Excimer laser light path adjusting structure capable of improving laser pointing stability
By setting a pull rod and locking nut structure on the laser cavity, the adjustment frame is ensured to be bidirectionally clamped in the appropriate position, which solves the problem of unstable laser pointing, realizes the stability of laser pointing, and improves the quality of industrial processing.
Patent Information
- Application Number
- CN202423306880.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-30
- Publication Date
- 2025-12-26
- Estimated Expiration
- 2034-12-30
AI Technical Summary
The heat accumulation in the laser cavity of existing excimer lasers leads to unstable laser pointing, which affects the quality of industrial precision machining.
A first pull rod, a second pull rod, and a third pull rod are installed on the laser cavity. The adjustment frame is sleeved on these pull rods, and the locking nut and compression spring work together to ensure that the adjustment frame is bidirectionally clamped in the appropriate position to resist the influence of air pressure and maintain the stability of the laser pointing.
This improves the stability of laser pointing, ensures the quality stability of industrial processing, and avoids changes in laser pointing caused by heat accumulation.
Smart Images
Figure CN223729205U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a kind of can improve the stability of laser pointing excimer laser optical path adjusting structure.
BACKGROUND
[0002] Excimer laser is a kind of gas laser device with excimer as working substance, 2bar to 5bar working gas is filled in laser cavity, and excitation is realized by discharge electrode discharge to emit excimer laser. Current excimer laser is widely used in fine and precision machining in industrial production, such as fiber grating writing, for such processing, the pointing stability of excimer laser emission laser is very important, unstable laser pointing may lead to unstable or failure of fiber grating writing. And the current excimer laser works, discharge electrode discharge and circulating fan rotation will constantly produce heat, part of the heat is taken away through heat dissipation structure, but still part of the heat accumulates in laser cavity, this part of heat causes the temperature of working gas in laser cavity to rise, temperature rise makes working pressure rise, leading to the position of laser emission port on laser cavity adjustment frame is affected by air pressure, optical lens installed on adjustment frame will appear subtle deviation, thereby leading to the change of laser pointing, finally leading to unstable or defective product of processing quality. Therefore, the current excimer laser still has room for improvement in fine and precision machining.
[0003] Therefore, the utility model is just based on the above insufficiency and generates.
UTILITY MODEL CONTENTS
[0004] The utility model aims at overcoming the deficiency of prior art, providing a kind of can improve the stability of laser pointing excimer laser optical path adjusting structure, to ensure the stability of fine and precision machining.
[0005] The utility model is realized by the following technical solutions:
[0006] The application discloses a kind of can improve the quasi-molecule laser optical path adjusting structure of laser pointing stability, including laser cavity, discharge electrode and circulating fan are arranged in the laser cavity, the laser cavity is opened with laser emission port, the laser emission port position is provided with lens assembly, it is characterized in that: the lens assembly includes the adjusting frame connected with laser cavity, the adjusting frame has laser emission hole, optical lens is arranged on the adjusting frame and is located the position of laser emission hole, first pull rod, second pull rod and third pull rod are arranged on the laser cavity and are spaced apart, first connecting hole, second connecting hole and third connecting hole are arranged on the adjusting frame and are sleeved to first pull rod, second pull rod and third pull rod, the first pull rod is provided with abutting portion on one side of adjusting frame, the other side of adjusting frame is provided with the first lock nut connected with first pull rod, the first lock nut is arranged on the second pull rod and is located between adjusting frame and laser cavity and can be moved relative thereto, the second lock nut is further arranged on the second pull rod and is screwed and can be clamped and locked adjusting frame with first lock nut, the second lock nut is arranged on the third pull rod and is located between adjusting frame and laser cavity and can be moved relative thereto, the third lock nut is further arranged on the third pull rod and is screwed and can be clamped and locked adjusting frame with second lock nut, pressure spring is arranged between the adjusting frame and the laser cavity and can push the adjusting frame outward.
[0007] The adjusting frame and the laser cavity are further provided with a bellows, the bellows includes a left connecting seat and a right connecting seat, a tube body is arranged between the left connecting seat and the right connecting seat, the left connecting seat is abutted and connected to the laser cavity, and the right connecting seat is abutted and connected to the adjusting frame.
[0008] A first sealing ring is arranged between the left connecting seat and the laser cavity, and a second sealing ring is arranged between the right connecting seat and the adjusting frame.
[0009] A step is arranged on the adjusting frame, one side of the optical lens is abutted on the step, and a lens pressing plate is arranged on the other side of the optical lens and used for pressing the optical lens on the adjusting frame.
[0010] A third sealing ring is arranged between the optical lens and the surface of the step.
[0011] A buffer gasket is arranged between the optical lens and the lens pressing plate.
[0012] The optical lens is a resonant lens.
[0013] The contact surfaces of the first lock nut, the second lock nut and the third lock nut and the adjusting frame are spherical or conical, and the contact surfaces of the abutting portion and the adjusting frame are spherical or conical.
[0014] The first anti-loosening nut contacts the adjusting frame in a spherical-to-plane contact manner; the second anti-loosening nut contacts the adjusting frame in a spherical-to-plane contact manner.
[0015] Compared with the prior art, the present invention has the following advantages: The laser cavity of the present invention is provided with a first pull rod, a second pull rod, and a third pull rod. An adjustment frame is sleeved on the first, second, and third pull rods. The abutting part of the first pull rod directly abuts against the adjustment frame. A compression spring is disposed between the adjustment frame and the laser cavity. The adjustment frame and the first pull rod can be locked together by a first locking nut cooperating with the first pull rod. Then, the tilt position of the adjustment frame can be adjusted by a second locking nut cooperating with the second pull rod and a third locking nut cooperating with the third pull rod. During the adjustment process, the adjustment frame applies pressure to the compression spring, and the compression spring applies outward pressure to the adjustment frame. The reverse thrust from the side causes the second and third locking nuts to have a corresponding reaction force on the other side of the adjustment frame when pushing it. This allows the adjustment frame to be smoothly adjusted to the appropriate position. When the adjustment frame is adjusted to the appropriate position, the first and second anti-loosening nuts are finally tightened, causing the first and second anti-loosening nuts to clamp the adjustment frame. At the same time, the second and third anti-loosening nuts also clamp the adjustment frame. The adjustment frame is clamped in both directions, ensuring that the position of the adjustment frame is not affected by the gas pressure inside the laser cavity. This improves the laser pointing stability of traditional excimer lasers and ensures the stability of industrial processing quality. [Attached Image Description]
[0016] Figure 1 This is a sectional view of the present invention;
[0017] Figure 2 yes Figure 1 A magnified view at point C;
[0018] Figure 3 This is a side view of the present invention;
[0019] Figure 4 It is along Figure 3 Sectional view of line AA in the middle;
[0020] Figure 5 It is along Figure 3 A cross-sectional view along the BB line.
Detailed Implementation Methods
[0021] The present invention will be further described below with reference to the accompanying drawings:
[0022] like Figures 1 to 5As shown in the figure, a kind of can improve the stability of laser pointing excimer laser optical path adjusting structure, including laser cavity 1, discharge electrode 2 and circulating fan (not shown in the figure) are arranged in the laser cavity 1, the laser cavity 1 is opened with laser exit 3, the laser exit 3 position is provided with lens assembly 4.Laser cavity 1 is filled with working gas after discharge electrode discharge excitation to working gas, when the unstable molecular bond of excited state excimer is broken and dissociates into ground state atom, the energy of excited state is released in the form of laser radiation, so that the laser is emitted from laser exit 3 and passes through lens assembly 4 and is emitted again, the emitted excimer laser can be used for industrial production after subsequent shaping and focusing, such as fiber grating writing etc.
[0023] As shown in the figure, Figures 1 to 5 The lens assembly 4 includes adjusting frame 41 connected with laser cavity 1, adjusting frame 41 has laser exit hole 42, adjusting frame 41 is provided with optical lens 43 on the position of laser exit hole 42, and in the embodiment, optical lens 43 is resonant lens.In the embodiment, adjusting frame 41 is provided with step 44, one side of optical lens 43 is abutted on step 44, the other side of optical lens 43 is provided with lens pressing plate 45 for pressing optical lens 43 on adjusting frame 41, and lens pressing plate 45 can be fixedly connected to adjusting frame 41 by bolt.The third sealing ring 46 is arranged between the optical lens 43 and the surface of the step 44, and the buffer gasket 47 is arranged between the optical lens 43 and the lens pressing plate 45, which can protect the optical lens 43.
[0024] As shown in the figure, Figures 1 to 5As shown, the laser cavity 1 is provided with first, second and third pull rods 51, 52 and 53 which are spaced apart, the adjusting frame 41 is provided with first, second and third connecting holes 61, 62 and 63 which are sleeved onto the first, second and third pull rods 51, 52 and 53, the first pull rod 51 is provided with an abutting portion 511 which abuts against one side of the adjusting frame 41, the other side of the adjusting frame 41 is provided with a first locking nut 71 which is connected with the first pull rod 51, the second pull rod 52 is provided with a first check nut 81 which is movable relative to the second pull rod 52 and is located between the adjusting frame 41 and the laser cavity 1, the second pull rod 52 is further provided with a second locking nut 72 which is threadedly connected with the second pull rod 52 and can clamp and lock the adjusting frame 41 with the first check nut 81, the third pull rod 53 is provided with a second check nut 82 which is movable relative to the third pull rod 53 and is located between the adjusting frame 41 and the laser cavity 1, the third pull rod 53 is further provided with a third locking nut 73 which is threadedly connected with the third pull rod 53 and can clamp and lock the adjusting frame 41 with the second check nut 82, and the adjusting frame 41 and the laser cavity 1 are provided with a compression spring 9 which can push the adjusting frame 41 outward. When the adjusting frame 41 is installed, the first, second and third connecting holes 61, 62 and 63 are sleeved onto the first, second and third pull rods 51, 52 and 53 respectively, the compression spring 9 abuts between the adjusting frame 41 and the laser cavity 1, the abutting portion 511 on the first pull rod 51 directly abuts against the adjusting frame 41 and locks the first locking nut 71, the position where the abutting portion 511 abuts against the adjusting frame 41 is the fulcrum when the adjusting frame 41 is adjusted to be inclined, the second and third locking nuts 72 and 73 are rotated to push the adjusting frame 41 to move, the adjusting frame 41 also moves at the position where it abuts against the abutting portion 511, at this time the compression spring 9 is compressed, when the adjusting frame 41 is pushed by the second and third locking nuts 72 and 73, the compression spring 9 exerts a pushing force in the opposite direction on the adjusting frame 41, so that the adjusting frame 41 can be smoothly moved to the required appropriate position, when the adjusting frame 41 is in the appropriate position, the first and second check nuts 81 and 82 are reversely screwed, the first check nut 81 and the second locking nut 72 clamp the adjusting frame 41, at the same time the second check nut 82 and the third locking nut 73 also clamp the adjusting frame 41, in combination with the fact that the adjusting frame 41 is also clamped by the abutting portion 511 and the first locking nut 71, the adjusting frame 41 is clamped in both directions and thus the position is fixed, so that the position of the adjusting frame 41 is not affected by the air pressure in the laser cavity 1, thereby ensuring that the resonant mirror does not appear to be slightly deviated, and further improving the laser pointing stability of the traditional excimer laser and ensuring the quality stability of industrial processing.
[0025] As Figure 1 and Figure 2As shown in the drawings, the adjusting frame 41 and the laser cavity 1 are further provided with a bellows 10, the bellows 10 comprises a left connecting seat 101 and a right connecting seat 102, the left connecting seat 101 and the right connecting seat 102 are provided with a pipe body 103, the left connecting seat 101 is connected to the laser cavity 1, and the right connecting seat 102 is connected to the adjusting frame 41. The bellows 10 has a certain flexibility, and the bellows 10 is arranged to facilitate the adjustment of the structural parts on the laser light path.
[0026] As shown in the drawings, Figure 1 and Figure 2 the left connecting seat 101 and the laser cavity 1 are provided with a first sealing ring 104, and the right connecting seat 102 and the adjusting frame 41 are provided with a second sealing ring 105, so as to ensure good airtightness.
[0027] As shown in the drawings, Figure 4 and Figure 5 the contact surface between the first locking nut 71, the second locking nut 72 and the third locking nut 73 and the adjusting frame 41 is a spherical surface or a conical surface, and the contact surface between the abutting portion 511 and the adjusting frame 41 is a spherical surface or a conical surface, so that the adjusting frame 41 is convenient to adjust the position when being adjusted.
[0028] As shown in the drawings, Figure 4 and Figure 5 the contact between the first locking nut 81 and the adjusting frame 41 is a spherical surface and a plane, and the contact between the second locking nut 82 and the adjusting frame 41 is a spherical surface and a plane, so as to ensure that the contact surface between the first locking nut 81 and the second locking nut 82 and the adjusting frame 41 is as small as possible, thereby ensuring that the first locking nut 81 and the second locking nut 82 do not affect the change of the light path position after being adjusted. Of course, the contact between the first locking nut 81 and the second locking nut 82 and the adjusting frame 41 can also adopt a small plane and a large plane.
[0029] The above embodiment is described in detail in combination with the drawings, but the utility model is not limited to the above embodiment, and various changes can be made within the knowledge range possessed by ordinary skilled persons in the technical field without departing from the purpose of the utility model.
Claims
1. A kind of can improve the structure of excimer laser optical path adjustment, and laser pointing stability includes laser cavity (1), the discharge electrode (2) and circulating fan are arranged in the laser cavity (1), the laser cavity (1) is set up with laser exit (3), the lens assembly (4) is arranged in the position of the laser exit (3), it is characterized by: The lens assembly (4) comprises an adjusting frame (41) connected with the laser cavity (1), the adjusting frame (41) is provided with a laser emission hole (42), an optical lens (43) is arranged on the adjusting frame (41) and located at the position of the laser emission hole (42), the laser cavity (1) is provided with a first pull rod (51), a second pull rod (52) and a third pull rod (53) which are spaced from each other, the adjusting frame (41) is provided with a first connecting hole (61), a second connecting hole (62) and a third connecting hole (63) which are sleeved on the first pull rod (51), the second pull rod (52) and the third pull rod (53), the first pull rod (51) is provided with an abutting portion (511) abutting against one side of the adjusting frame (41), the other side of the adjusting frame (41) is provided with a first locking nut (71) connected with the first pull rod (51), the second pull rod (52) is provided with a first anti-loosening nut (81) which can move relative to the adjusting frame (41) and the laser cavity (1), the second pull rod (52) is further provided with a second locking nut (72) which is threadedly connected with the second pull rod (52) and can clamp and lock the adjusting frame (41) with the first anti-loosening nut (81), the third pull rod (53) is provided with a second anti-loosening nut (82) which can move relative to the adjusting frame (41) and the laser cavity (1), the third pull rod (53) is further provided with a third locking nut (73) which is threadedly connected with the third pull rod (53) and can clamp and lock the adjusting frame (41) with the second anti-loosening nut (82), the adjusting frame (41) and the laser cavity (1) are provided with a compression spring (9) which can outwardly push the adjusting frame (41).
2. The excimer laser optical path adjusting structure capable of improving laser pointing stability according to claim 1, characterized in that: The adjusting frame (41) and the laser cavity (1) are further provided with a bellows (10), the bellows (10) comprises a left connecting seat (101) and a right connecting seat (102), the left connecting seat (101) and the right connecting seat (102) are provided with a pipe body (103) therebetween, the left connecting seat (101) is abuttingly connected on the laser cavity (1), and the right connecting seat (102) is abuttingly connected on the adjusting frame (41).
3. The structure for adjusting the path of excimer laser beam to improve the stability of laser pointing according to claim 2, characterized in that: The left connecting seat (101) and the laser cavity (1) are provided with a first sealing ring (104), and the right connecting seat (102) and the adjusting frame (41) are provided with a second sealing ring (105).
4. The excimer laser optical path adjusting structure capable of improving laser pointing stability according to claim 1, characterized in that: The adjusting frame (41) is provided with a step (44), one side of the optical lens (43) abuts on the step (44), and the other side of the optical lens (43) is provided with a lens pressing plate (45) for pressing the optical lens (43) on the adjusting frame (41).
5. The structure for adjusting the path of excimer laser beam to improve the stability of laser pointing according to claim 4, characterized in that: The optical lens (43) and the surface of the step (44) are provided with a third sealing ring (46).
6. The structure for adjusting the path of excimer laser beam to improve the stability of laser pointing according to claim 4, characterized in that: The optical lens (43) and the lens pressing plate (45) are provided with a buffer gasket (47).
7. The structure for adjusting the path of excimer laser beam to improve the stability of laser pointing according to claim 1, characterized in that: The optical lens (43) is a resonant lens.
8. The structure for adjusting the path of excimer laser beam to improve the stability of laser pointing according to claim 1, characterized in that: The contact surface between the first locking nut (71), the second locking nut (72), the third locking nut (73) and the adjusting frame (41) is spherical or conical contact, and the contact surface between the abutting part (511) and the adjusting frame (41) is spherical or conical contact.
9. The structure for adjusting the path of excimer laser beam to improve the stability of laser pointing according to claim 1, characterized in that: The contact between the first locking nut (81) and the adjusting frame (41) is spherical and planar contact, and the contact between the second locking nut (82) and the adjusting frame (41) is spherical and planar contact.