Cleanness testing device

Abstract

The utility model discloses a cleanliness testing device, which belongs to the technical field of cleanliness testing and comprises a precision control mechanism, a pressure-sensitive sensor and a control display system. The precise control mechanism comprises a micrometer head fixing seat, a micrometer adjusting micrometer head fixed at one end of the micrometer head fixing seat and a movable plate sliding on one side of the micrometer head fixing seat, and the working end of the micrometer adjusting micrometer head abuts against one end of the movable plate; the pressure-sensitive sensor and control display system comprises a sensor connector, and one end of the sensor connector is connected with a magnet extension rod in a vertically downward magnetic attraction manner. The pollution conditions of organic pollutants, surfactants and chemical reagents on the surface of a solid can be accurately tested, and meanwhile, by combining an artificial intelligence data model analysis technology, the detection accuracy is improved. And judgment of the surface cleanliness of the material is realized. The technology can be widely applied to precision part processing, food industry, various laboratories and family daily life, and is simple to operate, accurate in measured value and high in popularization value.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of cleanliness test, specifically is a kind of cleanliness test device. BACKGROUND

[0002] Solid material and experimental equipment surface cleanliness are the routine project of precision machining, semiconductor and laboratory routine cleaning detection, and the test content of cleanliness usually includes organic pollutants, surfactants, production reagent, solid particles, organic solidified film etc.Currently, the detection technology for organic pollutants such as oil stain is UV or infrared detection technology, and the solid particles adopt microscope method, and the water drop angle measurement method is used for organic solidified film;

[0003] However, for organic pollutants such as floating oil, or for surfactants, production process reagents such as polishing liquid, stripping liquid, lubricating oil, cutting fluid etc., the detection success rate of any of the above technologies is invalid.

[0004] The important application of cleanliness test in semiconductor industry and printing industry is the surface cleanliness test of sample after plasma cleaning or processing.The commonly used technology at present is daibai pen or water drop angle measuring instrument.The basic principle of test is that the surface free energy of solid material surface organic pollution and no organic pollution is different.The surface free energy of organic pollutants is low, so the daibai pen with relatively large daibai value (such as 50 dyne / cm or more) cannot spread on solid surface, and the water contact angle value at this time is relatively large.At present, the daibai value of 50 dyne / cm or more can also spread on clean surface, and the water contact angle value is also small.The two existing technologies ignore the condition that organic pollutants do not form solid film, and also ignore that the action mechanism of production process reagent and surfactant is different from solid film.

[0005] Therefore, the two technologies cannot test the organic pollutants, production reagent residues and surfactant residues on the surface of solid.

[0006] Based on this, the utility model discloses a kind of cleanliness test device to solve above-mentioned problem. SUMMARY

[0007] The utility model aims at providing a kind of cleanliness test device to solve above-mentioned technical problem.

[0008] To achieve the above object, the utility model provides the following technical scheme: a kind of cleanliness test device, comprising: precision control mechanism, pressure sensor and control display system.

[0009] The precision control mechanism comprises a differential head fixing base, a micron adjustment differential head fixed at one end of the differential head fixing base, and a movable plate sliding at one side of the differential head fixing base, and the working end of the micron adjustment differential head abuts against one end of the movable plate;

[0010] The pressure-sensitive sensor and control display system comprises a sensor connecting head, and a magnet extension rod is vertically and downwardly magnetically connected at one end of the sensor connecting head, and a probe fixing clamp is magnetically connected at the other end of the magnet extension rod, and a probe is clamped and fixed at one end of the probe fixing clamp;

[0011] The pressure-sensitive sensor and control display system is arranged on the outer wall of a fixed plate, and the fixed plate is fixed on the outer wall of a movable plate of a precision control mechanism.

[0012] Preferably, a support plate is fixed on the outer wall of the differential head fixing base in the precision control mechanism, a C-shaped bottom plate is fixed at the other end of the support plate, a guide rail fixing plate is fixed on the outer wall of the support plate, a first guide rail and a second guide rail are respectively fixed on the outer wall of the guide rail fixing plate, and the movable plate is fixed on the sliding end of the first guide rail and the second guide rail.

[0013] Preferably, a first tension spring fixing screw is threadedly connected on the outer wall of the guide rail fixing plate, a second tension spring fixing screw is threadedly connected on the outer wall of the movable plate, and a tension spring is arranged between the first tension spring fixing screw and the second tension spring fixing screw.

[0014] Preferably, an adjusting foot is threadedly connected on the outer wall of the C-shaped bottom plate, and a supporting foot is threadedly connected at one end of the adjusting foot.

[0015] Compared with the prior art, the pressure-sensitive sensor and control display system has the following beneficial effects:

[0016] The pressure-sensitive sensor and control display system is based on the molecular cohesion principle of test water, adopts a pressure-sensitive sensor, combines a high-precision micron adjustment mechanism and a bracket, and can accurately test the pollution of organic pollutants, surfactants and chemical reagents on the surface of a solid, and can realize the judgment of the cleanliness of the surface of a material by combining an artificial intelligence data model analysis technology. The technology can be widely applied to precision part machining, the food industry, various laboratories and daily life, is simple to operate, accurate in measurement, and high in popularization value. BRIEF DESCRIPTION OF DRAWINGS

[0017] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiment description. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without any creative effort on the basis of these drawings.

[0018] Figure 1The front view structural schematic diagram of the cleanness testing device of the embodiment;

[0019] Figure 2 The side view structural schematic diagram of the cleanness testing device of the embodiment not contacting water drops;

[0020] Figure 3 The side view structural schematic diagram of the cleanness testing device of the embodiment contacting water drops;

[0021] Figure 4 The schematic diagram of highlighting the precision control mechanism of the embodiment;

[0022] Figure 5 The side view schematic diagram of highlighting the precision control mechanism of the embodiment;

[0023] Figure 6 The schematic diagram of highlighting the precision control mechanism of the embodiment installing the movable plate.

[0024] In the drawings, each sign represents as follows:

[0025] 1, precision control mechanism; 2, fixed plate; 3, support plate; 4, pressure sensor and control display system; 5, adjusting foot; 6, C-shaped bottom plate; 7, support foot; 8, magnet extension rod; 9, probe fixing clamp; 10, probe; 11, micron adjusting differential head; 12, differential head fixing seat; 13, movable plate; 14, guide rail fixed plate; 15, first guide rail; 16, first tension spring fixing screw; 17, tension spring; 18, second tension spring fixing screw; 19, second guide rail. DETAILED DESCRIPTION

[0026] The technical scheme in the embodiments of the utility model will be described clearly and completely below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the person skilled in the art without creative labor belong to the protection scope of the utility model.

[0027] Please refer to Figures 1-6 The utility model provides a technical scheme: a cleanness testing device, which comprises: a precision control mechanism 1, a pressure sensor and a control display system 4.

[0028] The precision control mechanism 1 comprises a differential head fixing seat 12, a micron adjusting differential head 11 fixed to one end of the differential head fixing seat 12 and a movable plate 13 sliding on one side of the differential head fixing seat 12, and the working end of the micron adjusting differential head 11 abuts against one end of the movable plate 13.

[0029] The pressure sensitive sensor and control display system 4 comprises a sensor connecting head, and a magnet extension rod 8 is vertically downwardly and magnetically connected to one end of the sensor connecting head, and a probe fixing clamp 9 is magnetically connected to the other end of the magnet extension rod 8, and a probe 10 is clamped and fixed to one end of the probe fixing clamp 9;

[0030] The pressure sensitive sensor and control display system 4 is arranged on the outer wall of the fixed plate 2, and the fixed plate 2 is fixed to the outer wall of the movable plate 13 of the precision control mechanism 1.

[0031] The cleanliness testing device mainly controls the up-and-down movement of the probe 10 in the pressure sensitive sensor and control display system 4 through the rotation of the micron adjustment differential head 11 in the precision control mechanism 1, so that the probe 10 enters and exits the water drop 20 part on the surface of the tested sample 21, the pressure sensitive sensor and control display system 4 is a device integrating a pressure sensitive sensor, a control and a display system, and is used for auxiliary detection and control display, the sensor of the pressure sensitive sensor and control display system 4 provides a connecting head, and the material of the connecting head can be stainless steel or magnet.

[0032] Further preferably, a support plate 3 is fixed to the outer wall of the differential head fixing seat 12 in the precision control mechanism 1, the other end of the support plate 3 is fixed with a C-shaped bottom plate 6, the outer wall of the support plate 3 is fixed with a guide rail fixing plate 14, the outer wall of the guide rail fixing plate 14 is respectively fixed with a first guide rail 15 and a second guide rail 19, and the movable plate 13 is fixed to the sliding end of the first guide rail 15 and the second guide rail 19.

[0033] The rotation part of the micron adjustment differential head 11 is twisted, and the movable plate 13 can be moved relative to the guide rail fixing plate 14 through the operation end thereof.

[0034] Further preferably, the outer wall of the guide rail fixing plate 14 is threadedly connected with a first tension spring fixing screw 16, and the outer wall of the movable plate is threadedly connected with a second tension spring fixing screw 18, and a tension spring 17 is arranged between the first tension spring fixing screw and the second tension spring fixing screw 18.

[0035] The two ends of the tension spring 17 are fixed to the outer walls of the movable plate 13 and the guide rail fixing plate 14 through the first tension spring screw 16 and the second tension spring screw 18, and the movable plate 13 is assisted to move.

[0036] Further preferably, the outer wall of the C-shaped bottom plate 6 is threadedly connected with an adjusting foot 5, and one end of the adjusting foot 5 is threadedly connected with a supporting foot 7.

[0037] The adjusting foot 5 and the supporting foot 7 are both four, which support the C-shaped bottom plate 6, so that the C-shaped bottom plate 6 can be better placed on the surface of the tested sample, and the surface of the tested sample is also used for dropping water drops, and the water drops need to be directly opposite to the probe 10.

[0038] Specifically, in this embodiment, when the cleanliness of the sample under test is tested, the test method is as follows:

[0039] Step 1: test the cleanliness of water, put clean water in a sample dish, and place the sample dish under the probe 10.

[0040] Step 2: drop water droplets on the surface of the sample under test, and the diameter of the water droplets is greater than the probe 10.

[0041] Step 3: place the cleanliness testing device on the sample, place the probe 10 of the cleanliness testing device directly above the water droplets, adjust the micron adjustment differential head 11 of the precision control mechanism 1 until the probe 10 contacts the water droplets and the pressure sensor shows a change in value.

[0042] Step 4: read the value and analyze the surface cleanliness according to the results of the artificial intelligence big data model.

[0043] The control system of the pressure sensor analyzes the value of the water molecule cohesion force read, and according to the change of the molecule cohesion force caused by the pollution of the surfactant, organic matter or chemical reagent in the artificial intelligence big data model, a mathematical model is established. According to different pollution degrees, different colors are displayed, and special colors are used to warn serious pollution.

[0044] In the description of the present application, it should be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "the other end", "upper", "one side", "top", "inner", "front", "central", "both ends" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore it cannot be understood as a limitation of the present application.

[0045] In the present application, unless otherwise specified and limited, the terms "mounting", "setting", "connecting", "fixing", "threading" and the like should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise specified, the above-mentioned terms in the present application can be understood according to the specific meaning of the above-mentioned terms in the present application according to the specific situation.

[0046] Although the embodiments of the present application have been shown and described, it is to be understood that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present application, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A cleanliness testing device characterized by, Include: Precise control mechanism (1), pressure sensor and control display system (4); The precise control mechanism (1) comprises a differential head fixing seat (12), a micron adjusting differential head (11) fixed at one end of the differential head fixing seat (12), and a movable plate (13) sliding on one side of the differential head fixing seat (12), and the working end of the micron adjusting differential head (11) is abutted on one end of the movable plate (13); The pressure sensor and control display system (4) comprises a sensor connecting head, and one end of the sensor connecting head is vertically downwardly magnetically connected with a magnet extension rod (8), the other end of the magnet extension rod (8) is magnetically connected with a probe fixing clamp (9), and one end of the probe fixing clamp (9) is clamped and fixed with a probe (10); The pressure sensor and control display system (4) is arranged on the outer wall of the fixed plate (2), and the fixed plate (2) is fixed on the outer wall of the movable plate (13) of the precise control mechanism (1).

2. A cleanliness testing device according to claim 1, characterised in that: The differential head fixing seat (12) in the precise control mechanism (1) is fixed with a support plate (3) on the outer wall, the other end of the support plate (3) is fixed with a C-shaped bottom plate (6), the outer wall of the support plate (3) is fixed with a guide rail fixed plate (14), the outer wall of the guide rail fixed plate (14) is respectively fixed with a first guide rail (15) and a second guide rail (19), and the movable plate (13) is fixed on the sliding end of the first guide rail (15) and the second guide rail (19).

3. A cleanliness testing device according to claim 2, characterised in that: The outer wall of the guide rail fixed plate (14) is threadedly connected with a first tension spring fixing screw (16), the outer wall of the movable plate is threadedly connected with a second tension spring fixing screw (18), and a tension spring (17) is arranged between the first tension spring fixing screw and the second tension spring fixing screw (18).

4. A cleanliness testing device according to claim 2, wherein: The outer wall of the C-shaped bottom plate (6) is threadedly connected with an adjusting foot (5), and one end of the adjusting foot (5) is threadedly connected with a supporting foot (7).

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