Water volume detection module and grinding equipment

Abstract

The utility model provides a water volume detection module and grinding equipment. The water volume detection module comprises a conveying pipeline, a water volume monitoring unit and a communication unit, the conveying pipeline is connected with the nozzle and used for conveying the chemical liquid to the nozzle; the water quantity monitoring unit is connected with the conveying pipeline and is used for acquiring a real-time flow value of the chemical liquid; the communication unit is in communication connection with the water volume monitoring unit, and the communication unit is used for transmitting an alarm signal to the grinding equipment when the real-time flow value is out of a first preset range; and when the real-time flow value is out of the second preset range, a production pause signal is transmitted to the grinding equipment. According to the configuration, the water quantity monitoring unit is additionally arranged on the conveying pipeline, so that the flow of the conveying pipeline is monitored in real time, sudden change of the real-time flow value can be found in time, waste of chemical liquid caused by damage or blockage of a nozzle is avoided, meanwhile, optimal setting of the flow can be achieved, and the service life of the conveying pipeline is prolonged. And the production cost is reduced while the product yield is ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor manufacturing, especially a water quantity detection module and grinding equipment. BACKGROUND

[0002] Chemical mechanical polish (CMP) as a kind of manufacturing technology, is widely used in semiconductor process, it uses chemical oxidation and mechanical grinding combined mode to remove the excess material on wafer, to realize the high planarization of wafer surface.

[0003] When wafer finishes grinding, it will be conveyed to the interface (Output Station) with external interaction by wafer transfer system (Wafer Exchanger), in the interface, during the period of waiting to be grabbed by manipulator, it needs to use nozzle to spray deionized water (DIW) to wafer to realize moisturizing.

[0004] In the existing equipment, the water quantity of deionized water sprayed by nozzle is not monitored, it cannot detect whether nozzle is damaged or clogged, also cannot carry out the optimal setting of water quantity.

[0005] Therefore, how to realize the monitoring of nozzle water quantity to obtain the use state of nozzle and carry out the optimal setting of water quantity becomes the technical problem to be solved by the person skilled in the art. UTILITY MODEL CONTENTS

[0006] The utility model aims at providing a water quantity detection module and grinding equipment to solve the problem that whether nozzle is damaged or clogged cannot be detected in prior art, also the optimal setting of water quantity cannot be carried out.

[0007] In order to achieve the above-mentioned purpose, the utility model provides a water quantity detection module, which comprises: conveying pipeline, water quantity monitoring unit and communication unit;

[0008] The conveying pipeline is connected with nozzle, for conveying chemical liquid agent to nozzle;

[0009] The water quantity monitoring unit is connected with the conveying pipeline, for obtaining the real-time flow value of the chemical liquid agent;

[0010] The communication unit is in communication connection with the water quantity monitoring unit, the communication unit is used for transmitting alarm signal to grinding equipment when the real-time flow value is out of the first preset range, and transmitting pause production signal to the grinding equipment when the real-time flow value is out of the second preset range.

[0011] Optionally, the communication unit is provided with a preset flow value, the first preset range includes: the real-time flow value is in the range of 90%~110% of the preset flow value; the second preset range includes: the real-time flow value is in the range of 70%~130% of the preset flow value.

[0012] Optionally, the liquid outlet end of the conveying pipeline is connected with a plurality of nozzles, and the preset flow value is the sum of the predetermined flow of the plurality of nozzles.

[0013] Optionally, the communication unit includes an input subunit, a judgment subunit and an output subunit;

[0014] The input subunit is in communication connection with the water quantity monitoring unit and the judgment subunit respectively, for acquiring the real-time flow value and transmitting to the judgment subunit;

[0015] The judgment subunit is used for receiving the real-time flow value, and comparing the relationship between the real-time flow value and the first preset range and the second preset range respectively, based on the comparison result, not generating a signal, or generating the alarm signal or the pause production signal;

[0016] The output subunit is in communication connection with the judgment subunit and the control end of the grinding equipment respectively, for transmitting the alarm signal or the pause production signal to the control end of the grinding equipment.

[0017] Optionally, the input subunit includes a digital communication device; the judgment subunit includes a fault detection and classification system; and the output subunit includes an equipment automation control system.

[0018] Optionally, the water quantity monitoring unit is sleeved on the outside of the conveying pipeline.

[0019] Optionally, the water quantity monitoring unit includes a shell and a groove;

[0020] The groove is opened on the surface of the shell, and the conveying pipeline is accommodated in the groove.

[0021] Optionally, the water quantity monitoring unit further includes a baffle;

[0022] One end of the baffle is rotatably connected with the surface of the shell in which the groove is opened, the baffle has a closed position and an open position, when the baffle is in the closed position, the baffle is in contact with the surface of the shell and shields the groove; when the baffle is in the open position, the groove is exposed.

[0023] Optionally, the water quantity monitoring unit further includes an ultrasonic wave emitter, the ultrasonic wave emitter is located in the interior of the shell, and is used for emitting ultrasonic waves to the conveying pipeline.

[0024] To achieve the above object, the utility model embodiment further provides a grinding equipment, including water quantity detection module as described above.

[0025] Compared with the existing deionized water spraying assembly, the water quantity detection module and the grinding equipment have the following advantages:

[0026] The water quantity detection module provided by the application adds a water quantity monitoring unit on the conveying pipeline, obtains the real-time flow value of the chemical liquid agent in the conveying pipeline, and compares the real-time flow value with the first preset range and the second preset range respectively, so that different signals are transmitted to the grinding equipment when the real-time flow value is in different ranges, the real-time flow of the conveying pipeline is monitored, and the real-time flow value can be found in time when it changes suddenly, so that the waste of chemical liquid agent caused by nozzle damage or blockage is avoided, and the optimal setting of flow can be realized, so that the product yield is ensured and the production cost is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0027] Figure 1 The schematic view of the water quantity detection module provided by the utility model embodiment is shown in the figure.

[0028] Figure 2 The structural schematic view of the water quantity monitoring unit provided by the utility model embodiment is shown in the figure.

[0029] Figure 3 The schematic view of the baffle in the open position provided by the utility model embodiment is shown in the figure.

[0030] Figure 4 The schematic view of the baffle in the closed position provided by the utility model embodiment is shown in the figure.

[0031] Among them, the explanation of each figure mark is as follows:

[0032] 10-conveying pipeline;

[0033] 11-water quantity monitoring unit; 110-housing; 111-groove; 112-baffle; 113-ultrasonic transmitter;

[0034] 12-communication unit; 120-input subunit; 121-judgment subunit; 122-output subunit. DETAILED DESCRIPTION

[0035] In order to make the purpose, advantages and characteristics of the utility model more clear, the utility model will be explained in further detail below in combination with the drawings and specific embodiments. It should be noted that the drawings are all very simplified and not drawn in proportion, and are only used to facilitate and clarify the purpose of assisting in explaining the embodiments of the utility model. In addition, the structure shown in the drawings is often a part of the actual structure. In particular, the emphasis of each drawing needs to be different, and sometimes different proportions are used.

[0036] As used in this specification, the singular forms "a," "an" and "the" include plural referents unless the context clearly dictates otherwise. The term "or" is generally employed in its sense including "and / or" unless the context clearly dictates otherwise. The term "a number of" is generally employed in its sense including "at least one" unless the context clearly dictates otherwise. The term "at least two" is generally employed in its sense including "two or more" unless the context clearly dictates otherwise. Furthermore, the terms "first," "second," "third," etc. are used only to describe the order of the features and not to indicate or imply relative importance or a number of the indicated features. Thus, features defined with "first," "second," "third," etc. can explicitly or implicitly include one or at least two of the features. The terms "one end" and "the other end" and "proximal end" and "distal end" generally refer to the relative positions of the two parts, which include not only the end points, and the terms "mounting," "connecting," "connection" should be understood broadly, for example, it can be fixedly connected, or detachably connected, or integrated; it can be directly connected, or indirectly connected through an intermediate medium, or the internal communication or interaction relationship of two elements. In addition, as used in this specification, a component disposed in another component generally only indicates that there is a connection, coupling, cooperation or transmission relationship between the two components, and the connection, coupling, cooperation or transmission between the two components can be direct or indirect through an intermediate component, and cannot be understood as indicating or implying the spatial positional relationship between the two components, i.e. one component can be in any orientation inside, outside, above, below or one side of another component, unless the content is otherwise explicitly indicated. The terms "up," "down," "top," "bottom" are generally relative positional relationships arranged according to the direction of gravity; the terms "vertical direction" and "vertical direction" generally refer to the direction along the gravity, which is generally perpendicular to the ground, and the terms "horizontal direction" and "horizontal plane direction" generally refer to the direction parallel to the ground; for those skilled in the art, the specific meaning of the above terms in this specification can be understood according to the specific circumstances.

[0037] The utility model discloses a kind of water quantity detection module and grinding equipment, to solve the problem that whether nozzle is broken or appears jamming cannot be detected in prior art, water quantity optimization setting also cannot be carried out.

[0038] The skilled in the art can understand that after the grinding of the wafer is completed, the wafer needs to be sprayed with deionized water to keep the wafer surface wet during the waiting for transportation process. In the prior art, a nozzle is used to spray the wafer surface, but there is no detection mechanism to obtain the working state of the nozzle. Once the nozzle is damaged or blocked, it will cause unnecessary waste of deionized water, thereby increasing the production cost. Based on this, the embodiment provides a water amount detection module and a grinding equipment. By adding a water amount monitoring unit on the conveying pipeline, the real-time flow value in the conveying pipeline can be obtained, and different signals can be generated when the real-time flow value exceeds the preset range, thereby realizing the detection of the water amount and the optimal setting of the flow.

[0039] Please refer to Figure 1 The utility model provides a kind of water amount detection module, comprising: conveying pipeline 10, water amount monitoring unit 11 and communication unit 12;Conveying pipeline 10 is connected with nozzle (not shown in the figure), for conveying chemical liquid agent to nozzle;Water amount monitoring unit 11 is connected with conveying pipeline 10, for obtaining the real-time flow value of chemical liquid agent;Communication unit 12 is communicatively connected with water amount monitoring unit 11, and communication unit 12 is used to transmit alarm signal to grinding equipment when real-time flow value is outside first preset range;And, when real-time flow value is outside second preset range, transmit pause production signal to grinding equipment. As an optional embodiment, water amount monitoring unit 11 is a outer-clamping ultrasonic liquid flow sensor. The skilled in the art can understand that ultrasonic flow sensor is generally composed of ultrasonic transducer, electronic circuit and flow display and accumulation system, ultrasonic transducer converts electric energy into ultrasonic energy, and emits it to measured fluid, receiver receives ultrasonic signal, and is amplified and converted into electric signal representing flow by electronic circuit to provide display and calculator for display and calculation. The specific structure and working principle of ultrasonic flow sensor can be referred to prior art, and the embodiment will not be described here.

[0040] So configured, by adding water amount monitoring unit 11 on conveying pipeline 10, the real-time flow value of chemical liquid agent in conveying pipeline 10 is obtained, and the real-time flow value is compared with first preset range and second preset range respectively, to transmit different signals to grinding equipment when real-time flow value is in different ranges, realize the real-time monitoring of the flow of conveying pipeline 10, and can be found in time when real-time flow value changes suddenly, avoid waste of chemical liquid agent due to nozzle damage or blockage, and also can realize optimal setting of flow, ensure product yield while reducing production cost.

[0041] As a preferred embodiment, the communication unit 12 can also be configured to transmit an alarm signal to the polishing equipment if the real-time flow value for the current wafer spraying is outside the first preset range but within the second preset range; the polishing equipment can continue normal production if the real-time flow value for the next wafer spraying returns to the first preset range; if the real-time flow values for two consecutive wafers are outside the first preset range but within the second preset range, it can be determined that the delivery pipeline 10 or the nozzle has an unexpected situation, and a production suspension signal needs to be transmitted to the polishing equipment; if the real-time flow value for the current wafer spraying is outside the second preset range, it can be determined that the delivery pipeline 10 or the nozzle has a major failure, and a production suspension signal can be directly transmitted to the polishing equipment. In this embodiment, the alarm signal can be an acoustic signal, an optical signal, or an APP prompt pop-up window, etc.; the production suspension signal includes an instruction to the mechanical arm not to grab the wafer to be produced, at the same time, the wafer that has been produced in the polishing equipment needs to continue to complete the current production program until the polishing equipment is empty and the engineer takes over the inspection. In this way, the communication unit 12 can achieve more accurate detection of the delivery pipeline 10 or the nozzle by refining the judgment standard, and thus can refine the measures taken for different situations, and thus achieve the optimal setting of the flow. Of course, in other embodiments, the judgment standard can also include more preset ranges, which can be configured by those skilled in the art according to the actual situation, and this embodiment does not limit this.

[0042] Optionally, the communication unit 12 is provided with a preset flow value, the first preset range includes: the real-time flow value is within the range of 90%~110% of the preset flow value; the second preset range includes: the real-time flow value is within the range of 70%~130% of the preset flow value. It should be noted that the preset flow value can be the flow of deionized water that can meet the moisturizing demand based on the test data, for example, 1.0L / min~1.2L / min, and the corresponding first preset range and second preset range can be calculated based on the preset flow value. Of course, in some embodiments, the preset flow value can also be selected to be a larger or smaller flow based on the size of the wafer and the inner diameter of the delivery pipeline 10.

[0043] Further, the liquid outlet of the delivery pipeline 10 is connected with a plurality of nozzles, and the preset flow value is the sum of the predetermined flow of the plurality of nozzles. It should be noted that, taking 6 nozzles as an example, the predetermined flow of each nozzle can be between 0.18L / min~0.2L / min, and the preset flow value can be calculated accordingly. In other embodiments, the number of nozzles can be larger or smaller, and the liquid outlet of one delivery pipeline 10 can also correspond to one or other number of nozzles, and this embodiment does not limit this.

[0044] As an optional embodiment, the communication unit 12 comprises an input subunit 120, a judgment subunit 121 and an output subunit 122; the input subunit 120 is in communication connection with the water quantity monitoring unit 11 and the judgment subunit 121 respectively, for acquiring the real-time flow value and transmitting to the judgment subunit 121; the judgment subunit 121 is used for receiving the real-time flow value, and comparing the relationship between the real-time flow value and the first preset range and the second preset range respectively, based on the comparison result, no signal is generated, or an alarm signal or a production suspension signal is generated; the output subunit 122 is in communication connection with the judgment subunit 121 and the control end of the grinding equipment respectively, for transmitting the alarm signal or the production suspension signal to the control end of the grinding equipment. It should be noted that the input subunit 120, the judgment subunit 121 and the output subunit 122 can be integrated on one terminal, such as a computer or a mobile device; or can be respectively arranged on different terminals. For example, Figure 1 The input subunit 120 can be a DTD434M type communicator, the judgment subunit 121 can be a fault detection and classification system (FDC), and the output subunit 122 can be an equipment automation control system (EAP), wherein the digital type communicator is used to acquire the real-time flow value and transmit to the FDC system, the FDC system is used to compare the relationship between the real-time flow value and the preset range, and generate different signals, and the EAP system is used to transmit the signal generated by the FDC system to the grinding equipment and the transfer equipment such as the mechanical arm. The specific structure and use principle of the digital type communicator, the FDC system and the EAP system can refer to the prior art, and the present embodiment will not be described here.

[0045] In an optional embodiment, please refer to Figure 2 The water quantity monitoring unit 11 is arranged outside the conveying pipeline 10. Further, the water quantity monitoring unit 11 comprises a shell 110 and a groove 111; the groove 111 is opened on the surface of the shell 110, and the conveying pipeline 10 is accommodated in the groove 111. Further, the water quantity monitoring unit 11 further comprises an ultrasonic transmitter 113, which is located inside the shell 110 and used for transmitting ultrasonic waves to the conveying pipeline 10. As described above, in the present embodiment, the water quantity monitoring unit 11 is an external clamping type ultrasonic flow sensor, which is different from the conventional flow sensor, and only needs to be clamped outside the conveying pipeline 10, without contacting the liquid in the conveying pipeline 10. In other embodiments, the water quantity monitoring unit 11 can also be a traditional liquid flow sensor, which is assembled on the conveying pipeline 10, so that the liquid flowing through the conveying pipeline 10 passes through the liquid flow sensor, thereby realizing the detection of the flow. Figure 2In the example shown, the shell 110 is rectangular, and the conveying pipeline 10 is clamped in the groove 111 by opening the groove 111 on the surface of the shell 110. In some other embodiments, the shell 110 can also be configured as a cylinder, a prism or other irregular shapes based on space limitations, and the present embodiment does not limit this.

[0046] Preferably, referring to Figures 3-4 , the water amount monitoring unit 11 further comprises a baffle 112; one end of the baffle 112 is rotatably connected with the surface of the shell 110 in which the groove 111 is opened, and the baffle 112 has a closed position and an open position; when the baffle 112 is in the closed position, it is in contact with the surface of the shell 110 and covers the groove 111; when the baffle 112 is in the open position, the groove 111 is exposed. It should be noted that, in Figure 3 and Figure 4 the example shown, the baffle 112 is rotatably arranged between the open position and the closed position; when the baffle 112 is in the open position, the groove 111 is exposed (as shown in Figure 3 ); at this time, the operator can clamp the conveying pipeline 10 in the groove 111 or detect the conveying pipeline 10; when the baffle 112 is in the closed position, the baffle 112 is in contact with the surface of the shell 110 and covers the groove 111 completely (as shown in Figure 4 ); a closed space is formed, thereby ensuring that the water amount monitoring unit 11 is not disturbed by the outside world during the detection of the real-time flow value. In some other embodiments, the baffle 112 can also be slidably arranged between the open position and the closed position, which can be connected with the shell 110 through a sliding groove opened on the surface of the shell 110, thereby achieving the covering or exposure of the groove 111.

[0047] In another embodiment, the utility model embodiment further provides a grinding equipment comprising the water amount detection module as described above. By using the above water amount detection module, real-time monitoring of the flow of the conveying pipeline 10 can be achieved, and sudden changes in the real-time flow value can be discovered in time, thereby avoiding waste of chemical liquid caused by nozzle damage or blockage, and the optimal setting of the flow can also be achieved, thereby ensuring product yield while reducing production cost.

[0048] In summary, in the water amount detection module and the grinding equipment provided by the utility model embodiment, the water amount detection module comprises: a conveying pipeline, a water amount monitoring unit and a communication unit; the conveying pipeline is connected with a nozzle and is used for conveying chemical liquid to the nozzle; the water amount monitoring unit is connected with the conveying pipeline and is used for acquiring a real-time flow value of the chemical liquid; the communication unit is in communication connection with the water amount monitoring unit, and the communication unit is used for transmitting an alarm signal to the grinding equipment when the real-time flow value is outside a first preset range, and transmitting a production suspension signal to the grinding equipment when the real-time flow value is outside a second preset range.

[0049] By means of the water quantity monitoring unit added to the conveying pipeline, the real-time flow value of the chemical liquid agent in the conveying pipeline is obtained, and the real-time flow value is compared with the first preset range and the second preset range respectively, so that different signals are transmitted to the grinding equipment when the real-time flow value is in different ranges, the real-time monitoring of the flow of the conveying pipeline is realized, and sudden changes in the real-time flow value can be found in time, so that the waste of the chemical liquid agent caused by the damage or blockage of the nozzle is avoided, and the optimal setting of the flow can be realized, so that the production cost is reduced while the product yield is ensured.

[0050] The above description is only a description of the preferred embodiments of the present application, and does not limit the scope of the present application in any way. Any modification or modification of the above disclosure by a person skilled in the art belongs to the protection scope of the claims.

Claims

1. A water quantity detection module, comprising: The application relates to a water flow detection module for a chemical liquid agent delivery pipeline of a grinding device. The water flow detection module comprises a delivery pipeline, a water flow monitoring unit and a communication unit. The delivery pipeline is connected with a nozzle and used for delivering the chemical liquid agent to the nozzle. The water flow monitoring unit is connected with the delivery pipeline and used for acquiring a real-time flow value of the chemical liquid agent. The communication unit is in communication connection with the water flow monitoring unit.

2. The water quantity detection module of claim 1, wherein, When the real-time flow value is out of a first preset range, the communication unit transmits an alarm signal to the grinding device.

3. The water quantity detection module of claim 2, wherein, When the real-time flow value is out of a second preset range, the communication unit transmits a production suspension signal to the grinding device.

4. The water quantity detection module of claim 1, wherein, The communication unit is provided with a preset flow value. The first preset range includes a range of 90% to 110% of the preset flow value. The second preset range includes a range of 70% to 130% of the preset flow value. The delivery pipeline is connected with a plurality of nozzles.

5. The water quantity detection module of claim 4, wherein, The preset flow value is the sum of the predetermined flow values of the plurality of nozzles.

6. The water quantity detection module of claim 1, wherein, The communication unit comprises an input subunit, a judgment subunit and an output subunit.

7. The water quantity detection module of claim 6, wherein, The input subunit is in communication connection with the water flow monitoring unit and the judgment subunit. The input subunit is used for acquiring the real-time flow value and transmitting the real-time flow value to the judgment subunit.

8. The water quantity detection module of claim 7, wherein, The judgment subunit is used for receiving the real-time flow value and comparing the real-time flow value with the first preset range and the second preset range respectively. Based on the comparison result, the judgment subunit does not generate a signal or generates the alarm signal or the production suspension signal.

9. The water quantity detection module of claim 7, wherein, The output subunit is in communication connection with the judgment subunit and a control end of the grinding device.

10. A grinding apparatus characterized by comprising: The output subunit is used for transmitting the alarm signal or the production suspension signal to the control end of the grinding device. The input subunit comprises a digital communication device. The judgment subunit comprises a fault detection and classification system. The output subunit comprises an automatic device control system. The water flow monitoring unit is arranged outside the delivery pipeline. The water flow monitoring unit comprises a shell and a groove. The groove is arranged on the surface of the shell. The delivery pipeline is arranged in the groove. The water flow monitoring unit further comprises a baffle. One end of the baffle is rotatably connected with the surface of the shell in which the groove is arranged. The baffle has a closed position and an open position. When the baffle is in the closed position, the baffle is in contact with the surface of the shell and shields the groove. When the baffle is in the open position, the groove is exposed. The water flow monitoring unit further comprises an ultrasonic wave emitter. The ultrasonic wave emitter is arranged inside the shell and used for emitting ultrasonic waves to the delivery pipeline. The application further discloses a grinding device comprising the water flow detection module.

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