Diluent filtering equipment for manufacturing semiconductors

Abstract

The utility model relates to the technical field of semiconductor diluent processing, in particular to diluent filtering equipment for manufacturing semiconductors, which comprises a filter cartridge component, the filter cartridge component comprises a fixed pipe joint, a central pipe is arranged in an inner cavity of the filter cartridge component, the lower end of the central pipe is connected with a lower water distributor, and the upper end of the central pipe is connected with an upper water distributor. The upper end of the upper water distributor is connected with a multi-way valve body; the multi-way valve body is in threaded connection with the outer circular surface of the fixed pipe joint; two circular supporting rings are connected to the inner wall of the filter cartridge assembly at intervals, hollowed-out bearing ring mechanisms are connected to the circular supporting rings correspondingly, and each hollowed-out bearing ring mechanism comprises an inner circle discharging cavity, a hollowed-out bearing ring assembly and an outer circle discharging cavity which are sequentially arranged from inside to outside; the projection of the hollowed-out bearing ring assembly on the hollowed-out bearing ring mechanism on the upper portion is located in the inner circle discharging cavity in the hollowed-out bearing ring mechanism on the lower portion. The device is reasonable in structure, and the quality and the filtering efficiency of the semiconductor diluent are improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor diluent processing technology, and in particular to a diluent filtration device for manufacturing semiconductors. Background Technology

[0002] Semiconductor diluents are chemical reagents used to dilute semiconductor materials or related solutions. In semiconductor manufacturing, diluents are commonly used to remove unwanted substances, such as photoresist, from substrate edges or nozzles to ensure proper process operation. They are also used in RRC processes, TFT-LCD display cleaning, photoresist nozzle cleaning, wafer EBR (edge ​​bead removal agent), and coating machine cleaning. During processing, semiconductor diluents may contain impurities, including particulate matter, organic matter, and metal ions. These impurities reduce the purity of the semiconductor diluent, necessitating filtration to remove them. For metal ion removal, ion exchange resins are typically used. The ion exchange resin is spread evenly within a container, reaching two-thirds of the container's internal height. As the semiconductor diluent flows downwards, the resin, containing numerous exchangeable ionic groups, adsorbs and displaces metal ions, thus achieving filtration and removal.

[0003] Regarding the aforementioned technologies, the inventors discovered that, due to the certain height of the ion exchange resin inside the tank, the middle and lower layers of ion exchange resin are in close contact under their own gravity, preventing the semiconductor diluent from fully exchanging with the ion exchange resin. In other words, the ionic groups contained in the ion exchange resin cannot quickly and fully replace the metal ions in the semiconductor diluent, thus reducing the quality and filtration efficiency of the semiconductor diluent. Utility Model Content

[0004] The main technical problem solved by this invention is to provide a diluent filtration device for manufacturing semiconductors, which improves the quality and filtration efficiency of semiconductor diluents.

[0005] To solve the above-mentioned technical problems, the present invention provides a technical solution as follows: a diluent filtration device for manufacturing semiconductors, comprising: a filter cartridge assembly, the filter cartridge assembly including a fixed pipe joint, the inner cavity of the filter cartridge assembly having a central pipe, the lower end of the central pipe being connected to a lower water distributor, the upper end of the central pipe being connected to an upper water distributor, the upper end of the upper water distributor being connected to a multi-way valve body, and the multi-way valve body being threadedly connected to the outer surface of the fixed pipe joint;

[0006] The inner wall of the filter cartridge assembly is connected with two circular support rings at intervals. The circular support rings are respectively connected to a hollowed-out bearing ring mechanism located outside the central tube. The hollowed-out bearing ring mechanism includes an inner circular feeding cavity, a hollowed-out bearing ring assembly and an outer circular feeding cavity arranged sequentially from the inside to the outside.

[0007] The projection of the hollowed-out bearing ring assembly on the hollowed-out bearing ring mechanism described above is located within the inner circular feeding cavity on the hollowed-out bearing ring mechanism described below.

[0008] By adopting the above technical solution, during installation, the lower water distributor is sealed to the lower end of the central tube, which extends into the inner cavity of the filter cartridge assembly. The upper end of the central tube is sealed with a sealing material such as cloth. Quartz sand is then placed around the central tube, spreading it evenly at the bottom of the filter cartridge assembly. Next, ion exchange resin is placed around the central tube, ensuring that the upper surface of the ion exchange resin is two-thirds the height of the inner cavity of the filter cartridge assembly. The sealing material at the upper end of the central tube is removed, and the upper water distributor is installed at the upper end of the central tube. The multi-way valve body is connected to the upper water distributor, and the multi-way valve body is screwed into the fixed pipe joint. After installation and successful testing, the semiconductor diluent flows in from the inlet of the multi-way valve body. The semiconductor diluent is then evenly distributed on the upper surface of the ion exchange resin by the upper water distributor, flowing from top to bottom. The ion exchange resin contains a large number of exchangeable ion groups. These ionic groups can adsorb and displace metal ions in the semiconductor diluent, thereby achieving the filtration and removal of metal ions. Through the action of the hollow support ring component on the hollow support ring mechanism, the hollow support ring component supports part of the ion exchange resin, reducing the probability of the middle and lower layers of ion exchange resins being in close contact due to their own gravity. This makes the ion exchange resins relatively loose, allowing the semiconductor diluent to pass through the ion exchange resins evenly. The ionic groups contained in the ion exchange resins can quickly and fully displace metal ions, improving the quality and filtration efficiency of the semiconductor diluent. Through the action of the inner and outer circular feeding chambers, it is convenient to lay quartz sand and ion exchange resin into the inner cavity of the filter cartridge assembly. Through the use of the lower water distributor, the quartz sand or ion exchange resin is prevented from flowing from the central tube to the multi-way valve body with the filtered semiconductor diluent and flowing out through the outlet of the multi-way valve body.

[0009] In a preferred embodiment, the present invention can be further configured such that: the hollowed-out bearing ring assembly includes an outer ring body and an inner ring body disposed in its inner cavity, and a plurality of bearing plates are connected in a ring array between the outer ring body and the inner ring body, and a connecting plate is connected between adjacent bearing plates.

[0010] By adopting the above technical solution, the bearing plates are connected by connecting plates, so that several bearing plates are connected to each other at intervals to form an integral structure. The connecting plates, bearing plates, outer ring and inner ring effectively support the ion exchange resin, reducing the probability that the middle and lower layers of ion exchange resin will be in close contact due to their own gravity, and making the ion exchange resin relatively loose.

[0011] In a preferred embodiment, the present invention can be further configured as follows: the supporting plate includes a polygonal plate, the upper plane of the polygonal plate is connected to a polygonal cone, the angle between the cone surface of the polygonal cone and the horizontal plane is 10 to 15 degrees, and the surface of the polygonal plate is symmetrically connected to a fixing plate one and a fixing plate two, the outer end of the fixing plate one is connected to an outer ring body, and the outer end of the fixing plate two is connected to an inner ring body.

[0012] By adopting the above technical solution, when quartz sand or ion exchange resin falls on the polygonal cone, it can quickly slide downwards and continue to fall. The polygonal cone, fixing plate one, and fixing plate two can all bear part of the weight of the ion exchange resin, reducing the probability that the middle and lower layers of ion exchange resin will be in close contact due to their own gravity, making the ion exchange resin relatively loose.

[0013] In a preferred embodiment, the present invention can be further configured such that the cross-sections of the outer ring, the inner ring, the first fixing plate, and the second fixing plate are all rhomboid.

[0014] By adopting the above technical solution, the upper surfaces of the outer ring, inner ring, fixing plate one, and fixing plate two have a certain slope, which reduces the probability of hindering the laying of quartz sand and ion exchange resin.

[0015] In a preferred embodiment, the present invention can be further configured as follows: the outer circular feeding cavity includes a plurality of fan-shaped cavities arranged in a ring array, and a circular rod is provided between adjacent fan-shaped cavities. One end of the circular rod is connected to the hollowed-out bearing ring assembly, and the outer circle of the other end contacts the upper plane of the circular support ring.

[0016] By adopting the above technical solution and using the fan-shaped cavity design, it is convenient to lay quartz sand and ion exchange resin into the filter cartridge assembly, thus improving the ease of operation.

[0017] In a preferred embodiment, the present invention can be further configured as follows: the filter cartridge assembly includes a lower cylinder and an upper conical cylinder, the lower end opening of the upper conical cylinder is spirally connected to the upper end opening of the lower cylinder, a limiting ring is fitted onto the outer circle of the upper conical cylinder, and a sealing ring is provided between the limiting ring and the top wall of the lower cylinder.

[0018] By adopting the above technical solution, since the lower cylinder and the upper conical cylinder are connected by threads, it is convenient to install the hollowed-out bearing ring mechanism in the inner cavity of the filter cylinder assembly. The use of the sealing ring enhances the sealing performance of the connection between the lower cylinder and the upper conical cylinder.

[0019] In summary, this utility model has at least one of the following beneficial technical effects:

[0020] The hollowed-out support rings connected to the circular support rings can support part of the ion exchange resin, reducing the probability of the middle and lower layers of ion exchange resins being in close contact due to their own gravity. This makes the ion exchange resins relatively loose, allowing the semiconductor diluent to pass through the ion exchange resins evenly. The ionic groups contained in the ion exchange resins can quickly and fully replace metal ions, improving the quality and filtration efficiency of the semiconductor diluent. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort, wherein:

[0022] Figure 1 This is a schematic diagram of a preferred embodiment of a diluent filtration device for manufacturing semiconductors according to the present invention.

[0023] Figure 2 yes Figure 1 A schematic diagram of the hollowed-out bearing ring mechanism.

[0024] Figure 3 yes Figure 2 Schematic diagram of the load-bearing plate in the middle.

[0025] In the diagram: 10. Filter cartridge assembly; 2. Central tube; 3. Lower water distributor; 4. Upper water distributor; 5. Multi-way valve body; 6. Circular support ring; 7. Inner circular discharge chamber; 80. Hollowed-out bearing ring assembly; 90. Outer circular discharge chamber;

[0026] 11. Lower cylinder; 12. Upper conical cylinder; 13. Limiting ring; 14. Sealing ring; 15. Fixed pipe joint;

[0027] 81. Outer ring; 82. Inner ring; 83. Bearing plate; 84. Connecting plate;

[0028] 831. Polygonal plate; 832. Polygonal cone; 833. Fixed plate one; 834. Fixed plate two;

[0029] 91. Fan-shaped cavity; 92. Round rod. Detailed Implementation

[0030] The preferred embodiments of the present invention will be described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are for illustration and explanation only and are not intended to limit the present invention.

[0031] It should be noted that these figures are simplified schematic diagrams, which only illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention.

[0032] Reference Figures 1-3 The present invention discloses a diluent filtration device for manufacturing semiconductors, comprising: a filter cartridge assembly 10, the filter cartridge assembly 10 including a fixed pipe joint 15, a central pipe 2 provided in the inner cavity of the filter cartridge assembly 10, a lower water distributor 3 connected to the lower end of the central pipe 2, an upper water distributor 4 connected to the upper end of the central pipe 2, a multi-way valve body 5 connected to the upper end of the upper water distributor 4, and the multi-way valve body 5 being threadedly connected to the outer surface of the fixed pipe joint 15.

[0033] The inner wall of the filter cartridge assembly 10 is connected to two circular support rings 6 at intervals, and the circular support rings 6 are respectively connected to hollow bearing ring mechanisms located outside the central tube 2.

[0034] The filter cartridge assembly 10 includes a lower cylinder 11 and an upper conical cylinder 12. Both the lower cylinder 11 and the upper conical cylinder 12 are made of fiberglass. The lower end opening of the upper conical cylinder 12 is spirally connected to the upper end opening of the lower cylinder 11. A limiting ring 13 is fitted onto the outer circle of the upper conical cylinder 12. A sealing ring 14 is provided between the limiting ring 13 and the top wall of the lower cylinder 11. The upper end opening of the upper conical cylinder 12 is connected to the aforementioned fixed pipe joint 15. Since the lower cylinder 11 and the upper conical cylinder 12 are threadedly connected, it is convenient to install the hollowed-out bearing ring mechanism in the inner cavity of the filter cartridge assembly 10. The use of the sealing ring 14 enhances the sealing performance of the connection between the lower cylinder 11 and the upper conical cylinder 12.

[0035] The hollowed-out bearing ring mechanism includes an inner circular feeding cavity 7, a hollowed-out bearing ring assembly 80, and an outer circular feeding cavity 90 arranged sequentially from the inside to the outside.

[0036] The hollow-shaped support ring assembly 80 includes an outer ring body 81 and an inner ring body 82 disposed in its inner cavity. A plurality of support plates 83 are connected in a ring array between the outer ring body 81 and the inner ring body 82. A connecting plate 84 is connected between adjacent support plates 83. The support plates 83 are connected by the connecting plates 84, so that the plurality of support plates 83 are connected to each other at intervals to form an integral structure. The connecting plate 84, the support plates 83, the outer ring body 81 and the inner ring body 82 effectively support the ion exchange resin, reducing the probability that the middle and lower layers of ion exchange resin will be in close contact due to their own gravity, making the ion exchange resin relatively loose.

[0037] The supporting plate 83 includes a polygonal plate 831, the upper surface of which is connected to a polygonal cone 832. The angle between the cone surface of the polygonal cone 832 and the horizontal plane is 10 to 15 degrees. The surface of the polygonal plate 831 is symmetrically connected to a first fixing plate 833 and a second fixing plate 834. The outer end of the first fixing plate 833 is connected to the outer ring 81, and the outer end of the second fixing plate 834 is connected to the inner ring 82. When quartz sand or ion exchange resin falls on the polygonal cone 832, it can quickly slide downwards and continue to fall. The polygonal cone 832, the first fixing plate 833, and the second fixing plate 834 can all bear part of the weight of the ion exchange resin, reducing the probability that the middle and lower layers of ion exchange resin will be in close contact due to their own gravity, making the ion exchange resin relatively loose.

[0038] The cross-sections of the outer ring 81, the inner ring 82, the first fixing plate 833, and the second fixing plate 834 are all rhomboid.

[0039] The projection of the hollowed-out support ring assembly 80 on the hollowed-out support ring mechanism described above is located in the inner circular feeding cavity 7 on the hollowed-out support ring mechanism described below; this facilitates the hollowed-out support ring mechanism to support the ion exchange resin in different annular regions along the radial direction within the filter cartridge assembly 10.

[0040] The outer circular feeding chamber 90 includes several fan-shaped cavities 91 arranged in a ring array. A round rod 92 is provided between adjacent fan-shaped cavities 91. One end of the round rod 92 is connected to the hollowed-out bearing ring assembly 80, and the outer circle of the other end contacts the upper plane of the circular support ring 6. The arrangement of the fan-shaped cavities 91 facilitates the laying of quartz sand and ion exchange resin into the filter cartridge assembly 10, improving the convenience of operation.

[0041] The implementation principle of this embodiment is as follows: During installation, the lower water distributor 3 is sealed to the lower end of the central tube 2, which extends into the inner cavity of the filter cartridge assembly 10. The upper end of the central tube 2 is sealed with a sealing material such as cloth. Quartz sand is placed around the central tube 2, spreading it evenly at the bottom of the filter cartridge assembly 10. Next, ion exchange resin is placed around the central tube 2, so that the height of the upper surface of the ion exchange resin is two-thirds of the height of the inner cavity of the filter cartridge assembly 10. The sealing material at the upper end of the central tube 2 is removed, and the upper water distributor 4 is installed at the upper end of the central tube 2. The multi-way valve body 5 is connected to the upper water distributor 4, and the multi-way valve body 5 is rotated to connect with the fixed pipe joint 15 by thread. After installation and passing the test, the semiconductor diluent flows in from the inlet of the multi-way valve body 5. The semiconductor diluent is then evenly distributed on the upper surface of the ion exchange resin through the upper water distributor 4. The semiconductor diluent flows from top to bottom. The ion exchange resin contains a large amount of exchangeable... Ionic groups, which can adsorb and replace metal ions in semiconductor diluents, thereby achieving the filtration and removal of metal ions. Through the action of the hollow support ring assembly 80 on the hollow support ring mechanism, the hollow support ring assembly 80 supports part of the ion exchange resin, reducing the probability of the middle and lower layers of ion exchange resins being in close contact due to their own gravity, making the ion exchange resins relatively loose, so that the semiconductor diluent can pass through the ion exchange resin evenly. The ionic groups contained in the ion exchange resin can quickly and fully replace metal ions, improving the quality and filtration efficiency of the semiconductor diluent. Through the action of the inner circular feeding chamber 7 and the outer circular feeding chamber 90, it is convenient to lay quartz sand and ion exchange resin into the inner cavity of the filter cartridge assembly 10. Through the use of the lower water distributor 3, the quartz sand or ion exchange resin is prevented from flowing from the central tube 2 to the multi-way valve body 5 with the filtered semiconductor diluent and flowing out through the liquid outlet of the multi-way valve body 5.

[0042] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made using the content of this utility model specification, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A diluent filtering apparatus for manufacturing a semiconductor, characterized by, Include: Filter cartridge assembly (10), the inner cavity of the filter cartridge assembly (10) is provided with a center tube (2), the lower end of the center tube (2) is connected with a lower water distributor (3), the upper end is connected with an upper water distributor (4), the upper end of the upper water distributor (4) is connected with a multi-way valve body (5), the multi-way valve body (5) is connected with the outer circular surface of the fixed pipe joint (15) by screw thread; The inner wall of the filter cartridge assembly (10) is connected with two circular support rings (6), the circular support rings (6) are respectively connected with hollow load ring mechanisms located outside the center tube (2), the hollow load ring mechanisms include inner circular blanking cavities (7), hollow load ring assemblies (80) and outer circular blanking cavities (90) arranged in sequence from inside to outside; The projection of the hollow load ring assembly (80) on the upper hollow load ring mechanism is located in the inner circular blanking cavity (7) on the lower hollow load ring mechanism.

2. The diluent filtering apparatus for manufacturing a semiconductor according to claim 1, wherein The hollow load ring assembly (80) includes an outer ring body (81) and an inner ring body (82) arranged in the inner cavity thereof, a plurality of load plate pieces (83) are connected in an annular array between the outer ring body (81) and the inner ring body (82), and connecting plates (84) are connected between adjacent load plate pieces (83).

3. The diluent filtering apparatus for manufacturing a semiconductor according to claim 2, wherein The load plate piece (83) includes a polygonal plate (831), a polygonal conical body (832) is connected to the upper plane of the polygonal plate (831), the included angle between the conical surface of the polygonal conical body (832) and the horizontal plane is 10-15 degrees, and the surface of the polygonal plate (831) is symmetrically connected with a first fixed plate (833) and a second fixed plate (834), the outer end of the first fixed plate (833) is connected with the outer ring body (81), and the outer end of the second fixed plate (834) is connected with the inner ring body (82).

4. The diluent filtering apparatus for manufacturing a semiconductor according to claim 3, wherein The cross sections of the outer ring body (81), the inner ring body (82), the first fixed plate (833) and the second fixed plate (834) are all rhombic.

5. The diluent filtering apparatus for manufacturing a semiconductor according to Claim 1, wherein The outer circular blanking cavity (90) includes a plurality of annularly arranged fan-shaped cavities (91), and a round rod (92) is arranged between adjacent fan-shaped cavities (91), one end of the round rod (92) is connected with the hollow load ring assembly (80), and the outer circle of the other end is in contact with the upper plane of the circular support ring (6).

6. The diluent filtering apparatus for manufacturing a semiconductor according to claim 1, wherein The filter cartridge assembly (10) includes a lower cartridge body (11) and an upper conical cartridge body (12), the lower end opening of the upper conical cartridge body (12) is connected in a screwing manner in the upper end opening of the lower cartridge body (11), the outer circle of the upper conical cartridge body (12) is connected with a limiting ring (13) in a sleeving manner, and a sealing ring (14) is arranged between the limiting ring (13) and the top wall of the lower cartridge body (11).

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