Paddle head frame fixing mechanism, paddle head frame assembly and machining equipment

Abstract

The utility model provides a paddle head frame fixing mechanism, a paddle head frame assembly and processing equipment, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problem that a paddle head frame is easy to twist after a load is placed on a paddle structure. The paddle head frame fixing mechanism is configured to adjust the posture of a paddle head frame and comprises a sliding table connected with the paddle head frame; the at least one first abutting assembly is connected with the sliding table, abuts against the top of the matching part and is configured to apply downward pressure to the top of the matching part; and the at least one second abutting assembly is connected with the sliding table, abuts against the bottom of the supporting part and is configured to apply upward supporting force to the bottom of the supporting part. The posture of the oar head frame can be fixed through the first abutting assembly and the second abutting assembly, the oar head frame is prevented from twisting after a load is placed on the oar structure, and therefore the situations that due to the fact that the load on the oar structure topples over, equipment faults occur, the equipment efficiency is reduced, and products are reworked and scrapped are avoided.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor or photovoltaic material processing, in particular to a paddle head frame fixing mechanism, a paddle head frame assembly and a processing device. BACKGROUND

[0002] The paddle head frame fixing mechanism is an important component of a cantilever paddle adjusting system. Before the cantilever paddle operates, the paddle head frame needs to be adjusted and fixed by the paddle head frame fixing mechanism. The paddle head frame is usually suspended on a sliding table, and the sliding table can slide along a track. A cantilever paddle is usually connected below the paddle head frame, and the cantilever paddle is used to carry a load (i.e., a carrier with products). After the load is placed on the cantilever paddle, the paddle head frame is easily twisted due to the gravity of the load located on the side of the paddle head frame. This can cause the load on the cantilever paddle to fall over, thereby causing the device to malfunction, reducing the use efficiency of the device, and possibly causing some products to be scrapped. CONTENT OF THE UTILITY MODEL

[0003] To solve the above technical problems, the present application is proposed. The paddle head frame fixing mechanism, the paddle head frame assembly and the processing device are provided.

[0004] In a first aspect, an embodiment of the present application provides a paddle head frame fixing mechanism configured to adjust the posture of a paddle head frame, the paddle head frame having a fitting part and a supporting part, the paddle head frame being configured to carry a paddle structure, the paddle head frame fixing mechanism comprising: a sliding table connected with the paddle head frame; at least one first abutting component connected with the sliding table and abutting against the top of the fitting part, configured to apply a downward pressure to the top of the fitting part; and at least one second abutting component connected with the sliding table and abutting against the bottom of the supporting part, configured to apply an upward supporting force to the bottom of the supporting part.

[0005] In some embodiments, the first abutting component comprises: a first fixing component arranged above the fitting part and connected with the sliding table, a part of the first fixing component close to the fitting part having at least one first threaded part extending in the vertical direction; and at least one first screwing piece, each first screwing piece being screwed with one first threaded part and abutting against the top of the fitting part.

[0006] In some embodiments, the sliding table has at least one second threaded part extending in the vertical direction; and the first fixing component comprises: a first fixing block having a vertical part and a horizontal part, the horizontal part being connected with the vertical part at a side close to the fitting part, the vertical part having at least one first through hole extending in the vertical direction, and the horizontal part having at least one first threaded part; and at least one second screwing piece, each second screwing piece passing through one first through hole and being screwed with one second threaded part.

[0007] In some embodiments, the second abutting assembly comprises: a second fixing assembly arranged below the support portion and connected to the sliding table, a part of the second fixing assembly close to the support portion having at least one third threaded portion extending in the vertical direction; and at least one third screwing member, each third screwing member being screwed with one third threaded portion and abutting against the bottom of the support portion.

[0008] In some embodiments, the sliding table has at least one second through hole extending in the horizontal direction; the second fixing assembly comprises: a second fixing block arranged on the side of the sliding table away from the support portion, the second fixing block having at least one fourth threaded portion extending in the horizontal direction; a third fixing block arranged on the side of the sliding table close to the support portion, the third fixing block having at least one third threaded portion and at least one fifth threaded portion extending in the horizontal direction; and at least one fourth screwing member, each fourth screwing member being screwed with one fifth threaded portion, passing through one second through hole, and being screwed with one fourth threaded portion.

[0009] In some embodiments, the second fixing assembly further comprises: at least one locking nut arranged between the second fixing assembly and the support portion, each third screwing member being screwed with at least one locking nut.

[0010] In some embodiments, the paddle holder has at least one waist-shaped hole extending in the vertical direction, and the sliding table has at least one sixth threaded portion extending in the horizontal direction; the paddle holder fixing mechanism further comprises: at least one fifth screwing member, each fifth screwing member passing through one waist-shaped hole and being screwed with one sixth threaded portion.

[0011] In some embodiments, the number of first abutting assemblies is at least two, and the at least two first abutting assemblies are symmetrically arranged relative to the vertical symmetry plane of the fitting portion; and / or, the number of second abutting assemblies is at least two, and the at least two second abutting assemblies are symmetrically arranged relative to the vertical symmetry plane of the support portion.

[0012] In a second aspect, an embodiment of the present application provides a paddle holder assembly, comprising: a paddle holder configured to carry a paddle structure; and the paddle holder fixing mechanism of any one of the first aspect, connected to the paddle holder and configured to adjust the posture of the paddle holder.

[0013] In a third aspect, an embodiment of the present application provides a processing device, comprising: at least one paddle structure configured to carry a product; the paddle holder assembly of the second aspect, connected to the at least one paddle structure; a linear module in transmission connection with the paddle holder assembly and configured to drive the paddle holder assembly to move; and a reaction furnace configured to accommodate the product carried by the at least one paddle structure and to process the product.

[0014] The paddle head frame fixing mechanism provided by the embodiment of the present application can fix the posture of the paddle head frame through the at least one first abutting component and the at least one second abutting component, avoid the twist of the paddle head frame after the load is placed on the paddle structure, and thus avoid the equipment failure, the reduction of the equipment efficiency, the product rework and scrapping and the like caused by the load on the paddle structure. BRIEF DESCRIPTION OF DRAWINGS

[0015] The above and other objects, features and advantages of the present application will become more apparent from the following detailed description of the application when taken in conjunction with the accompanying drawings. The drawings provided in the present application are used to provide further understanding of the embodiments of the present application, and constitute a part of the specification, and are used to explain the present application together with the embodiments of the present application, and do not constitute a limitation of the present application. In the drawings, the same reference numerals generally indicate the same components or steps.

[0016] Figure 1 The structure schematic diagram of the linear module, the paddle head frame fixing mechanism and the paddle head frame provided by an exemplary embodiment of the present application is shown.

[0017] Figure 2 The front view of the processing equipment provided by an exemplary embodiment of the present application is shown.

[0018] Figure 3 The side view of the paddle head frame fixing mechanism and the paddle head frame provided by an exemplary embodiment of the present application is shown.

[0019] Figure 4 The structure schematic diagram of the paddle head frame fixing mechanism and the paddle head frame provided by an exemplary embodiment of the present application is shown. Figure 3 The local enlarged view of the paddle head frame fixing mechanism and the paddle head frame in the A area is shown.

[0020] Figure 5 The structure schematic diagram of the paddle head frame fixing mechanism and the paddle head frame provided by an exemplary embodiment of the present application is shown. Figure 3 The local enlarged view of the paddle head frame fixing mechanism and the paddle head frame in the B area is shown.

[0021] Figure 6 The structure schematic diagram of the paddle head frame fixing mechanism and the paddle head frame provided by an exemplary embodiment of the present application is shown. Figure 2 The local enlarged view of the processing equipment in the C area is shown.

[0022] Figure 7 The structure schematic diagram of the paddle head frame fixing mechanism and the paddle head frame provided by an exemplary embodiment of the present application is shown. Figure 2 The local enlarged view of the processing equipment in the D area is shown.

[0023] Figure 8 The side view of the paddle head frame fixing mechanism and the paddle head frame provided by another exemplary embodiment of the present application is shown.

[0024] Reference signs:

[0025] 100, paddle holder fixing mechanism; 110, sliding table; 120, first abutting assembly; 121, first fixing assembly; 1211, first fixing block; 12111, vertical part; 12112, horizontal part; 1212, second screw element; 122, first screw element; 130, second abutting assembly; 131, second fixing assembly; 1311, second fixing block; 1312, third fixing block; 1313, fourth screw element; 1314, locking nut; 140, fifth screw element; 200, paddle holder; 210, waist-shaped hole; 220, vertical symmetry plane; 230, matching part; 240, supporting part; 250, main body; 300, paddle structure; 400, paddle holder assembly; 500, processing equipment; 600, product; 700, linear module; 800, reaction furnace. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of protection of the present application.

[0027] Figure 1 Fig. 1 shows a structural schematic diagram of a linear module, a paddle holder fixing mechanism and a paddle holder provided by an exemplary embodiment of the present application, Figure 2 Fig. 2 shows a front view of a processing equipment provided by an exemplary embodiment of the present application, Figure 3 Fig. 3 shows a side view of a paddle holder fixing mechanism and a paddle holder provided by an exemplary embodiment of the present application. Figure 8 Fig. 4 shows a side view of a paddle holder fixing mechanism and a paddle holder provided by another exemplary embodiment of the present application.

[0028] As Figures 1-3 and Figure 8As shown, the embodiment of the present application provides a paddle head frame fixing mechanism 100 configured to adjust the posture of a paddle head frame 200, the paddle head frame 200 having a matching part 230 and a supporting part 240, the paddle head frame 200 being configured to carry a paddle structure 300, the paddle head frame fixing mechanism 100 comprising: a sliding table 110, at least one first abutting assembly 120, and at least one second abutting assembly 130. The sliding table 110 is connected with the paddle head frame 200. The at least one first abutting assembly 120 is connected with the sliding table 110 and abuts against the top of the matching part 230, and is configured to apply a downward pressure to the top of the matching part 230. The at least one second abutting assembly 130 is connected with the sliding table 110 and abuts against the bottom of the supporting part 240, and is configured to apply an upward supporting force to the bottom of the supporting part 240.

[0029] The paddle structure 300 is usually used to carry products, such as the paddle structure 300 can carry a boat structure, the boat structure carries products to be processed, and the products are exemplarily silicon wafers or glass substrates. Exemplarily, the paddle head frame 200 extends along a first direction (such as the X direction in FIG. 1), the paddle structure 300 extends along the first direction, the side of the paddle head frame 200 parallel to the first direction is connected with the sliding table 110, and one end of the paddle head frame 200 is connected with the at least one paddle structure 300. Figure 1 and Figure 2 The paddle head frame 200 can extend along a first direction (such as the X direction in FIG. 1), the paddle structure 300 can extend along the first direction, the side of the paddle head frame 200 parallel to the first direction can be connected with the sliding table 110, and one end of the paddle head frame 200 can be connected with the at least one paddle structure 300.

[0030] In the embodiment of the present application, Figures 1-3 and Figure 8 The paddle head frame 200 can extend along a first direction (such as the X direction in FIG. 1), the paddle structure 300 can extend along the first direction, the side of the paddle head frame 200 parallel to the first direction can be connected with the sliding table 110, and one end of the paddle head frame 200 can be connected with the at least one paddle structure 300. Figure 8

[0031] In the above embodiment, since the at least one first abutting assembly 120 can apply a downward pressure to the top of the matching part 230, and the at least one second abutting assembly 130 can apply an upward supporting force to the bottom of the supporting part 240, the posture of the paddle head frame 200 can be fixed by the at least one first abutting assembly 120 and the at least one second abutting assembly 130, so as to avoid the paddle head frame 200 from being twisted after a load is placed on the paddle structure 300, thereby avoiding the situations such as equipment failure, equipment efficiency reduction, product rework and scrap due to the load on the paddle structure 300 being dumped.

[0032] Figure 4 As shown, the embodiment of the present application provides a paddle head frame fixing mechanism 100 configured to adjust the posture of a paddle head frame 200, the paddle head frame 200 having a matching part 230 and a supporting part 240, the paddle head frame 200 being configured to carry a paddle structure 300, the paddle head frame fixing mechanism 100 comprising: a sliding table 110, at least one first abutting assembly 120, and at least one second abutting assembly 130. The sliding table 110 is connected with the paddle head frame 200. The at least one first abutting assembly 120 is connected with the sliding table 110 and abuts against the top of the matching part 230, and is configured to apply a downward pressure to the top of the matching part 230. The at least one second abutting assembly 130 is connected with the sliding table 110 and abuts against the bottom of the supporting part 240, and is configured to apply an upward supporting force to the bottom of the supporting part 240. Figure 3 As shown, the embodiment of the present application provides a paddle head frame fixing mechanism 100 configured to adjust the posture of a paddle head frame 200, the paddle head frame 200 having a matching part 230 and a supporting part 240, the paddle head frame 200 being configured to carry a paddle structure 300, the paddle head frame fixing mechanism 100 comprising: a sliding table 110, at least one first abutting assembly 120, and at least one second abutting assembly 130. The sliding table 110 is connected with the paddle head frame 200. The at least one first abutting assembly 120 is connected with the sliding table 110 and abuts against the top of the matching part 230, and is configured to apply a downward pressure to the top of the matching part 230. The at least one second abutting assembly 130 is connected with the sliding table 110 and abuts against the bottom of the supporting part 240, and is configured to apply an upward supporting force to the bottom of the supporting part 240.

[0033] In some embodiments, as​Figure 4 As shown, the first abutting assembly 120 comprises a first fixing assembly 121 and at least one first screwing element 122. The first fixing assembly 121 is arranged above the fitting portion 230 and connected with the sliding table 110. The part of the first fixing assembly 121 close to the fitting portion 230 has at least one first screw thread portion extending along the vertical direction. Each first screwing element 122 is screwed with one first screw thread portion and abuts with the top of the fitting portion 230.

[0034] Exemplarily, the part of the first fixing assembly 121 close to the fitting portion 230 has at least one first screw thread hole, and the first screw thread portion is a screw thread in the first screw thread hole. The first screwing element 122 can be a screw or a bolt.

[0035] Through this structure, the first screwing element 122 can exert downward pressure on the top of the fitting portion 230, thereby stabilizing the posture of the paddle head frame 200, and by rotating the first screwing element 122 and adjusting the height of the first screwing element 122, the height of the paddle head frame 200 can be limited.

[0036] In some embodiments, as shown, Figure 4 The sliding table 110 has at least one second screw thread portion extending along the vertical direction. The first fixing assembly 121 comprises a first fixing block 1211 and at least one second screwing element 1212. The first fixing block 1211 has a vertical portion 12111 and a horizontal portion 12112, the horizontal portion 12112 is connected with the side of the vertical portion 12111 close to the fitting portion 230, the vertical portion 12111 has at least one first through hole extending along the vertical direction, and the horizontal portion 12112 has at least one first screw thread portion. Each second screwing element 1212 passes through one first through hole and is screwed with one second screw thread portion.

[0037] Exemplarily, the sliding table 110 has at least one second screw thread hole, and the second screw thread portion is a screw thread in the second screw thread hole.

[0038] Exemplarily, the number of first screwing elements 122 is at least two, the horizontal portion 12112 of each first fixing block 1211 has two first screw thread portions arranged along the first direction. The number of second screwing elements 1212 is at least two, the vertical portion 12111 of each first fixing block 1211 has two first through holes arranged along the first direction, and the sliding table 110 has at least two second screw thread portions arranged along the first direction.

[0039] Through this structure, the first fixing block 1211 can be stably fixed, thereby stably fixing the first screwing element 122, so that the first screwing element 122 can stably exert downward pressure on the top of the fitting portion 230.

[0040] Figure 5The image shown is an exemplary embodiment of this application. Figure 3 The enlarged view of the propeller head bracket fixing mechanism and the propeller head bracket in area B is shown. Figure 6 The image shown is an exemplary embodiment of this application. Figure 2 A magnified view of the processing equipment in region C.

[0041] In some embodiments, such as Figure 5 and Figure 6 As shown, the second abutment assembly 130 includes a second fixing assembly 131 and at least one third threaded member (not shown). The second fixing assembly 131 is disposed below the support portion 240 and connected to the slide table 110. The portion of the second fixing assembly 131 near the support portion 240 has at least one third threaded portion extending in a vertical direction. Each third threaded member is screwed into one third threaded portion and abuts against the bottom of the support portion 240.

[0042] For example, the portion of the second fixing component 131 near the support portion 240 has at least one third threaded hole extending in a vertical direction, the third threaded portion being the thread within the third threaded hole. The third screw can be a screw or a bolt.

[0043] With this structure, the third screw connector can apply an upward supporting force to the bottom of the support 240, thereby stabilizing the attitude of the propeller head frame 200. Furthermore, by rotating the third screw connector, the height of the propeller head frame 200 can be adjusted. In practical applications, the first screw connector 122 and the third screw connector can be adjusted simultaneously to regulate the height of the propeller head frame 200.

[0044] In some embodiments, such as Figure 5 and Figure 6 As shown, the slide 110 has at least one second through hole extending horizontally. The second fixing assembly 131 includes: a second fixing block 1311, a third fixing block 1312, and at least one fourth threaded member 1313. The second fixing block 1311 is disposed on the side of the slide 110 away from the support portion 240, and the second fixing block 1311 has at least one fourth threaded portion extending horizontally. The third fixing block 1312 is disposed on the side of the slide 110 near the support portion 240, and the third fixing block 1312 has at least one third threaded portion and at least one fifth threaded portion extending horizontally. Each fourth threaded member 1313 is screwed to a fifth threaded portion, passes through a second through hole, and is screwed to a fourth threaded portion.

[0045] Exemplarily, the second fixing block 1311 has at least one fourth threaded hole extending along a horizontal direction, and the fourth threaded part is a thread in the fourth threaded hole. The third fixing block 1312 has at least one fifth threaded hole extending along a horizontal direction, and the fifth threaded part is a thread in the fifth threaded hole. The fourth screwing member 1313 is a screw or a bolt.

[0046] Exemplarily, each fourth threaded part can extend along a second direction (e.g., the Y direction in Figure 1 and Figure 3 ), which is a horizontal direction perpendicular to the first direction. Each fifth threaded part can extend along the second direction. Each second through hole can extend along the second direction.

[0047] Exemplarily, each second fixing block 1311 has two fourth threaded parts arranged along the first direction. The sliding table 110 has two second through holes arranged along the first direction. Each third fixing block 1312 has two fifth threaded parts arranged along the first direction, and three third threaded parts arranged along the first direction.

[0048] With this structure, the second fixing block 1311 and the third fixing block 1312 can be stably fixed, thereby stably fixing the third screwing member, so that the third screwing member can stably exert an upward supporting force on the bottom of the supporting part 240.

[0049] In some embodiments, as shown in Figure 5 and Figure 6 , the second fixing assembly 131 further includes at least one locking nut 1314. The at least one locking nut 1314 is arranged between the second fixing assembly 131 and the supporting part 240, and each third screwing member is screwed with the at least one locking nut 1314.

[0050] With this structure, the third screwing member can be reinforced, thereby improving the structural stability of the paddle holder fixing mechanism 100.

[0051] Figure 7 As shown in Figure 2 , the processing equipment provided by an exemplary embodiment of the present application includes a paddle holder fixing mechanism 100.

[0052] In some embodiments, as shown in Figure 7 , the paddle holder 200 has at least one waist-shaped hole 210 extending along a vertical direction, and the sliding table 110 further has at least one sixth threaded part extending along a horizontal direction (e.g., the second direction). The paddle holder fixing mechanism 100 further includes at least one fifth screwing member 140. Each fifth screwing member 140 passes through one waist-shaped hole 210 and is screwed with one sixth threaded part.

[0053] Exemplarily, the sliding table 110 further has at least one sixth threaded hole extending in the horizontal direction, and the sixth threaded part is a thread in the sixth threaded hole. The fifth screwing member 140 can be a screw or a bolt.

[0054] Through this structure, the paddle head frame 200 and the sliding table 110 can be firmly connected, and the height of the paddle head frame 200 can be adjusted by loosening the fifth screwing member 140, locking the fifth screwing member 140, and then adjusting the height of the paddle head frame 200. In practical applications, when the height of the paddle head frame 200 is adjusted, the first abutting assembly 120 and the second abutting assembly 130 also need to be adjusted synchronously, such as adjusting the first screwing member 122 and the third screwing member, to adjust the height of the paddle head frame 200.

[0055] In some embodiments, as shown in Figure 2 The number of the first abutting assemblies 120 is at least two, and the at least two first abutting assemblies 120 are symmetrically arranged relative to the vertical symmetry plane 220 of the fitting part 230.

[0056] Exemplarily, the vertical symmetry plane 220 is parallel to the second direction, and the number of the first abutting assemblies 120 is two, and the two first abutting assemblies 120 are located on two sides of the vertical symmetry plane 220.

[0057] By symmetrically arranging the first abutting assemblies 120, the top of the fitting part 230 can be balanced in force, and the structural stability can be improved.

[0058] In some embodiments, as shown in Figure 2 The number of the second abutting assemblies 130 is at least two, and the at least two second abutting assemblies 130 are symmetrically arranged relative to the vertical symmetry plane 220 of the support part 240.

[0059] Exemplarily, the vertical symmetry plane 220 is parallel to the second direction, and the number of the second abutting assemblies 130 is two, and the two second abutting assemblies 130 are located on two sides of the vertical symmetry plane 220.

[0060] By symmetrically arranging the second abutting assemblies 130, the bottom of the support part 240 can be balanced in force, and the structural stability can be improved.

[0061] Exemplarily, Figure 2 The vertical symmetry plane 220 of the fitting part 230 and the vertical symmetry plane 220 of the support part 240 are the same plane. However, in the embodiments of the present application, the vertical symmetry plane 220 of the fitting part 230 and the vertical symmetry plane 220 of the support part 240 can be different planes.

[0062] Based on the same concept, as shown in Figure 3As shown, the embodiment of the present application further provides a paddle holder assembly 400, which comprises the paddle holder 200 and the paddle holder fixing mechanism 100 of any one of the above embodiments. The paddle holder 200 is configured to carry the paddle structure 300. The paddle holder fixing mechanism 100 is connected with the paddle holder 200 and is configured to adjust the posture of the paddle holder 200.

[0063] Based on the same concept, as Figure 2 As shown, the embodiment of the present application further provides a processing equipment 500, which comprises at least one paddle structure 300, a product 600, the paddle holder assembly 100 of any one of the above embodiments, a linear module 700 and a reaction furnace 800. The at least one paddle structure 300 is configured to carry the product 600. The paddle holder assembly 100 is connected with the at least one paddle structure 300. The linear module 700 is drivingly connected with the paddle holder assembly 100 and is configured to drive the paddle holder assembly 100 to move. The reaction furnace 800 is configured to accommodate the product 600 carried by the at least one paddle structure 300 and to process the product 600.

[0064] Exemplarily, the paddle structure 300 can be used to carry a boat structure, and the boat structure carries the product 600, which is exemplarily a silicon wafer or a glass substrate. The reaction furnace 800 is exemplarily a chemical vapor deposition equipment.

[0065] The above describes the basic principles of the present application in combination with specific embodiments, however, it is necessary to point out that the advantages, advantages, effects and the like mentioned in the present application are only examples and are not limited, and these advantages, advantages, effects and the like cannot be considered as the must-haves of each embodiment of the present application. In addition, the above disclosed specific details are only for the purpose of example and understanding, and are not limited to the must-haves of the present application.

[0066] The block diagrams of the devices, apparatuses, equipment, systems involved in the present application are only illustrative examples and are not intended to require or imply the connection, arrangement, configuration as shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, equipment, systems can be connected, arranged, configured in any way. Words such as "include", "contain", "have" and the like are open-ended words, which mean "including but not limited to", and can be used interchangeably. The words "or" and "and" used herein mean the word "and / or", and can be used interchangeably unless the context clearly indicates otherwise. The word "such as" used herein means the phrase "such as but not limited to", and can be used interchangeably.

[0067] It is also necessary to point out that in the devices, equipment and methods of the present application, each component or each step can be decomposed and / or recombined. These decompositions and / or recombination should be considered as equivalent solutions of the present application.

[0068] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the generic principles defined herein can be applied to other aspects without departing from the scope of the application. Thus, the present application is not intended to be limited to the aspects shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0069] The above description has been presented to enable any person skilled in the art to make or use the application. Furthermore, the purpose of the above description is not intended to limit the embodiments of the present application to the form disclosed herein. Although various example aspects and embodiments have been discussed above, those of ordinary skill in the art will appreciate a variety of modifications, alternatives, permutations, additions, and sub-combinations, which fall within the scope of the application. Accordingly, although specific aspects, configurations and arrangements have been discussed, these are merely illustrative of the aspects provided in accordance with the disclosure and many other aspects, configurations, and arrangements can be implemented or trained.

Claims

1. A paddle head holder securing mechanism, characterized by, The paddle head frame is configured to adjust the posture of the paddle head frame, the paddle head frame has a fitting part and a supporting part, the paddle head frame is configured to carry a paddle structure, and the paddle head frame fixing mechanism comprises: a sliding table connected with the paddle head frame; at least one first abutting component connected with the sliding table and abutting against the top of the fitting part, configured to apply downward pressure to the top of the fitting part; at least one second abutting component connected with the sliding table and abutting against the bottom of the supporting part, configured to apply upward supporting force to the bottom of the supporting part.

2. The paddle holder securing mechanism of claim 1, wherein, The first abutting component comprises: a first fixing component arranged above the fitting part and connected with the sliding table, the part of the first fixing component close to the fitting part has at least one first threaded part extending in the vertical direction; at least one first screwing piece, each first screwing piece is screwed with one first threaded part and abuts against the top of the fitting part.

3. The paddle holder securing mechanism of claim 2, wherein, The sliding table has at least one second threaded part extending in the vertical direction; The first fixing component comprises: a first fixing block having a vertical part and a horizontal part, the horizontal part is connected with the vertical part close to one side of the fitting part, the vertical part has at least one first through hole extending in the vertical direction, and the horizontal part has at least one first threaded part; at least one second screwing piece, each second screwing piece passes through one first through hole and is screwed with one second threaded part.

4. The paddle holder securing mechanism of any one of claims 1 to 3, wherein The second abutting component comprises: a second fixing component arranged below the supporting part and connected with the sliding table, the part of the second fixing component close to the supporting part has at least one third threaded part extending in the vertical direction; at least one third screwing piece, each third screwing piece is screwed with one third threaded part and abuts against the bottom of the supporting part.

5. The paddle holder securing mechanism of claim 4, wherein, The sliding table has at least one second through hole extending in the horizontal direction; The second fixing component comprises: a second fixing block arranged on one side of the sliding table away from the supporting part, the second fixing block has at least one fourth threaded part extending in the horizontal direction; a third fixing block arranged on one side of the sliding table close to the supporting part, the third fixing block has at least one third threaded part and at least one fifth threaded part extending in the horizontal direction; at least one fourth screwing piece, each fourth screwing piece is screwed with one fifth threaded part, passes through one second through hole, and is screwed with one fourth threaded part.

6. The paddle holder securing mechanism of claim 4, wherein, The second fixing component further comprises: at least one locking nut arranged between the second fixing component and the supporting part, each third screwing piece is screwed with at least one locking nut.

7. The paddle holder securing mechanism of any one of claims 1 to 3, wherein, The paddle head frame has at least one waist-shaped hole extending in the vertical direction, and the sliding table further has at least one sixth threaded part extending in the horizontal direction; The paddle head frame fixing mechanism further comprises: at least one fifth screwing piece, each fifth screwing piece passes through one waist-shaped hole and is screwed with one sixth threaded part.

8. The paddle holder securing mechanism of any one of claims 1 to 3, wherein, The number of the first abutting components is at least two, and the at least two first abutting components are symmetrically arranged relative to the vertical symmetry plane of the fitting part; And / or, the number of the second abutting components is at least two, and the at least two second abutting components are symmetrically arranged relative to the vertical symmetry plane of the support part.

9. A paddle head assembly comprising: Comprise: A paddle head frame configured to carry a paddle structure; The paddle head frame fixing mechanism of any one of claims 1-8 is connected with the paddle head frame and is configured to adjust the attitude of the paddle head frame.

10. A processing apparatus characterized by comprising: Comprise: At least one paddle structure configured to carry a product; The paddle head frame assembly of claim 9 is connected with at least one paddle structure; A linear module is drivingly connected with the paddle head frame assembly and is configured to drive the paddle head frame assembly to move; A reaction furnace configured to accommodate the product carried by the at least one paddle structure and to process the product.

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