Slide glass device

Abstract

The utility model discloses a chip carrying device. The chip carrying device is used for carrying a chip. The slide glass device comprises a base body, a movable assembly, a detection assembly, a cleaning assembly and an air guide assembly. The substrate is provided with a bearing part used for bearing a chip. The movable assembly is movably connected with the base body, and the movable assembly is configured to be capable of moving towards the bearing part. The detection assembly is connected with the movable assembly and is suitable for detecting the cleanliness of the bearing part. The cleaning assembly is connected with the movable assembly and comprises a cleaning part, and the cleaning part is suitable for abutting against the bearing part so as to clean attachments on the bearing part. The air guide assembly is connected with the movable assembly and comprises an air guide part, and the air guide part is suitable for generating airflow capable of flowing to the bearing part so as to take away attachments on the bearing part. According to the scheme, the cleaning efficiency can be effectively improved, and the cleaning effect is guaranteed.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor, especially relate to a carrier device. BACKGROUND

[0002] The carrier table includes a bearing surface for bearing the chip. Specifically, the chip can be adsorbed on the bearing surface by a vacuum hole or a vacuum air groove on the bearing surface. The bearing surface has a high cleanliness requirement for the chip, that is, the bearing surface of the carrier table on the probe table needs to meet the specific cleanliness requirement. If there are stains or foreign matters on the bearing surface, it will affect the test parameters of the chip or even contaminate the chip. If the bearing surface has debris or protruding foreign matters, it may cause the chip to break. In addition, the back surface of some chips has poor processing technology, that is, the plating layer on the back surface of the chip may stick to the bearing surface, which will affect the test parameters of the chip if not cleaned for a long time. Therefore, the carrier table needs to be cleaned regularly. In the related art, the bearing surface of the carrier table is manually wiped to remove stains or foreign matters on the bearing surface. However, manual cleaning cannot guarantee high standard cleanliness, resulting in poor cleaning effect. SUMMARY

[0003] The main purpose of the utility model is to provide a carrier device to solve the technical problem of poor cleaning effect of the carrier table.

[0004] To achieve the above-mentioned purpose, the utility model embodiment provides a carrier device for bearing a chip, which comprises:

[0005] a base body having a bearing part for bearing the chip;

[0006] a movable assembly movably connected to the base body, the movable assembly being configured to move towards the bearing part;

[0007] a detection assembly connected to the movable assembly, the detection assembly being adapted to detect the cleanliness of the bearing part;

[0008] a cleaning assembly connected to the movable assembly, the cleaning assembly comprising a cleaning part adapted to abut against the bearing part to clean the adhering matters on the bearing part;

[0009] a gas guiding assembly connected to the movable assembly, the gas guiding assembly comprising a gas guiding part adapted to generate a gas flow that can flow to the bearing part to remove the adhering matters on the bearing part.

[0010] In some embodiments, the gas guiding part comprises a gas guiding block having a gas guiding channel inside, the gas guiding block being provided with an air inlet and an air outlet in communication with the gas guiding channel, and the air outlet is located on the side of the gas guiding block facing the bearing part.

[0011] In some embodiments, the air guide block comprises a base plate and a cover plate detachably connected to each other, the base plate is provided with a first air groove on a side thereof facing the cover plate, the cover plate is provided with a second air groove on a side thereof facing the base plate, and the first air groove is adapted to be combined with the air groove to jointly define the air guide channel.

[0012] In some embodiments, the air guide block is provided with a plurality of the air outlets, each of the air outlets is arranged along an extension direction of the air guide block, and each of the air outlets is arranged towards the carrier portion.

[0013] In some embodiments, the air guide portion is adapted to generate a blowing air flow that can flow to the carrier portion to carry away the adhesion on the carrier portion;

[0014] and / or,

[0015] the air guide portion is adapted to generate a suction air flow that can flow to the carrier portion to carry away the adhesion on the carrier portion.

[0016] In some embodiments, the cleaning portion comprises a fixed block and a roller body, the roller body is rotationally connected to the fixed block, and the roller body is adapted to abut against the carrier portion to clean the adhesion on the carrier portion.

[0017] In some embodiments, the cleaning portion comprises a silica gel layer, the silica gel layer is arranged at least partially around an outer peripheral wall of the roller body; and / or,

[0018] the cleaning portion comprises a brush layer, the brush layer is arranged at least partially around the outer peripheral wall of the roller body.

[0019] In some embodiments, the movable assembly comprises a first sliding block and a first sliding rail, the first sliding block is connected to the detection assembly, the cleaning assembly and the air guide assembly, the first sliding rail is connected to the base body, and the first sliding block is configured to be able to slide on the first sliding rail.

[0020] In some embodiments, the slide device comprises a second sliding block and a second sliding rail, the second sliding block is connected to the carrier portion, the second sliding rail is connected to the base body, and the second sliding block is adapted to slide on the second sliding rail along a first direction.

[0021] In some embodiments, the slide device comprises a third sliding block and a third sliding rail, the third sliding block is connected to the carrier portion, the third sliding rail is connected to the base body, and the third sliding block is adapted to slide on the third sliding rail along a second direction, the second direction intersects the first direction.

[0022] The slide device comprises a fourth sliding block connected to the bearing part and a fourth sliding rail connected to the base body, and the fourth sliding block is adapted to slide on the fourth sliding rail in a third direction intersecting the second direction.

[0023] Compared with the prior art, the utility model has the beneficial effects that include:

[0024] In the technical scheme of the utility model, the slide device comprises a base body, a movable assembly, a detection assembly, a cleaning assembly and an air guide assembly. The base body has a bearing part for bearing a chip. In the prior art, the bearing surface of the slide table is manually wiped to remove stains or foreign matter on the bearing surface, but manual cleaning cannot guarantee high cleaning standards, resulting in poor cleaning effect. The cleaning assembly of the present scheme comprises a cleaning part which can abut against the bearing part to clean the adhering matter on the bearing part, thereby effectively improving the cleaning efficiency and ensuring the cleaning effect. Moreover, the air guide assembly comprises an air guide part which can generate an air flow that can flow to the bearing part, and the air flow can carry away the adhering matter on the bearing part. Therefore, the present scheme can further improve the cleaning effect by reducing the situation that foreign matter remains on the bearing surface after the cleaning part cleans the bearing surface. In addition, the detection assembly can detect the cleanliness of the bearing part, thereby reducing the situation that the human eye cannot reliably identify the cleanliness of the bearing surface.

[0025] Further, the movable assembly is movably connected to the base body, and the movable assembly can move towards the bearing part. Since the detection assembly, the cleaning assembly and the air guide assembly are all connected to the movable assembly, the detection assembly, the cleaning assembly and the air guide assembly can adjust their angles and distances with the bearing part according to actual conditions. Therefore, the detection assembly, the cleaning assembly and the air guide assembly of the present scheme do not interfere with the normal picking and placing of the chip, can further improve the cleaning effect of the bearing part, ensure the reliability of cleaning, and can adapt to the cleaning needs of various scenes. BRIEF DESCRIPTION OF DRAWINGS

[0026] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are only some embodiments of the utility model, and those skilled in the art can obtain other drawings from the structures shown in these drawings without creating any creative labor.

[0027] Figure 1 It is a schematic view of the slide device in an embodiment of the utility model;

[0028] Figure 2 It is a schematic view of the slide device in an embodiment of the utility model; wherein the movable assembly moves towards the bearing part;

[0029] Figure 3 It is the schematic view of the slide device in an embodiment of the utility model, wherein the probe card is shown;

[0030] Figure 4 It is the schematic view of the detection assembly, the cleaning assembly and the air guide assembly in an embodiment of the utility model;

[0031] Figure 5 It is the schematic view of the detection assembly, the cleaning assembly and the air guide assembly in an embodiment of the utility model;

[0032] Figure 6 It is the schematic view of the air guide assembly in an embodiment of the utility model;

[0033] Figure 7 It is the schematic view of the air guide assembly in an embodiment of the utility model, wherein the base plate and the cover plate are shown;

[0034] Figure 8 It is the schematic view of the cleaning assembly in an embodiment of the utility model, wherein the silica gel layer is shown;

[0035] Figure 9 It is the schematic view of the cleaning assembly in an embodiment of the utility model, wherein the brush layer is shown;

[0036] Figure 10 It is the operation flow chart of the cleaning method in an embodiment of the utility model.

[0037] Explanation of figure mark:

[0038] Slide device 10;

[0039] Base body 100;Carrying part 110;Probe card 120;

[0040] Movable assembly 200;First sliding block 210;First sliding rail 220;

[0041] Detection assembly 300;Window 310;

[0042] Cleaning assembly 400;Cleaning part 410;Fixed block 411;Roller body 412;Silica gel layer 413;Brush layer 414;

[0043] Air guide assembly 500;Air guide part 510;Air guide block 520;Air guide passage 521;Air inlet 522;Air outlet 523;Base plate 524;First air groove 5241;Cover plate 525;Second air groove 5251;

[0044] Second sliding block 610;Second sliding rail 620;

[0045] Third sliding block 710;Third sliding rail 720;

[0046] a first direction X; a second direction Y; a third direction Z.

[0047] The purposes, functional features and advantages of the present application will be further described with reference to the embodiments and the accompanying drawings. DETAILED DESCRIPTION

[0048] The technical solutions in the embodiments of the present application will be clearly and completely described with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.

[0049] The first aspect of the present application provides a wafer device 10, which is used for carrying a chip and can guarantee a cleaning effect. The wafer device 10 of the present application will be described below with reference to the accompanying drawings. Figures 1 to 9 Specifically, the wafer device 10 comprises a base 100, a movable assembly 200, a detection assembly 300, a cleaning assembly 400 and a gas guiding assembly 500.

[0050] Referring to Figure 1 and Figure 2 , the base 100 is provided with a carrying part 110, which is used for carrying the chip. Specifically, the carrying part 110 comprises a carrying surface, which can support the chip. It should be noted that the carrying surface can be provided with a vacuum ring groove or hole to adsorb the chip, thereby guaranteeing the stability of the carrying. The base 100 can also be provided with a probe card 120, which can be used for chip detection.

[0051] Referring to Figure 1 and Figure 2 , the movable assembly 200 can drive the detection assembly 300, the cleaning assembly 400 and the gas guiding assembly 500 to move. It can be understood that the movable assembly 200 is movably connected to the base 100. In some embodiments, the movable assembly 200 can move towards the carrying part 110 by sliding. In other embodiments, the movable assembly 200 can also move towards the carrying part 110 by rotating. The present application will be described by taking the movable assembly 200 moving towards the carrying part 110 by sliding as an example.

[0052] Referring to Figure 1 and Figure 2The detection assembly 300 is used to detect the cleanliness of the bearing part 110. The detection assembly 300 is connected to the movable assembly 200, that is, the detection assembly 300 can move with the movable assembly 200 relative to the bearing part 110, so that the detection assembly 300 has multiple detection positions relative to the bearing part 110, which can guarantee the accuracy of detection. Specifically, the detection assembly 300 can be detachably connected to the movable assembly 200, that is, the detection assembly 300 can be replaced or maintained conveniently. It should be noted that the detection assembly 300 can be provided with a window 310 to visually detect the adhesion on the bearing part 110.

[0053] With reference to Figure 1 and Figure 2 The cleaning assembly 400 is used to clean the bearing part 110. The cleaning assembly 400 is connected to the movable assembly 200, that is, the cleaning assembly 400 can move with the movable assembly 200 relative to the bearing part 110, so that the cleaning effect can be guaranteed and the generation of cleaning dead angles on the bearing part 110 can be reduced. It should be noted that the cleaning assembly 400 includes a cleaning part 410, which can abut against the bearing part 110 to clean the adhesion on the bearing part 110. It can be understood that the cleaning part 410 can adjust the abutting force of itself applied to the bearing part 110 through the movable assembly 200, so as to meet different cleaning requirements.

[0054] With reference to Figures 1 to 7 The air guide assembly 500 can generate air flow that can flow to the bearing part 110 to carry away the adhesion on the bearing part 110 to achieve cleaning. The air guide assembly 500 is connected to the movable assembly 200, that is, the air guide assembly 500 can move with the movable assembly 200 relative to the bearing part 110, so that the air guide assembly 500 has multiple positions relative to the bearing part 110, that is, the air guide assembly 500 can adjust the air flow direction and wind speed of itself, so as to achieve multiple cleaning effects.

[0055] The utility model discloses a technical scheme, and the slide glass device 10 includes base body 100, movable assembly 200, detection assembly 300, cleaning assembly 400 and gas guide assembly 500. Base body 100 has the bearing part 110 for bearing chip. In prior art, manual wiping is adopted to the bearing surface of slide glass table to remove the dirt or foreign matter on the bearing surface, and manual cleaning is difficult to guarantee the high standard cleanliness requirement, so that the cleaning effect is poor. The cleaning assembly 400 of the scheme includes the cleaning part 410, and the cleaning part 410 can abut the bearing part 110 to clean the adherent on the bearing part 110, that is, the cleaning efficiency can be effectively improved, and the cleaning effect is guaranteed. Moreover, the gas guide assembly 500 includes the gas guide block 510, and the gas guide block 510 can generate the gas flow that can flow to the bearing part 110, and the gas flow can carry away the adherent on the bearing part 110, so that the scheme can also reduce the situation that the foreign matter still adheres to the bearing surface after the cleaning part 410 cleans the bearing surface, and further improve the cleaning effect. In addition, the detection assembly 300 can detect the cleanliness of the bearing part 110, that is, the situation that the human eye identification (the cleanliness of the bearing surface) is unreliable can be reduced,

[0056] Further, the movable assembly 200 is movably connected with the base body 100, and the movable assembly 200 can move towards the bearing part 110, and the detection assembly 300, the cleaning assembly 400 and the gas guide assembly 500 are all connected with the movable assembly 200, that is, the detection assembly 300, the cleaning assembly 400 and the gas guide assembly 500 can adjust the angle and distance between themselves and the bearing part 110 according to the actual situation, so that the detection assembly 300, the cleaning assembly 400 and the gas guide assembly 500 of the scheme do not interfere with the normal taking and placing of the chip, and can further improve the cleaning effect of the bearing part 110, guarantee the reliability of cleaning, and also can adapt to the cleaning needs of various scenes.

[0057] Referring to Figures 4 to 7 , the specific setting of the gas guide block 510 will be introduced below. In some embodiments, the gas guide block 510 includes a gas guide block 520. The gas guide block 520 has a gas guide channel 521 inside. The gas guide block 520 is provided with an air inlet 522 and an air outlet 523, and the air inlet 522 and the air outlet 523 are both in communication with the gas guide channel 521. The air outlet 523 is arranged on the side of the gas guide block 520 facing the bearing part 110, that is, the gas flow can flow to the bearing part 110 through the air inlet 522, the gas guide channel 521 and the air outlet 523, and can carry away the adherent on the bearing part 110. The gas guide block 520 of the scheme can guarantee the cleaning effect of the bearing part 110, and the gas guide block 520 is convenient to replace. It should be noted that the air inlet 522 and the air outlet 523 of the gas guide block 520 can be provided with a gas flow valve, that is, the gas flow flowing in the gas guide block 520 can be adjusted.

[0058] Referring to Figures 4 to 7The specific structure of the air guide block 520 will be described below. In some embodiments, the air guide block 520 includes a base plate 524 and a cover plate 525, and the base plate 524 and the cover plate 525 are detachably connected to each other, that is, the base plate 524 or the cover plate 525 can be replaced individually to ensure smooth gas flow. Specifically, the base plate 524 and the cover plate 525 can be connected by clamping or screwing, etc. It should be noted that in other embodiments, the base plate 524 and the cover plate 525 can also be arranged in an integrated manner, that is, the sealing of the air guide channel 521 can be ensured.

[0059] Referring to Figure 6 and Figure 7 , the side of the base plate 524 facing the cover plate 525 is provided with a first air groove 5241, and the side of the cover plate 525 facing the base plate 524 is provided with a second air groove 5251. The structure of the second air groove 5251 can be the same as or different from that of the first air groove 5241. The first air groove 5241 can be combined with the second air groove 5251 to jointly define the air guide channel 521. The air guide channel 521 of the present scheme is formed by combining the base plate 524 and the cover plate 525, which facilitates cleaning of the inside of the air guide channel 521 and avoids the situation that the air guide channel 521 is blocked by attachments. It should be noted that in some embodiments, the groove depth of the second air groove 5251 of the cover plate 525 is 0.05mm-0.1mm, and the groove depth of the first air groove 5241 can be the same as or different from that of the second air groove 5251.

[0060] It should be noted that in some embodiments, the base plate 524 and the cover plate 525 have a first connection position and a second connection position. When in the first connection position, the base plate 524 can jointly define a first air guide channel 521 with the cover plate 525. When in the second connection position, the base plate 524 can jointly define a second air guide channel 521 with the cover plate 525. The cross-sectional size of the first air guide channel 521 is larger than that of the second air guide channel 521. The specific combination of the base plate 524 and the cover plate 525 can be determined according to actual conditions. The base plate 524 and the cover plate 525 of the present scheme can be combined to form air guide channels 521 of various cross-sectional sizes to meet various cleaning needs.

[0061] Referring to Figure 6 and Figure 7 , the specific air outlet arrangement of the air guide block 520 will be described below. In some embodiments, the air guide block 520 is provided with a plurality of air outlets 523, and the structures and sizes of the air outlets 523 can be the same or different. The air outlets 523 are arranged at intervals along the extension direction of the air guide block 520. It can be understood that the intervals between adjacent air outlets 523 can be uniform or non-uniform. It should be noted that each air outlet 523 can be arranged towards the bearing portion 110.

[0062] In some embodiments, the air guide block 520 can be arranged in a straight line, i.e., each air outlet 523 can be arranged in a straight line. In other embodiments, the air guide block 520 can be arranged in a curve (which can be adapted to the carrier 110 and be arc-shaped), i.e., each air outlet 523 can be arranged in a curve. The specific arrangement of the air guide block 520 can be determined according to actual conditions, and the embodiments of the present application are described by taking the arrangement of each air outlet 523 in a curve as an example.

[0063] The air guide block 520 of the present solution is provided with a plurality of air outlets 523, i.e., the airflow can cover the entire carrier 110, ensuring that each area of the carrier 110 can be effectively cleaned, avoiding the problem of incomplete cleaning in a local area.

[0064] The specific air guide arrangement of the air guide part 510 will be described below. In some embodiments, the air guide part 510 can generate a blowing airflow that can flow to the carrier 110, and the blowing airflow can carry the adhering objects on the carrier 110 away by high pressure. In other embodiments, the air guide part 510 can generate a suction airflow that can flow to the carrier 110, and the blowing airflow can carry the adhering objects on the carrier 110 away by negative pressure, avoiding the situation that the adhering objects fall on the carrier 110 or other components of the slide device 10 after detaching from the carrier 110, ensuring the reliability of cleaning. In other embodiments, the air guide part 510 can generate both the blowing airflow and the suction airflow, i.e., the cleaning effect can be further ensured. The specific arrangement of the air guide part 510 can be determined according to actual conditions. It should be noted that when the air guide part 510 cleans the carrier 110 by the suction airflow, a filter part can be arranged at the air inlet 522 of the air guide block 520.

[0065] Referring to Figure 6 and Figure 7 , the specific structural arrangement of the cleaning part 410 will be described below. In some embodiments, the cleaning part 410 includes a fixed block 411 and a roller body 412, and the roller body 412 is rotationally connected to the fixed block 411. The roller body 412 can abut against the carrier 110, thereby cleaning the adhering objects on the carrier 110. It can be understood that in some embodiments, the roller body 412 of the cleaning part 410 can roll by relying on the power provided by the movable assembly 200 (the roller body 412 cannot actively rotate by itself), thereby cleaning the adhering objects. In other embodiments, the cleaning part 410 includes a driving part, and the driving part can drive the roller body 412 to actively roll, thereby cleaning the adhering objects. The specific driving arrangement of the cleaning part 410 can be determined according to actual conditions.

[0066] It should be noted that in some embodiments, the slide device 10 comprises a rotating part connected to the bearing part 110, which can drive the bearing part 110 to rotate relative to the base 100. The bearing part 110 is cleaned by the cleaning part 410 during the rotation of the bearing part 110. This scheme can increase the relative friction between the cleaning part 410 and the bearing part 110, effectively improving the cleaning effect. In other embodiments, the slide device 10 comprises a rotating part connected to the bearing part 110, which can drive the bearing part 110 to rotate relative to the base 100. The bearing part 110 is cleaned by the air flow generated by the air guide part 510 during the rotation of the bearing part 110. It can be understood that the direction of air flow movement on the bearing part 110 can be opposite or the same as the direction of rotation of the bearing part 110. This scheme can further enhance the cleaning effect.

[0067] With reference to Figure 8 The specific structure of the cleaning part 410 will be described below. In some embodiments, the cleaning part 410 comprises a silica gel layer 413 arranged at least partially around the outer wall of the roller body 412. The specific wrapping angle of the silica gel layer 413 on the roller body 412 can be determined according to actual conditions. The embodiments of the present application are described by taking the example of the silica gel layer 413 wrapping the entire outer periphery of the roller body 412. The silica gel layer 413 is soft and has a certain elasticity, which can improve the cleanliness of the bearing part 110. It should be noted that the silica gel layer 413 can be coated with an adhesive layer, which can improve the cleaning effect. It can be understood that the silica gel layer 413 can be sleeved on the outer periphery of the roller body 412, which facilitates the replacement of the silica gel layer 413.

[0068] With reference to Figure 9 The specific structure of the cleaning part 410 will be described below. In some embodiments, the cleaning part 410 comprises a brush layer 414 arranged at least partially around the outer wall of the roller body 412. The specific wrapping angle of the brush layer 414 on the roller body 412 can be determined according to actual conditions. The embodiments of the present application are described by taking the example of the brush layer 414 wrapping the entire outer periphery of the roller body 412. The brush layer 414 can remove stubborn stains and ensure the cleaning effect. It should be noted that the brush layer 414 can be sleeved on the roller body 412, which facilitates the replacement of the brush layer 414.

[0069] With reference to Figures 1 to 3The specific configuration of the movable assembly 200 is described below. In some embodiments, the movable assembly 200 includes a first slider 210 and a first slide rail 220, and the first slider 210 can be arranged in the first slide rail 220. The first slider 210 is connected to the detection assembly 300, the cleaning assembly 400, and the air guide assembly 500. The first slide rail 220 is connected to the base body 100. The first slider 210 is configured to be able to slide on the first slider 210, that is, to be able to drive the detection assembly 300, the cleaning assembly 400, and the air guide assembly 500 to move relative to the base body 100. It can be understood that the movable assembly 200 can be provided with multiple groups of first sliders 210 and first slide rails 220, that is, to be able to guarantee the stability of movement.

[0070] Referring to Figures 1 to 3 The specific movement configuration of the carrying part 110 is described below. In some embodiments, the slide device 10 includes a second slider 610 and a second slide rail 620, and the second slider 610 can be arranged in the second slide rail 620. The second slider 610 is connected to the carrying part 110, and the second slide rail 620 is connected to the base body 100. The second slider 610 is able to slide on the second slide rail 620 in a first direction X. Referring to Figure 1 The first direction X can refer to the left-right direction. The first slider 210 and the first slide rail 220 of the present solution can increase the movement range of the carrying part 110, guarantee the cleaning effect of the cleaning assembly 400 and the air guide assembly 500 on the carrying part 110, and improve the reliability of the cleanliness detection of the detection assembly 300 on the carrying part 110.

[0071] In some embodiments, the slide device 10 includes a third slider 710 and a third slide rail 720, and the third slider 710 can be arranged in the third slide rail 720. The third slider 710 is connected to the carrying part 110, and the third slide rail 720 is connected to the base body 100. The third slider 710 is able to slide on the third slide rail 720 in a second direction Y. The second direction Y intersects the first direction X. Specifically, the second direction Y can be perpendicular to the first direction X, or can be at other angles that are not perpendicular, and the embodiments of the present application are described by taking the second direction Y perpendicular to the first direction X as an example. Referring to Figure 1 The second direction Y can refer to the front-back direction. The second slider 610 and the second slide rail 620 of the present solution can further increase the movement range of the carrying part 110, guarantee the cleaning effect of the cleaning assembly 400 and the air guide assembly 500 on the carrying part 110, and improve the reliability of the cleanliness detection of the detection assembly 300 on the carrying part 110.

[0072] In some embodiments, the slide device 10 comprises a fourth slider and a fourth sliding rail, the fourth slider can be matched with the fourth sliding rail. The fourth slider is connected with the carrying part 110, and the fourth sliding rail is connected with the base 100. The fourth slider can slide on the fourth sliding rail along a third direction Z. The third direction Z is perpendicular to the second direction Y. Specifically, the third direction Z can be perpendicular to the second direction Y, or can be at other angles, and the embodiments of the present application take the case that the third direction Z is perpendicular to the second direction Y as an example. Referring to Figure 1 The third direction Z can be upward and downward. The fourth slider and the fourth sliding rail can further increase the movement range of the carrying part 110, guarantee the cleaning effect of the cleaning assembly 400 and the air guide assembly 500 on the carrying part 110, and improve the reliability of the cleanliness detection of the detection assembly 300 on the carrying part 110.

[0073] Referring to Figure 10 The second aspect of the utility model provides a cleaning method, the cleaning method uses the slide device 10 of the above embodiment to clean the carrying part 110, and the cleaning method comprises the following steps:

[0074] S101: the movement assembly 200 drives the detection assembly 300 to move towards the carrying part 110, and the detection assembly 300 detects the cleanliness of the carrying part 110. It should be noted that in some embodiments, the carrying part 110 can also be moved towards the detection assembly 300 by using the slider and the sliding rail.

[0075] S102: the air guide assembly 500 generates an airflow that can flow to the carrying part 110 to remove the adhering matter on the carrying part 110. It can be understood that the air guide assembly 500 can generate a blowing airflow to remove the adhering matter, or can generate a suction airflow to remove the adhering matter.

[0076] S103: the cleaning part 410 of the cleaning assembly 400 abuts against the carrying part 110 to clean the adhering matter on the carrying part 110. Specifically, the roller body 412 of the cleaning part 410 can be rotated to clean the adhering matter on the carrying part 110.

[0077] S104: the air guide assembly 500 generates an airflow that can flow to the carrying part 110 to remove the adhering matter; and the detection assembly 300 detects the cleanliness of the carrying part 110. It should be noted that when the detection assembly 300 confirms that the cleanliness of the carrying part 110 does not meet the standard, the above steps can be repeated to clean the carrying part 110.

[0078] The cleaning method of the specific embodiment of the present application is introduced as follows:

[0079] First, click the cleaning button of the slide device 10.

[0080] Second step, through the program automatically determine whether there is a chip on the bearing part 110 (through the vacuum sensor to determine), if the judgment "yes", automatically or manually take away the chip, if the judgment "no", then directly to the next step.

[0081] Third step, make the bearing part 110 to the cleaning station, so that the movable assembly 200 drive detection assembly 300, cleaning assembly 400 and gas guide assembly 500 to the cleaning station.

[0082] Fourth step, open the air valve, so that the bearing part 110 along the second direction Y reciprocating motion (that is, the gas guide block 520 generated by the airflow can cover the entire bearing part 110 surface).

[0083] Fifth step, after the gas guide assembly 500 to complete the cleaning, make the bearing part 110 along the third direction Z (vertical) to the set cleaning position, so that the cleaning assembly 400 contact bearing part 110, and the bearing part 110 along the second direction Y reciprocating motion. Reciprocating motion times can be set according to actual situation.

[0084] Sixth step, after the cleaning assembly 400 to complete the cleaning, open the gas guide assembly 500 again, so that the bearing part 110 along the second direction Y reciprocating motion, reciprocating motion times can be set according to actual situation, that is, the cleaning part 410 can be cleaned completely residual attachments.

[0085] Seventh step, after the gas guide assembly 500 to complete the cleaning, make the bearing part 110 to the detection assembly 300 window 310 under the visual inspection, if there is still contamination or foreign matter, through the cleaning assembly 400 and gas guide assembly 500 again to clean.

[0086] Eighth step, after the completion of the cleaning operation again, if the detection assembly 300 confirmed that there is still contamination or foreign matter, the device alarm by manual confirmation and removal.

[0087] It should be noted that, if the embodiment of the present application involves directional indication (such as up, down, left, right, front, back……), the directionality of the indication is only used to explain the relative position relationship between the components, movement and so on in a certain posture, if the specific posture changes, the directionality of the indication also changes accordingly.

[0088] In addition, if the description of "first", "second" and the like is involved in the embodiments of the utility model, the description of "first", "second" and the like is only for the purpose of description, and cannot be understood as indicating or implying the relative importance of the same or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first", "second" can be explicitly or implicitly included at least one of the features. In addition, if "and / or", "and / or" or "and / or" appears throughout the text, it means that the three parallel schemes include "A and / or B", including A scheme, or B scheme, or A and B scheme. In addition, the technical solutions of each embodiment can be combined with each other, but it must be based on the realization of ordinary skilled in the art, when the combination of technical solutions appears contradictory or cannot be realized, it should be considered that the combination of technical solutions does not exist, nor is it within the scope of the utility model claimed by the utility model.

[0089] The above is only the preferred embodiment of the utility model, and does not limit the patent range of the utility model, and any equivalent structural transformation made by the utility model specification and the attached drawings, or direct / indirect application in other related technical fields under the utility model concept of the utility model is included in the patent protection range of the utility model.

Claims

1. A carrier device for carrying a chip, characterized in that The slide device comprises: a base body having a carrying portion for carrying the chip; a movable assembly movably connected to the base body, the movable assembly being configured to be movable towards the carrying portion; a detection assembly connected to the movable assembly, the detection assembly being adapted to detect cleanliness of the carrying portion; a cleaning assembly connected to the movable assembly, the cleaning assembly comprising a cleaning portion adapted to abut against the carrying portion to clean the adhering objects on the carrying portion; a gas guiding assembly connected to the movable assembly, the gas guiding assembly comprising a gas guiding block adapted to generate a gas flow that is flowable to the carrying portion to remove the adhering objects on the carrying portion.

2. The slide device of claim 1, wherein the gas guiding block comprises a gas guiding passage inside the gas guiding block, the gas guiding block being provided with an air inlet and an air outlet in communication with the gas guiding passage, the air outlet being located on a side of the gas guiding block facing the carrying portion.

3. The slide device of claim 2, wherein the gas guiding block comprises a base plate and a cover plate detachably connected to each other, the base plate being provided with a first air groove on a side of the base plate facing the cover plate, the cover plate being provided with a second air groove on a side of the cover plate facing the base plate, the first air groove being adapted to be combined with the second air groove to jointly define the gas guiding passage.

4. The slide device of claim 2, wherein the gas guiding block is provided with a plurality of the air outlets, each of the air outlets being arranged along an extension direction of the gas guiding block and facing the carrying portion.

5. The slide device of claim 1, wherein the gas guiding block is adapted to generate a blowing gas flow that is flowable to the carrying portion to remove the adhering objects on the carrying portion; and / or the gas guiding block is adapted to generate a suction gas flow that is flowable to the carrying portion to remove the adhering objects on the carrying portion.

6. The slide device of claim 1, wherein the cleaning portion comprises a fixed block and a roller body rotatably connected to the fixed block, the roller body being adapted to abut against the carrying portion to clean the adhering objects on the carrying portion.

7. The slide device of claim 6, wherein the cleaning portion comprises a silica gel layer at least partially arranged around an outer peripheral wall of the roller body; and / or the cleaning portion comprises a brush layer at least partially arranged around the outer peripheral wall of the roller body.

8. The slide device of claim 1, wherein the movable assembly comprises a first sliding block and a first sliding rail, the first sliding block being connected to the detection assembly, the cleaning assembly and the gas guiding assembly, the first sliding rail being connected to the base body, the first sliding block being configured to be slidable on the first sliding rail.

9. The slide device of claim 1, wherein the slide device comprises a second sliding block and a second sliding rail, the second sliding block being connected to the carrying portion, the second sliding rail being connected to the base body, the second sliding block being adapted to be slidable on the second sliding rail in a first direction.

10. The slide device of claim 9, wherein ​ The slide device comprises a third sliding block and a third sliding rail, the third sliding block is connected to the bearing part, the third sliding rail is connected to the base body, the third sliding block is adapted to slide on the third sliding rail in a second direction, the second direction is transverse to the first direction; The slide device comprises a fourth sliding block and a fourth sliding rail, the fourth sliding block is connected to the bearing part, the fourth sliding rail is connected to the base body, the fourth sliding block is adapted to slide on the fourth sliding rail in a third direction, the third direction is transverse to the second direction.

Images