Surface impurity removal equipment for carbon silicon plate processing

Abstract

The utility model relates to the technical field of material science and engineering, in particular to surface impurity removal equipment for carbon silicon plate processing. The utility model provides surface impurity removal equipment for carbon silicon plate processing, which comprises a bottom plate, supporting legs, electric sliding rails, electric sliding blocks, a guide piece, an electric push rod and the like, the bottom of the bottom plate is fixedly connected with the supporting legs which are symmetrical front and back and left and right, the top of the bottom plate is fixedly connected with the electric sliding rails which are symmetrical left and right, and each electric sliding rail is connected with the corresponding electric sliding block in a sliding mode. A guide piece is fixedly connected between the tops of the two electric sliding blocks, and an electric push rod is fixedly connected to the upper portion of the guide piece. The rotary water sprayer system is introduced, and the bevel gear transmission system is driven by the motor, so that the water sprayer can rotate in all directions in the cleaning process, each area can be fully cleaned, the limitation that a traditional fixed sprayer can only clean from a single angle is avoided, the secondary cleaning effect is remarkably improved, and the cleaning efficiency is improved. The condition of repeatedly cleaning the treated area is reduced, and the cleaning efficiency is greatly improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to material science and engineering technical field especially relates to a surface impurity removal equipment for carbon silicon plate processing. BACKGROUND

[0002] In the manufacturing and processing of carbon silicon plate, it is crucial to ensure the surface is clean and free of impurities. Surface impurities not only affect the appearance quality of the product, but also may adversely affect the subsequent process (such as deposition, etching, etc.), thereby reducing the product performance and reliability. The traditional carbon silicon plate surface impurity removal method mainly relies on ultrasonic cleaning technology and water jet cleaning technology. Ultrasonic cleaning utilizes the cavitation effect generated by high-frequency vibration to effectively remove dust, particulate matter and other contaminants attached to the surface of the carbon silicon plate. Water jet cleaning further removes residual impurities and loosens dirt during the ultrasonic cleaning process by washing the carbon silicon plate surface with high-pressure water flow.

[0003] However, the traditional water jet cleaning technology has obvious limitations: traditional cleaning equipment is usually equipped with fixed water jet nozzles. These nozzles can only spray water flow from a single angle to the surface of the carbon silicon plate. Since the position of the nozzles is fixed and cannot rotate or move with the workpiece, some areas are difficult to be fully covered, especially at the edges and corners, resulting in unsatisfactory cleaning effect. When a second cleaning is needed, since the nozzles are fixed, the second water spray may repeat cleaning the already treated areas, and cannot effectively remove the parts that were not cleaned the first time. This not only wastes water resources and time, but also may cause residual impurities to remain on the surface, failing to achieve the desired cleanliness.

[0004] Therefore, there is a particular need for a carbon silicon plate processing surface impurity removal equipment with rotating nozzles to solve the above problems. SUMMARY

[0005] In order to overcome the shortcomings of fixed nozzles that cannot rotate and low efficiency of secondary cleaning, the utility model provides a carbon silicon plate processing surface impurity removal equipment.

[0006] The utility model discloses a surface impurity removing equipment for carbon-silicon plate processing, characterized in that it comprises a bottom plate, supporting feet, electric sliding rails, electric sliding blocks, guide elements, electric push rods, bearing frames, double-cavity cleaning devices, controllers, ultrasonic cleaning machines, filter screens, motors, bevel gears and water sprayers, the bottom plate bottom is fixedly connected with front-to-back and left-to-right symmetrical supporting feet, the bottom plate top is fixedly connected with left-to-right symmetrical electric sliding rails, each electric sliding rail is slidably connected with an electric sliding block, the two electric sliding blocks are fixedly connected with a guide element between the top, the guide element upper part is fixedly connected with an electric push rod, the output shaft of the electric push rod is fixedly connected with a bearing frame, the bottom plate top is fixedly connected with a double-cavity cleaning device, the double-cavity cleaning device is located between the two electric sliding rails, the double-cavity cleaning device interior front side is provided with a front cleaning cavity, and the rear side is provided with a rear cleaning cavity, the double-cavity cleaning device front part left side wall is fixedly connected with a controller, the double-cavity cleaning device front side interior is fixedly connected with left-to-right symmetrical ultrasonic cleaning machines, the double-cavity cleaning device interior is fixedly connected with left-to-right symmetrical filter screens, the filter screen is located on the one side of the ultrasonic cleaning machine, the double-cavity cleaning device rear part left side wall is fixedly connected with a motor, the motor rotating shaft is rotatably connected to the double-cavity cleaning device through bearing, the motor rotating shaft is fixedly connected with a bevel gear, the double-cavity cleaning device rear side interior is rotatably connected with front-to-back and left-to-right symmetrical water sprayers, the bevel gear on the motor rotating shaft is connected with the front water sprayer, the right side water sprayer is fixedly connected with front-to-back symmetrical bevel gears, the front side bevel gear of the right side water sprayer is engaged with the bevel gear on the front water sprayer, the rear side water sprayer is fixedly connected with left-to-right symmetrical bevel gears, the right side bevel gear of the rear side water sprayer is engaged with the rear side bevel gear on the right side water sprayer, the left side water sprayer rear part is fixedly connected with a bevel gear, the left side bevel gear on the rear side water sprayer is engaged with the bevel gear on the left side water sprayer, and the electric sliding rail, the electric sliding block, the electric push rod, the ultrasonic cleaning machine, the motor and the water sprayer are electrically connected with the controller.

[0007] Optionally, the double-cavity cleaning device rear part left side wall is slidably provided with a water gun.

[0008] Optionally, the double-cavity cleaning device interior is slidably provided with front-to-back symmetrical filter frames.

[0009] Optionally, the double-cavity cleaning device front side wall is fixedly provided with left-to-right symmetrical placement plates.

[0010] Optionally, the supporting feet lower part is provided with a plurality of threaded holes.

[0011] Optionally, the front water sprayer length is equal to the rear water sprayer length, the left side water sprayer length is equal to the right side water sprayer length, and the front water sprayer length is longer than the right side water sprayer length.

[0012] The utility model discloses a design starting point, concept and advantage are: 1, the utility model discloses a rotating water sprayer system is introduced, utilizes motor drive bevel gear drive system, makes water sprayer all -round rotation in the cleaning process, not only ensures that every area can be fully cleaned, avoids the limitation that traditional fixed nozzle can only clean from single angle, still significantly improves the effect of secondary cleaning, reduces the situation of repeated cleaning already handled area, greatly promotes cleaning efficiency.

[0013] 2, the utility model discloses the way that ultrasonic cleaning and high pressure water flow flush are combined, first through the high frequency vibration and cavitation effect of ultrasonic and remove stubborn dirt, utilize high pressure water flow to clean up residual impurities completely, ensure that the surface of carbon silicon plate is without any residual, thereby significantly improve the cleaning quality.

[0014] 3, the utility model discloses the design of electric slide rail, electric sliding block and electric push rod makes that bearing frame can automatically move to the position of convenient operation, and the operator loads and unloads carbon silicon plate, and the operation process of the utility model discloses is unified management by controller, simplifies the operation step, reduces the requirement to the skill of operator.

[0015] 4, the whole cleaning process of the utility model discloses is highly automated, reduces the demand of manual intervention, avoids the risk that operator directly touches cleaning fluid or high pressure water flow, especially when taking out the place that has not been cleaned, and the water gun as auxiliary tool can carry out local supplementary cleaning under the condition that the main cleaning process is not interrupted, further guarantee operation safety. DRAWINGS

[0016] Figure 1 It is the three-dimensional structure schematic diagram of the utility model.

[0017] Figure 2 It is the three-dimensional structure schematic diagram of the utility model double cavity cleaner.

[0018] Figure 3 It is the three-dimensional structure schematic diagram of the utility model double cavity cleaner.

[0019] Figure 4 It is the three-dimensional structure schematic diagram of the utility model motor, bevel gear and water sprayer.

[0020] Figure 5 It is the three-dimensional structure schematic diagram of the utility model bottom plate, support foot and electric slide rail.

[0021] Figure 6 It is the three-dimensional structure schematic diagram of the utility model filter frame.

[0022] Explanation of reference signs: 1, bottom plate, 2, support foot, 3, electric sliding rail, 4, electric sliding block, 5, guide, 6, electric push rod, 7, bearing frame, 8, double-cavity cleaner, 801, front cleaning cavity, 802, rear cleaning cavity, 9, controller, 10, ultrasonic cleaner, 11, filter screen, 12, motor, 13, bevel gear, 14, water sprayer, 15, water gun, 16, filter frame, 17, placing plate. DETAILED DESCRIPTION

[0023] The following description is merely preferred embodiments of the present application and is not intended to limit the scope of the present application.

[0024] Embodiment: A surface impurity removal equipment for carbon-silicon plate processing, such as Figures 1-6As shown, including the base plate 1, support feet 2, electric slide rail 3, electric slide block 4, guide 5, electric push rod 6, carrier frame 7, double cavity cleaner 8, controller 9, ultrasonic cleaner 10, filter screen 11, motor 12, bevel gear 13, water sprayer 14, water gun 15, filter frame 16 and placement plate 17, the bottom of the base plate 1 is bolted to the front and rear and left and right symmetrical support feet 2, a plurality of threaded holes are formed in the lower part of the support feet 2, which are convenient for being fixed to the horizontal ground or other horizontal platform by screws, the top of the base plate 1 is fixedly connected with left and right symmetrical electric slide rails 3, the electric slide block 4 is slidably connected to each electric slide rail 3, the guide 5 is welded between the top of the two electric slide blocks 4, the electric push rod 6 is bolted to the upper part of the guide 5, the output shaft of the electric push rod 6 is fixedly connected with the carrier frame 7, which is used for carrying the carbon-silicon plate to be cleaned, the double cavity cleaner 8 is adhesively connected to the top of the base plate 1, the double cavity cleaner 8 is located between the two electric slide rails 3, the front cleaning cavity 801 is formed in the front side of the double cavity cleaner 8, and the rear cleaning cavity 802 is formed in the rear side, the controller 9 is fixedly connected to the left side wall of the front part of the double cavity cleaner 8 and is responsible for overall operation control, the ultrasonic cleaner 10 is bolted to the inside of the front side of the double cavity cleaner 8, which is used for removing dust, particulate matter and other pollutants attached to the surface of the carbon-silicon plate, the filter screen 11 is adhesively connected to the inside of the double cavity cleaner 8, which is located on the side of the ultrasonic cleaner 10, and is used for preventing dust, particulate matter and other pollutants from affecting the operation of the ultrasonic cleaner 10, the motor 12 is bolted to the left side wall of the rear part of the double cavity cleaner 8, the rotating shaft of the motor 12 penetrates and is rotatably connected to the double cavity cleaner 8 through a bearing, the bevel gear 13 is welded to the rotating shaft of the motor 12, the water sprayer 14 is rotatably connected to the inside of the rear part of the double cavity cleaner 8, the length of the front water sprayer 14 is equal to that of the rear water sprayer 14, the length of the left water sprayer 14 is equal to that of the right water sprayer 14, the length of the front water sprayer 14 is longer than that of the right water sprayer 14, the bevel gear 13 on the rotating shaft of the motor 12 is connected to the front water sprayer 14, the front and rear symmetrical bevel gears 13 are welded to the right water sprayer 14, the front bevel gear 13 of the right water sprayer 14 is engaged with the bevel gear 13 on the front water sprayer 14, the left and right symmetrical bevel gears 13 are welded to the right water sprayer 14, the right bevel gear 13 of the right water sprayer 14 is engaged with the rear bevel gear 13 on the right water sprayer 14, the bevel gear 13 is welded to the rear part of the left water sprayer 14, the left bevel gear 13 on the rear water sprayer 14 is engaged with the bevel gear 13 on the left water sprayer 14, so that all the water sprayers 14 can rotate synchronously to realize omnidirectional water spraying and cleaning, the electric slide rail 3, the electric slide block 4, the electric push rod 6, the ultrasonic cleaner 10, the motor 12 and the water sprayer 14 are electrically connected with the controller 9, the water gun 15 is slidably placed on the left side wall of the rear part of the double cavity cleaner 8 and is located behind the motor 12, which can be used for manual auxiliary cleaning or emergency flushing, the filter frame 16 is slidably placed in the double cavity cleaner 8, which is symmetrical front and rear, and is convenient for cleaning and maintaining the filter screen 11.To ensure the cleaning efficiency in long-term use, the front side wall of the double-cavity cleaner 8 is bolted with left-right symmetrical placement plates 17 for placing carbon-silicon plates or temporarily placing tools, which is convenient for operators to use.

[0025] When the carbon-silicon plate needs to be cleaned, first, place the support feet 2 on the horizontal ground and ensure that the bottom plate 1 is in a horizontal state. The threaded holes in the lower part of the support feet 2 can be used to fix the equipment with screws to ensure stability. Pour an appropriate amount of cleaning liquid into the front cleaning cavity 801 and ensure that the liquid level is moderate. Connect the water pipes of the water sprayer 14 and the water gun 15 to the appropriate water source, respectively. Then, turn on the electric sliding rail 3 through the controller 9 to make the electric sliding block 4 drive the guide 5 to move forward until the carrier frame 7 is in a position that is convenient for operation. Place the carbon-silicon plates to be cleaned in the carrier frame 7 in turn. For carbon-silicon plates that cannot be placed, they can be temporarily placed on the placement plates 17. After the placement is completed, control the electric sliding block 4 to drive the carrier frame 7 to move to the upper part of the front cleaning cavity 801. Then, start the electric push rod 6 through the controller 9 to make the carrier frame 7 slowly descend into the front cleaning cavity 801. Turn on the ultrasonic cleaner 10 through the controller 9 to remove dust, particulate matter, and other pollutants on the surface of the carbon-silicon plate by using the high-frequency vibration and cavitation effect generated by the ultrasonic cleaner 10. The filter screen 11 prevents dust, particulate matter, and other pollutants from affecting the normal operation of the ultrasonic cleaner 10. After the first cleaning is completed, turn off the ultrasonic cleaner 10 through the controller 9 and control the electric push rod 6 to make the carrier frame 7 move upwards and away from the front cleaning cavity 801. Then, control the electric sliding block 4 to drive the carrier frame 7 to move backwards to above the rear cleaning cavity 802. Control the electric push rod 6 to make the carrier frame 7 move downwards into the rear cleaning cavity 802. Turn on the water sprayer 14 through the controller 9 to flush the surface of the carbon-silicon plate with high-pressure water flow to further remove residual impurities. At the same time, turn on the motor 12 through the controller 9 to drive the water sprayer 14 to rotate through the bevel gear 13 transmission system to achieve omnidirectional cleaning. After the second cleaning is completed, turn off the water sprayer 14 and the motor 12 through the controller 9 and control the electric push rod 6 to make the carrier frame 7 move upwards and away from the rear cleaning cavity 802. If it is found that the carbon-silicon plate has not been cleaned completely, the water gun 15 can be used for local flushing. After the comprehensive cleaning is completed, control the electric sliding block 4 to drive the carrier frame 7 to move to a position that is convenient for taking and placing the cleaned carbon-silicon plate. If there are remaining carbon-silicon plates to be cleaned, first, lift the filter frame 16 upwards. During the lifting process, the filter frame 16 filters the impurities in the double-cavity cleaner 8. After the filter frame 16 is removed, clean the impurities in the filter frame 16. After the cleaning is completed, place the filter frame 16 back to its original position. Then, repeat the above steps. If it is confirmed that all the carbon-silicon plates have been cleaned, turn off the electric sliding rail 3 and the electric push rod 6 through the controller 9 to end the operation.

[0026] Although the embodiments of the present application have been shown and described, it is to be understood that for the purpose of the present application, the embodiments can be changed or modified without departing from the spirit and scope of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A surface impurity removal device for processing silicon carbide plates, characterized in that, The utility model provides a kind of ultrasonic cleaning machine, including bottom plate (1), support leg (2), electric slide rail (3), electric slide block (4), guide (5), electric push rod (6), bearing frame (7), double-cavity cleaner (8), controller (9), ultrasonic cleaner (10), filter screen (11), motor (12), bevel gear (13) and water sprayer (14), bottom plate (1) bottom is fixedly connected with front and back symmetry support leg (2), bottom plate (1) top is fixedly connected with left and right symmetry electric slide rail (3), each electric slide rail (3) is slidably connected with electric slide block (4), two electric slide block (4) top is fixedly connected with guide (5), guide (5) upper portion is fixedly connected with electric push rod (6), the output shaft of electric push rod (6) is fixedly connected with bearing frame (7), bottom plate (1) top is fixedly connected with double-cavity cleaner (8), double-cavity cleaner (8) is between two electric slide rail (3), double-cavity cleaner (8) inside front side is provided with front cleaning cavity (801), rear cleaning cavity (802) is set up, double-cavity cleaner (8) front left side wall is fixedly connected with controller (9), double-cavity cleaner (8) front side inside is fixedly connected with left and right symmetry ultrasonic cleaner (10), double-cavity cleaner (8) inside is fixedly connected with left and right symmetry filter screen (11), filter screen (11) is located in the side of ultrasonic cleaner (10) inward, double-cavity cleaner (8) rear left side wall is fixedly connected with motor (12), motor (12) rotating shaft is passed through bearing and is rotatably connected on double-cavity cleaner (8), motor (12) rotating shaft is fixedly connected with bevel gear (13), double-cavity cleaner (8) rear side inside rotatably connected with front and back symmetry water sprayer (14), the bevel gear (13) on the rotating shaft of motor (12) is connected with front water sprayer (14), right side water sprayer (14) is fixedly connected with front and back symmetry bevel gear (13), and the front bevel gear (13) of its is engaged with the bevel gear (13) on the front water sprayer (14), right side water sprayer (14) is fixedly connected with left and right symmetry bevel gear (13), and the right bevel gear (13) of its is engaged with the right side bevel gear (13) on the right side water sprayer (14), left side water sprayer (14) rear portion is fixedly connected with bevel gear (13), and the left bevel gear (13) on the rear side water sprayer (14) is engaged with the bevel gear (13) on the left side water sprayer (14), electric slide rail (3), electric slide block (4), electric push rod (6), ultrasonic cleaner (10), motor (12) and water sprayer (14) are electrically connected between controller (9).

2. The surface impurity removing apparatus for processing carbon-silicon plates according to claim 1, wherein Still including water gun (15), double-cavity cleaner (8) rear left side wall slidingly placed water gun (15).

3. The surface impurity removing apparatus for processing carbon-silicon plates according to claim 2, wherein Still including filter frame (16), double-cavity cleaner (8) inside slidingly placed front and back symmetry filter frame (16).

4. The surface impurity removing apparatus for processing carbon-silicon plates according to claim 3, wherein Still including placement plate (17), double-cavity cleaner (8) front side wall is fixedly connected with left and right symmetry placement plate (17).

5. The surface impurity removing apparatus for processing carbon-silicon plates according to claim 4, wherein Support leg (2) lower portion is provided with a plurality of threaded holes.

6. The surface impurity removing apparatus for processing carbon-silicon plates according to claim 5, wherein The length of the front water jet (14) is equal to the length of the rear water jet (14), the length of the left water jet (14) is equal to the length of the right water jet (14), and the length of the front water jet (14) is longer than the length of the right water jet (14).

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