Vacuum drying equipment

Abstract

The utility model discloses vacuum drying equipment which comprises a plurality of vacuum drying grooves distributed in one direction, and each vacuum drying groove comprises a groove body and a groove cover arranged on the cross section of the upper portion of the groove body and larger than the cross section of the groove body. The guide rails are arranged on the two opposite sides of the vertical projection of the groove body, the lifting mechanism or the lifting and grabbing mechanism capable of moving along the guide rails is arranged on the basis of the guide rails, a plurality of vacuum drying grooves can share one guide rail, lifting mechanism or lifting and grabbing mechanism, the space is saved, meanwhile, the operation cost can be reduced, in addition, the groove cover can be placed above the adjacent vacuum drying grooves, and the space is saved. Or is placed between two adjacent vacuum drying tanks; compared with a mode of independently reserving a placing space for each groove cover, the arrangement mode can effectively save the occupied space of the equipment.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum drying technology, and more specifically, relates to a vacuum drying device. Background Technology

[0002] During the production of solar cells (hereinafter referred to as silicon wafers), the surface of the silicon wafers needs to be cleaned to remove impurities. After cleaning, they need to be dried using drying equipment. The current drying method uses multiple hot air tanks. The solar cells are placed in the hot air tanks, and the solar cells are dried by blowing air through heating and hot air circulation.

[0003] The invention patent with publication number CN102944106A discloses a vacuum drying tank for solar photovoltaic cleaning equipment, including a tank body and a tank cover disposed above the tank body. It also includes a horizontally moving reciprocating mechanism and a vertically moving reciprocating mechanism. The horizontally moving reciprocating mechanism is connected to the tank cover and is used to control the opening and closing of the tank cover relative to the opening of the tank body. The vertically moving reciprocating mechanism is connected to the middle of the tank cover and is used to control the sealing or opening of the tank cover and the tank body. This means that each vacuum drying tank needs to be equipped with both a horizontally moving reciprocating mechanism and a vertically moving reciprocating mechanism, resulting in high cost. Furthermore, when multiple vacuum drying tanks need to be placed, the reciprocating mechanisms occupy excessive space. Utility Model Content

[0004] To address the aforementioned problems, this invention provides a vacuum drying device that saves space and reduces costs.

[0005] The technical solution of this utility model to solve the above problems is as follows:

[0006] A vacuum drying device includes a plurality of vacuum drying tanks distributed in one direction. Each vacuum drying tank includes a tank body with an opening at the top, a tank cover disposed above the tank body with a cross-section larger than the cross-section of the tank body, guide rails disposed on opposite sides of the vertical projection of the tank body, and a lifting mechanism or a hoisting mechanism disposed based on the guide rails and movable along the guide rails. The tank cover has at least a functional part that connects to the working end of the lifting mechanism or hoisting mechanism, and the guide rails are arranged in the same direction as the distribution direction of the plurality of vacuum drying tanks.

[0007] Preferably, the vacuum drying equipment is provided with a tank cover placement area, which is located above an adjacent vacuum drying tank or between two adjacent vacuum drying tanks.

[0008] The placement area of ​​the tank cover is set above the adjacent vacuum drying tank. This means that the moved tank cover can be placed on either side of it and above any of the two adjacent vacuum drying tanks. That is, it can be placed on the left side of the adjacent vacuum drying tank or on the right side of the adjacent vacuum drying tank.

[0009] As preferred, the lifting mechanism is arranged directly below the acting part, and the lifting mechanism comprises a fixed end arranged based on the guide rail and an acting end arranged above the fixed end and vertically movable relative to the fixed end.

[0010] As preferred, the vacuum drying equipment further comprises an avoiding mechanism arranged based on the acting end of the lifting mechanism and the acting part of the tank cover, and the avoiding mechanism is provided with an avoiding space facing the opening of the tank body for avoiding the remaining tank cover when the lifting mechanism is translated.

[0011] As preferred, the avoiding space has a height not less than the thickness of the acting part.

[0012] As preferred, the avoiding mechanism comprises a base fixedly installed on the acting end, a supporting piece horizontally arranged above the base for supporting the acting part, and a supporting piece arranged between the base and the supporting piece for supporting the supporting piece; the base, the supporting piece and the supporting piece jointly form the avoiding space facing the opening of the tank body.

[0013] As preferred, when the acting end is not moved, the supporting piece is below the acting part; when the acting end is moved to the end of stroke, the base is below the initial height of the acting part, and the supporting piece is above the initial height of the acting part.

[0014] As preferred, the drying equipment comprises a screw rod arranged based on the guide rail and a motor driving the rotation of the screw rod, and the fixed end of the lifting mechanism is arranged on the guide rail and the screw rod through a mounting seat.

[0015] As preferred, a plurality of lifting mechanisms are arranged on the guide rail and mounted on the same mounting seat, so that the plurality of lifting mechanisms can move synchronously and avoid deviation of the tank cover during movement.

[0016] The utility model has the following beneficial effects:

[0017] 1. The vacuum drying equipment comprises a plurality of vacuum drying tanks arranged in one direction, each vacuum drying tank comprises a tank body and a tank cover arranged above the tank body and having a cross section larger than that of the tank body; guide rails are arranged on opposite sides of the vertical projection space of the tank body; a lifting mechanism or a lifting grab mechanism is arranged based on the guide rails and can move along the guide rails; and the plurality of vacuum drying tanks can share one guide rail, one lifting mechanism or one lifting grab mechanism, thereby saving space and reducing operation cost.

[0018] 2. The vacuum drying equipment can place the tank cover above the adjacent vacuum drying tank or between the adjacent two vacuum drying tanks, thereby effectively saving the floor space of the equipment compared with reserving a separate space for each tank cover. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the vacuum drying equipment disclosed in Embodiment 1 of this utility model;

[0020] Figure 2 This is a side view of the vacuum drying equipment disclosed in Embodiment 1 of this utility model;

[0021] In the diagram: 11-Trench body, 12-Trench cover, 121-Actuating part, 21-Guide rail, 22-Screw rod, 23-Motor, 31-Fixed end, 32-Actuating end, 4-Mounting base, 5-Avoidance mechanism. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail with reference to the embodiments. It should be understood that the specific embodiments described herein are only used to explain this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0023] A vacuum drying apparatus includes multiple identical vacuum drying chambers distributed along one direction. Each vacuum drying chamber includes a chamber body 11 and a cover 12. An opening is provided at the top of the chamber body 11, and the cover 12 is located at the opening, with the cover 12 being larger than the cross-section of the chamber body 11. Guide rails 21 are provided on opposite sides of the vertical projection of the chamber body 11, extending in the same direction as the distribution of the vacuum drying chambers. The vacuum drying apparatus also includes a lifting mechanism or a hoisting mechanism based on and movable along the guide rails 21, and the cover 12 has an actuating portion 121 that can connect to the actuating end 32 of the lifting mechanism or the hoisting mechanism.

[0024] Example 1

[0025] In this embodiment, the placement area of ​​the tank cover 12 is located above the adjacent vacuum drying tank. That is, the tank cover 12 can be placed above either of the two adjacent vacuum drying tanks on its sides, that is, above the vacuum drying tank on its left or right. The tank cover 12 and the tank body 11 are initially sealed by a sealing ring. Since the tank cover 12 has a large self-weight, it can self-seal by vacuuming.

[0026] The lower part of the action part 121 of the cover 12 is provided with a lifting mechanism for driving the cover 12 to rise and fall relative to the tank body 11. The provision of the action part 121 not only facilitates the control of the lifting mechanism on the cover 12, but also avoids the direct contact between the lifting mechanism and the cover 12 directly above the opening of the tank body 11, which may cause wear of the cover 12 and affect the sealing of the drying tank.

[0027] The lifting mechanism drives the cover 12 to rise and fall by controlling its movement, so that the cover 12 moves closer to or away from the tank body 11 in the vertical direction. The lifting mechanism can be a pneumatic cylinder, an oil cylinder, etc. In this embodiment, the lifting mechanism is a pneumatic cylinder, which includes a fixed end 31 and an action end 32. The action end 32 is installed above the fixed end 31 and can move vertically relative to the fixed end 31. The action end 32 is arranged below the action part 121 and can be directly or indirectly connected to the action part 121. When the action end 32 moves upward, the cover 12 moves upward, and when the action end 32 moves downward, the cover 12 moves downward.

[0028] The lifting mechanism is installed on the guide rail 21 and can move horizontally along the guide rail 21, thereby driving the cover 12 to move horizontally, so that the cover 12 moves closer to or away from the opening above the tank body 11 in the horizontal direction. The drying device further comprises a lead screw 22 arranged parallel to the guide rail 21 and a servo motor 23 connected to the lead screw 22 and driving the lead screw 22 to rotate. The fixed end 31 of the lifting mechanism is installed on the guide rail 21 and the lead screw 22 through a mounting seat 4.

[0029] In order to avoid collision between the cover 12 and the adjacent vacuum drying tank during lifting and translation and when the cover 12 is placed in the placement area, a avoiding mechanism 5 is arranged between the lifting mechanism and the action part 121 of the cover 12. The avoiding mechanism 5 comprises a base, a supporting piece arranged horizontally above the base, and a supporting piece arranged between the base and the supporting end and providing support for the supporting piece. The base, the supporting piece and the supporting piece form an avoiding space together, which is used for avoiding the cover 12 of the adjacent drying tank during the translation of the cover 12. The height of the avoiding space is greater than the thickness of the action part 121 of the cover 12. The base of the avoiding mechanism 5 is installed on the action end 32 of the lifting mechanism. When the action end 32 is in the initial position, the supporting piece is in the lower position of the action part 121. When the action end 32 starts to move upward, the supporting piece abuts against the action part 121 and lifts the cover 12 upward. When the action end 32 moves to the end of the stroke, the height of the supporting piece is higher than the height of the cover 12 of the adjacent drying tank, and the height of the base is lower than the height of the cover 12 of the adjacent drying tank.

[0030] In the embodiment, the number of the vacuum drying tanks is 2, which are respectively a first vacuum drying tank and a second vacuum drying tank, two acting portions 121 are arranged in each of the two opposite sides of the tank cover 12, an avoiding mechanism 5 and a lifting mechanism are arranged below each acting portion 121, and guide rails 21 are horizontally arranged below the lifting mechanisms along the distribution direction of the two vacuum drying tanks. The two lifting mechanisms on one side of the tank cover 12 are installed on the guide rails 21 through the same mounting seat 4, so as to prevent the tank cover 12 from deviating during the translation.

[0031] In the vacuum drying equipment disclosed by the embodiment of the utility model, the moving mode of the tank cover 12 is as follows:

[0032] When the first vacuum drying tank needs to be fed or discharged, first, the servo motor 23 and the lead screw 22 move according to the corresponding parameters, the lifting mechanism is horizontally moved to the position directly below the acting portion 121 of the tank cover 12 of the first vacuum drying tank, when it is confirmed that the tank body 11 of the first vacuum drying tank is in a non-vacuum state, the cylinder is supplied with gas, the acting end 32 of the cylinder is stretched, the avoiding mechanism 5 and the tank cover 12 are moved upwards until the acting end 32 is moved to a predetermined height, then the servo motor 23 and the lead screw 22 are controlled to move horizontally according to the pre-set parameters, so that the lifting mechanism, the avoiding mechanism 5 and the tank cover 12 of the first drying tank are horizontally moved, during the translation of the tank cover 12 of the first vacuum drying tank, the tank cover 12 of the second vacuum drying tank is located in the avoiding space of the avoiding mechanism 5, when the tank cover 12 of the first drying tank is above the tank cover 12 of the second drying tank, the feeding or discharging work of the first vacuum drying tank can be carried out.

[0033] In the above process, the cylinder can be supplied with gas through the electromagnetic valve; the position sensing photoelectric detection sensor can be arranged to ensure the accuracy of the positioning of the lifting mechanism and the accuracy of the moving position of the tank cover.

[0034] Embodiment 2

[0035] In the embodiment, the placing area of the tank cover 12 is located between the adjacent two vacuum drying tanks, and the movement of the tank cover 12 is realized through the movable hoisting and grabbing mechanism which is arranged based on the guide rails 21 and can move along the guide rails 21. In the embodiment, the hoisting and grabbing mechanism is a mechanical hand. When the vacuum drying tank needs to be discharged or fed, the acting portion 121 of the tank cover 12 can be grabbed by the mechanical hand which moves along the guide rails 21 and placed in the placing area of the tank cover 12.

[0036] The above-described embodiments are only used to describe the preferred embodiments of the utility model, and do not limit the scope of the utility model, and various deformations and improvements of the technical solutions of the utility model made by the ordinary skilled in the art without departing from the design spirit of the utility model shall fall within the protection scope of the utility model.

Claims

1. A vacuum drying apparatus, characterized by, The vacuum drying device comprises a plurality of vacuum drying slots distributed in one direction, the vacuum drying slot comprises a slot body (11) with an upper opening, a slot cover (12) arranged above the slot body (11) and having a cross section larger than that of the slot body (11), guide rails (21) arranged on opposite sides of the vertical projection of the slot body (11), and a lifting mechanism or a lifting grab mechanism arranged based on the guide rails (21) and movable along the guide rails (21); the slot cover (12) has at least an action part (121) connecting the action end (32) of the lifting mechanism or the lifting grab mechanism, and the arrangement direction of the guide rails (21) is the same as the distribution direction of the plurality of vacuum drying slots.

2. A vacuum drying apparatus according to claim 1, wherein The vacuum drying device is provided with a slot cover (12) placement area arranged above adjacent vacuum drying slots or between adjacent two vacuum drying slots.

3. A vacuum drying apparatus according to claim 1, wherein The lifting mechanism is arranged directly below the action part (121), and the lifting mechanism comprises a fixed end (31) arranged based on the guide rails (21) and an action end (32) arranged above the fixed end (31) and vertically movable relative to the fixed end (31).

4. A vacuum drying apparatus according to claim 3, wherein The vacuum drying device further comprises an avoidance mechanism (5) arranged based on the action end (32) of the lifting mechanism and the action part (121) of the slot cover (12), and the avoidance mechanism (5) is provided with an avoidance space opening towards the slot body (11).

5. A vacuum drying apparatus according to claim 4, wherein The avoidance space has a height not less than the thickness of the action part (121).

6. A vacuum drying apparatus according to claim 4, wherein The avoidance mechanism (5) comprises a base fixedly installed on the action end (32), a supporting piece horizontally arranged above the base for supporting the action part (121), and a supporting piece arranged between the base and the supporting piece for supporting the supporting piece; the base, the supporting piece and the supporting piece jointly form the avoidance space opening towards the slot body (11).

7. A vacuum drying apparatus according to claim 6, wherein When the action end (32) is not moved, the supporting piece is below the action part (121); when the action end (32) is moved to the end of the stroke, the base is below the initial height of the action part (121), and the supporting piece is above the initial height of the action part (121).

8. A vacuum drying apparatus according to claim 3, wherein The drying device comprises a lead screw (22) arranged based on the guide rails (21) and a motor (23) driving the rotation of the lead screw (22), and the fixed end (31) of the lifting mechanism is arranged on the guide rails (21) and the lead screw (22) through a mounting seat (4).

9. A vacuum drying apparatus according to claim 1 or 8, wherein A plurality of lifting mechanisms are arranged on the guide rails (21) through the same mounting seat (4).

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