Vacuum carrier

Abstract

The utility model discloses a vacuum carrier and relates to the technical field of battery pack carriers. The vacuum carrier comprises a base and a cover body, at least two vacuum cavities are formed in the base, and each vacuum cavity is communicated with a vacuum suction cup and a vacuum connector; the vacuum suction cup is connected to the working face of the base, and the vacuum connector is connected to the base. The working surface of the cover body is connected with a plurality of cushions; and at least part of the buffer pad corresponds to the vacuum chuck. The utility model aims to provide the vacuum carrier so as to solve the technical problems in the prior art that the vacuum pressure of the vacuum carrier is insufficient, the vacuum holding time is short, and the vacuum pressure of the carrier is easy to leak to a certain extent.

Description

Technical Field

[0001] This utility model relates to the field of battery pack carrier technology, and more specifically, to a vacuum carrier. Background Technology

[0002] Carriers are a common product positioning and transportation mechanism in the battery pack (also known as PACK) industry. They are widely used for positioning and handling products on various automated production lines to achieve various processing techniques.

[0003] Currently available carriers are divided into mechanical carriers and vacuum carriers. Mechanical carriers are more affected by materials and equipment, and have poor adaptability to products of different sizes; vacuum carriers are less affected by materials and equipment, and can adapt to a wider range of products of different sizes. However, existing vacuum carriers suffer from insufficient vacuum pressure, short vacuum holding time, and easy leakage of vacuum pressure, which can lead to product displacement and fail to meet production line process requirements. Utility Model Content

[0004] The purpose of this utility model is to provide a vacuum carrier to solve, to a certain extent, the technical problems of insufficient vacuum pressure, short vacuum holding time, and easy leakage of vacuum pressure in the existing vacuum carrier.

[0005] To achieve the above objectives, the present invention provides the following technical solution:

[0006] A vacuum carrier includes a base and a cover;

[0007] The base is provided with at least two vacuum chambers, each of which is connected to a vacuum suction cup and a vacuum connector; the vacuum suction cup is connected to the working surface of the base, and the vacuum connector is connected to the base;

[0008] The working surface of the cover is connected to a plurality of buffer pads; at least some of the buffer pads correspond to the vacuum suction cup; wherein, the working surface of the base is the side of the base close to the cover, and the working surface of the cover is the side of the cover close to the base.

[0009] Optionally, in any of the above technical solutions, a fixed magnetic chuck is provided on the base; an elastic magnetic chuck is provided on the cover to abut against the fixed magnetic chuck; the size of the elastic magnetic chuck is configured to be changeable along the first direction to adapt to different distances between the working surface of the cover and the working surface of the base; wherein the fastening direction of the cover and the base is parallel to the first direction.

[0010] In any of the above technical solutions, optionally, the cover includes a cover body and cover side beams, at least one pair of cover side beams are fixedly connected to the corresponding two sides of the cover body; each cover side beam is connected to a plurality of elastic magnetic elements;

[0011] The buffer pad is disposed on the main body of the cover.

[0012] In any of the above technical solutions, optionally, the elastic magnetic suction member includes an abutting part, a connecting part, and a limiting part; along the first direction, the abutting part and the limiting part are connected to the two opposite sides of the connecting part, and the limiting part is located on the side of the cover away from the base;

[0013] The abutting portion, the connecting portion, and the limiting portion form a groove for accommodating a portion of the cover side beam; and along the first direction, the size of the groove is larger than the size of the cover side beam;

[0014] The elastic magnetic attractor further includes an elastic element, which is disposed between the limiting part and the cover side beam; the elastic element has an elastic deformation that causes the limiting part to move away from the cover side beam, and the abutting part moves synchronously with the limiting part;

[0015] The magnetic attraction between the abutting part and the fixed magnetic member is greater than the elastic force of the elastic member.

[0016] In any of the above technical solutions, optionally, the base includes a base body and a base bottom plate; the vacuum chamber is disposed on the base body and has a chamber opening on the side of the base body opposite to the cover; the base bottom plate is connected to the base body and covers the chamber opening.

[0017] The vacuum suction cup is connected to the working surface of the base body, and the vacuum connector is connected to the side surface of the base body; wherein the working surface and the side surface of the base body are adjacent.

[0018] Optionally, in any of the above technical solutions, the base further includes a spacer; the spacer is connected to the working surface of the base body;

[0019] At least a portion of the vacuum suction cup extends out of the septum.

[0020] Optionally, in any of the above technical solutions, the number of septa is the same as the number of vacuum chambers;

[0021] The septum has a pressure relief groove on the side near the base body, and at least one end of the pressure relief groove extends to the end of the septum; the septum has a through hole for the vacuum suction cup to pass through; the pressure relief groove communicates with the through hole of the septum.

[0022] In any of the above technical solutions, optionally, the vacuum suction cup includes a disk body and a disk cover; the disk body is connected to the base;

[0023] The disc body includes a corrugated structure or an accordion structure, and the disc cover is provided with multiple disc cover through holes; the disc cover through holes communicate with the chamber of the disc body.

[0024] In any of the above technical solutions, optionally, the number of vacuum suction cups connected to a single vacuum cavity is one or more;

[0025] The number of vacuum connectors connected to a single vacuum chamber is one or more.

[0026] Optionally, in any of the above technical solutions, the vacuum connector includes a one-way valve structure.

[0027] The main beneficial effects of this utility model are as follows:

[0028] The vacuum carrier provided by this utility model includes a base and a cover. At least two vacuum chambers are provided within the base, replacing the traditional integral vacuum chamber with multiple, relatively independent vacuum chambers. This effectively improves the vacuum holding capacity of the vacuum carrier, offering greater product compatibility and flexibility, effectively extending the vacuum holding time, and reducing the probability of vacuum pressure leakage to a certain extent. Specifically, vacuuming is achieved through vacuum connectors connecting each vacuum chamber, and the product is clamped by vacuum suction cups and corresponding buffer pads on the cover, thus enabling product loading.

[0029] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0030] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0031] Figure 1 A first-view structural schematic diagram of the vacuum vehicle provided in an embodiment of this utility model;

[0032] Figure 2 A second-view structural schematic diagram of the vacuum vehicle provided in an embodiment of this utility model;

[0033] Figure 3A third-view structural schematic diagram of the vacuum vehicle provided in an embodiment of this utility model;

[0034] Figure 4 for Figure 3 A top view of the vacuum vehicle shown;

[0035] Figure 5 for Figure 3 A sectional view of the vacuum vehicle shown along line AA;

[0036] Figure 6 for Figure 3 An exploded view of the vacuum vehicle shown.

[0037] Figure 7 A schematic diagram of the structure of the cover provided in an embodiment of this utility model;

[0038] Figure 8 for Figure 7 The rear view of the cover shown;

[0039] Figure 9 for Figure 7 The BB-direction sectional view of the cover shown;

[0040] Figure 10 for Figure 7 The enlarged section view of the cover along the CC direction is shown.

[0041] Figure 11 An exploded view of the cover provided in an embodiment of this utility model;

[0042] Figure 12 An exploded view of the base provided in an embodiment of this utility model;

[0043] Figure 13 This is a schematic diagram of the structure of the base body provided in an embodiment of the present utility model;

[0044] Figure 14 This is a schematic diagram of the structure of the spacer provided in an embodiment of the present utility model;

[0045] Figure 15 This is a schematic diagram of the septum structure from another perspective provided in an embodiment of the present utility model;

[0046] Figure 16 This is a schematic diagram of the structure of the vacuum suction cup provided in an embodiment of the present utility model;

[0047] Figure 17 This is a schematic diagram of the structure of the elastic magnetic suction component provided in an embodiment of the present utility model.

[0048] Icons: 100-Base; 110-Vacuum Chamber; 120-Vacuum Suction Cup; 121-Disc Body; 122-Disc Cover; 123-Disc Cover Through Hole; 130-Vacuum Connector; 140-Fixing Magnetic Component; 150-Base Body; 160-Base Base Plate; 170-September; 171-Pressure Relief Groove; 172-September Through Hole; 200-Cover Body; 210-Cover Body Body; 220-Cover Body Side Beam; 230-Elastic Magnetic Component; 231-Abutting Part; 232-Connecting Part; 233-Limiting Part; 234-Elastic Component; 235-Groove; 240-Buffer Pad; 300-Product. Detailed Implementation

[0049] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can typically be arranged and designed in various different configurations.

[0050] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0051] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0052] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0053] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0054] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0055] The following detailed description, in conjunction with the accompanying drawings, outlines some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0056] Example

[0057] This embodiment provides a vacuum carrier that can be used to mount products such as battery chips, for example, for positioning and handling of battery packs on various automated production lines.

[0058] See Figures 1-17 As shown, the vacuum carrier includes a base 100 and a cover 200.

[0059] The base 100 has at least two vacuum chambers 110, each connected to a vacuum suction cup 120 and a vacuum connector 130. The vacuum suction cup 120 is connected to the working surface of the base 100, and the vacuum connector 130 is connected to the base 100. The working surface of the base 100 is the side of the base 100 closest to the cover 200. Optionally, the number of vacuum chambers 110 may be, for example, two, three, or other numbers. Figures 1-13 The number of vacuum chambers 110 shown is two. Optionally, the number of vacuum suction cups 120 connected to a single vacuum chamber 110 can be one or more; for example, the number of vacuum suction cups 120 connected to a single vacuum chamber 110 can be two, four, or other numbers. Optionally, the number of vacuum connectors 130 connected to a single vacuum chamber 110 can be one or more; for example, the number of vacuum connectors 130 connected to a single vacuum chamber 110 can be one, to facilitate connection to vacuum equipment.

[0060] The working surface of the cover 200 is connected to several buffer pads 240; the working surface of the cover 200 is the side of the cover 200 closest to the base 100. At least some of the buffer pads 240 correspond to the vacuum suction cups 120, and the product 300 is sandwiched between the buffer pads 240 and the vacuum suction cups 120, that is, the product is sandwiched between the working surface of the base 100 and the working surface of the cover 200; the vacuum suction cups 120 adsorb the product to fix it on the working surface of the base 100. The buffer pads 240 protect the product and avoid or reduce any potential damage to the product from the cover 200. The vacuum chamber 110, vacuum suction cups 120, and vacuum connector 130 ensure that the vacuum chamber 110 is kept in a continuous vacuum state after the product is placed in the vacuum carrier and then extracted. In this embodiment, the product 300 is, for example, a battery chip or other product.

[0061] Optionally, the vacuum connector 130 includes a one-way valve structure; the one-way valve structure ensures that the vacuum chamber 110 is in a vacuum-maintaining state. In this embodiment, the vacuum connector 130 is connected to the corresponding vacuum chamber 110, and the one-way valve structure of the vacuum connector 130 is used to prevent gas from flowing from the vacuum connector 130 to the vacuum chamber 110, so as to ensure the vacuum-maintaining capability of the vacuum chamber 110.

[0062] Optionally, the cushioning pad 240 is made of foamed silicone or rubber. Foamed silicone and rubber have good elastic properties, which can effectively protect the product and avoid or reduce potential damage to the product from the cover 200. In this embodiment, the cushioning pad 240 may also be made of other cushioning materials.

[0063] In this embodiment, the vacuum carrier includes a base 100 and a cover 200. At least two vacuum chambers 110 are provided within the base 100, replacing the traditional integral vacuum chamber with multiple, relatively independent, separate vacuum chambers. This effectively improves the vacuum holding capacity of the vacuum carrier, resulting in higher product compatibility and flexibility, effectively extending the vacuum holding time, and reducing the probability of vacuum pressure leakage to a certain extent. Specifically, vacuuming is achieved through vacuum connectors 130 connecting each vacuum chamber 110, and product loading is achieved by clamping the product using vacuum suction cups 120 and corresponding buffer pads 240 on the cover 200.

[0064] The vacuum carrier described in this embodiment is less affected by materials and equipment compared to mechanical carriers, and can adapt to more products of different sizes. For example, it can realize the positioning, transportation and processing of lithium batteries of different sizes for multiple products. By replacing the traditional integral vacuum cavity with multiple split and relatively independent vacuum cavities, each vacuum cavity is independent of each other and has good sealing performance, and can be compatible with different product types.

[0065] See Figures 1-6 , Figure 12As shown, in an optional embodiment, a fixing magnetic member 140 is provided on the base 100; an elastic magnetic member 230 is provided on the cover 200 to abut against the fixing magnetic member 140; the size of the elastic magnetic member 230 is configured to be changeable along the first direction to adapt to different distances between the working surface of the cover 200 and the working surface of the base 100; wherein, the fastening direction of the cover 200 and the base 100 is parallel to the first direction. The base 100 and the cover 200 are connected by magnetic attraction through the fixing magnetic member 140 and the elastic magnetic member 230. The size of the elastic magnetic clasp 230 can be changed to accommodate different distances between the working surfaces of the cover 200 and the base 100. When the cover 200 closes the base 100, the elastic magnetic clasp 230 can adapt to different product thicknesses, preventing the cover 200 from magnetically detaching from the base 100 and effectively ensuring the stability and strength of the connection between the base 100 and the cover 200.

[0066] The vacuum carrier described in this embodiment uses the vacuum negative pressure provided by the vacuum chamber 110 and the elastic magnetic suction component 230 to adapt to the cover 200 to be compatible with batteries of different product thicknesses, effectively ensuring the stability and reliability of battery positioning.

[0067] See Figures 7-11 As shown, in an optional embodiment, the cover 200 includes a cover body 210 and cover side beams 220, with at least one pair of cover side beams 220 fixedly connected to corresponding sides of the cover body 210; each cover side beam 220 is connected to a plurality of elastic magnetic components 230. A buffer pad 240 is disposed on the cover body 210. By dividing the cover 200 into a cover body 210 and cover side beams 220, the production and processing of the cover 200 are facilitated, and the installation of the elastic magnetic components 230 is also facilitated.

[0068] In this embodiment, the elastic magnetic chuck 230 can be a telescopic spring magnetic chuck, a magnetic chuck inlaid with highly elastic EVA (ethylene-vinyl acetate copolymer) material, or other elastic structures. See also Figure 9 , Figure 10 and Figure 17As shown, optionally, along the first direction, the elastic magnetic member 230 includes an abutment portion 231, a connecting portion 232 and a limiting portion 233 connected in sequence. That is, along the first direction, the abutment portion 231 and the limiting portion 233 are connected on opposite sides of the connecting portion 232; the limiting portion 233 is located on the side of the cover 200 away from the base 100. The abutment portion 231, the connecting portion 232, and the limiting portion 233 form a groove 235 for accommodating the cover side beam 220; and along the first direction, the size of the groove 235 is larger than the size of the cover side beam 220; the elastic magnetic attractor 230 also includes an elastic element 234, which is disposed between the limiting portion 233 and the cover side beam 220; the elastic element 234 has an elastic deformation that causes the limiting portion 233 to move away from the cover side beam 220, and the abutment portion 231 moves synchronously with the limiting portion 233, that is, when the elastic element 234 drives the limiting portion 233 to move away from the cover side beam 220, the abutment portion 231 moves synchronously with the limiting portion 233. The magnetic attraction force between the abutment portion 231 and the fixed magnetic attractor 140 is greater than the elastic force of the elastic element 234. By making the size of the groove 235 larger than the size of the cover side beam 220, the limiting part 233 can reciprocate along the first direction on the cover side beam 220, that is, the abutting part 231 can reciprocate along the first direction on the cover side beam 220; by making the magnetic attraction force between the abutting part 231 and the fixed magnetic attraction member 140 greater than the elastic force of the elastic member 234, the magnetic attraction between the cover 200 and the base 100 is prevented from being magnetically separated, effectively ensuring the stability and connection strength of the connection between the base 100 and the cover 200.

[0069] Optionally, the elastic element 234 is a spring. Using a spring as the elastic element 234 is widely available, cost-effective, and provides good elastic deformation, which can drive the limiting part 233 away from the cover side beam 220. In this embodiment, the elastic element 234 can also be other elastic structures.

[0070] Optionally, the fixing magnetic component 140 is a permanent magnet. By using a permanent magnet for the fixing magnetic component 140, the fixing magnetic component 140 has good magnetism, thereby facilitating the magnetic connection of the base 100 to the cover 200 via the fixing magnetic component 140. In this embodiment, the fixing magnetic component 140 can also be made of other magnetic materials.

[0071] See Figure 12 and Figure 13 As shown, in an optional embodiment, the base 100 includes a base body 150 and a base plate 160; a vacuum chamber 110 is disposed on the base body 150 and has a chamber opening on the side of the base body 150 facing away from the cover 200; the base plate 160 is connected to the base body 150 and covers the chamber opening; by setting the base 100 as a base body 150 and a base plate 160, the production and processing of the base 100 are facilitated.

[0072] Optionally, the vacuum connector 130 is connected to the side of the base 100, wherein the side of the base 100 is adjacent to the working surface. For example, the vacuum connector 130 is connected to the side of the base body 150, and the vacuum suction cup 120 is connected to the working surface of the base body 150; wherein the working surface of the base body 150 is adjacent to the side. By connecting the vacuum connector 130 to the side of the base body 150, the vacuum connector 130 is prevented from interfering with the positioning and connection of the product 300 on the working surface of the base body 150.

[0073] Optionally, the base plate 160 is made of stainless steel with a hardened finish so that it can support the base body 150 and the cover 200 during handling, transportation, and positioning, thereby ensuring the stability and reliability of the vacuum carrier to a certain extent and improving its service life.

[0074] See Figure 12 , Figure 14 and Figure 15 As shown, in an optional embodiment, the base 100 further includes a spacer 170; the spacer 170 is connected to the working surface of the base body 150; at least a portion of the vacuum suction cup 120 extends out of the spacer 170. The spacer 170 effectively reduces potential damage to the product 300 caused by the base 100.

[0075] The vacuum carrier described in this embodiment effectively protects the product 300 through the buffer pad 240 connected to the working surface of the cover 200 and the spacer 170 connected to the working surface of the base body 150. This effectively avoids damage to the product during handling, transportation, positioning, etc., and can also adapt to the product thickness to a certain extent.

[0076] In an optional embodiment, the number of septa 170 is the same as the number of vacuum chambers 110; of course, in this embodiment, the number of septa 170 may be more or less than the number of vacuum chambers 110.

[0077] In an optional embodiment, the spacer 170 has a pressure relief groove 171 on the side near the base body 150, with at least one end of the pressure relief groove 171 extending to the end of the spacer 170; the spacer 170 has a spacer through hole 172 for the vacuum suction cup 120 to pass through; the pressure relief groove 171 communicates with the spacer through hole 172. Through the pressure relief groove 171, the pressure exerted by the product 300 on the spacer 170 when the product 300 is adsorbed by the vacuum suction cup 120 can be released through the pressure relief groove 171, effectively ensuring the stability of the product 300 fixed on the spacer 170, and thus ensuring the stability of the product 300 fixed on the base 100.

[0078] See Figure 16As shown, in an optional embodiment, the vacuum suction cup 120 includes a plate body 121 and a plate cover 122; the plate body 121 is connected to the base 100; the plate body 121 has a corrugated structure or an accordion structure, and the plate cover 122 is provided with multiple plate cover through holes 123; the plate cover through holes 123 communicate with the chamber of the plate body 121. The corrugated or accordion structure of the plate body 121 improves the adsorption capacity of the vacuum suction cup 120. The multiple plate cover through holes 123 on the plate cover 122, instead of a single through hole, reduce the suction marks and deformation generated when the vacuum suction cup 120 adsorbs the product 300, and also improve the adsorption capacity of the product 300. In this embodiment, the vacuum suction cup 120 can also adopt other vacuum structures.

[0079] To better understand the vacuum carrier described in this embodiment, the workflow is briefly described below:

[0080] After the vacuum carrier opens its cover 200 and the product is positioned 300, it is placed into the vacuum carrier.

[0081] Vacuum connector 130 is opened, vacuum chamber 110 is evacuated, and after the vacuum signal is completed, the robotic arm leaves.

[0082] Vacuum connector 130 is closed, and the robotic arm departs.

[0083] The robotic arm removes 200 pieces of the lid and closes it.

[0084] Once the vacuum carrier positioning is complete, the vacuum carrier can be transported or moved to the next process.

[0085] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A vacuum carrier, characterized by, The base (100) and the cover (200) are included. At least two vacuum cavities (110) are arranged in the base (100), each of the vacuum cavities (110) is communicated with a vacuum chuck (120) and a vacuum joint (130); the vacuum chuck (120) is connected to a working surface of the base (100), and the vacuum joint (130) is connected to the base (100); A plurality of buffer pads (240) are connected to a working surface of the cover (200); at least part of the buffer pads (240) correspond to the vacuum chucks (120); wherein the working surface of the base (100) is a surface of the base (100) close to the cover (200), and the working surface of the cover (200) is a surface of the cover (200) close to the base (100).

2. The vacuum carrier of claim 1, wherein, A fixed magnetic attraction member (140) is arranged on the base (100); an elastic magnetic attraction member (230) is arranged on the cover (200) and abuts against the fixed magnetic attraction member (140); in a first direction, the size of the elastic magnetic attraction member (230) is configured to be changeable to adapt to different distances between the working surface of the cover (200) and the working surface of the base (100); wherein the direction of buckling of the cover (200) and the base (100) is parallel to the first direction.

3. The vacuum carrier of claim 2, wherein, The cover (200) includes a cover main body (210) and a cover edge beam (220), and at least one pair of cover edge beams (220) are fixedly connected to the cover main body (210) on the corresponding two sides; a plurality of elastic magnetic attraction members (230) are connected to each cover edge beam (220); The buffer pads (240) are arranged on the cover main body (210).

4. The vacuum carrier of claim 3, wherein, The elastic magnetic attraction member (230) includes an abutting portion (231), a connecting portion (232) and a limiting portion (233); in the first direction, the abutting portion (231) and the limiting portion (233) are connected to the opposite sides of the connecting portion (232), and the limiting portion (233) is located on a surface of the cover (200) away from the base (100); The abutting portion (231), the connecting portion (232) and the limiting portion (233) form a groove (235) accommodating part of the cover edge beam (220); and in the first direction, the size of the groove (235) is greater than the size of the cover edge beam (220); The elastic magnetic attraction member (230) further includes an elastic member (234), which is arranged between the limiting portion (233) and the cover edge beam (220); the elastic member (234) has an elastic deformation that moves the limiting portion (233) away from the cover edge beam (220), and the abutting portion (231) moves synchronously with the limiting portion (233); The magnetic attraction force between the abutting portion (231) and the fixed magnetic attraction member (140) is greater than the elastic force of the elastic member (234).

5. The vacuum carrier of claim 1, wherein, The base (100) comprises a base body (150) and a base bottom plate (160); the vacuum cavity (110) is arranged on the base body (150) and is provided with a cavity opening on the side of the base body (150) away from the cover body (200), and the base bottom plate (160) is connected with the base body (150) and covers the cavity opening; The vacuum chuck (120) is connected to the working surface of the base body (150), and the vacuum connector (130) is connected to the side surface of the base body (150); wherein the working surface of the base body (150) is adjacent to the side surface.

6. The vacuum carrier of claim 5, wherein, The base (100) further comprises a spacer (170); the spacer (170) is connected to the working surface of the base body (150); At least a part of the vacuum chuck (120) extends out of the spacer (170).

7. The vacuum carrier of claim 6, wherein, The number of the spacer (170) is consistent with the number of the vacuum cavity (110); The spacer (170) is provided with a pressure relief groove (171) on the side close to the base body (150), at least one end of the pressure relief groove (171) extends to the end of the spacer (170); the spacer (170) is provided with a spacer through hole (172) through which the vacuum chuck (120) passes; the pressure relief groove (171) is in communication with the spacer through hole (172).

8. The vacuum carrier of claim 1, wherein, The vacuum chuck (120) comprises a chuck body (121) and a chuck cover (122); the chuck body (121) is connected with the base (100); The chuck body (121) comprises a corrugated structure or an organ structure, and the chuck cover (122) is provided with a plurality of chuck cover through holes (123); the chuck cover through holes (123) are in communication with the cavities of the chuck body (121).

9. The vacuum carrier of claim 1, wherein, The number of the vacuum chucks (120) connected with a single vacuum cavity (110) is one or more; The number of the vacuum connectors (130) connected with a single vacuum cavity (110) is one or more.

10. The vacuum carrier of claim 1, wherein, The vacuum connector (130) comprises a one-way valve structure.

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