Air leakage prevention vacuum chamber flange connecting structure

Abstract

The utility model relates to the technical field of vacuum chamber flanges, in particular to an air leakage prevention vacuum chamber flange connecting structure which comprises a first flange, a fixing sleeve is integrally formed at the upper end of the first flange, a connecting pipe is movably installed in the fixing sleeve, and a second flange is integrally formed at the top end of the connecting pipe. A movable sleeve is movably installed in the connecting pipe, a sealing mechanism is arranged between the connecting pipe and the movable sleeve, and a rotating mechanism is arranged between the connecting pipe and the fixed sleeve. According to the utility model, independent sealing structures are respectively arranged between the movable sleeve and the fixed sleeve, between the inner wall of the movable sleeve and the crystal control probe, between the sliding block and the sliding chute, and between the connecting pipe and the fixed sleeve, so that multiple sealing barriers are formed, and the stability of the overall sealing performance is ensured.

Description

Technical Field

[0001] This utility model relates to the field of vacuum chamber flange technology, specifically to a leak-proof vacuum chamber flange connection structure. Background Technology

[0002] In the field of vacuum technology, the sealing performance of a vacuum chamber directly affects the operating efficiency of equipment and product quality. Especially in industrial applications such as semiconductor manufacturing, vacuum coating, and vacuum heat treatment, gas leakage within the vacuum chamber can lead to a decline in equipment performance and even affect product yield. Therefore, designing an efficient and reliable leak-proof flange connection structure for a vacuum chamber has become a key technical issue in vacuum equipment design.

[0003] In existing technologies, the sealing performance of vacuum chamber flange connection structures often relies on a single sealing ring or gasket. After long-term use or frequent disassembly, this design is prone to aging, deformation, or wear of the sealing ring, leading to a decline in sealing performance and consequently causing air leakage problems. Utility Model Content

[0004] The purpose of this invention is to provide a leak-proof vacuum chamber flange connection structure to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A leak-proof vacuum chamber flange connection structure, including

[0007] Flange 1, the upper end of which is integrally formed with a fixing sleeve, the inside of which a connecting pipe is movably installed, and the top end of which is integrally formed with flange 2;

[0008] A movable sleeve is movably installed inside the connecting pipe, a sealing mechanism is provided between the connecting pipe and the movable sleeve, and a rotating mechanism is provided between the connecting pipe and the fixed sleeve.

[0009] Preferably, the rotating mechanism includes a guide groove, a guide groove is circumferentially formed in the middle of the inner side of the fixed sleeve, a guide ring is fixedly connected to the outer wall of the middle part of the connecting pipe and slidably connected to the guide groove, and a sealing ring is movably installed on the inner wall of the fixed sleeve near the upper and lower ends of the guide groove.

[0010] Preferably, a threaded groove is provided on the lower inner wall of the connecting pipe, and the outer wall of the movable sleeve is threadedly connected to the threaded groove;

[0011] Preferably, the lower inner wall of the fixed sleeve is provided with sliding grooves on both sides, and sliding blocks that are slidably connected to the sliding grooves are fixedly installed on both sides of the bottom end of the movable sleeve.

[0012] Preferably, the sealing mechanism includes a sealing ring three, which is movably installed on the inner wall of the upper end of the movable sleeve, and a sealing ring two is movably installed on the inner walls of the upper and lower ends of the movable sleeve.

[0013] Preferably, a sealing ring is movably installed at the top of the sliding block.

[0014] Compared with the prior art, the beneficial effects of this utility model are:

[0015] 1. This leak-proof vacuum chamber flange connection structure forms multiple sealing barriers by setting independent sealing structures between the movable sleeve and the fixed sleeve, between the inner wall of the movable sleeve and the crystal control probe, between the sliding block and the sliding groove, and between the connecting pipe and the fixed sleeve, thereby ensuring the stability of the overall sealing performance.

[0016] 2. This leak-proof vacuum chamber flange connection structure allows for easy installation by simply rotating flange two to rotate the connecting pipe, causing the movable sleeve to rise along the slide groove and press the sealing ring three to ensure a tight seal. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall main structure of this utility model;

[0018] Figure 2 For the present utility model Figure 1 Enlarged view of point A in the middle;

[0019] Figure 3 For the present utility model Figure 1 Enlarged view of point B in the middle;

[0020] Figure 4 For the present utility model Figure 1 Enlarged diagram of point C in the middle.

[0021] In the diagram: 1. Flange 1; 2. Fixed sleeve; 3. Connecting pipe; 4. Flange 2; 5. Movable sleeve; 6. Guide groove; 7. Guide ring; 8. Threaded groove; 9. Sliding groove; 10. Sliding block; 11. Sealing ring 3; 12. Sealing ring 2; 13. Sealing ring 1; 14. Sealing ring 4. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] like Figure 1-4As shown, this utility model provides a technical solution:

[0024] A leak-proof vacuum chamber flange connection structure includes a flange 1, a fixed sleeve 2 integrally formed at the upper end of the flange 1, a connecting pipe 3 movably installed inside the fixed sleeve 2, a flange 4 integrally formed at the top end of the connecting pipe 3, a movable sleeve 5 movably installed inside the connecting pipe 3, a sealing mechanism provided between the connecting pipe 3 and the movable sleeve 5, the sealing mechanism including a sealing ring 11, a sealing ring 11 movably installed on the upper inner wall of the movable sleeve 5, and sealing rings 12 movably installed on the upper and lower inner walls of the movable sleeve 5, and a rotating mechanism provided between the connecting pipe 3 and the fixed sleeve 2, the rotating mechanism including... The movable sleeve 5 includes a guide groove 6, which is circumferentially formed in the middle of the inner side of the fixed sleeve 2. A guide ring 7, which is slidably connected to the guide groove 6, is fixedly connected to the outer wall of the middle part of the connecting pipe 3. Sealing rings 14 are movably installed on the inner wall of the fixed sleeve 2 near the upper and lower ends of the guide groove 6. A threaded groove 8 is formed on the lower inner wall of the connecting pipe 3. The outer wall of the movable sleeve 5 is threadedly connected to the threaded groove 8. Sliding grooves 9 are formed on both sides of the lower inner wall of the fixed sleeve 2. Sliding blocks 10, which are slidably connected to the sliding grooves 9, are fixedly installed on both sides of the bottom end of the movable sleeve 5. Sealing rings 13 are movably installed on the top of the sliding blocks 10.

[0025] In this embodiment, independent sealing structures are set between the movable sleeve 5 and the fixed sleeve 2, between the inner wall of the movable sleeve 5 and the crystal control probe, between the sliding block 10 and the sliding groove 9, and between the connecting pipe 3 and the fixed sleeve 2, forming multiple sealing barriers to ensure the stability of the overall sealing performance.

[0026] Furthermore, during installation, simply rotating flange 2 4 will rotate the connecting pipe 3, causing the movable sleeve 5 to rise along the slide groove 9 and press the sealing ring 3 11 to ensure a sealing effect.

[0027] Working principle: During installation, the crystal control probe is fixed on flange 2 4. The detection end of the crystal control probe passes through flange 2 4 and is connected to the movable sleeve 5. At this time, flange 2 4 is rotated, which drives the connecting pipe 3 to rotate. Because the connecting pipe 3 and the movable sleeve 5 are threadedly connected, and the bottom of the movable sleeve 5 is provided with sliding blocks 10 that are slidably connected to the slide groove 9 on both sides, the movable sleeve 5 will rise along the gap and drive the sealing ring 3 11 to abut against the connection between the movable sleeve 5 and the fixed sleeve 2. At the same time, the outer wall of the detection end of the crystal control probe is sealed on the inside by the two sealing rings 2 12 at the upper and lower ends of the inner wall of the movable sleeve 5. Meanwhile, the upper end of the sliding block 10 is sealed with the upper end of the slide groove 9 by the sealing ring 1 13. This can further improve the sealing performance and thus achieve the purpose of preventing air leakage.

[0028] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A leak-tight vacuum chamber flange connection structure, characterized by: Comprising A flange (1), the upper end of the flange (1) is integrally formed with a fixed sleeve (2), the inside of the fixed sleeve (2) is movably mounted with a connecting pipe (3), the top end of the connecting pipe (3) is integrally formed with a flange (4); The inside of the connecting pipe (3) is movably mounted with a movable sleeve (5), a sealing mechanism is arranged between the connecting pipe (3) and the movable sleeve (5), and a rotating mechanism is arranged between the connecting pipe (3) and the fixed sleeve (2).

2. The leakproof vacuum chamber flange connection structure according to claim 1, characterized in that: The rotating mechanism comprises a guide groove (6), the inside of the fixed sleeve (2) is annularly opened with a guide groove (6) in the middle, the middle outer wall of the connecting pipe (3) is fixedly connected with a guide ring (7) which is slidably connected with the guide groove (6), and the inner wall of the fixed sleeve (2) is movably mounted with a sealing ring four (14) near the upper and lower ends of the guide groove (6).

3. The leakproof vacuum chamber flange connection structure according to claim 1, characterized in that: A threaded groove (8) is formed in the lower inner wall of the connecting pipe (3), and the outer wall of the movable sleeve (5) is threadedly connected with the threaded groove (8).

4. The leakproof vacuum chamber flange coupling structure according to claim 1, wherein: The lower inner wall of the fixed sleeve (2) is formed with a sliding groove (9) on both sides, and the bottom end of the movable sleeve (5) is fixedly mounted with a sliding block (10) which is slidably connected with the sliding groove (9).

5. The leakproof vacuum chamber flange coupling structure according to claim 1, wherein: The sealing mechanism comprises a sealing ring three (11), the upper end inner wall of the movable sleeve (5) is movably mounted with a sealing ring three (11), and the upper and lower end inner walls of the movable sleeve (5) are movably mounted with a sealing ring two (12).

6. A leakproof vacuum chamber flange connection structure according to claim 4, characterized in that: The top end of the sliding block (10) is movably mounted with a sealing ring one (13).

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