Linear piezoelectric actuator and optical element driving device
By designing a linear piezoelectric actuator and adopting a multilayer piezoelectric ceramic and elastomer structure, the problems of high noise, large size and susceptibility to environmental interference of existing drive devices have been solved, realizing the application of quiet, small-sized and low-cost micro-devices.
Patent Information
- Application Number
- CN202422999222.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-05
- Publication Date
- 2025-12-19
- Estimated Expiration
- 2034-12-05
AI Technical Summary
Existing drive devices are noisy and bulky, which cannot meet the small size requirements of micro devices, and electromagnetic drives are easily affected by environmental factors.
A linear piezoelectric actuator was designed, which adopts a structure of stacked piezoelectric ceramics and elastomers. The conductive electrode is connected to the side or drilled to allow the conductive electrode to pass through the piezoelectric ceramic, thereby exciting the piezoelectric ceramic sheet to vibrate and drive the mover to move.
It achieves excellent quiet operation, has a small size design, is suitable for micro-devices, saves manufacturing costs and space, and is suitable for widespread industrialization.
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Figure CN223693838U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to optical component precision drive technical field especially relates to a linear piezoelectric actuator and optical element drive arrangement. BACKGROUND
[0002] With the development of science and technology, driving device gradually tends to miniaturization and quietness, the driving device of the existing small instrument usually adopts step motor drive or electromagnetic drive form, wherein the step motor is large in noise and volume, cannot satisfy the small volume demand of miniature device with quietness demand, electromagnetic drive needs magnet and coil to set up correspondingly, is large in space occupation, cannot satisfy the small volume demand of miniature device, and electromagnetic drive needs to keep stable voltage and current for normal operation, and environmental factors such as electromagnetic interference can influence its normal operation. SUMMARY
[0003] The utility model aims at providing a linear piezoelectric actuator and optical element drive arrangement to solve the problems of the prior art, such as large noise and volume of the driving device, inability to meet the small volume demand of miniature devices, and electromagnetic drive susceptible to environmental factors such as electromagnetic interference affecting normal operation.
[0004] To solve the above technical problems, the embodiments of the present application propose the following technical solutions:
[0005] The first aspect of the present application provides a linear piezoelectric actuator, comprising an elastic body and a piezoelectric element, the piezoelectric element is at least one piezoelectric ceramic sheet, the piezoelectric ceramic sheet is fixedly connected with the elastic body, the elastic body is provided with a first surface and a second surface opposite to the first surface, recesses are provided on both sides of the elastic body for adjusting the vibration mode of the entire piezoelectric actuator, and the elastic body is provided with at least one actuating protrusion, the piezoelectric element is a laminated piezoelectric ceramic, comprising an electric connection layer, a piezoelectric ceramic layer, an electrode layer and a conductive electrode, the electric connection layer is used for connecting external electrical signals and transmitting the external electrical signals to the conductive electrode, the conductive electrode transmits the electrical signals to the electrode layer again, thereby exciting the piezoelectric ceramic sheet to vibrate, and the piezoelectric ceramic sheet is insulated from the elastic body.
[0006] Further, the electrode layer comprises a first electrode layer and a second electrode layer, the first layer of the piezoelectric element is the electric connection layer, except the electric connection layer, the remaining layers of the piezoelectric element are stacked in the order of the piezoelectric ceramic layer, the first electrode layer, the piezoelectric ceramic layer, the second electrode layer, and the tail layer of the piezoelectric element is the piezoelectric ceramic layer, the number of the electric connection layers is 1, the number of the first electrode layers is N, the number of the second electrode layers is M, and the number of the piezoelectric ceramic layers is N+M+1.
[0007] Further, the first electrode layer is divided into four sub-zones, namely a zone, a b zone, a c zone and a d zone, and the b zone and the d zone are in a conductive state; the second electrode layer is divided into four sub-zones, namely a a zone, a b zone, a c zone and a d zone, and the a zone and the c zone are in a conductive state. , , , , , ,
[0008] Further, the piezoelectric element further comprises a first conductive electrode electrically connected with the electrode layer, the first conductive electrode is arranged on the side surface of the piezoelectric ceramic sheet, the first conductive electrode comprises a first conductive end and a second conductive end; the b zone or the d zone of the first electrode layer, the a zone, the c zone are respectively provided with a first electric connection end, and the first electric connection end is electrically connected with the first conductive end; the a zone or the c zone of the second electrode layer, the b zone, the d zone are respectively provided with a second electric connection end, and the second electric connection end is electrically connected with the second conductive end. , , , ,
[0009] Further, the piezoelectric element is two piezoelectric ceramic sheets, and the two piezoelectric ceramic sheets are respectively fixed with the first surface of the elastic body and the second surface of the elastic body; the elastic body is provided with two actuating protrusions, and an adjusting protrusion is arranged between the two actuating protrusions, and the adjusting protrusion is used for adjusting the vibration mode of the whole piezoelectric actuator.
[0010] In some modified embodiments of the first aspect of the present application, the piezoelectric element further comprises a second conductive electrode electrically connected with the electrode layer, the piezoelectric element is provided with a through hole, the second conductive electrode is embedded in the hole and penetrates through the piezoelectric element; the b zone or the d zone, the a zone, the c zone in the first electrode layer are respectively electrically connected with the second conductive electrode; the a zone or the c zone, the b zone, the d zone in the second electrode layer are respectively electrically connected with the second conductive electrode. , , , ,
[0011] The second aspect of the present application provides an optical element driving device, which has a stator, a rotor and a connecting piece, the stator comprises the linear piezoelectric actuator as described above, the linear piezoelectric actuator is embedded in the stator, the stator and the rotor are respectively fixed with the connecting piece, the connecting piece is slidable, and the rotor moves linearly relative to the stator through the connecting piece.
[0012] Further, the mover comprises an optical element, a carrier and a fixing column, the fixing column is fixedly connected with the connecting piece, and the optical element is embedded in the carrier.
[0013] Further, the connecting piece comprises a stator fixing part, a mover fixing part and a sliding part, the sliding part is located between the stator fixing part and the mover fixing part, the stator fixing part and the mover fixing part can slide relative to the sliding part respectively, the mover fixing part is fixedly connected with the mover, and the stator fixing part is fixedly connected with the stator.
[0014] Further, the stator further comprises a base, a rear guard plate arranged at the bottom of the base, a pre-pressing piece, a gasket, a first electric connecting piece, a second electric connecting piece, a closed-loop controller and a front guard plate arranged at the top of the base, the pre-pressing piece is embedded on the base, the linear piezoelectric actuator is provided with the gasket at both ends, the first electric connecting piece and the second electric connecting piece are arranged in the base respectively, the closed-loop controller is arranged on the first electric connecting piece, the first electric connecting piece is electrically connected with the second electric connecting piece and the closed-loop controller respectively, and the second electric connecting piece is electrically connected with the first electric connecting piece and the linear piezoelectric actuator respectively.
[0015] Compared with the prior art, the linear piezoelectric actuator and the optical element driving device provided by the utility model design the laminated piezoelectric ceramic and the elastic body, the through electrode is made to penetrate the piezoelectric ceramic through side surface connection conduction electrode or in the form of punching, the electric signal is layered and connected and transmitted, the piezoelectric ceramic sheet vibration is excited, the actuating convex of the elastic body and the mover produce friction, thereby driving the movement of the mover, the structure is quiet, the utility model structure is simple, the process is simple, the miniature equipment with the requirements of quiet and small size can be simultaneously met, especially the structure of the through electrode, the manufacturing cost and the space can be saved, and the utility model is suitable for universal industrialization popularization. BRIEF DESCRIPTION OF DRAWINGS
[0016] Figure 1 It is the explosion drawing of the optical element driving device of the utility model;
[0017] Figure 2 It is the stator structure schematic view of the optical element driving device of the utility model;
[0018] Figure 3 It is the stator explosion drawing of the optical element driving device of the utility model;
[0019] Figure 4 It is the explosion drawing of the optical element driving device stator from the rear; Figure 3
[0020] Figure 5 It is the mover explosion drawing of the optical element driving device of the utility model;
[0021] Figure 6 is the explosion map of the connecting piece of the optical element driving device of the utility model;
[0022] Figure 7 is the schematic diagram of the stator and the connecting piece of the optical element driving device of the utility model;
[0023] Figure 8 is the schematic diagram of the moving part and the connecting piece of the optical element driving device of the utility model;
[0024] Figure 9 is the structural schematic diagram of one embodiment of the linear piezoelectric actuator of the utility model;
[0025] Figure 10 is the structural schematic diagram of one elastic body of the linear piezoelectric actuator of the utility model;
[0026] Figure 11 is the explosion map of the first embodiment of the piezoelectric element of the linear piezoelectric actuator of the utility model;
[0027] Figure 12a is the schematic diagram of the first electrode layer in the Figure 11
[0028] Figure 12b is the schematic diagram of the second electrode layer in the Figure 11
[0029] Figure 13a is the schematic diagram of the electrical connection of the first embodiment of the piezoelectric element of the linear piezoelectric actuator of the utility model;
[0030] Figure 13b is the schematic diagram of the electrical connection between the electrode layer and the conducting end of the first embodiment of the piezoelectric element of the linear piezoelectric actuator of the utility model;
[0031] Figure 14a is the schematic diagram of one side of the first conducting electrode of the linear piezoelectric actuator of the utility model;
[0032] Figure 14b is the schematic diagram of the other side of the first conducting electrode of the linear piezoelectric actuator of the utility model;
[0033] Figure 15 is the top view of the first embodiment of the piezoelectric element of the linear piezoelectric actuator of the utility model;
[0034] Figure 16 is the structural schematic diagram of the second embodiment of the piezoelectric element of the linear piezoelectric actuator of the utility model;
[0035] Figure 17a is the schematic diagram of the first electrode layer in the Figure 16
[0036] Figure 17b yes Figure 16 Schematic diagram of the second electrode layer;
[0037] Figure 18 This is a schematic diagram of the electrical connection of the piezoelectric element in the second embodiment of the linear piezoelectric actuator of this utility model;
[0038] Figure 19 This is a top view of the second embodiment of the linear piezoelectric actuator piezoelectric element of this utility model, excluding the electrical connection layer.
[0039] Explanation of the labels in the diagram:
[0040] 1. Piezoelectric element, 2. Actuating protrusion, 3. Elastomer, 4. Adjusting protrusion, 5. First surface, 6. Groove, 7. Electrical connection layer, 8. Piezoelectric ceramic layer, 10. Electrode layer, 101. First electrode layer, 1011. Region a, 1012. Region b, 1013. Region c, 1014. Region d, 102. Second electrode layer, 1021. a , District, 1022, b , District, 1023, c , District, 1024, d , 111, First conducting electrode; 1111, First conducting end; 1112, Second conducting end; 112, Second conducting electrode; 131, First electrical connection end; 132, Second electrical connection end; 14, Stator; 15, Connector; 16, Mover; 17, Base; 18, Rear guard plate; 19, Pre-compression component; 20, Gasket; 21, First electrical connection component; 22, Second electrical connection component; 23, Closed-loop controller; 24, Front guard plate; 25, Stator fixing part; 26, Sliding part; 27, Mover fixing part; 28, Optical element; 29, Fixing column; 30, Carrier; 31, Linear piezoelectric actuator. Detailed Implementation
[0041] To better understand the purpose, structure, and function of this utility model, the linear piezoelectric actuator and optical element driving device of this utility model will be described in further detail below with reference to the accompanying drawings. It should be understood that the embodiments shown in the drawings are not intended to limit the scope of this utility model, but are merely for illustrating the essential spirit of the technical solution of this utility model.
[0042] Figure 1 An optical element driving device is shown, including a stator 14, a mover 16 and a connector 15. The stator 14 and the mover 16 are respectively fixed to the connector 15. The connector 15 is a sliding structure, and the mover 16 can move linearly relative to the stator 14 through the connector 15.
[0043] like Figures 2 to 4As shown, the stator 14 includes a base 17, a back plate 18, a pre-pressing part 19, a linear piezoelectric actuator 31, a gasket 20, a first electrical connector 21, a second electrical connector 22, a closed-loop controller 23, and a front plate 24. The back plate 18 is arranged at the bottom of the base 17, the pre-pressing part 19 is embedded on the base 17 and generates a certain pre-pressing force on the linear piezoelectric actuator 31, the linear piezoelectric actuator 31 is provided with the gasket 20 at both ends, which plays a limiting role; the first electrical connector 21 and the second electrical connector 22 are arranged inside the base 17, the closed-loop controller 23 is arranged on the first electrical connector 21, and the first electrical connector 21 is electrically connected with the second electrical connector 22 and the closed-loop controller 23 respectively, and the second electrical connector 22 is electrically connected with the first electrical connector 21 and the linear piezoelectric actuator 31 respectively; the front plate 24 is arranged at the top of the base 17, which realizes the limiting function of the pre-pressing part.
[0044] As shown in Figure 5 The mover 16 includes an optical element 28, a carrier 30, and a fixing column 29 for fixing with the connector 15, and the optical element 28 is embedded in the carrier 30.
[0045] As shown in Figures 6 to 8 The connector 15 includes a stator fixing part 25, a mover fixing part 27, and a sliding part 26. The sliding part 26 is arranged between the stator fixing part 25 and the mover fixing part 27, the mover fixing part 27 and the stator fixing part 25 can respectively generate relative sliding with the sliding part 26, the mover fixing part 27 is fixed with the mover 16, and the stator fixing part 25 is fixed with the stator 14.
[0046] Figure 9 And Figure 10 A first embodiment of the linear piezoelectric actuator is shown in detail, which includes a piezoelectric element 1 and an elastic body 3, wherein the elastic body 3 is provided with a first face 5 and a second face opposite to the first face 5, and the piezoelectric element 1 is a piezoelectric ceramic sheet, wherein the piezoelectric ceramic sheet is at least one piece.
[0047] Preferably, the piezoelectric ceramic sheet is one or two pieces, and when the piezoelectric ceramic sheet is one piece, it is fixed with the first face 5 of the elastic body 3; when the piezoelectric ceramic sheet is two pieces, it is fixed with the first face 5 of the elastic body 3 and the second face of the elastic body 3. As a preferred, the piezoelectric ceramic sheet is insulated from the elastic body.
[0048] The elastic body 3 is provided with a groove 6 at both sides, which is used for adjusting the vibration mode of the whole piezoelectric actuator, and the elastic body 3 is provided with at least one actuating protrusion 2. Preferably, the elastic body is provided with two actuating protrusions 2, which can adapt to a larger movement stroke, and when two actuating protrusions 2 are provided, an adjusting protrusion 4 for adjusting the vibration mode of the whole piezoelectric actuator is arranged between the two actuating protrusions 2, so that the piezoelectric actuator works better.
[0049] As shown in Figure 11As shown, the piezoelectric element 1 is a laminated piezoelectric ceramic, comprising an electrical connection layer 7, a piezoelectric ceramic layer 8, an electrode layer 10, and a conducting electrode, the electrical connection layer 7 is used to access an external electrical signal and transmit the external electrical signal to the conducting electrode.
[0050] Specifically, the conducting electrode comprises a first conducting electrode 111 and a second conducting electrode 112, as shown in Figure 13a 、 Figure 13b 、 Figure 14a 、 Figure 14b 、 Figure 15 As shown, the first conducting electrode 111 is arranged on the side of the piezoelectric ceramic sheet, the first conducting electrode 111 comprises a first conducting end 1111 and a second conducting end 1112, and the electrical signal is transmitted to the electrode layer 10 again; the electrode layer 10 comprises a first electrode layer 101 and a second electrode layer 102, wherein the first conducting end 1111 is electrically connected to the first electrode layer 101, and the second conducting end 1112 is electrically connected to the second electrode layer 102.
[0051] Preferably, the piezoelectric element 1 has an electrical connection layer 7 as the first layer, and the remaining layers of the piezoelectric element 1 are stacked in the order of the piezoelectric ceramic layer 8, the first electrode layer 101, the piezoelectric ceramic layer 8, the second electrode layer 102, and the piezoelectric ceramic layer 8 as the last layer, the number of the electrical connection layer 7 is 1, the number of the first electrode layer 101 is N (at least one), the number of the second electrode layer 102 is M (at least one), and the number of the piezoelectric ceramic layer 8 is N+M+1 (the sum of the number of the electrical connection layer 7, the number of the first electrode layer 101, and the number of the second electrode layer 102).
[0052] As shown in Figure 12a 、 Figure 13a 、 Figure 13b The first electrode layer 101 is divided into four zones, namely a zone 1011, a b zone 1012, a c zone 1013, and a d zone 1014, wherein the b zone 1012 and the d zone 1014 are in a conducting state, one of the b zone 1012 or the d zone 1014 and the a zone 1011 or the c zone 1013 is provided with a first electrical connection end 131, and the first electrical connection end 131 is electrically connected to the first conducting end 1111.
[0053] As shown in Figure 12b 、 Figure 13a 、 Figure 13b The second electrode layer 102 is divided into four zones, namely a zone 1021, a b zone 1022, a c zone 1023, and a d zone 1024, wherein the a zone 1021 and the c zone 1023 are in a conducting state, one of the a zone 1021 or the c zone 1023 and the b zone 1022 or the d zone 1024 is provided with a second electrical connection end 132, and the second electrical connection end 132 is electrically connected to the second conducting end 1112.
[0054] Figures 16 to 19 A second embodiment of a linear piezoelectric actuator is shown in detail. The piezoelectric element 1 includes an electrical connection layer 7, a piezoelectric ceramic layer 8, an electrode layer 10, and a second conductive electrode 112. The electrode layer 10 includes a first electrode layer 101 and a second electrode layer 102. The first electrode layer 101 is divided into four sections: a section 1011, b section 1012, c section 1013, and d section 1014, wherein b section 1012 and d section 1014 are in a conductive state. The second electrode layer 102 is also divided into four sections: a section 1011, b section 1012, c section 1013, and d section 1014. , District 1021, b , District 1022, c , District 1023 and d , District 1024, of which a , District 1021 and C , The circuit between zones 1023 is in a conductive state.
[0055] The difference from the first embodiment is that holes are directly drilled in all layers of the piezoelectric element 1 except for the electrical connection layer 7, namely the piezoelectric ceramic layer 8 and the electrode layer 10. The second conductive electrode 112 is a cylinder that can be tightly inserted into the hole. One of the b region 1012 or d region 1014 in the first electrode layer 101, as well as the a region 1011 and c region 1013, are in direct contact with the second conductive electrode 112 to achieve electrical connection. The a region in the second electrode layer 102 is directly in contact with the second conductive electrode 112 to achieve electrical connection. , Zone 1021 or C , One of the two in district 1023, b , District 1022, d , Zone 1024 is in direct contact with the second conductive electrode 112 to achieve electrical connection; the four zones of the first electrode layer 101 no longer have the first electrical connection terminal 131, and the four zones of the second electrode layer 102 no longer have the second electrical connection terminal 132. The second conductive electrode 112 can penetrate through all other layers of the piezoelectric element 1 except for the electrical connection layer 7. This form can save space.
[0056] Preferably, the piezoelectric ceramic layer 8 and the electrode layer 10 have circular holes, and the second conductive electrode is a cylinder.
[0057] The working principle of this utility model is as follows: the actuation protrusion 2 of the linear piezoelectric actuator 31 and the mover fixing part 27 of the connector 15 generate a certain pre-pressure through the pre-pressure member. When the external electrical signal is introduced through the first electrical connector 21, it is transmitted from the first electrical connector 21 to the second electrical connector 22, and finally to the linear piezoelectric actuator 31. When the linear piezoelectric actuator 31 is energized, it will excite the piezoelectric element to vibrate. The actuation protrusion 2 and the mover fixing part 27 will generate relative friction, thereby driving the mover fixing part 27 and the mover 16 to move.
[0058] The utility model discloses drive structure is simple, simple technology can save cost or space, is fit for universal industrialization popularization.
[0059] The basic principle and main features of the utility model and the advantages of the utility model are shown and described above, and the skilled person in the art should understand that the utility model is not limited by the above examples, and the above examples and the description in the specification are only to illustrate the principle of the utility model, and various changes and improvements can be made to the utility model without departing from the spirit and scope of the utility model, and these changes and improvements all fall within the scope of the utility model claimed. The scope of protection of the utility model is defined by the appended claims and their equivalents.
Claims
1. A linear piezoelectric actuator, characterized by, The piezoelectric element (1) is a laminated piezoelectric ceramic, comprising an electric connection layer (7), a piezoelectric ceramic layer (8), an electrode layer (10) and a through electrode, the electric connection layer (7) is used for connecting an external electric signal and transmitting the external electric signal to the through electrode, the through electrode transmits the electric signal to the electrode layer (10) again, so as to excite the piezoelectric ceramic sheet to vibrate. The piezoelectric ceramic sheet is insulated from the elastic body (3). The electrode layer (10) comprises a first electrode layer (101) and a second electrode layer (102), the piezoelectric element (1) has the electric connection layer (7) as the first layer, and the piezoelectric element (1) has the piezoelectric ceramic layer (8), the first electrode layer (101), the piezoelectric ceramic layer (8), the second electrode layer (102) stacked in sequence except the electric connection layer (7), and the piezoelectric element (1) has the piezoelectric ceramic layer (8) as the last layer, the electric connection layer (7) is one in number, the first electrode layer (101) is N in number, the second electrode layer (102) is M in number, and the piezoelectric ceramic layer (8) is N+M+1 in number. The first electrode layer (101) is divided into four subareas, namely a region (1011), a b region (1012), a c region (1013) and a d region (1014), and the b region (1012) and the d region (1014) are in a conductive state; 2. The linear piezoelectric actuator according to claim 1, characterized by The piezoelectric element (1) further comprises a first through electrode (111) electrically connected with the electrode layer (10), the first through electrode (111) is arranged on the side of the piezoelectric ceramic sheet, and the first through electrode (111) comprises a first through end (1111) and a second through end (1112); 3. The linear piezoelectric actuator according to claim 2, wherein The b region (1012) or the d region (1014), the a region (1011) and the c region (1013) of the first electrode layer (101) are respectively provided with a first electric connection end (131), and the first electric connection end (131) is electrically connected with the first through end (1111); The second electrode layer (102) is divided into four sub-zones, respectively a , sub-zone (1021), b , sub-zone (1022), c , sub-zone (1023) and d , sub-zone (1024), the a , sub-zone (1021) and the c , sub-zone (1023) are in a conductive state.
4. The linear piezoelectric actuator according to claim 3, wherein The piezoelectric element (1) is two piezoelectric ceramic sheets, and the two piezoelectric ceramic sheets are respectively fixed to the first face (5) and the second face of the elastic body (3); The elastic body (3) is provided with two actuating protrusions (2), and an adjusting protrusion (4) is arranged between the two actuating protrusions (2) for adjusting the vibration mode of the whole piezoelectric actuator. a , zone (1021) or c , zone (1023), b , zone (1022), d , zone (1024) is respectively provided with one second electric connection end (132), and the second electric connection end (132) is electrically connected with the second conduction end (1112).
5. The linear piezoelectric actuator of claim 1, wherein 6. The linear piezoelectric actuator according to claim 3, wherein The piezoelectric element (1) further comprises a second conducting electrode (112) electrically connected with the electrode layer (10), the piezoelectric element (1) is provided with a through hole, and the second conducting electrode (112) is embedded in the hole and penetrates through the piezoelectric element (1); The b region (1012) or d region (1014), a region (1011), and c region (1013) in the first electrode layer (101) are respectively electrically connected with the second conducting electrode (112); a in the second electrode layer (102) , region (1021) or c , region (1023), b , region (1022), d , region (1024) are respectively electrically connected with the second conducting electrode (112).
7. An optical element driving device characterized by comprising: The linear piezoelectric actuator (31) is embedded in the stator (14), the stator (14) and the mover (16) are fixed with the connecting piece (15) respectively, the connecting piece (15) is slidable, and the mover (16) moves linearly relative to the stator (14) through the connecting piece (15).
8. The optical element driving apparatus according to claim 7, wherein The mover (16) comprises an optical element (28), a carrier (30), and a fixing column (29), the fixing column (29) is fixedly connected with the connecting piece (15), and the optical element (28) is embedded in the carrier (30).
9. The optical element driving apparatus according to claim 7, wherein The connecting piece (15) comprises a stator fixing part (25), a mover fixing part (27), and a sliding part (26), the sliding part (26) is located between the stator fixing part (25) and the mover fixing part (27), the mover fixing part (27) and the stator fixing part (25) are relatively slidable with the sliding part (26) respectively, the mover fixing part (27) is fixedly connected with the mover (16), and the stator fixing part (25) is fixedly connected with the stator (14).
10. The optical element driving apparatus according to claim 7, wherein The stator (14) further comprises a base (17), a rear guard plate (18) arranged at the bottom of the base (17), a pre-pressing piece (19), a gasket (20), a first electric connecting piece (21), a second electric connecting piece (22), a closed-loop controller (23), and a front guard plate (24) arranged at the top of the base (17), the pre-pressing piece (19) is embedded on the base (17), the linear piezoelectric actuator (31) is provided with the gasket (20) at two ends, the first electric connecting piece (21) and the second electric connecting piece (22) are arranged in the base (17) respectively, the closed-loop controller (23) is arranged on the first electric connecting piece (21), the first electric connecting piece (21) is electrically connected with the second electric connecting piece (22) and the closed-loop controller (23) respectively, and the second electric connecting piece (22) is electrically connected with the first electric connecting piece (21) and the linear piezoelectric actuator (31) respectively.