Mask plate for coating perovskite solar cell

Abstract

The utility model discloses a mask plate for coating a perovskite solar cell. The mask plate comprises a substrate and a coating mask plate. The base plate comprises a square bottom plate and a film coating mask plate placing area consisting of a rectangular groove, a semicircular groove and a rectangular hollow area, and the film coating mask plate comprises a film coating area and a mask area. The substrate and the film coating mask plate are of a separated structure, and the mask plate for perovskite solar cell film coating, which can be used for preparing various patterns, is formed in a combined manner, so that the requirements of different application conditions are met. The substrate has enough thickness so as to ensure that the substrate can bear evaporation, sputtering and other coating process treatments in the coating process, meanwhile, the thickness of the coating mask plate is reduced, and the coating uniformity and accuracy are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of solar cell, concretely is the mask plate for perovskite solar cell coating. BACKGROUND

[0002] Since perovskite solar cell was first reported in 2009, it has attracted extensive attention and in-depth research from academia and industry due to its high photoelectric conversion efficiency, low manufacturing cost, flexible preparation and other advantages.

[0003] Perovskite solar cell is a typical multilayer structure device, which usually includes transparent conductive layer, electron transport layer, perovskite absorption layer, hole transport layer, electrode layer and other functional layers. Some functional layers are prepared by coating, and different patterned masks are used in the preparation process. However, the existing mask plate has the following problems: 1. The mask plate is an integral structure, and only a specific pattern can be selected for coating at a time. However, in actual application, different patterns may need to be coated at the same time. If the coating is divided into multiple times, not only time and materials will be wasted, but also the uniformity of multiple coating cannot be guaranteed; 2. The thickness of the coating area of the mask plate is usually 2-5 mm, and shadow effect will occur during coating, which will reduce the deposition amount of the coating material at the edge of the coating area, resulting in irregular edge and uneven thickness of the functional layer, and increasing the defects at the interface of the functional layer, which will affect the performance of the device. SUMMARY

[0004] The utility model aims at providing mask plate for perovskite solar cell coating, the substrate and the coating mask plate adopt the separate type design, the combination of different coating patterns is convenient to satisfy the need of actual application, improves the uniformity and accuracy of coating at the same time.

[0005] The above-mentioned mask plate for perovskite solar cell coating includes a substrate (1) and a coating mask plate (2). The substrate (1) includes a square base plate (11) and a coating mask plate placement area (12) composed of a rectangular groove (121), a semicircular groove (122) and a rectangular hollow area (123). The coating mask plate (2) is divided into two structures: a first coating mask plate (21) and a second coating mask plate (22). The first coating mask plate (21) includes a first coating area (211) and a first mask area (212). The second coating mask plate (22) includes a second coating area (221) and a second mask area (222).

[0006] Further, the substrate (1) and the coating mask plate (2) are in a separate structure. The substrate (1) and the coating mask plate (2) are used together during coating. The coating mask plate (2) is placed in the rectangular groove (121) of the substrate (1).

[0007] Further, the substrate (1) has a size of 110*110mm and a thickness of 1-3mm, and contains two structure and size completely same film coating mask plate placement areas (12).

[0008] Further, the rectangular groove (121) has a size of 30*90mm and a depth of 0.1-0.5mm.

[0009] Further, the rectangular groove (121) is provided with six semicircular grooves (122) around the rectangular groove (121), and the semicircular grooves (122) are used for taking and placing the first film coating mask plate (21) and the second film coating mask plate (22), each semicircular groove (122) has a radius of 5mm and a depth consistent with the rectangular groove (121).

[0010] Further, the rectangular groove (121) is provided with six semicircular grooves (122) around the rectangular groove (121), and the semicircular grooves (122) are used for taking and placing the first film coating mask plate (21) and the second film coating mask plate (22), each semicircular groove (122) has a radius of 5mm and a depth consistent with the rectangular groove (121).

[0011] Further, the first film coating mask plate (21) has a size of 30*30mm and a thickness of 0.1-0.5mm, and the thickness of the first film coating mask plate (21) is greater than the depth of the rectangular groove (121). Preferably, the thickness of the first film coating mask plate (21) is 0.1-0.3mm.

[0012] Further, the first film coating mask plate (21) has a size of 30*30mm and a thickness of 0.1-0.5mm, and the thickness of the first film coating mask plate (21) is greater than the depth of the rectangular groove (121). Preferably, the thickness of the first film coating mask plate (21) is 0.1-0.3mm.

[0013] Further, the second film coating mask plate (22) has a size of 30*90mm and a thickness of 0.1-0.5mm, and the thickness of the second film coating mask plate (22) is greater than the depth of the rectangular groove (121). Preferably, the thickness of the second film coating mask plate (22) is 0.1-0.3mm.

[0014] Further, the second film coating mask plate (22) has a size of 30*90mm and a thickness of 0.1-0.5mm, and the thickness of the second film coating mask plate (22) is greater than the depth of the rectangular groove (121). Preferably, the thickness of the second film coating mask plate (22) is 0.1-0.3mm.

[0015] The beneficial effects of the utility model are as follows.

[0016] 1. The substrate (1) and the film coating mask plate (2) of the film coating mask plate for perovskite solar cells adopt a separated structure, different patterns and sizes of the film coating mask plate (2) can be arranged on the substrate (1), and the film coating mask plate for perovskite solar cells with multiple patterns can be formed through combination, so that the needs of different application conditions can be met.

[0017] 2. The thickness of the substrate (1) of the mask plate for coating perovskite solar cells is 1-3 mm, which provides sufficient mechanical strength during coating to withstand evaporation, sputtering and other coating process treatments during the coating process.

[0018] 3. The thickness of the first coating mask plate (21) and the second coating mask plate (22) is 0.1-0.5 mm, the shadow effect during coating is weak, the coating material can be uniformly and accurately deposited on the substrate, and the device performance is improved. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 is a schematic view of the front surface structure of the substrate (1).

[0020] Figure 2 is a schematic view of the cross-sectional structure of the substrate (1).

[0021] Figure 3 is a schematic view of the structure of the first coating mask plate (21).

[0022] Figure 4 is a schematic view of the structure of the second coating mask plate (22).

[0023] Figure 5 is a schematic view of the application of Example 1.

[0024] Figure 6 is a schematic view of the application of Example 2.

[0025] Figure 7 is a schematic view of the application of Example 3.

[0026] Figure 8 is a schematic view of the application of Example 4.

[0027] Reference signs: substrate (1), square base plate (11), coating mask plate placement area (12), rectangular groove (121), semicircular groove (122), rectangular hollow area (123), coating mask plate (2), first coating mask plate (21), first coating area (211), first mask area (212), second coating mask plate (22), second coating area (221), second mask area (222), substrate (3), evaporation table (4), evaporation source (5), vacuum evaporation chamber (6). DETAILED DESCRIPTION

[0028] In order to make the technical scheme, design purpose and beneficial effects of the present application more clear, the present application will be further described in detail below in combination with the drawings and examples. It should be understood that the specific examples described herein are only used to explain the present application and do not limit the present application. EXAMPLE

[0029] The mask plate for coating perovskite solar cell includes a substrate (1) and a coating mask plate (2). In this embodiment, six first coating mask plates (21) are assembled in two rectangular grooves (121) of the substrate (1), as shown in Figure 5 . Embodiment

[0030] The mask plate for coating perovskite solar cell includes a substrate (1) and a coating mask plate (2). In this embodiment, two second coating mask plates (22) are assembled in two rectangular grooves (121) of the substrate (1), as shown in Figure 6 . Embodiment

[0031] The mask plate for coating perovskite solar cell includes a substrate (1) and a coating mask plate (2). In this embodiment, three first coating mask plates (21) and one second coating mask plate (22) are assembled in two rectangular grooves (121) of the substrate (1), as shown in Figure 7 . Embodiment

[0032] The mask plate for coating perovskite solar cell is used for thermal evaporation coating. The substrate (1), the coating mask plate (2) and the substrate (3) are assembled in sequence and placed on the evaporation table (4) of the vacuum evaporation chamber (6). The coating material in the evaporation source (5) is heated and vaporized, then passes through the rectangular hollow area (123), the coating mask plate (2) and is deposited on the substrate (3) in sequence, as shown in Figure 8 .

[0033] The above embodiments are only optional embodiments of the present application, and do not limit the present application. Based on the inspiration of the present application, those skilled in the art can make many forms of optimization and adjustment without departing from the purpose of the present application and the scope protected by the claims, for example, modifying the coating mask plate pattern, adjusting the substrate size, etc. These are all within the protection scope of the present application.

Claims

1. A mask plate for coating a perovskite solar cell, characterized by: The substrate (1) and the coating mask plate (2) are separated structures, and the coating mask plate (2) is placed in the rectangular groove (121) of the substrate (1) during coating. The substrate (1) includes a square base plate (11) and a coating mask plate placement area (12), and the coating mask plate placement area (12) is composed of a rectangular groove (121), a semicircular groove (122) and a rectangular hollow area (123). The coating mask plate (2) includes a first coating mask plate (21) and a second coating mask plate (22), the first coating mask plate (21) includes a first coating area (211) and a first mask area (212), and the second coating mask plate (22) includes a second coating area (221) and a second mask area (222). 2.The mask plate for coating perovskite solar cells according to claim 1, characterized in that: The substrate (1) and the coating mask plate (2) are separated structures, and the coating mask plate (2) is placed in the rectangular groove (121) of the substrate (1) during coating. 3.The mask plate for coating perovskite solar cells according to claim 1, characterized in that: The size of the substrate (1) is 110*110mm, and the thickness is 1-3mm, and the substrate (1) contains two coating mask plate placement areas (12) with the same size. 4.The mask plate for coating perovskite solar cells according to claim 1, characterized in that: The size of the rectangular groove (121) is 30*90mm, and the depth is 0.1-0.5mm. 5.The mask plate for coating perovskite solar cells according to claim 1, characterized in that: Six semicircular grooves (122) are arranged around each rectangular groove (121), and the radius of each semicircular groove (122) is 5mm, and the depth is consistent with that of the rectangular groove (121). 6.The mask plate for coating perovskite solar cells according to claim 1, characterized in that: A rectangular hollow area (123) is arranged in the center of each rectangular groove (121), and the size of the rectangular hollow area (123) is 20*80mm and penetrates the square base plate (11).

7. The mask plate for coating perovskite solar cells according to claim 1, characterized in that: The size of the first coating mask plate (21) is 30*30mm, and the thickness is 0.1-0.5mm, and the thickness of the first coating mask plate (21) is greater than or equal to the depth of the rectangular groove (121). 8.The mask plate for coating perovskite solar cells according to claim 1, characterized in that: The first coating area (211) is located in the center of the first coating mask plate (21), and the range of the first coating area (211) is 20*20mm. 9.The mask plate for coating perovskite solar cells according to claim 1, characterized in that: The size of the second coating mask plate (22) is 30*90mm, and the thickness is 0.1-0.5mm, and the thickness of the second coating mask plate (22) is greater than or equal to the depth of the rectangular groove (121). 10.The mask plate for coating perovskite solar cells according to claim 1, characterized in that: The second coating area (221) is located in the center of the second coating mask plate (22), and the range of the second coating area (221) is 20*80mm.

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