MEMS accelerometer chip vibration test tool
Through innovative design of aluminum tooling and test PCB, the problem of test distortion caused by high-frequency vibration of MEMS accelerometer chips was solved, realizing high-frequency accuracy and high-efficiency multi-chip testing, and improving the accuracy and efficiency of test results.
Patent Information
- Application Number
- CN202520135016.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-20
- Publication Date
- 2026-01-02
- Estimated Expiration
- 2035-01-20
AI Technical Summary
In traditional MEMS accelerometer chip testing, high-frequency vibrations cause test results to be distorted, and existing elevated installation methods affect test accuracy.
The design employs aluminum tooling and test PCB, which are fixed together with screws to avoid high-frequency vibration distortion, increase the rigidity and vibration resistance of the aluminum tooling, and set machining grooves to avoid pin interference, enabling parallel testing of multiple chips.
It improves the accuracy and frequency range of test results, and the frequency can be stably increased to above 80Hz, significantly improving test efficiency and accuracy. Grooves are machined on the aluminum tooling to avoid pin interference and ensure installation stability.
Smart Images

Figure CN223756768U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to micro electro mechanical system (MEMS) test technical field, more specifically, it relates to a MEMS accelerometer chip vibration test frock. BACKGROUND
[0002] MEMS accelerometer chip as the key component in modern electronic equipment, its performance stability and precision are directly related to the overall performance of the equipment. Therefore, after the chip manufacturing is completed, strict dynamic performance test, especially bandwidth test, is needed to ensure that it meets the design requirements. The traditional test method depends on the vibration table to provide the sweep frequency sine wave vibration, and the MEMS accelerometer and the standard accelerometer sensor are installed on the vibration table at the same time. The vibration table generates sine wave vibration of different frequencies and amplitudes to simulate the acceleration change in actual use, and collects the output data of the two accelerometers. Using these data, the frequency response graph can be drawn to accurately calculate the bandwidth of the MEMS accelerometer.
[0003] However, in the actual test process, the MEMS accelerometer chip needs to be connected through a special test base during the test, and the test base is usually welded on a test PCB. Because there are a large number of pins on the back of the test PCB, which are used to connect with the test equipment or system, therefore, when the test PCB is installed on the vibration table, it must be raised to avoid direct contact with the vibration table.
[0004] The common way to raise is to support the PCB by copper studs about 10mm high. However, this way of installation is easy to cause distortion of vibration performance and affect the accuracy of test results when the frequency is higher than 80Hz due to the transmission of vibration energy and the slight deformation of the PCB. UTILITY MODEL CONTENTS
[0005] In view of the deficiencies of the prior art, the utility model aims to provide a MEMS accelerometer chip vibration test frock for improving the accuracy of test results.
[0006] To achieve the above-mentioned purpose, the utility model provides the following technical scheme:
[0007] A MEMS accelerometer chip vibration test frock, comprising an aluminum frock, a test PCB and a test base,
[0008] The test PCB is placed between the aluminum frock and the test base,
[0009] The test PCB is placed on the aluminum frock and fixedly connected with the aluminum frock through screws,
[0010] The test base is placed on the test PCB and fixedly welded with the test PCB,
[0011] The test base is provided with a plurality of screw holes,
[0012] The test PCB is provided with a plurality of pins,
[0013] The aluminum tooling is provided with a plurality of machining grooves, and the machining grooves are arranged between adjacent pins.
[0014] The utility model further sets up: machining groove includes first connecting groove and second connecting groove, first connecting groove and second connecting groove vertical distribution, first connecting groove and second connecting groove intercommunication.
[0015] The utility model further sets up: first connecting groove and second connecting groove all have two.
[0016] The utility model further sets up: test base and test PCB all have four.
[0017] By adopting the above technical scheme, the utility model has the beneficial effects that:
[0018] By fixing the test PCB screw on the aluminum tooling, the high-frequency vibration distortion problem caused by the high test PCB is avoided, the test frequency can be stably improved to above 80Hz without distortion, in actual test, the vibration test nature is good after the frequency is higher than 80Hz, thereby improving the accuracy of test result, the test base and test PCB all have four, realize the parallel test of multiple chips, significantly improve the test efficiency, the machining groove on the aluminum tooling avoids the pin on the test PCB, avoids the interference installation, further improves the accuracy of test result. BRIEF DESCRIPTION OF DRAWINGS
[0019] Figure 1 It is the structural schematic diagram of the utility model embodiment.
[0020] Aluminum tooling-1, test PCB-2, test base-3, screw hole-4, pin-5, machining groove-6, first connecting groove-7, second connecting groove-8. DETAILED DESCRIPTION
[0021] The technical scheme in the utility model embodiment will be clearly and completely described below in combination with the drawings in the utility model embodiment, and obviously, the described embodiment is only a part of the embodiment of the utility model, not all the embodiment. Based on the embodiment in the utility model, all other embodiments obtained by the person skilled in the art without creative labor belong to the range of protection of the utility model.
[0022] In the description of the utility model, it is understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model.
[0023] As shown in Figure 1 The MEMS accelerometer chip vibration test tool includes an aluminum tool, a test PCB and a test base, the aluminum tool is installed on a vibration table, screws are penetrated through the test PCB and then fixed with the aluminum tool, the test PCB and the test base are fixed by welding, at this time, the aluminum tool, the test PCB and the test base form an integral whole, the test base and the test PCB each have four, multiple chips can be tested in parallel, and the test efficiency is significantly improved,
[0024] The aluminum tool has good rigidity and vibration resistance, can effectively reduce deformation in the vibration process, and ensures the accuracy of test results.
[0025] The test PCB is used for welding the peripheral circuit of the chip and the test base and output and lead welding, realizes circuit connection and signal transmission.
[0026] The aluminum tool is provided with a plurality of machining grooves, the machining grooves avoid the pins of the test PCB, avoid interference installation, the machining grooves include a first connecting groove and a second connecting groove, the first connecting groove and the second connecting groove are vertically distributed, the first connecting groove and the second connecting groove are communicated, the first connecting groove and the second connecting groove each have two, when the test PCB is placed, the two first connecting grooves and the two second connecting grooves are not communicated with the pins on the test PCB,
[0027] Working principle: first, prepare the test base with screw holes and the test PCB, weld the chip and the peripheral circuit on the test PCB, then place the test PCB on the aluminum tool, the machining grooves on the aluminum tool avoid the pins on the test PCB, fix the test PCB on the aluminum tool through the screws. Finally, install the entire aluminum tool on the vibration table and perform vibration test. During the test, the vibration table provides a sweep frequency sine wave vibration, collects and analyzes data, draws a frequency response graph, and calculates the bandwidth of the MEMS accelerometer.
[0028] The above merely describes preferred embodiments of the present application and is not intended to limit the present application, and any change and replacement within the technical scheme of the present application made by those skilled in the art shall be included in the protection scope of the present application.
Claims
1. A MEMS accelerometer chip vibration test tool, characterized in that, it comprises an aluminum tool, a test PCB and a test base, the test PCB is arranged between the aluminum tool and the test base, the test PCB is arranged on the aluminum tool and fixedly connected to the aluminum tool by screws, the test base is arranged on the test PCB and fixedly connected to the test PCB by welding, a plurality of screw holes are formed in the test base, a plurality of pins are formed in the test PCB, a plurality of machining grooves are formed in the aluminum tool, and the machining grooves are arranged between adjacent pins.
2. The MEMS accelerometer chip vibration test tool of claim 1, wherein, The machining grooves comprise a first connecting groove and a second connecting groove, and the first connecting groove and the second connecting groove are vertically distributed and connected.
3. The MEMS accelerometer chip vibration test tool of claim 2, wherein, Both the first connecting groove and the second connecting groove have two.
4. The MEMS accelerometer chip vibration test tool of claim 1, wherein, Both the test base and the test PCB have four.