Integrated multi-pressure multi-azimuth silicon piezoresistance general testing device

Abstract

The utility model discloses an integrated multi-pressure multi-azimuth silicon piezoresistance universal testing device, and relates to the technical field of silicon piezoresistance testing. In order to solve the problem that an existing testing device is limited in testing due to few interfaces or complex in structure due to excessive interfaces, the following technical scheme is provided: the testing device comprises an upper cover plate and a lower cover plate, integrated ventilation columns are symmetrically arranged between the upper cover plate and the lower cover plate, and the two integrated ventilation columns are communicated with a silicon piezoresistive sensor through a filler neck; one end face of the integrated ventilation column is provided with a plurality of ventilation holes, the ventilation holes are connected with the filler neck, and the front end of the integrated ventilation column is provided with an external air source interface communicated with the test air path. The utility model is suitable for assembling products with different interfaces and different shapes, forms a general structure, can be suitable for high and low temperature medium pressure airtight tests, and forms a standard sealing interface. Meanwhile, the testing device is small in structure and convenient to use, multiple groups of testing devices can be placed in a high-low temperature box, multiple products can be tested, and the testing efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of silicon piezoresistive testing technology, specifically to a universal silicon piezoresistive testing device integrating multiple pressures and multiple orientations. Background Technology

[0002] A silicon piezoresistive pressure sensor is a sensor that uses the piezoresistive effect of silicon material to detect force. Specifically, it refers to a sensor that can monitor different locations within an engine to acquire and monitor varying pressures. Typically, silicon piezoresistive pressure sensors require airtightness testing. The product is placed in a high-low temperature chamber, with a test temperature range generally from -55°C to +175°C. Each silicon piezoresistive pressure sensor has 3-5 interfaces for multi-pressure, multi-directional testing, and these interfaces must be tested under insulated conditions. There are two main testing methods: the first involves connecting and fixing the sensor to the product via adapters. The number of adapters corresponds to the number of test interfaces on the product, with the other end connected to the equipment's air source for individual testing. The second method uses a dedicated fixture with multiple rows of test ports. The product can be installed and fixed through these ports. The fixture also has an interface for connecting to the equipment's air source, allowing multiple products to be tested simultaneously after installation.

[0003] Method 1 has a limited number of tests. It uses a threaded adapter to tighten the installation, and only one interface of one product can be tested at a time. Method 2 allows for testing of multiple products. However, since most interfaces are threaded connections, the product testing interfaces are numerous, the structure is cumbersome, the operability is poor, and the versatility is poor, which cannot meet the product testing efficiency requirements. Utility Model Content

[0004] The purpose of this invention is to provide an integrated multi-pressure, multi-directional silicon piezoresistive universal testing device to solve the problems of limited testing due to too few interfaces or complex structure due to too many interfaces in existing testing devices.

[0005] The technical solution of this utility model to solve the above-mentioned technical problems is as follows:

[0006] A universal silicon piezoresistive testing device integrating multiple pressures and directions includes: an upper cover plate and a lower cover plate, with integrated vent columns symmetrically arranged between the upper and lower cover plates, and the two integrated vent columns connected to a silicon piezoresistive sensor via a connecting nozzle; one end face of the integrated vent column is provided with multiple vent holes, which are connected to the connecting nozzle, and the front end of the integrated vent column is provided with an external air source interface connected to the test air circuit.

[0007] Furthermore, the vent is equipped with an adapter post or an adapter post combination.

[0008] Furthermore, the adapter assembly includes a movable nut and a second sealing ring disposed within the movable nut.

[0009] Furthermore, the adapter post is equipped with a gasket and a first sealing ring inside.

[0010] Furthermore, a fixing screw is provided on one side of the integrated ventilation column, and the integrated ventilation column is attached to the upper cover plate by the fixing screw.

[0011] Furthermore, both the upper and lower cover plates are provided with elliptical grooves for installing fixing screws.

[0012] Furthermore, both the upper and lower cover plates are provided with elliptical stepped grooves, and the fixing screws are provided with limit retaining rings. The elliptical stepped grooves are used to install the limit retaining rings.

[0013] This utility model has the following beneficial effects:

[0014] This utility model discloses a box-shaped silicon piezoresistive rapid, integrated, and universal testing device. The integrated vent column is configured with evenly distributed air holes and threaded holes to accommodate products with different interfaces and shapes, forming a universal structure. The multi-channel air holes on the integrated vent column are standard cylindrical sealing surfaces, forming a radial seal with the first sealing ring on the adapter column. This makes it suitable for high and low temperature medium pressure airtightness testing, forming a standard sealed interface.

[0015] The symmetrical elliptical grooves, symmetrical through holes, and symmetrical stepped elliptical grooves on the upper and lower cover plates allow for arbitrary clamping during assembly, ensuring product compression. The symmetrical stepped elliptical grooves on the upper and lower cover plates are used to place retaining rings, ensuring that the fixing screws are integrated with each of the upper and lower cover plates. The clamping screw is designed as a symmetrical long screw to accommodate products with inconsistent heights. A movable nut is installed on the adapter column assembly, limited by a retaining post. During connection, the movable nut moves relative to the adapter column assembly, and a second sealing ring on the adapter column assembly provides durability and sealing. The testing device is compact, easy to use, and multiple units can be placed in high and low temperature chambers to test multiple products, improving testing efficiency. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of the present invention in use.

[0017] Figure 2 An assembly diagram of the integrated ventilation column and adapter column;

[0018] Figure 3 This is a schematic diagram of the assembly of the cover plate, fixing screws, and retaining ring.

[0019] Figure 4 A schematic diagram of the assembly of the integrated vent column, adapter column, and movable nut;

[0020] Figures 1 to 4The reference numerals in the attached drawings represent: 1. Upper cover plate; 2. Lower cover plate; 3. External air source interface; 4. Fixing screw; 5. Wing nut; 6. Clamping bolt; 7. Adapter post; 8. Gasket; 9. Sealing ring 1; 10. Integrated vent column; 11. Plug; 12. Retaining ring; 13. Movable nut; 14. Sealing ring 2; 15. Adapter post assembly. Detailed Implementation

[0021] The technical solution of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0022] Please refer to Figure 1 This embodiment relates to a universal multi-pressure, multi-directional silicon piezoresistive testing device, particularly suitable for omnidirectional, multi-pressure-point testing of silicon piezoresistive pressure sensors. The testing device is ingeniously designed and structurally robust, capable of adapting to the testing needs of silicon piezoresistive sensors of different specifications and interfaces, thus improving the versatility and convenience of the testing. The following is a detailed implementation of this embodiment:

[0023] The testing device in this embodiment mainly consists of an upper cover plate 1, a lower cover plate 2, an integrated ventilation column 10, a fixing screw 4, a clamping bolt 6, a wing nut 5, an adapter column 7, a first sealing ring 9, a gasket 8, an external air source interface 3, a plug 11, a limit ring 12, a movable nut 13, a second sealing ring 14, and an adapter column assembly 15.

[0024] Both the upper cover plate 1 and the lower cover plate 2 are designed as square plates to accommodate the cuboid shape of the silicon piezoresistive sensor. The upper cover plate 1 has symmetrical mounting holes for clamping bolts 6 and mounting slots for fixing screws 4. These holes and slots not only facilitate installation and disassembly but also enhance the versatility of the device. Specifically, the mounting holes for the clamping bolts 6 are designed as a combination of through holes and elliptical holes to accommodate different sized connectors, ensuring that the clamping bolts 6 can accurately and securely fix the silicon piezoresistive sensor. The mounting slots for the fixing screws 4 are designed as elliptical slots, allowing the fixing screws 4 to freely adjust their position within the slot to accommodate the positional requirements of different connectors.

[0025] Reference Figure 3 The upper cover plate 1 and the lower cover plate 2 are also provided with elliptical stepped grooves for installing the limiting retaining ring 12. The setting of the limiting retaining ring 12 ensures that one side of the fixing screw 4 is limited to the upper cover plate 1 and the other side is limited to the elliptical groove, thereby forming a stable fixing structure, effectively preventing parts from falling off, and improving the convenience and safety of operation.

[0026] The integrated vent column 10 is one of the core components of this testing device. One end face of the integrated vent column 10 has multiple evenly distributed vent holes, designed with standard sealing interfaces to accommodate the testing and installation needs of various products. These vent holes connect to the connector of the silicon piezoresistive sensor, allowing the test air path to smoothly enter the sensor for testing. On the other end face of the integrated vent column 10, two symmetrical threaded connection holes are provided. These connection holes are securely connected to the threaded holes on the upper cover plate 1 using fixing screws 4, ensuring that the integrated vent column 10 fits firmly against the upper cover plate 1.

[0027] An external air source interface 3 is provided at the front end of the integrated ventilation column 10 for connecting to the test air circuit. The design of the external air source interface 3 allows the test air circuit to be easily connected to the test device for testing operations. At the rear end of the integrated ventilation column 10, a plug 11 is provided to seal the ventilation hole and prevent leakage of the test air circuit.

[0028] Reference Figure 2 The adapter post 7 is another important component of this testing device. One end connects to the connector of the silicon piezoresistive sensor, and the other end cylindrically engages with the vent hole of the integrated vent post 10. Inside the adapter post 7, a gasket 8 and a first sealing ring 9 are provided, forming a standard radial sealing structure. This sealing structure design ensures the stability and reliability of the medium-pressure airtightness test. In particular, when there is a difference between the adapter post 7 and the product's thread interface, the thread size of the adapter post 7 and the product interface can be adjusted to adapt to different product testing requirements, while the size of the connection part with the integrated vent post 10 remains unchanged, thereby improving the versatility of the testing device.

[0029] During the connection between the adapter post 7 and the silicon piezoresistive sensor, the first sealing ring 9 plays a crucial sealing role. It effectively prevents leakage in the test gas path, ensuring the accuracy and stability of the test. At the same time, the gasket 8 also enhances the stability of the connection, preventing the adapter post 7 from loosening or falling off during the test.

[0030] Reference Figure 4 In addition to adapter post 7, this embodiment also provides adapter post assembly 15 as an alternative solution. When the interface of the silicon piezoresistive sensor is incompatible with adapter post 7, adapter post assembly 15 can be used to adapt to different interface requirements. Adapter post assembly 15 consists of a movable nut 13 and a second sealing ring 14. The movable nut 13 is limited on the adapter post assembly by a stop provided on the adapter post assembly, while the second sealing ring 14 is disposed inside the movable nut 13, serving a sealing function.

[0031] During connection, the movable nut 13 moves relative to the adapter post assembly 15, while the adapter post assembly 15 remains relatively fixed. This design allows the second sealing ring 14 to maintain a fixed position, thereby improving its durability and sealing performance. At the same time, the convenient operation of the movable nut 13 makes the connection and disassembly of the testing device simpler and more efficient.

[0032] During testing, the test gas path is connected to the integrated ventilation column 10 via the external gas source interface 3. Then, the test gas path enters the adapter column 7 or adapter column assembly 15, and connects to the connector of the silicon piezoresistive sensor. During testing, the silicon piezoresistive sensor is subjected to pressure from the test gas path, thereby generating a corresponding electrical signal output. These electrical signals can be collected and analyzed to evaluate the performance of the silicon piezoresistive sensor.

[0033] To ensure the accuracy and stability of the test, this embodiment also adopts a series of measures to eliminate potential interference factors. For example, a cylindrical connection is used between the integrated ventilation column 10 and the adapter column 7 or adapter column assembly 15. This connection method is not only convenient to operate, but also ensures the stability of the test. At the same time, sealing structures are provided inside the adapter column 7 and adapter column assembly 15 to prevent leakage of the test gas path.

[0034] Furthermore, this embodiment also employs an innovative design for the clamping bolt 6. Both ends of the clamping bolt 6 are equipped with evenly distributed long screws, allowing it to adapt to the clamping requirements of products of varying heights. During testing, the clamping degree of the clamping bolt 6 is adjusted by rotating the wing nut 5, ensuring that the silicon piezoresistive sensor is securely fixed between the upper cover plate 1 and the lower cover plate 2. This design not only improves the accuracy of the test but also enhances the structural stability of the device.

[0035] It is worth mentioning that the testing device in this embodiment also has high versatility. Due to the standardized vent interface and adapter post design, the testing device can adapt to the testing needs of various silicon piezoresistive sensors with different specifications and interfaces. Furthermore, by adjusting the thread size and sealing structure of the adapter post 7 or the adapter post assembly 15, the applicability of the testing device can be further expanded.

[0036] In addition to routine pressure testing of the silicon piezoresistive sensor, the testing apparatus of this embodiment can also be used to perform high and low temperature performance tests. This testing method can more comprehensively evaluate the performance of the silicon piezoresistive sensor under different temperature environments, thereby providing strong assurance for its stability and reliability in practical applications.

[0037] In practice, the silicon piezoresistive sensor is first placed between the upper cover plate 1 and the lower cover plate 2, and connected to the vent of the integrated vent column 10 via a connector. Then, a suitable adapter pin 7 or adapter pin assembly 15 is selected and connected according to the interface specifications of the silicon piezoresistive sensor. Next, the tightening of the clamping bolt 6 is adjusted by rotating the wing nut 5 to ensure the silicon piezoresistive sensor is securely fixed between the upper cover plate 1 and the lower cover plate 2. Finally, the test air path is connected to the external air source interface 3, and the test operation is performed.

[0038] During testing, the performance of the silicon piezoresistive sensor can be evaluated by acquiring and analyzing its electrical signal output. Simultaneously, parameters such as pressure and temperature in the test gas path can be adjusted according to testing requirements to simulate different testing environments. This flexible testing method enables the testing device in this embodiment to more comprehensively evaluate the performance of the silicon piezoresistive sensor and provides strong assurance for its stability and reliability in practical applications.

[0039] Furthermore, the testing device in this embodiment has advantages such as simple structure, convenient operation, and easy maintenance. Due to the adoption of standardized components and a modular design, the assembly and disassembly of the testing device are very simple and efficient. At the same time, the connections between the various components also adopt standardized interfaces and connection methods, making maintenance and replacement of components easier and more convenient.

[0040] In practical implementation, the testing device can be further improved and optimized according to actual needs. For example, more vents and adapter posts can be added to meet the testing requirements of more specifications of silicon piezoresistive sensors; the design of the sealing structure can be optimized to improve the accuracy and stability of the test; and an automated control module can be added to achieve automation and intelligence in the test. These improvements and optimizations will further enhance the applicability and competitiveness of the testing device in this embodiment.

[0041] In summary, this embodiment provides a universal silicon piezoresistive testing device integrating multiple pressures and orientations. This device is ingeniously designed, structurally robust, highly versatile, and easy to operate. It can comprehensively evaluate the performance of silicon piezoresistive sensors and provide strong assurance for their stability and reliability in practical applications. Furthermore, the device is easy to maintain and improve.

[0042] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An integrated multi-pressure multi-azimuth silicon piezoresistive universal testing device, characterized in that, The utility model relates to a kind of integrated venting column for silicon pressure sensor, including: Upper cover plate (1) and lower cover plate (2), the upper cover plate (1) is symmetrically provided with integrated venting column (10) between lower cover plate (2), two the integrated venting column (10) is communicated with silicon pressure sensor by connecting pipe nozzle;The end face of the integrated venting column (10) is provided with multiple venting holes, the venting hole is connected with the connecting pipe nozzle, the front end of the integrated venting column (10) is provided with external air source interface (3) communicated with test gas path.

2. The integrated multi-pressure multi-azimuth silicon piezoresistive universal testing device of claim 1, wherein, The venting hole is provided with adapter column (7) or adapter column combination (15).

3. The integrated multi-pressure multi-azimuth silicon piezoresistive universal testing device of claim 2, wherein, The adapter column combination (15) includes movable nut (13) and second sealing ring (14) arranged in movable nut (13).

4. The integrated multi-pressure multi-azimuth silicon piezoresistive universal testing device of claim 2, wherein, The inside of the adapter column (7) is provided with gasket (8) and first sealing ring (9).

5. The integrated multi-pressure multi-azimuth silicon piezoresistive universal testing device of claim 1, wherein, One side of the integrated venting column (10) is provided with fixed screw (4), and the integrated venting column (10) is attached to the upper cover plate (1) through the fixed screw (4).

6. The integrated multi-pressure multi-azimuth silicon piezoresistive universal testing device of claim 5, wherein, The upper cover plate (1) and the lower cover plate (2) are both provided with an oval groove for mounting the fixed screw (4).

7. The integrated multi-pressure multi-azimuth silicon piezoresistive universal testing device of claim 5, wherein, The upper cover plate (1) and the lower cover plate (2) are both provided with an oval stepped groove, and the fixed screw (4) is provided with a limit check ring (12), and the oval stepped groove is used for mounting the limit check ring (12).

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