[0133] Step S100: Install the sample to be tested in the sample stage of the testing equipment, and activate the telescopic fixing component of the testing equipment to fix the transparent film of the sample to be tested.

[0134] The preparation of the sample to be tested also needs to be carried out in a certain way. For example, weigh 3g-3.5g of sludge sample and place it in a sample cup. Then, compact it using a press, with the press pressure being 20MPa-30MPa.

[0135] Step S200: Activate the lifting and rotating devices of the testing equipment to position the sample stage in the testing position; wherein, the lifting device drives the bearing component of the sample stage to move along the first central axis; and the rotating device is connected to the bearing component to drive the bearing component to rotate 180° along the second central axis; the second central axis is perpendicular to the first central axis.

[0136] In this embodiment, the lifting device is first activated, and the lifting device is used to move the sample stage's support component along the first central axis to the test position; or, the lifting device can adjust the height of the support component.

[0137] Then, the rotating device of the testing equipment is activated. The rotating device is connected to the bearing component and is used to drive the bearing component to rotate 180° along the second central axis so that the opening of the sample to be tested faces downward; wherein, the second central axis is perpendicular to the first central axis.

[0138] Step S300: Start the first driving member and the second driving member. The first driving member is used to drive the first central axis of the first carrier to rotate, and the second driving member is used to drive the first carrier to perform eccentric movement relative to the first central axis within a preset range.

[0139] Next, the test parameters within the housing of the testing equipment are adjusted to meet the test conditions; these test parameters include the test temperature and the vacuum level. For example, the test parameters are adjusted using the constant temperature system 500 and the vacuum system 600, such that the test temperature within the housing 100 is 28.5℃~30.5℃ and the vacuum level is 0.8Kpa~1Kpa.

[0140] Step 400: Start the detection system, which is used to test the content of light elements in the sample to be tested.

[0141] To improve the detection accuracy of the detection system, this embodiment also controls the environment inside the housing before starting the detection system.

[0142] In one possible implementation, the testing method also includes:

[0143] Obtain multiple first test temperatures at the current time point and multiple second test temperatures at the previous time point; wherein, the test temperature is the temperature inside the casing.

[0144] In this embodiment, the first test temperature and the second test temperature are obtained through a temperature sensor. It should be noted that multiple first test temperatures refer to a set of temperatures obtained at multiple different test points.

[0145] The rate of temperature change is determined based on multiple first test temperatures and multiple second test temperatures.

[0146] Multiple first test temperatures and temperature change rates are input into the adaptive neural fuzzy inference algorithm model, which then outputs the power adjustment value of the heating element and the speed adjustment value of the fan.

[0147] Based on the power adjustment value of the heating element and the current power of the heating element, the target power value of the heating element is determined; and based on the speed adjustment value of the fan and the current value of the fan, the target speed of the fan is determined.

[0148] Based on the difference between the target power value of the heating element and the current power of the heating element, a first control instruction for the PID controller is generated; and based on the difference between the target speed of the fan and the current speed of the fan, a second control instruction for the PID controller is generated.

[0149] Based on the first control command, the power of the heating element is adjusted; and based on the second control command, the fan speed is adjusted so that the temperature inside the housing is 28.5℃~30.5℃.

[0150] In this way, by optimizing the power of the heating element and the speed of the fan through multiple algorithms, the temperature inside the casing can always be kept within a reasonable range, which is 28.5℃~30.5℃.

[0151] In one possible implementation, the testing method also includes:

[0152] To obtain the initial vacuum level inside the casing;

[0153] The first vacuum degree is input into the fuzzy inference algorithm model, and the target speed of the frequency converter is output through the fuzzy inference algorithm model.

[0154] Adjust the speed of the vacuum pump according to the target speed;

[0155] Obtain the second vacuum level inside the housing, wherein the second vacuum level is the vacuum level inside the housing after the vacuum pump has been running at the target speed for a period of time;

[0156] Based on the second vacuum level and the target vacuum level, the error value is obtained;

[0157] Based on the error value and the target vacuum level, a third control command for PID control is generated;

[0158] Based on the third control command, the actual speed of the vacuum pump is adjusted by the frequency converter so that the vacuum degree of the housing is 0.8 kPa to 1 kPa.

[0159] Thus, by combining the advantages of fuzzy inference algorithm and PID algorithm, the fuzzy inference algorithm can quickly calculate the target speed based on the current vacuum level, enabling the system to quickly approach the target vacuum level range (0.8 kPa to 1 kPa) and shorten the response time; while the PID algorithm eliminates steady-state error by finely adjusting the error value and suppresses oscillation through the derivative element, ensuring that the vacuum level is stable within the target range and improving control accuracy.

[0160] In this embodiment, particle swarm optimization can be used to optimize the adaptive neural fuzzy inference algorithm model and the fuzzy inference algorithm model respectively, so as to improve the accuracy of the above models.

[0161] Throughout the entire testing process, the testing data was optimized, for example:

[0162] Acquire detection signals; where the detection signals are acquired through a detector.

[0163] The detection signal is input into the adaptive filtering algorithm model, and the output is a denoised detection signal.

[0164] The noise-reduced detection signal is calibrated using the calibration curve of a standard sample to form a calibrated detection signal. This ensures an accurate correspondence between signal integrity and light element content.

[0165] Principal component analysis was performed on the calibrated detection signal to extract spectral characteristic peaks.

[0166] Quantitative analysis of light elements is performed based on spectral characteristic peaks.

[0167] In this embodiment, particle swarm optimization can be used to optimize the adaptive filtering algorithm model to improve its accuracy.

[0168] This embodiment utilizes the aforementioned testing equipment to test sludge of different qualities.

[0169] Example 1

[0170] High-quality sludge from different batches was tested, and the CaF2 content in the sludge was above 80%. Specific test data are as follows:

[0171] Table 1. Test results of high-quality sludge from different batches.

[0172] batch F element content % Ca content % 1 42.825 45.315 2 42.052 44.578 3 42.617 44.910 4 43.025 45.652 5 42.285 44.521 6 41.856 44.035 7 41.831 44.103 8 42.032 44.255 9 41.201 43.378 10 43.114 45.391 average value 42.284 44.613 Relative standard deviation 1.436 1.589

[0173] Example 2

[0174] Lower-quality sludge from different batches was tested, with the CaF2 content in the sludge below 40%. Specific test data are as follows:

[0175] Table 2. Test results of lower quality sludge from different batches.

[0176] batch F element content % Ca content: 0.5% 1 14.745 15.254 2 15.017 15.687 3 14.205 14.782 4 15.911 16.322 5 14.595 15.025 6 14.952 15.378 7 13.943 14.523 8 14.01 14.389 9 13.533 13.997 10 14.371 14.832 average value 14.528 15.018 Relative standard deviation 4.653 4.497

[0177] Tables 1 and 2 clearly show that, regardless of whether the sludge is of high or low quality, the light elements in the sludge can be accurately detected. This provides a scientific basis and optimization scheme for sludge treatment, utilization and disposal, which helps to improve resource utilization efficiency and promote sustainable environmental development.

[0178] The various embodiments or implementation methods described in this specification are presented in a progressive manner. Each embodiment focuses on the differences from other embodiments, and the same or similar parts between the embodiments can be referred to each other.

[0179] It should be noted that the terms "one embodiment," "embodiment," "exemplary embodiment," "some embodiments," etc., mentioned in the specification indicate that the described embodiment may include a specific feature, structure, or characteristic, but not every embodiment necessarily includes that specific feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. Moreover, when a specific feature, structure, or characteristic is described in connection with an embodiment, implementing such a feature, structure, or characteristic in conjunction with other embodiments, whether explicitly described or not, is within the knowledge scope of those skilled in the art.

[0180] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A rapid detection device for fluoride-containing sludge in the semiconductor industry, characterized in that, include: A housing, the housing including a top opening and a sealing end cap covering the top opening; A sample stage includes a support assembly and a second drive component. The support assembly is movably connected within a housing and includes a first support member and a second support member having a first mounting chamber. The first support member includes a mounting chamber for fixing a sample to be tested. The first support member is mounted in the first mounting chamber via a first drive component, which drives the first support member to rotate around its first central axis at a rotational speed of 1 rpm to 2.5 rpm. The first central axis extends in a direction perpendicular to the second support member. The second drive component is disposed on the second support member, and its output end is connected to the first drive component. The second drive component drives the first support member to perform eccentric movement relative to the first central axis within a preset range, wherein the preset range is 1° to 5°. A detection system, disposed within the housing, is used to detect the light element content of the sample to be tested. The detection system includes an optical path assembly disposed within the housing. The optical path assembly includes a first optical element and a second optical element arranged at intervals. On a cross-section parallel to the housing, the orthographic projection of the sample stage is located on one side of the line connecting the orthographic projections of the first optical element and the second optical element. Both the first and second optical elements include a bent crystal support and a first bent crystal and a second bent crystal rotatably connected to the bent crystal support. The orientations of the first and second bent crystals are opposite, and they are made of different materials. Both the first and second bent crystals include a first radius of curvature and a second radius of curvature, which are different.

2. The rapid detection equipment for fluoride-containing sludge in the semiconductor industry according to claim 1, characterized in that, The first curved crystal is used to detect fluorine in the fluorine-containing sludge. The material of the first curved crystal includes lithium fluoride, thallium hydrogen phthalate, or pentaerythritol. The second curved crystal is used to detect calcium in the fluorinated sludge, and the material of the second curved crystal includes lithium fluoride or germanium.

3. The rapid detection equipment for fluoride-containing sludge in the semiconductor industry according to claim 2, characterized in that, The support assembly further includes a third support member having a second mounting chamber; the second support member is disposed within the second mounting chamber, and the second drive member is at least partially accommodated within the second mounting chamber.

4. The rapid detection equipment for fluoride-containing sludge in the semiconductor industry according to claim 3, characterized in that, The sample stage also includes a rotating device connected to the support assembly, which drives the support assembly to rotate along a second central axis; the second central axis is perpendicular to the first central axis. The sample stage also includes a lifting device, which is connected to the inner wall of the housing and extends along the first central axis; the rotating device of the sample stage is connected to the lifting device.

5. The rapid detection equipment for fluoride-containing sludge in the semiconductor industry according to claim 4, characterized in that, The sample to be tested includes a sample cup with an opening and a transparent film covering the opening; the inner diameter of the sample cup is 3cm to 5cm and the height is 0.6cm to 1.0cm. The bearing chamber is provided with a telescopic fixing component, which is configured to connect to the sample cup and fix the transparent membrane.

6. The rapid detection device for fluoride-containing sludge in the semiconductor industry according to any one of claims 1-5, characterized in that, The detection system further includes a light source, a filter exchanger, and a detector. The light source is disposed on one side of the first optical element, and the filter exchanger is disposed between the light source and the first optical element. The filter exchanger includes an aluminum filter and a beryllium filter. The detector is disposed on one side of the second optical element. The X-rays emitted by the light source are filtered by the filter exchanger and then focused and reflected by the first optical element to the sample to be tested; wherein, when the detection device is used to detect fluorine, the filter of the filter exchanger is a beryllium filter; when the detection device is used to detect calcium, the filter of the filter exchanger is an aluminum filter; The X-rays excite the test elements in the sample to generate X-ray fluorescence; The X-ray fluorescence is focused and reflected by the second optical element to the detector.

7. The rapid detection equipment for fluoride-containing sludge in the semiconductor industry according to claim 6, characterized in that, The testing equipment further includes a constant temperature system, which includes a heating element, at least one temperature sensor, and a constant temperature controller; the heating element and at least one temperature sensor are respectively disposed on the housing. The thermostat is connected to the heating element and the temperature sensor respectively; the thermostat is used to control the working state of the heating element according to the temperature sensor. The constant temperature system further includes at least one fan, which is disposed on the housing and spaced apart from at least one temperature sensor; at least one fan is connected to the constant temperature controller.

8. The rapid detection equipment for fluoride-containing sludge in the semiconductor industry according to claim 7, characterized in that, The housing includes a first housing and a second housing, wherein the second housing is fitted onto the first housing and together with the first housing form a cavity; The heating element is a resistance wire, which is wound around the first housing and housed in the chamber; the temperature sensor is embedded in the first housing, and the fan is embedded in the second housing.

9. The rapid detection device for fluoride-containing sludge in the semiconductor industry according to claim 7 or 8, characterized in that, The detection equipment also includes a vacuum system, which includes a vacuum pressure sensor, a vacuum generator, a vacuum controller, and a pressure relief valve; the vacuum pressure sensor is mounted on the housing and is used to detect the vacuum level inside the housing. The vacuum generator is connected to the inner cavity of the housing; wherein, the vacuum generator includes a vacuum pump, a solenoid valve, a vacuum valve, a frequency converter, and connecting pipes; the vacuum pump, the solenoid valve, and the vacuum valve are all disposed on the connecting pipes, and the frequency converter is connected to the vacuum pump; The vacuum controller is connected to the vacuum pressure sensor, the solenoid valve, the vacuum valve, the frequency converter, and the pressure relief valve, respectively. The vacuum controller is used to control the operating state of the vacuum generator and the operating state of the pressure relief valve based on the vacuum pressure sensor.

10. The rapid detection equipment for fluoride-containing sludge in the semiconductor industry according to claim 9, characterized in that, The testing equipment also includes a control system, which is connected to the constant temperature controller and the vacuum controller respectively.

Images