HOT N2 system nitrogen heating body

By designing vertically arranged heating units in the nitrogen heating element of the HOT N2 system and installing temperature control thermocouples away from the pump equipment connection port, combined with high-temperature ball valves and check valves, the problem of easy leakage of temperature sensors was solved, achieving higher safety and heating efficiency.

CN223709912UActive Publication Date: 2025-12-23WUXI FUJIA SEMICONDUCTOR TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202520114990.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-01-17
Publication Date
2025-12-23
Estimated Expiration
2035-01-17

AI Technical Summary

Technical Problem

The temperature sensor of a common heating element is directly installed on the air intake module, which can easily lead to leakage of toxic gas inside the pipeline due to improper connection, posing a safety hazard.

Method used

Design a nitrogen heating element for a HOT N2 system. The heating unit is arranged vertically. The temperature control thermocouple is installed at the front end of the check valve away from the pump connection port. The system combines a high-temperature ball valve and a check valve for double protection to prevent gas backflow. The inlet and outlet sizes are increased to improve gas flow.

Benefits of technology

It effectively prevents gas backflow and leakage inside the pipeline, reduces the risk of gas leakage from the nitrogen heating element, and improves heating efficiency and safety.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the technical field of nitrogen heating, in particular to an HOT N2 system nitrogen heating body which comprises a vertically-arranged heating unit, a nitrogen channel is formed in the heating unit, a cold nitrogen inlet is formed in the outer side of the top of the heating unit, and a hot nitrogen pipeline is arranged at the bottom of the heating unit. A high-temperature ball valve and a one-way valve are arranged on the hot nitrogen pipeline, a temperature control thermocouple is arranged on one side of the hot nitrogen pipeline and located between the high-temperature ball valve and the heating unit, a turbojet accessory is arranged at the output end of the hot nitrogen pipeline, the one-way valve is located between the turbojet accessory and the high-temperature ball valve, and a temperature measuring unit is arranged on the outer side of the bottom of the heating unit. The one-way valve is used for preventing gas from flowing back to the heating unit. The temperature control thermocouple is installed at the front end of the one-way valve and close to the gas outlet in the bottom of the heating unit, the turbojet accessory and the temperature control thermocouple are separated through the one-way valve and the high-temperature ball valve, poison gas in a pipeline is not prone to backflow and leakage, and the gas leakage risk of the nitrogen heating body is reduced.
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Description

TECHNICAL FIELD

[0001] The application relates to the technical field of nitrogen heating, in particular to a HOT N2 system nitrogen heating body. BACKGROUND

[0002] The HOT N2 system is mainly used for generating powder and improving the problem of hot nitrogen exhaust pipe blockage, and is suitable for the fields of environmental protection, chemical industry, biological industry and agriculture, and the like. The HOT N2 system can maximize inhibit the generation of by-products by spraying heated nitrogen (N2) into the pipeline.

[0003] According to the search, the patent application No. 202223568052.8 discloses a pipeline anti-blocking system of a semiconductor waste gas treatment equipment, which comprises a nitrogen heater. The gas inlet of the nitrogen heater is connected with a nitrogen source, and the gas outlet is connected with an air inlet module. The two ends of the air inlet module are connected with the air inlet pipeline of a general waste gas treatment equipment. A temperature control port is arranged at the outlet position of the air inlet module, and a temperature sensor is arranged in the temperature control port. The air inlet module comprises a pipeline, a jacket and an air inlet pipe. The two ends of the pipeline are connected with the air inlet pipeline of the general waste gas treatment equipment. The jacket is arranged at the inlet position of the pipeline in a sealed manner. The outlet position of the pipeline is provided with a temperature control port. The air inlet of the air inlet pipe is connected with the nitrogen heater, and the air outlet is communicated with the jacket. A plurality of through holes are uniformly arranged on the outer wall of the pipeline connected with the jacket in a sealed manner.

[0004] According to the related technology in the above, the inventors believe that the following technical defects need to be improved:

[0005] The temperature sensor of the common heating body is generally directly installed on the air inlet module (i.e. at the side spraying position). This position is located on the connecting port of the pump equipment. If the gas leaks or the screw is loose during connection, the toxic gas in the pipeline is easy to leak, which is very dangerous. CONTENT OF THE UTILITY MODEL

[0006] The application provides a HOT N2 system nitrogen heating body to improve the following technical problems:

[0007] The temperature sensor of the common heating body is generally directly installed on the air inlet module (i.e. at the side spraying position). This position is located on the connecting port of the pump equipment. If the gas leaks or the screw is loose during connection, the toxic gas in the pipeline is easy to leak, which is very dangerous.

[0008] The application provides a HOT N2 system nitrogen heating body, which adopts the following technical scheme:

[0009] The application discloses a nitrogen heating body of a HOT N2 system, which comprises a vertically arranged heating unit, a nitrogen channel arranged in the heating unit, a cold nitrogen inlet arranged on the top outer side of the heating unit, a hot nitrogen pipeline arranged at the bottom of the heating unit, a high-temperature ball valve and a one-way valve arranged on the hot nitrogen pipeline, a temperature control thermocouple arranged on one side of the hot nitrogen pipeline and located between the high-temperature ball valve and the heating unit, a turbojet accessory arranged at the output end of the hot nitrogen pipeline, the one-way valve being located between the turbojet accessory and the high-temperature ball valve, and a temperature measuring unit arranged on the outer side of the bottom of the heating unit, wherein the one-way valve is used for preventing the backflow of gas to the heating unit.

[0010] In an implementation of the application, the hot nitrogen pipeline comprises a vertical pipe, a bend pipe and a horizontal pipe, the vertical pipe is arranged along the central axis of the heating unit and connected to the bottom of the heating unit, the bend pipe is connected between the bottom of the vertical pipe and the horizontal pipe, the turbojet accessory is arranged at the end of the horizontal pipe away from the horizontal pipe, the high-temperature ball valve is arranged on the vertical pipe, the temperature control thermocouple is arranged on the outer side of the vertical pipe, and the one-way valve is arranged on the horizontal pipe.

[0011] In an implementation of the application, the temperature measuring unit comprises a temperature measuring thermocouple and a plurality of thermal springs, the thermal springs are connected to the outer side of the bottom of the heating unit, and the thermal springs are arranged in the interior of a box body, the temperature measuring thermocouple is connected to the bottom of the box body and in thermal contact with the thermal springs in the interior of the box body.

[0012] In an implementation of the application, the heating unit comprises a heat preservation sleeve pipe and a heating rod, the heating rod is arranged in the interior of the heat preservation sleeve pipe and the central axes of the heating rod and the heat preservation sleeve pipe coincide, a wiring control end is arranged at the top of the heating rod and located outside the heat preservation sleeve pipe.

[0013] In an implementation of the application, a spiral fin is arranged on the heating rod and located in the interior of the heat preservation sleeve pipe, the outer diameter of the spiral fin is between 50 mm and 60 mm, and the length of the heating rod located in the interior of the heat preservation sleeve pipe is between 300 mm and 450 mm.

[0014] In an implementation of the application, the heating unit further comprises a flange sealing element arranged at the top of the heat preservation sleeve pipe.

[0015] In an implementation of the application, the turbojet accessory is vertically arranged, and the horizontal pipe is vertically connected to the bottom side of the turbojet accessory.

[0016] In an implementation of the application, the diameters of the gas inlet and the gas outlet of the turbojet accessory are between 30 mm and 45 mm.

[0017] In summary, the present application includes at least one of the following beneficial technical effects:

[0018] After the cold nitrogen gas enters the inside of the heating unit, it is heated and warmed. When the gas is discharged, the temperature of the hot nitrogen gas is detected by the temperature control thermocouple, and the temperature signal is fed back to the control box. After the system determines, the appropriate heating power is output, and the heated nitrogen gas passes through the high-temperature ball valve and the check valve, and finally enters the inside of the pipeline through the turbojet fitting. When the nitrogen heating body needs to be closed, the high-temperature ball valve can be closed first to prevent the gas in the pipeline from flowing back to the inside of the nitrogen heating body. Or when the nitrogen heating body suddenly appears abnormal or the gas source is interrupted, the check valve can also effectively prevent the gas in the pipeline from flowing back to the nitrogen heating body. This is a double protection.

[0019] The temperature control thermocouple is installed at the front end of the check valve and near the gas outlet position at the bottom of the heating unit. This position is away from the connection port of the pump equipment, that is, away from the turbojet fitting, and the turbojet fitting and the temperature control thermocouple are also separated by the check valve and the high-temperature ball valve. Even if the turbojet fitting leaks or the screw is loose when it is connected to the pipeline, it is not easy to cause the backflow and leakage of the toxic gas in the pipeline, reducing the risk of gas leakage of the nitrogen heating body. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiment description. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creating laborious work.

[0021] Figure 1 It is a structure schematic diagram of the nitrogen heating body of the HOT N2 system of the embodiment of the present application.

[0022] Explanation of reference signs:

[0023] 1, heating unit; 11, heat preservation sleeve pipe; 12, heating rod; 13, flange sealing element;

[0024] 2, cold nitrogen gas inlet;

[0025] 3, hot nitrogen gas pipeline; 31, vertical pipe; 32, elbow; 33, horizontal pipe;

[0026] 4, high-temperature ball valve;

[0027] 5, check valve;

[0028] 6, temperature control thermocouple;

[0029] 7, turbojet fitting;

[0030] 8, temperature measuring unit; 81, temperature measuring thermocouple; 82, thermal spring; 83, box body. DETAILED DESCRIPTION

[0031] In order to make the technical problems, technical solutions and beneficial effects of the present application clearer, the present application will be further described in detail below in conjunction with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and not intended to limit the present application.

[0032] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0033] It should be understood that the terms "length", "width", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0034] In addition, the terms "first", "second", "third", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise specifically limited.

[0035] The following will be described in detail in conjunction with the drawings Figure 1 The present application will be further described in detail.

[0036] The embodiments of the present application disclose a HOT N2 system nitrogen heating body. Referring to Figure 1 , the HOT N2 system nitrogen heating body comprises a heating unit 1 arranged vertically, a nitrogen passage is arranged inside the heating unit 1, a cold nitrogen inlet 2 is arranged on the top outer side of the heating unit 1, a hot nitrogen pipeline 3 is arranged at the bottom of the heating unit 1, a high-temperature ball valve 4 and a check valve 5 are arranged on the hot nitrogen pipeline 3, a temperature control thermocouple 6 is arranged on one side of the hot nitrogen pipeline 3, the temperature control thermocouple 6 is located between the high-temperature ball valve 4 and the heating unit 1, a turbojet fitting 7 is arranged at the output end of the hot nitrogen pipeline 3, the check valve 5 is located between the turbojet fitting 7 and the high-temperature ball valve 4, a temperature measuring unit 8 is arranged on the outer side of the bottom of the heating unit 1, the check valve 5 is used to prevent gas from flowing back to the heating unit 1, and the high-temperature ball valve 4 is specifically a graphite type ball valve.

[0037] In the embodiment, the hot nitrogen pipeline 3 comprises a vertical pipe 31, a bend pipe 32 and a horizontal pipe 33, the vertical pipe 31 is arranged along the central axis of the heating unit 1 and connected to the bottom of the heating unit 1, the bend pipe 32 is connected between the bottom of the vertical pipe 31 and the horizontal pipe 33, the turbojet accessory 7 is arranged at the end of the horizontal pipe 33 away from the horizontal pipe 33, the high-temperature ball valve 4 is arranged on the vertical pipe 31, the temperature control thermocouple 6 is arranged on the outside of the vertical pipe 31, and the one-way valve 5 is arranged on the horizontal pipe 33.

[0038] The temperature control thermocouple 6 is arranged at the lower end of the heating unit 1. In addition to safety, the gas flow rate at the lower end of the heating unit 1 is slow, the test temperature is more accurate and stable, and the temperature control is more accurate and stable.

[0039] In the embodiment, the temperature measuring unit 8 comprises a temperature measuring thermocouple 81 and a plurality of thermal bimorphs 82, the thermal bimorphs 82 are connected to the outside of the bottom of the heating unit 1, and the plurality of thermal bimorphs 82 are installed in the inside of a box body 83, the temperature measuring thermocouple 81 is connected to the bottom of the box body 83 and in thermal contact with the thermal bimorphs 82 in the inside.

[0040] When the nitrogen heating body is normally working, the temperature control thermocouple 6 controls the temperature, the temperature measuring unit 8 only plays a monitoring and protection role and does not participate in direct temperature control work. When the temperature control thermocouple 6 has an abnormal situation and the temperature is overcharged, the temperature measuring thermocouple 81 detects that the temperature exceeds the set threshold value, the system alarms and disconnects the system heating, and when the system has an abnormal situation and directly intervenes, the thermal bimorphs 82 reach the threshold value and physically cut off the heating output, forcibly stopping the continuous heating, avoiding the occurrence of dangerous or serious overcharging and other problems. The above-mentioned double thermocouple design has higher safety.

[0041] The heating unit 1 comprises a heat preservation outer sleeve pipe 11 and a heating rod 12, the heating rod 12 is installed in the inside of the heat preservation outer sleeve pipe 11 and the central axes of the two coincide, the top of the heating rod 12 is provided with a wiring control end, the wiring control end is located outside the heat preservation outer sleeve pipe 11, and the heating unit 1 further comprises a flange sealing piece 13 installed at the top of the heat preservation outer sleeve pipe 11. The heat preservation outer sleeve pipe 11 not only has a heat preservation effect, but also has a good protection effect on the heating rod 12 in the inside.

[0042] The heating rod 12 is provided with a spiral fin inside the heat preservation outer sleeve 11, the outer diameter of the spiral fin is between 50-60mm, and the length of the heating rod 12 inside the heat preservation outer sleeve 11 is between 300-450mm. Compared with the conventional design of the heating rod 12, the diameter of the above-mentioned heating rod 12 is increased, the length is lengthened, and the spiral fin is adopted, so that the heating rod 12 has a larger heat dissipation area when heating, the heat dissipation area of the nitrogen gas is larger, the path of the nitrogen gas in the heating body is longer, and the heating time of the nitrogen gas in the heating body is also longer, so that the heating efficiency of the nitrogen gas is greatly improved.

[0043] In the embodiment, the turbojet accessory 7 is vertically arranged, and the cross pipe 33 is connected to the bottom side of the turbojet accessory 7 vertically, and the diameter of the air inlet and the air outlet of the turbojet accessory 7 is between 30-45mm. The above-mentioned scheme improves the common small flow design, increases the size of the air inlet and the air outlet, ensures larger air flow, and the air outlet mode can be adjusted to side spraying or turbojet spraying according to the needs, which is suitable for different environments.

[0044] The beneficial technical effects of the HOT N2 system nitrogen heating body of the embodiment are as follows:

[0045] After the cold nitrogen gas enters the heating unit 1, it is heated and warmed, and when the gas is discharged, the temperature of the hot nitrogen gas is detected by the temperature control thermocouple 6, the temperature signal is fed back to the control box, and after the system determines, the appropriate heating power is output, and the heated nitrogen gas passes through the high-temperature ball valve 4 and the check valve 5, and finally enters the pipeline inside the turbojet flow accessory; when the nitrogen heating body needs to be closed, the high-temperature ball valve 4 can be closed first to prevent the pipeline gas from flowing back to the nitrogen heating body, or when the nitrogen heating body suddenly appears abnormal or the gas source is interrupted, the check valve 5 can also effectively prevent the pipeline gas from flowing back to the nitrogen heating body, which belongs to double protection;

[0046] The temperature control thermocouple 6 is installed at the front end of the check valve 5 and near the bottom outlet position of the heating unit 1, which is far away from the connection port of the pump equipment, that is, far away from the turbojet accessory 7, and the turbojet accessory 7 and the temperature control thermocouple 6 are also separated by the check valve 5 and the high-temperature ball valve 4, so that even if the turbojet accessory 7 leaks or the screw is loose when connected with the pipeline, it is not easy to cause the pipeline internal toxic gas to flow back and leak, thereby reducing the risk of nitrogen heating body leakage.

[0047] The above-mentioned is only the preferred embodiment of the present application, and does not limit the present application, any modification, equivalent replacement and improvement made within the spirit and principle of the application shall be included in the protection scope of the present application.

Claims

1. A nitrogen heating element for a HOT N2 system, characterized in that, The heating unit includes a vertically arranged heating unit (1), which has a nitrogen channel inside. A cold nitrogen inlet (2) is provided on the outer side of the top of the heating unit (1). A hot nitrogen pipe (3) is provided at the bottom of the heating unit (1). A high-temperature ball valve (4) and a one-way valve (5) are provided on the hot nitrogen pipe (3). A temperature control thermocouple (6) is provided on one side of the hot nitrogen pipe (3). The temperature control thermocouple (6) is located between the high-temperature ball valve (4) and the heating unit (1). A turbojet fitting (7) is provided at the output end of the hot nitrogen pipe (3). The one-way valve (5) is located between the turbojet fitting (7) and the high-temperature ball valve (4). A temperature measuring unit (8) is provided on the outer side of the bottom of the heating unit (1). The one-way valve (5) is used to prevent gas from flowing back into the heating unit (1).

2. The nitrogen heating element of the HOT N2 system according to claim 1, characterized in that, The hot nitrogen pipeline (3) includes a vertical pipe (31), a bend (32) and a horizontal pipe (33). The vertical pipe (31) is arranged along the central axis of the heating unit (1) and connected to the bottom of the heating unit (1). The bend (32) is connected between the bottom of the vertical pipe (31) and the horizontal pipe (33). The turbojet fitting (7) is located at the end of the horizontal pipe (33) away from the horizontal pipe (33). The high-temperature ball valve (4) is located on the vertical pipe (31). The temperature control thermocouple (6) is located on the outside of the vertical pipe (31). The one-way valve (5) is located on the horizontal pipe (33).

3. The nitrogen heating element of the HOT N2 system according to claim 1, characterized in that, The temperature measuring unit (8) includes a temperature measuring thermocouple (81) and multiple thermal springs (82). The thermal springs (82) are connected to the bottom outer side of the heating unit (1), and the multiple thermal springs (82) are installed inside a box (83). The temperature measuring thermocouple (81) is connected to the bottom of the box (83) and is in thermal contact with the thermal springs (82) inside.

4. The nitrogen heating element of the HOT N2 system according to claim 1, characterized in that, The heating unit (1) includes an insulating outer tube (11) and a heating rod (12). The heating rod (12) is installed inside the insulating outer tube (11) and the central axes of the two coincide. A wiring control terminal is provided on the top of the heating rod (12) and the wiring control terminal is located outside the insulating outer tube (11).

5. The nitrogen heating element of the HOT N2 system according to claim 4, characterized in that, The heating rod (12) is provided with spiral fins located inside the heat-insulating outer tube (11), and the outer diameter of the spiral fins is between 50-60 mm. The length of the heating rod (12) inside the heat-insulating outer tube (11) is between 300-450 mm.

6. The nitrogen heating element of the HOT N2 system according to claim 4, characterized in that, The heating unit (1) also includes a flange seal (13) installed on the top of the insulation jacket (11).

7. The nitrogen heating element of the HOT N2 system according to claim 2, characterized in that, The turbojet component (7) is arranged vertically, and the horizontal pipe (33) is vertically connected to the bottom side of the turbojet component (7).

8. The nitrogen heating element of the HOT N2 system according to claim 1, characterized in that, The diameter of the air inlet and outlet of the turbojet component (7) is between 30 and 45 mm.

Citation Information

Patent Citations

  • Anti-blocking system for pipeline of semiconductor waste gas treatment equipment

    CN219186370U