Automatic focusing device of ultrasonic scanning microscope
By combining the motion stage module and the ranging module, the position of the ultrasonic probe can be adjusted in real time, which solves the problem of insufficient probe depth of focus in traditional ultrasonic microscopes during the detection process, and improves the quality of scanned images and detection accuracy.
Patent Information
- Application Number
- CN202423074251.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-12
- Publication Date
- 2025-12-02
- Estimated Expiration
- 2034-12-12
AI Technical Summary
In traditional ultrasonic microscopes, the insufficient depth of field of the probe during the inspection process leads to a decrease in the quality of the scanned image when the workpiece is tilted, warped, or arched, thus affecting the accuracy of the inspection results.
The system employs a combination of a motion stage module, a ranging module, and an ultrasonic probe module. The ranging module measures the surface height of the workpiece in real time, while the motion stage module adjusts the position of the ultrasonic probe in real time to achieve automatic focusing and keep the probe and workpiece at the optimal focal plane.
It improves the quality of ultrasonic scanning images, adapts to the tilt, warping or arching of the workpiece surface being tested, ensures that the probe is always at the optimal focal plane, and improves the accuracy of the test results.
Smart Images
Figure CN223624185U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of ultrasonic scanning detection technology, specifically to an automatic focusing device for an ultrasonic scanning microscope. Background Technology
[0002] Traditional ultrasonic microscopy equipment requires a focusing process to adjust the distance between the probe and the workpiece to the optimal focal plane height before scanning. Throughout the scanning process, the probe height remains constant and is not adjusted further.
[0003] Traditional equipment and methods that focus before scanning are poorly suited for situations where the surface of the workpiece being tested is tilted, warped, or arched beyond the probe's focal depth range. During scanning, the probe is only at its optimal focal height near the focus point, while other areas are out of focus, resulting in degraded image quality and affecting the accuracy of ultrasonic scanning results. Utility Model Content
[0004] To address the shortcomings of existing technologies, the purpose of this invention is to provide an automatic focusing device for an ultrasonic scanning microscope. This device uses a ranging module to acquire the height changes of the workpiece surface and automatically adjusts the height of the focusing axis and the ultrasonic probe module in real time, keeping the probe and the workpiece at the optimal focal plane at all times, thereby achieving automatic focusing and improving the quality of ultrasonic scanning images.
[0005] To achieve the above objectives, according to one aspect of the present invention, an automatic focusing device for an ultrasonic scanning microscope is provided, comprising:
[0006] Motion table module, ranging module, and ultrasonic probe module;
[0007] The motion stage module includes a scanning axis, a focusing axis, and a stepping axis. The scanning axis is set along the X-axis, the stepping axis is set along the Y-axis, and the focusing axis is set along the Z-axis. The motion stage module is used to adjust the position of the ultrasound probe module and focus the ultrasound probe.
[0008] The ranging module is mounted on the scanning axis or the focusing axis, and the ranging module is used to measure the surface height of the workpiece being measured.
[0009] The ultrasonic probe module is mounted on the focusing axis and is used to emit and receive ultrasonic waves to detect the workpiece under test.
[0010] Optionally, the ultrasonic probe module and the ranging module are arranged in parallel to each other.
[0011] Optionally, the motion platform module is also used to adjust the position of the ranging module.
[0012] Optionally, the scanning axis is perpendicular to the stepping axis and is disposed on the stepping axis, and the focusing axis is perpendicular to the scanning axis and is disposed on the scanning axis.
[0013] Optionally, one end of the scanning axis is disposed on a stepping axis, and the other end of the scanning axis is disposed on another stepping axis.
[0014] Optionally, the scanning axis, the focusing axis, the ranging module, and the ultrasonic probe module move along the Y-axis on the stepping axis;
[0015] The focusing axis, the ranging module, and the ultrasonic probe module move along the X-axis on the scanning axis;
[0016] If the ranging module is mounted on the focusing axis, the ranging module moves along the Z-axis on the focusing axis;
[0017] The ultrasonic probe module moves along the Z-axis on the focusing axis.
[0018] Optionally, it also includes a first connecting plate, through which the focusing axis is fixed on the scanning axis.
[0019] Optionally, it also includes a second connecting plate, on which the ultrasonic probe module is fixed and mounted on the focusing axis via the second connecting plate.
[0020] Optionally, it also includes a third connecting plate, on which the ranging module is fixed, and the ranging module and the third connecting plate are mounted on the scanning axis via the first connecting plate.
[0021] Optionally, the system also includes a water tank module, which is disposed at the bottom of the motion table module and is used to place the workpiece to be tested.
[0022] Compared with the prior art, the embodiments of this utility model have at least one of the following beneficial effects:
[0023] Through the above technical solution, the motion stage module is equipped with a scanning axis along the X-axis, a stepping axis along the Y-axis, and a focusing axis along the Z-axis. The ranging module measures the surface height of the workpiece being measured. When the surface height of the workpiece changes, the motion stage module adjusts the positions of the ranging module and the ultrasonic probe module in real time to achieve automatic focusing of the ultrasonic probe module, always keeping the ultrasonic probe module and the workpiece being measured at the optimal focal plane, thereby improving the quality of the ultrasonic scanning image. Attached Figure Description
[0024] Other features, objects, and advantages of this invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings:
[0025] Figure 1 This is a schematic diagram of the overall structure of an automatic focusing device for an ultrasonic scanning microscope according to an exemplary embodiment of the present invention.
[0026] Figure 2 This is a schematic diagram of the structure of a motion table module according to an exemplary embodiment of the present invention.
[0027] Figure 3 This is a schematic diagram of the structure of a ranging module according to an exemplary embodiment of the present invention.
[0028] Figure 4 This is a schematic diagram of the structure of an ultrasonic probe module according to an exemplary embodiment of the present invention.
[0029] Figure 5 This is a structural schematic diagram of a water tank module according to an exemplary embodiment of the present invention.
[0030] Figure 6 This is a structural schematic diagram of a cantilever motion table module according to an exemplary embodiment of the present invention.
[0031] Figure 7 This is a schematic diagram of the structure of a turntable motion table module according to an exemplary embodiment of the present invention.
[0032] Figure 8 This is a schematic diagram of the structure of a cam pusher reciprocating motion table module according to an exemplary embodiment of the present invention.
[0033] Figure 9 This is a schematic diagram illustrating the working principle of an automatic focusing device for an ultrasonic scanning microscope according to an exemplary embodiment of the present invention.
[0034] Figure 10 This is a schematic diagram illustrating the defocusing state of a tilted workpiece being tested without automatic focusing, according to an exemplary embodiment of the present invention.
[0035] Figure 11 This is a schematic diagram illustrating the defocusing state of a warped workpiece under test without automatic focusing, according to an exemplary embodiment of the present invention.
[0036] Figure 12 This is a schematic diagram illustrating an automatic focusing device for an ultrasonic scanning microscope, according to an exemplary embodiment of the present invention, which adapts to the tilt of the surface of the workpiece being measured.
[0037] Figure 13 This is a schematic diagram illustrating an automatic focusing device for an ultrasonic scanning microscope, according to an exemplary embodiment of the present invention, which automatically adjusts to adapt to the warping of the surface of the workpiece being tested.
[0038] Figure 14 This is a schematic diagram of a scanning trajectory in a two-round scanning mode according to an exemplary embodiment of the present invention.
[0039] Figure 15 This is a schematic diagram of a progressive scan mode scan trajectory according to an exemplary embodiment of the present invention.
[0040] Figure 16 This is a schematic diagram of a scanning trajectory in a parallel scanning mode according to an exemplary embodiment of the present invention.
[0041] Figure 17 This is a schematic diagram of the scanning trajectory of an ultrasonic probe module that also functions as a ranging module in a two-round scanning mode, according to an exemplary embodiment of the present invention.
[0042] Figure 18 This is a schematic diagram of the scanning trajectory of an ultrasonic probe module that also functions as a ranging module in progressive scan mode, according to an exemplary embodiment of the present invention.
[0043] Figure 19 This is a schematic diagram of the scanning trajectory of an ultrasonic probe module that also functions as a ranging module in parallel scanning mode, according to an exemplary embodiment of the present invention.
[0044] Explanation of reference numerals in the attached figures
[0045] 100 Automatic focusing device for ultrasonic scanning microscope
[0046] 110 motion table module
[0047] 111 Scan axis
[0048] 112 stepper axis
[0049] 113 Focusing axis
[0050] 120 ranging module
[0051] 130 Ultrasonic Probe Module
[0052] 140 First connecting plate
[0053] 150 Second connecting plate
[0054] 160 Third connecting plate
[0055] 170 Water Tank Module
[0056] 180 The workpiece under test
[0057] 190 turntable
[0058] 200 Cam Module
[0059] 201 Cam
[0060] 202 Putter Detailed Implementation
[0061] The present invention will now be described in detail with reference to specific embodiments. These embodiments will help those skilled in the art to further understand the present invention, but do not limit the present invention in any way. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all fall within the protection scope of the present invention.
[0062] Figure 1 This is a schematic diagram of the overall structure of an automatic focusing device for an ultrasonic scanning microscope according to an exemplary embodiment of the present invention.
[0063] like Figure 1 As shown, this utility model provides an automatic focusing device 100 for an ultrasonic scanning microscope, including: a motion stage module 110, a ranging module 120, and an ultrasonic probe module 130.
[0064] The ranging module 120 and the ultrasonic probe module 130 are mounted on the motion stage module 110. The motion stage module 110 is used to drive the ranging module 120 and the ultrasonic probe module 130 to move in the XYZ directions. The ranging module 120 is used to measure the distance between the ranging module 120 and the upper surface of the workpiece 180 being measured. The ultrasonic probe module 130 is used to emit and receive ultrasonic waves to perform ultrasonic scanning on the workpiece 180 being measured, which facilitates subsequent ultrasonic scanning imaging.
[0065] Figure 2 This is a schematic diagram of the structure of a motion table module according to an exemplary embodiment of the present invention.
[0066] like Figure 2 As shown, the motion stage module 110 includes a scanning axis 111, a focusing axis 113, and a stepping axis 112. The scanning axis 111 is set along the X-axis direction, the stepping axis 112 is set along the Y-axis direction, and the focusing axis 113 is set along the Z-axis direction.
[0067] The motion stage module 110 is used to adjust the position of the ranging module 120 and the ultrasonic probe module 130 and to focus the ultrasonic probe module 130.
[0068] The motion stage module 110 of this utility model is a gantry-type motion stage module. The gantry-type motion stage module can focus the ultrasonic probe module 130 by adjusting the distance measuring module 120 and the ultrasonic probe module 130 to move in the XYZ direction.
[0069] like Figure 2 As shown, the gantry-type motion stage module includes a scanning axis 111, a focusing axis 113, and two stepping axes 112. One end of the scanning axis 111 is mounted on one stepping axis 112, and the other end is mounted on the other stepping axis 112. The scanning axis 111 and the two stepping axes 112 are arranged perpendicularly to each other, and the scanning axis 111 can move along the Y-axis on the two stepping axes 112. The focusing axis 113 is mounted on the scanning axis 111, and the focusing axis 113 can move along the X-axis on the scanning axis 111.
[0070] Figure 3 This is a schematic diagram of the structure of a ranging module according to an exemplary embodiment of the present invention.
[0071] like Figure 1 , Figure 3 As shown, the ranging module 120 is mounted on the scanning axis 111 or the focusing axis 113. The ranging module 120 is used to measure the surface height of the workpiece 180 being measured.
[0072] The surface height of the workpiece 180 measured by the ranging module 120 is the surface height in the overall coordinate system of the automatic focusing device 100 of the ultrasonic scanning microscope provided in this utility model.
[0073] The ranging module 120 can be used as a pre-scanning module to achieve accurate ranging. Specifically, the ranging module 120 can be a laser ranging module, an ultrasonic ranging module, an eddy current ranging module, or a capacitance ranging module.
[0074] Figure 4 This is a schematic diagram of the structure of an ultrasonic probe module according to an exemplary embodiment of the present invention.
[0075] like Figure 1 , Figure 4 As shown, the ultrasonic probe module 130 is mounted on the focusing axis 113. The ultrasonic probe module 130 is used to emit and receive ultrasonic waves to detect the workpiece 180 under test.
[0076] The ultrasonic probe module 130 can move up and down along the Z-axis with the focusing axis 113. During the ultrasonic scanning process, it emits and receives ultrasonic echo signals for final imaging.
[0077] Through the above technical solution, the motion stage module 110 is provided with a scanning axis 111 set along the X-axis, a stepping axis 112 set along the Y-axis, and a focusing axis 113 set along the Z-axis. The ranging module 120 measures the surface height of the workpiece 180 being measured. When the surface height of the workpiece 180 being measured changes, the motion stage module 110 adjusts the positions of the ranging module 120 and the ultrasonic probe module 130 in real time to achieve automatic focusing of the ultrasonic probe module 130, always keeping the ultrasonic probe module 130 and the workpiece 180 being measured at the optimal focal plane, thereby improving the quality of the ultrasonic scanning image.
[0078] In one possible embodiment, the ultrasonic probe module 130 and the ranging module 120 are arranged parallel to each other. The motion stage module is also used to adjust the position of the ranging module.
[0079] In one possible embodiment, the scanning axis 111 is perpendicular to the stepping axis 112 and is disposed on the stepping axis 112, and the focusing axis 113 is perpendicular to the scanning axis 111 and is disposed on the scanning axis 111.
[0080] Specifically, one end of the scanning axis 111 is mounted on a stepping axis 112, and the other end of the scanning axis 111 is mounted on another stepping axis 112.
[0081] In one possible embodiment, under the adjustment of the motion stage module 110, the scanning axis 111, the focusing axis 113, the ranging module 120, and the ultrasonic probe module 130 move along the Y-axis direction on the stepping axis 112.
[0082] The focusing axis 113, the ranging module 120, and the ultrasonic probe module 130 move along the X-axis on the scanning axis 111.
[0083] If the ranging module 120 is set on the focusing axis 113, the ranging module 120 moves along the Z-axis direction on the focusing axis 113.
[0084] The ultrasonic probe module 130 moves along the Z-axis on the focusing axis 113.
[0085] If the ranging module 120 is set on the scanning axis 111, the ranging module 120 will not move along the Z-axis.
[0086] The ultrasonic probe module 130 is adjusted to the focusing position by the adjustment function of the motion stage module 110.
[0087] For example, 1. Figure 4 As shown, in one possible embodiment, the autofocus device 100 of the ultrasonic scanning microscope further includes a first connecting plate 140, through which the focusing axis 113 is fixed to the scanning axis 111.
[0088] The first connecting plate 140 can slide along the X-axis on the scanning axis 111.
[0089] In one possible embodiment, the autofocusing device 100 of the ultrasonic scanning microscope further includes a second connecting plate 150, on which the ultrasonic probe module 130 is fixed and mounted on the focusing axis 113 via the second connecting plate 150.
[0090] The ultrasonic probe module 130 passes through both bottom surfaces of the second connecting plate 150, and one side of the second connecting plate 150 is fixed on the focusing shaft 113. Thus, the ultrasonic probe module 130 is mounted on the focusing shaft 113 through the second connecting plate 150.
[0091] As an example, the first connecting plate 140, the focusing axis 113, the second connecting plate 150, and the ultrasonic probe module 130 can move together along the X-axis on the scanning axis 111.
[0092] As another example, the ultrasonic probe module 130 and the second connecting plate 150 can move together with the focusing axis 113 on the first connecting plate 140 along the Z-axis.
[0093] like Figure 1 , Figure 3 As shown, in one possible embodiment, the autofocus device 100 of the ultrasonic scanning microscope further includes a third connecting plate 160, a ranging module 120 fixed on the third connecting plate 160, and the ranging module 120 and the third connecting plate 160 mounted on the scanning axis 111 via a first connecting plate 140.
[0094] The ranging module 120 penetrates both bottom surfaces of the third connecting plate 160, and one side of the third connecting plate 160 is fixed to the first connecting plate 140.
[0095] As an example, the ranging module 120 and the third connecting plate 160 can move along the X-axis direction on the scanning axis 111 along with the first connecting plate 140.
[0096] In another possible embodiment, the ranging module 120 can also be mounted on the focusing axis 113 via the third connecting plate 160. If the ranging module 120 is mounted on the focusing axis 113 via the third connecting plate 160, the ranging module 120 can move together with the ultrasonic probe module 130 along the Z-axis direction on the focusing axis 113.
[0097] When the ranging module 120 is mounted on the focusing axis 113 via the third connecting plate 160, the ranging module 120 and the ultrasonic probe module 130 are still arranged parallel to each other.
[0098] Figure 5 This is a structural schematic diagram of a water tank module according to an exemplary embodiment of the present invention.
[0099] like Figure 5 As shown, in one possible embodiment, an autofocusing device 100 for an ultrasonic scanning microscope may further include a water tank module 170, which is disposed at the bottom of the motion stage module 110 and is used to place the workpiece 180 to be measured.
[0100] If a gantry-type motion table module is used, the water tank module 170 can be positioned between the two stepper axes 112, below the scanning axis 111 and the focusing axis 113. The water tank module 170 can hold water or other liquids, and the workpiece 180 to be tested is placed in the liquid in the water tank module 170 for ultrasonic testing.
[0101] Figure 6 This is a structural schematic diagram of a cantilever motion table module according to an exemplary embodiment of the present invention.
[0102] like Figure 6 As shown, in one possible embodiment, the motion table module 110 of this utility model can also be a cantilever motion table module.
[0103] The cantilever motion stage module includes a scanning axis 111, a stepping axis 112, and a focusing axis 113. The scanning axis 111 is positioned along the X-axis, the stepping axis 112 along the Y-axis, and the focusing axis 113 along the Z-axis. The scanning axis 111 is perpendicular to and mounted on the stepping axis 112. One end of the scanning axis 111 is mounted on the stepping axis 112, and the other end is free after scanning. The scanning axis 111 can move along the Y-axis on the stepping axis 112. The focusing axis 113 is perpendicular to and mounted on the scanning axis 111. The focusing axis 113 can move along the X-axis with the scanning axis 111 and can also move along the Z-axis.
[0104] If the motion stage module 110 is a cantilever motion stage module, in the autofocus device 100 of the ultrasonic scanning microscope, the focusing axis 113 is fixed to the scanning axis 111 via the first connecting plate 140. The ultrasonic probe module 130 passes through both bottom surfaces of the second connecting plate 150 and is fixed to the second connecting plate 150. One side of the second connecting plate 150 is fixed to the focusing axis 113. Thus, the ultrasonic probe module 130 is mounted on the focusing axis 113 via the second connecting plate 150. The ranging module 120 passes through both bottom surfaces of the third connecting plate 160 and is fixed to the third connecting plate 160. One side of the third connecting plate 160 is fixed to the first connecting plate 140. Thus, the ranging module 120 is mounted on the scanning axis 111 via the third connecting plate 160 and the first connecting plate 140.
[0105] The ranging module 120 and the ultrasonic probe module 130 are arranged in parallel to each other.
[0106] The water tank module 170 can be set on one side of the stepper axis 112, below the scanning axis 111 and the focusing axis 113, and the workpiece 180 to be measured is set in the liquid inside the water tank module 170.
[0107] Figure 7 This is a schematic diagram of the structure of a turntable motion table module according to an exemplary embodiment of the present invention.
[0108] like Figure 7 As shown, in one possible embodiment, the motion table module 110 of this utility model can also be a turntable motion table module.
[0109] The rotary table module includes a focusing axis 113, a scanning axis 111 and a turntable 190. The scanning axis 111 is set along the X-axis direction, and the focusing axis 113 is set along the Z-axis direction. The focusing axis 113 is perpendicular to the scanning axis 111 and is set on the scanning axis 111.
[0110] If a rotary stage module is used, in the autofocus device 100 of the ultrasonic scanning microscope, the focusing axis 113 is fixed to the scanning axis 111 via the first connecting plate 140. The ultrasonic probe module 130 passes through both bottom surfaces of the second connecting plate 150 and is fixed to the second connecting plate 150. One side of the second connecting plate 150 is fixed to the focusing axis 113. Thus, the ultrasonic probe module 130 is mounted on the focusing axis 113 via the second connecting plate 150. The ranging module 120 passes through both bottom surfaces of the third connecting plate 160 and is fixed to the third connecting plate 160. One side of the third connecting plate 160 is fixed to the first connecting plate 140. Thus, the ranging module 120 is mounted on the scanning axis 111 via the third connecting plate 160 and the first connecting plate 140.
[0111] The ranging module 120 and the ultrasonic probe module 130 are arranged in parallel to each other.
[0112] The water tank module 170 is positioned below the scanning axis 111 and the focusing axis 113, and the workpiece 180 to be measured is placed in the liquid inside the water tank module 170. Furthermore, a turntable 190 is provided at the bottom of the water tank module 170, and the turntable 190 drives the water tank module 170 to rotate, thereby realizing the movement of the workpiece 180 to be measured in the Y-axis direction.
[0113] Figure 8 This is a schematic diagram of the structure of a cam pusher reciprocating motion table module according to an exemplary embodiment of the present invention.
[0114] like Figure 8 As shown, in one possible embodiment, the motion table module 110 of this utility model can also be a cam push rod reciprocating motion table module.
[0115] like Figure 8 As shown, the cam-pull reciprocating motion stage module includes a scanning axis 111, a stepping axis 112, a focusing axis 113, and a cam module 200. The scanning axis 111 is positioned along the Y-axis, the stepping axis 112 along the X-axis, and the focusing axis 113 along the Z-axis. The focusing axis 113 is perpendicular to and mounted on the stepping axis 112. The focusing axis 113 can move along the X-axis on the stepping axis 112 and can also move along the Z-axis itself. The scanning axis 111 is positioned below the focusing axis 113 and the stepping axis 112. The cam module 200 includes a cam 201 and a pusher 202. One end of the pusher 202 is connected to the cam 201, and the other end is connected to the stepping axis 112. The cam module 200 drives the stepping axis 112 to reciprocate along the X-axis.
[0116] If a cam-pull reciprocating motion stage module is used, in the autofocus device 100 of the ultrasonic scanning microscope, the focusing shaft 113 is fixed to the stepper shaft 112 via the first connecting plate 140. The ultrasonic probe module 130 passes through both bottom surfaces of the second connecting plate 150 and is fixed to the second connecting plate 150. One side of the second connecting plate 150 is fixed to the focusing shaft 113. Thus, the ultrasonic probe module 130 is mounted on the focusing shaft 113 via the second connecting plate 150. The ranging module 120 passes through both bottom surfaces of the third connecting plate 160 and is fixed to the third connecting plate 160. One side of the third connecting plate 160 is fixed to the first connecting plate 140. Thus, the ranging module 120 is mounted on the stepper shaft 112 via the third connecting plate 160 and the first connecting plate 140.
[0117] The ranging module 120 and the ultrasonic probe module 130 are arranged in parallel to each other.
[0118] The water tank module 170 is mounted on the scanning axis 111, which is used to drive the water tank module 170 to move along the Y-axis.
[0119] Figure 9 This is a schematic diagram illustrating the working principle of an automatic focusing device for an ultrasonic scanning microscope according to an exemplary embodiment of the present invention.
[0120] like Figure 9 As shown, in one possible embodiment, when using the autofocusing device 100 of the ultrasonic scanning microscope provided by this utility model for autofocusing, the motion stage module 110 drives the ranging module 120 to perform a pre-scan operation on the workpiece 180 along the scanning trajectory corresponding to the preset scanning mode. At the same time, the scanning axis 111 (X-axis), the stepping axis 112 (Y-axis), the height L of the ranging module 120, and the distance S between the ranging module 120 and the surface of the workpiece 180 are recorded. The actual height H of the scanning position (X, Y) of the upper surface of the workpiece 180 is obtained by subtracting the distance S between the ranging module 120 and the surface of the workpiece 180 from the height L of the ranging module 120. This is recorded in a lookup table to form a lookup table of each scanning position and height of the upper surface of the workpiece 180, and serves as the target data for the formal scanning operation.
[0121] H=LS
[0122] Where H represents the actual height of the scanning position (X, Y) on the upper surface of the workpiece 180 being measured, L represents the height of the ranging module 120, and S represents the distance between the ranging module 120 and the surface of the workpiece 180 being measured.
[0123] When the motion stage module 110 drives the ranging module 120 to perform a formal scanning operation on the workpiece 180 under test along the scanning trajectory corresponding to the preset scanning mode, the current position of the scanning axis 111 (X-axis) and the stepping axis 112 (Y-axis) is read. The actual height H of the upper surface of the workpiece 180 under test corresponding to the current position (X, Y) is obtained by looking up the reference table. The optimal focal plane distance F is superimposed as the target height of the focusing axis 113. The focusing axis 113 is adjusted to the target height position of the focusing axis 113, and the ultrasonic probe module 130 is automatically focused.
[0124] Z = H + F
[0125] Where Z represents the target height of the focusing axis 113, H represents the actual height H of the upper surface of the workpiece 180 at the current position (X, Y), and F represents the optimal focal plane spacing.
[0126] In this invention, the preset scanning mode can be a two-round scanning mode, a line-by-line scanning mode, or a parallel scanning mode. In the two-round scanning mode, the pre-scan operation and the formal scanning operation each execute an S-shaped reciprocating scanning trajectory once; in the line-by-line scanning mode, a pre-scan operation is first performed for each line, and then a formal scanning operation is performed in the opposite direction of that line, executing a reciprocating scanning trajectory line by line; in the parallel scanning mode, the pre-scan operation and the formal scanning operation execute an S-shaped scanning trajectory simultaneously.
[0127] In one possible embodiment, the autofocusing device 100 of an ultrasonic scanning microscope may use only the ultrasonic probe module 130 to measure the surface height of the workpiece 180 under test. Furthermore, the ultrasonic probe module 130 emits and receives ultrasonic waves to detect the workpiece 180, thus omitting the ranging module 120 and using the ultrasonic probe module 130 to measure the surface height of the workpiece 180. When only the ultrasonic probe module 130 is used, a two-round scanning mode, a line-by-line scanning mode, or a parallel scanning mode can also be employed, with the ultrasonic probe module 130 replacing the function of the ranging module 120.
[0128] Figure 10 This is a schematic diagram illustrating the defocusing state of a tilted workpiece 180 without automatic focusing, according to an exemplary embodiment of the present invention. Figure 11 This is a schematic diagram illustrating the defocusing state of a warped workpiece 180 without automatic focusing, according to an exemplary embodiment of the present invention.
[0129] like Figure 10 , 11 As shown, without autofocus, the ultrasonic probe module 130 has poor adaptability when detecting workpieces 180 with tilted, warped, or arched surfaces. The ultrasonic probe module 130 is only at the optimal focal height near the focal point, and is in a defocused state at other positions, resulting in a decrease in the quality of the scanned image.
[0130] Figure 12 This is a schematic diagram illustrating an automatic focusing device for an ultrasonic scanning microscope, according to an exemplary embodiment of the present invention, which adapts to the tilt of the surface of the workpiece being measured. Figure 13 This is a schematic diagram illustrating an automatic focusing device for an ultrasonic scanning microscope, according to an exemplary embodiment of the present invention, which automatically adjusts to adapt to the warping of the surface of the workpiece being tested.
[0131] like Figure 12 , 13As shown, the automatic focusing device 100 of the ultrasonic scanning microscope provided by this utility model can automatically adjust the height of the ultrasonic probe module 130 during ultrasonic scanning to adapt to the surface tilt, warping, and arching of the workpiece 180 being measured, ensuring that the ultrasonic probe module 130 and the surface of the workpiece 180 being measured are always at the effective focusing depth, preventing the surface of the workpiece 180 being measured from defocusing, and improving the quality of the scanned image.
[0132] Figure 14 This is a schematic diagram of a scanning trajectory in a two-round scanning mode according to an exemplary embodiment of the present invention.
[0133] like Figure 14 As shown, in one possible embodiment, the autofocusing device 100 of the ultrasonic scanning microscope operates in a two-round scanning mode as follows:
[0134] like Figure 14 As shown in (a), firstly, the motion stage module 110 drives the ranging module 120 to perform a pre-scan operation, scanning the entire plane of the workpiece 180 along the S-shaped reciprocating scanning trajectory, recording the actual height data of the entire plane of the workpiece 180, and generating a table of each scan position and height on the upper surface of the workpiece 180.
[0135] like Figure 14 As shown in (b), next, the motion stage module 110 drives the ultrasonic probe module 130 to perform a formal scanning operation along the S-shaped reciprocating scanning trajectory. During the formal scanning operation, the position coordinates of the formal scanning axis 111 and the stepping axis 112 are read in real time to determine the formal scanning position (X, Y). By querying the table of each scanning position and height of the upper surface of the workpiece 180 under test and interpolating, the actual height of the surface of the workpiece 180 under test at the current formal scanning position is calculated. The optimal focal plane spacing is superimposed to determine the target height of the focusing axis 113. The motion stage module 110 drives the focusing axis 113 to move to the target height of the focusing axis 113 to realize the automatic focusing of the ultrasonic probe module 130.
[0136] Figure 15 This is a schematic diagram of a progressive scan mode scan trajectory according to an exemplary embodiment of the present invention.
[0137] like Figure 15 As shown, in one possible embodiment, the autofocusing device 100 of the ultrasonic scanning microscope performs autofocusing in progressive scan mode as follows:
[0138] like Figure 15As shown in (a), firstly, the motion stage module 110 drives the ranging module 120 to perform the pre-scan operation of the first row. The stepping axis 112 is fixed in the position of the first row, and the scanning axis 111 moves from left to right along the X-axis to record the actual height data of the surface of the workpiece 180 being measured in the first row, and generates a table of each scanning position and height of the upper surface of the workpiece 180 being measured.
[0139] like Figure 15 As shown in (b), next, the motion stage module 110 drives the ultrasonic probe module 130 to perform the first row of formal scanning operations, moves the ultrasonic probe module 130 to the position of the stepping axis 112 corresponding to the first row of pre-scanning operations and fixes it, and the scanning axis 111 moves from right to left along the X-axis. During the formal scanning process, the current position of the scanning axis 111 is read in real time to determine the formal scanning position (X, Y). By querying the table of each scanning position and height of the upper surface of the workpiece 180 under test and interpolating, the actual height of the surface of the workpiece 180 under test at the current formal scanning position is calculated. The optimal focal plane spacing is superimposed to determine the target height of the focusing axis 113. The motion stage module 110 drives the focusing axis 113 to move to the target height of the focusing axis 113.
[0140] like Figure 15 (c) Figure 15 As shown in (d), after the first row of pre-scan and formal scan operations are completed, the stepper axis 112 is moved to the starting point of the second row, driving the ranging module 120 and the ultrasonic probe module 130 to repeatedly perform the pre-scan and formal scan operations until the ultrasonic scan of the entire surface of the workpiece 180 is completed, so as to realize the automatic focusing of the ultrasonic probe module 130.
[0141] Figure 16 This is a schematic diagram of a scanning trajectory in a parallel scanning mode according to an exemplary embodiment of the present invention.
[0142] like Figure 16 As shown, in one possible embodiment, the autofocusing device 100 of the ultrasonic scanning microscope operates in parallel scanning mode as follows:
[0143] like Figure 16 (a) and Figure 16 As shown in (b), the motion stage module 110 drives the ranging module 120 and the ultrasonic probe module 130 to simultaneously perform pre-scan and formal scan operations, scanning the entire plane of the workpiece 180 along an S-shaped reciprocating scanning trajectory. Based on the positional deviation between the ranging module 120 and the ultrasonic probe module 130, as... Figure 16 As shown in (a), when the ultrasonic probe module 130 is outside the height measured by the ranging module 120, the height of the focusing axis 113 remains unchanged, and the height of the ultrasonic probe module 130 remains unchanged, as shown in (a). Figure 16 As shown in (b), when the ultrasonic probe module 130 is within the height measured by the ranging module 120, interpolation calculation is performed to determine the target height of the focusing axis 113, and the height of the focusing axis 113 is adjusted to focus the ultrasonic probe module 130.
[0144] like Figure 16 As shown in (b), when the ultrasonic probe module 130 is within the height measured by the ranging module 120, the ranging module 120 performs a pre-scan operation on the leading edge S-shaped reciprocating scanning trajectory to continuously record the actual height data of the plane of the workpiece 180 under test, and generates a table of each scanning position and height of the upper surface of the workpiece 180 under test. The ultrasonic probe module 130 performs a formal scanning operation on the trailing edge S-shaped reciprocating scanning trajectory, reads the position coordinates of the formal scanning axis 111 and the stepping axis 112 in real time to determine the formal scanning position (X, Y), queries the table of each scanning position and height of the upper surface of the workpiece 180 under test and interpolates to calculate the actual height of the surface of the workpiece 180 under test at the current formal scanning position, superimposes the optimal focal plane spacing, determines the target height of the focusing axis 113, and the motion stage module 110 drives the focusing axis 113 to move to the target height of the focusing axis 113 to realize the automatic focusing of the ultrasonic probe module 130.
[0145] When scanning according to the preset scanning trajectory, the number of pre-scanning trajectory lines can be reduced, a rough table of each scanning position and height on the upper surface of the workpiece under test can be determined, and the table of each scanning position and height of the workpiece under test on the actual scanning trajectory can be calculated by interpolation. By introducing a certain focal plane height control error, the pre-scanning time can be shortened and the overall scanning efficiency can be improved.
[0146] In one possible embodiment, the ultrasonic probe module 130 itself can also perform the ranging function. When the surface morphology of the workpiece 180 being measured changes little, the ranging module 120 can be cancelled and the ultrasonic probe module 130 can be used to perform the pre-scanning operation.
[0147] Figure 17 This is a schematic diagram of the scanning trajectory of an ultrasonic probe module that also functions as a ranging module in a two-round scanning mode, according to an exemplary embodiment of the present invention.
[0148] like Figure 17 As shown, in one possible embodiment, the automatic focusing process of the ultrasonic probe module 130 as a ranging module 120 in the two-round scanning mode is as follows:
[0149] like Figure 17As shown in (a), firstly, the position of the focusing axis 113 is kept fixed, and the motion stage module 110 drives the scanning axis 111 and the stepping axis 112 to move the ultrasonic probe module 130 to perform a pre-scan operation. Along the S-shaped reciprocating scanning trajectory, the entire plane of the workpiece 180 under test is scanned, the actual height data of the entire plane of the workpiece 180 under test is recorded, and a table of each scanning position and height on the upper surface of the workpiece 180 under test is generated.
[0150] like Figure 17 As shown in (a), next, the motion stage module 110 drives the ultrasonic probe module 130 to perform a formal scanning operation along the S-shaped reciprocating scanning trajectory. During the formal scanning operation, the position coordinates of the formal scanning axis 111 and the stepping axis 112 are read in real time to determine the formal scanning position (X, Y). By querying the table of each scanning position and height of the upper surface of the workpiece 180 under test and interpolating, the actual height of the surface of the workpiece 180 under test at the current formal scanning position is calculated. The optimal focal plane spacing is superimposed to determine the target height of the focusing axis 113. The motion stage module 110 drives the focusing axis 113 to move to the target height of the focusing axis 113 to realize the automatic focusing of the ultrasonic probe module 130.
[0151] Figure 18 This is a schematic diagram of the scanning trajectory of an ultrasonic probe module that also functions as a ranging module in progressive scan mode, according to an exemplary embodiment of the present invention.
[0152] like Figure 18 As shown, in one possible embodiment, the automatic focusing process of the ultrasonic probe module 130, which also functions as the ranging module 120, in progressive scan mode is as follows:
[0153] like Figure 18 As shown in (a), firstly, the position of the focusing axis 113 is kept fixed, the motion stage module 110 drives the ultrasonic probe module 130 to perform the first row of pre-scanning operations, the stepping axis 112 is fixed in the first row, and the scanning axis 111 is driven to move from left to right along the X-axis, recording the actual height data of the surface of the workpiece 180 in the first row, and generating a table of each scanning position and height of the upper surface of the workpiece 180.
[0154] like Figure 18As shown in (b), next, the motion stage module 110 drives the ultrasonic probe module 130 to perform the first row of formal scanning operations, fixes the stepping axis 112, and drives the scanning axis 111 to move from right to left along the X-axis. During the formal scanning process, the current position of the scanning axis 111 is read in real time to determine the formal scanning position (X, Y). By querying the table of each scanning position and height of the upper surface of the workpiece 180 under test and interpolating, the actual height of the surface of the workpiece 180 under test at the current formal scanning position is calculated. The optimal focal plane spacing is superimposed to determine the target height of the focusing axis 113. The motion stage module 110 drives the focusing axis 113 to move to the target height of the focusing axis 113.
[0155] like Figure 18 (c) Figure 18 As shown in (d), after the first row of pre-scan and formal scan operations are completed, the stepper axis 112 is moved to the starting point of the second row, driving the ultrasonic probe module 130 to repeatedly perform the pre-scan and formal scan operations until the ultrasonic scan of the entire surface of the workpiece 180 under test is completed, thereby realizing the automatic focusing of the ultrasonic probe module 130.
[0156] Figure 19 This is a schematic diagram of the scanning trajectory of an ultrasonic probe module that also functions as a ranging module in parallel scanning mode, according to an exemplary embodiment of the present invention.
[0157] like Figure 19 As shown, in one possible embodiment, the automatic focusing process of the ultrasonic probe module 130, which also functions as the ranging module 120, in parallel scanning mode is as follows:
[0158] like Figure 19 (a) and Figure 19 As shown in (b), the motion stage module 110 drives the ultrasound probe module 130 to perform pre-scan and formal scan operations along an S-shaped reciprocating scanning trajectory. When the stepping distance of the stepping axis 112 is not greater than a preset distance threshold, such as 1 mm, the scan line of the pre-scan operation and the scan line of the formal scan operation are very close in the direction of the stepping axis 112, and the positional deviation of the two in the Z-axis direction is within an acceptable range. The actual height data of the current formal scan operation can be used as the height data of the pre-scan of the next scan line, so that the pre-scan and formal scan operations can be achieved using only the ultrasound probe module 130.
[0159] When the step distance is greater than the preset threshold, such as 1 mm, only the ultrasonic probe module 130 is used as the ranging module 120. If the deviation between the pre-scan height data and the formal scan height data exceeds the acceptable range, the parallel scanning mode cannot be used.
[0160] The specific embodiments of this utility model have been described above. It should be understood that this utility model is not limited to the specific embodiments described above, and those skilled in the art can make various modifications or variations within the scope of the claims, which do not affect the substantive content of this utility model. The above-described preferred features can be used in any combination without conflict.
Claims
1. An automatic focusing device for an ultrasonic scanning microscope, characterized in that, include: Motion table module, ranging module, and ultrasonic probe module; The motion stage module includes a scanning axis, a focusing axis, and a stepping axis. The scanning axis is set along the X-axis, the stepping axis is set along the Y-axis, and the focusing axis is set along the Z-axis. The motion stage module is used to adjust the position of the ultrasound probe module and focus the ultrasound probe module. The ranging module is mounted on the scanning axis or the focusing axis, and the ranging module is used to measure the surface height of the workpiece being measured. The ultrasonic probe module is mounted on the focusing axis and is used to emit and receive ultrasonic waves to detect the workpiece under test.
2. The automatic focusing device for an ultrasonic scanning microscope according to claim 1, characterized in that, The ultrasonic probe module and the ranging module are arranged in parallel to each other.
3. The automatic focusing device for an ultrasonic scanning microscope according to claim 1, characterized in that, The motion platform module is also used to adjust the position of the ranging module.
4. The automatic focusing device for an ultrasonic scanning microscope according to claim 1, characterized in that, The scanning axis is perpendicular to the stepping axis and is disposed on the stepping axis, and the focusing axis is perpendicular to the scanning axis and is disposed on the scanning axis.
5. The automatic focusing device for an ultrasonic scanning microscope according to claim 2, characterized in that, One end of the scanning axis is mounted on a stepper axis, and the other end of the scanning axis is mounted on another stepper axis.
6. The automatic focusing device for an ultrasonic scanning microscope according to claim 1, characterized in that, The scanning axis, the focusing axis, the ranging module, and the ultrasonic probe module move along the Y-axis on the stepping axis; The focusing axis, the ranging module, and the ultrasonic probe module move along the X-axis on the scanning axis; If the ranging module is mounted on the focusing axis, the ranging module moves along the Z-axis on the focusing axis; The ultrasonic probe module moves along the Z-axis on the focusing axis.
7. The automatic focusing device for an ultrasonic scanning microscope according to claim 1, characterized in that, It also includes a first connecting plate, through which the focusing axis is fixed on the scanning axis.
8. The automatic focusing device for an ultrasonic scanning microscope according to claim 1, characterized in that, It also includes a second connecting plate, on which the ultrasonic probe module is fixed and mounted on the focusing axis via the second connecting plate.
9. The automatic focusing device for an ultrasonic scanning microscope according to claim 7, characterized in that, It also includes a third connecting plate, on which the ranging module is fixed, and the ranging module and the third connecting plate are mounted on the scanning axis through the first connecting plate.
10. The automatic focusing device for an ultrasonic scanning microscope according to claim 1, characterized in that, It also includes a water tank module, which is located at the bottom of the motion table module and is used to place the workpiece to be tested.