High-precision axial floating force control device

Abstract

The utility model relates to the technical field of axial floating force control devices, and discloses a high-precision axial floating force control device which comprises an outer shell, a limiting sleeve is fixedly connected in the outer shell, a transmission valve element is movably connected in the limiting sleeve in a sleeved mode, a transmission pipe is fixedly connected to the inner side of the lower portion of the transmission valve element, and the inner side of the lower portion of the transmission pipe is fixedly connected with a transmission shaft. And a first limiting plate is fixedly connected to the interior of the shell, a limiting sleeve is fixedly connected to the lower portion of the first limiting plate, and the lower end of the transmission pipe is movably connected into the limiting sleeve in a sleeved mode. According to the high-precision axial floating force control device, the transmission valve element can be driven through airflow through the arranged transmission valve element, equipment abrasion is reduced, the service life of equipment is prolonged, the floating precision is improved, the transmission valve element can be protected through the arranged spring, and collision damage caused by excessive movement of the transmission valve element is prevented.

Description

TECHNICAL FIELD

[0001] The utility model relates to axial floating force control device technical field, especially a kind of high-precision axial floating force control device. BACKGROUND

[0002] High-precision axial floating force control device is a kind of equipment for realizing accurate control to workpiece in precision manufacturing and assembly process.This kind of equipment is usually applied in the application scene needing very high position precision and repeat accuracy, for example, semiconductor manufacturing, optical element assembly and so on.

[0003] High-precision axial floating force control device aims to meet the demand of high-end manufacturing industry for accurate positioning and dynamic response.The traditional mechanical axial transmission is through direct contact transmission, which is easy to cause mechanical wear, reduce the service life of equipment, and inconvenient to fine-tune, realize high-precision positioning, therefore, a kind of high-precision axial floating force control device is presented. UTILITY MODEL CONTENT

[0004] The main purpose of the utility model is to provide a kind of high-precision axial floating force control device, solve the problem that the traditional mechanical axial transmission is through direct contact transmission, which is easy to cause mechanical wear, reduce the service life of equipment, and inconvenient to fine-tune, realize high-precision positioning.

[0005] To achieve the above-mentioned purpose, the technical scheme adopted by the utility model is as follows:

[0006] A kind of high-precision axial floating force control device, including shell, the inside fixed connection of the shell is limit bushing, the inside movable sleeve of the limit bushing is connected with transmission valve core, the lower side of the transmission valve core is fixedly connected with transmission pipe, the inside fixed connection of the shell is first limit plate, the lower side of the first limit plate is fixedly connected with limit sleeve, the lower end of the transmission pipe is movably sleeved in limit sleeve.

[0007] Further, the lower side of the transmission valve core is fixedly connected with four springs, and the lower side of the four springs is fixedly connected with the first limit plate.

[0008] Further, the upper side of the shell is fixedly installed with sealing head in the inside, the lower side of the sealing head is fixedly connected with air passage guide groove in the inside, and the inside of the air passage guide groove is provided with air hole.

[0009] Further, the lower side of the first limit plate is fixedly connected with second limit plate, and the lower side of the second limit plate is fixedly connected with shell.

[0010] Further, the lower part of the transmission pipe is fixedly connected with a transmission plate, a fixed groove is formed in the upper part of the transmission plate, a fixed support is abutted in the fixed groove, a first bolt is screw-connected to the inner side of the fixed support, and the lower part of the first bolt is screw-connected with the transmission plate.

[0011] Further, two second bolts are screw-connected to the inner side of the fixed support at equal intervals, a sensor is screw-connected to the inner side of the two second bolts, a mounting groove is formed in the outer side of the shell, the sensor is movably arranged in the mounting groove, and the upper part of the sensor is fixedly connected with the shell.

[0012] Further, a first connecting air pipe is fixedly connected to the outer side of the shell, a second connecting air pipe is fixedly connected to the outer side of the shell, and a third connecting air pipe is fixedly connected to the outer side of the shell.

[0013] Compared with the prior art, the high-precision axial floating force control device has the following beneficial effects:

[0014] 1、the transmission valve core is driven by the airflow, the equipment wear is reduced, the service life of the equipment is improved, the floating precision is improved, the first airflow is injected through the first connecting air pipe, the first airflow enters the air guide groove through the air inlet channel in the shell, the first airflow downwardly extrudes and pushes the transmission valve core, the second airflow is injected through the second connecting air pipe, the second airflow enters the space between the transmission valve core and the first limiting plate through the air inlet channel in the shell, and the second airflow upwardly extrudes and pushes the transmission valve core, the transmission valve core is pushed from top to bottom through the action of the first airflow and the second airflow, the position of the transmission valve core is adjusted, the transmission valve core drives the transmission plate through the transmission pipe, and then the axial floating force control is realized.

[0015] 2、the spring is arranged, the transmission valve core is protected, and the transmission valve core is prevented from colliding and being damaged due to excessive movement, when the transmission valve core moves excessively, the transmission valve core drives the spring to compress or stretch, the movement of the transmission valve core is buffered through the spring, the transmission valve core is protected, and the transmission valve core is prevented from colliding and being damaged due to excessive movement.

[0016] The parts not involved in the device are the same as or can be realized by the prior art. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is a whole structure schematic view of the first angle of the high-precision axial floating force control device.

[0018] Figure 2The utility model discloses a high-precision axial floating force control device's first angle's overall structure schematic diagram.

[0019] Figure 3 The utility model discloses a high-precision axial floating force control device's limiting sleeve's partial structure schematic diagram.

[0020] Figure 4 The utility model discloses a high-precision axial floating force control device's transmission valve core's partial structure schematic diagram.

[0021] Figure 5 The utility model discloses a high-precision axial floating force control device's spring's partial structure schematic diagram.

[0022] In the drawing: 1, shell, 2, sealing head, 3, first connecting air pipe, 4, second connecting air pipe, 5, third connecting air pipe, 6, limiting sleeve, 7, first limiting plate, 8, second limiting plate, 9, spring, 10, transmission valve core, 11, aeration guide slot, 12, limiting sleeve, 13, transmission pipe, 14, fixed support, 15, first bolt, 16, sensor, 17, second bolt, 18, installation groove, 19, transmission plate. DETAILED DESCRIPTION

[0023] In order to make the technical means, creation features, purposes and effects of the utility model easy to understand, the utility model is further described below in combination with specific embodiments.

[0024] As shown in Figures 1-5 A high-precision axial floating force control device, including shell 1, the inside fixed connection of shell 1 has limiting sleeve 6, the inside movable sleeve of limiting sleeve 6 has transmission valve core 10, the lower side fixed connection of transmission valve core 10 has transmission pipe 13, the inside fixed connection of shell 1 has first limiting plate 7, the lower side fixed connection of first limiting plate 7 has limiting sleeve 12, the lower end movable sleeve of transmission pipe 13 is in limiting sleeve 12, by adopting the above technical scheme, the inside of limiting sleeve 6 is provided with limiting groove, can limit transmission valve core 10 only up and down movement, can not rotate.

[0025] As shown in Figures 1-5 The lower side equidistance fixed connection of transmission valve core 10 has four springs 9, the lower side fixed connection of four springs 9 has first limiting plate 7, by adopting the above technical scheme, the pre-tightening force of spring 9 is designed, can buffer the movement of transmission valve core 10.

[0026] As shown in Figures 1-5As shown, the upper inside of the shell 1 is fixedly installed with a sealing head 2, the lower inside of the sealing head 2 is fixedly connected with a ventilation guide groove 11, and the inside of the ventilation guide groove 11 is provided with a ventilation hole. By adopting the above technical scheme, the ventilation guide groove 11 can guide the airflow more uniformly between the sealing head 2 and the transmission valve core 10, so that the airflow can better push the transmission valve core 10.

[0027] As shown in the figure, Figures 1-5 The lower side of the first limiting plate 7 is fixedly connected with the second limiting plate 8, and the outer side of the lower side of the second limiting plate 8 is fixedly connected with the shell 1. Through such a setting, the second limiting plate 8 can play the effect of strengthening the support structure.

[0028] As shown in the figure, Figures 1-5 The lower side of the transmission pipe 13 is fixedly connected with a transmission plate 19, the upper side of the transmission plate 19 is provided with a fixed groove, the fixed groove is abutted with a fixed support 14, the inside of the fixed support 14 is threadedly connected with a first bolt 15, and the lower side of the first bolt 15 is threadedly connected with the transmission plate 19. Through such a setting, the fixed support 14 is fixed on the transmission plate 19 through the first bolt 15, and the fixed support 14 can be removed by removing the first bolt 15.

[0029] As shown in the figure, Figures 1-5 The inside of the fixed support 14 is equidistantly threadedly connected with two second bolts 17, the inside of the two second bolts 17 is threadedly connected with a sensor 16, the outside of the shell 1 is provided with a mounting groove 18, and the sensor 16 is movably arranged in the mounting groove 18. The upper sensing end of the sensor 16 is fixedly connected with the shell 1. Through such a setting, the sensor 16 is fixedly connected with the shell 1 through the sensing end, and the distance change between the transmission plate 19 and the shell 1 can be detected, and the axial floating force can be more accurately detected.

[0030] The outside of the sensor 16 is connected with an electric control box, which can control the inflation of the first connecting air pipe 3 and the second connecting air pipe 4 according to the feedback of the sensor 16, and further control the high-precision control of the axial floating force.

[0031] As shown in the figure, Figures 1-5 The outside of the shell 1 is fixedly connected with the first connecting air pipe 3, the outside of the shell 1 is fixedly connected with the second connecting air pipe 4, and the outside of the shell 1 is fixedly connected with the third connecting air pipe 5. Through such a setting, the first connecting air pipe 3 can inject the airflow into the ventilation guide groove 11 through the air inlet channel inside the shell 1.

[0032] The second connecting air pipe 4 can enter the space between the transmission valve core 10 and the first limiting plate 7 through the air inlet channel inside the shell 1.

[0033] The third connecting air pipe 5 can pass through the pipeline inside the shell 1 to balance the airflow entering the inside of the shell 1, realize air pressure balance, and prevent the shell 1 from exploding.

[0034] In use, the first gas flow is injected through the first connecting air pipe 3, the first gas flow enters the air guide groove 11 through the air inlet channel inside the shell 1, the first gas flow pushes and drives the transmission valve core 10 downward, at the same time, the second gas flow is injected through the second connecting air pipe 4, the second gas flow enters the space between the transmission valve core 10 and the first limiting plate 7 through the air inlet channel inside the shell 1, and the second gas flow pushes and drives the transmission valve core 10 upward, the transmission valve core 10 is pushed and driven from top to bottom by the first gas flow and the second gas flow, the position of the transmission valve core 10 is adjusted, and the transmission valve core 10 drives the transmission plate 19 through the transmission pipe 13, thereby realizing axial floating force control.

[0035] When the transmission valve core 10 moves excessively, the transmission valve core 10 drives the spring 9 to compress or stretch, the movement of the transmission valve core 10 is buffered through the spring 9, and the protection of the transmission valve core 10 is realized.

[0036] The utility model provides a kind of high-precision axial floating force control device, solve the traditional mechanical axial transmission by direct contact transmission, it is easy to cause mechanical wear, reduce the service life of equipment, and it is inconvenient to carry out fine adjustment, realize the problem of high-precision positioning, it is more practical.

[0037] The above shows and describes the basic principles and main features of the utility model and the advantages of the utility model. It should be understood by those skilled in the art that the utility model is not limited by the above examples, and the above examples and descriptions in the specification are only to illustrate the principles of the utility model. Without departing from the spirit and scope of the utility model, the utility model can also have various changes and improvements, and these changes and improvements all fall within the scope of the claimed utility model. The scope of protection of the utility model is defined by the appended claims and their equivalents.

Claims

1. A high-precision axial floating force control device comprising a housing (1), characterized in that: The inside of the shell (1) is fixedly connected with a limiting sleeve (6), the inside of the limiting sleeve (6) movably sheaths a transmission valve core (10), the lower inside of the transmission valve core (10) is fixedly connected with a transmission pipe (13), the inside of the shell (1) is fixedly connected with a first limiting plate (7), the lower side of the first limiting plate (7) is fixedly connected with a limiting sleeve (12), and the lower end of the transmission pipe (13) movably sheaths in the limiting sleeve (12).

2. The high-precision axial floating force control device according to claim 1, characterized in that: The lower side of the transmission valve core (10) is fixedly connected with four springs (9), and the lower side of the four springs (9) is fixedly connected with the first limiting plate (7).

3. The high-precision axial floating force control device according to claim 2, characterized in that: The upper side of the shell (1) is fixedly connected with a sealing head (2), the lower inside of the sealing head (2) is fixedly connected with a ventilation guide groove (11), and the inside of the ventilation guide groove (11) is provided with a ventilation hole.

4. The high-precision axial floating force control device according to claim 3, characterized in that: The lower side of the first limiting plate (7) is fixedly connected with a second limiting plate (8), and the lower side of the second limiting plate (8) is fixedly connected with the shell (1).

5. The high-precision axial floating force control device according to claim 4, characterized in that: The lower side of the transmission pipe (13) is fixedly connected with a transmission plate (19), the upper side of the transmission plate (19) is provided with a fixed groove, the fixed groove abuts against a fixed support (14), the inside of the fixed support (14) is screw-connected with a first bolt (15), and the lower side of the first bolt (15) is screw-connected with the transmission plate (19).

6. The high-precision axial floating force control device according to claim 5, characterized in that: The inside of the fixed support (14) is screw-connected with two second bolts (17) at equal intervals, the inside of the two second bolts (17) is screw-connected with a sensor (16), the outside of the shell (1) is provided with a mounting groove (18), the sensor (16) is movably arranged in the mounting groove (18), and the upper sensing end of the sensor (16) is fixedly connected with the shell (1).

7. The high-precision axial floating force control device according to claim 6, characterized in that: The outside of the shell (1) is fixedly connected with a first connecting air pipe (3), the outside of the shell (1) is fixedly connected with a second connecting air pipe (4), and the outside of the shell (1) is fixedly connected with a third connecting air pipe (5).

Images