Piezoelectric actuator

Abstract

The utility model relates to the technical field of precision motion, and discloses a piezoelectric actuator, which comprises a base, a clamping plate and guide ceramic. The base comprises a first flexible hinge mechanism and a door-shaped support. The clamping plate is arranged on the outer side of the door-shaped support in a sleeving mode and arranged above the first flexible hinge mechanism. The clamping plate is provided with a sliding groove and a protruding block which are opposite. The two ends of the guide ceramic are connected with the first flexible hinge mechanism and the second flexible hinge mechanism correspondingly. The guide ceramic is arranged between the sliding groove and the protruding block. The guide ceramic is in contact with the sliding grooves and the protruding blocks through friction surfaces. The clamping plate and the base are connected with each other in a manner that the clamping plate performs inertial motion relative to the base. The second flexible hinge mechanism can prevent the clamping plate from being separated from the base. The stick-slip driving principle is utilized, and the structural design of the clamping plate, the guide ceramic and the base is combined, so that high-precision and high-resolution precise positioning is realized. The device is simple, compact and stable in overall structure, and can be easily integrated with other precise instruments.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the precise movement technical field, and concretely relates to a piezoelectric actuator. BACKGROUND

[0002] Stick-slip drive is a typical driving mode based on friction theory. Friction is a basic dissipative force, which exists in all relative sliding machines and structures. The past research on stick-slip mechanism only stays in how to avoid the instability and loss caused by friction in precise servo systems. Stick-slip principle is applied to driving work due to the emergence of piezoelectric material and good response characteristics. The essence of stick-slip driving mechanism is to control the displacement of the driven object by using the difference between the maximum static friction and sliding friction.

[0003] The stick-slip driving mode of basic piezoelectric ceramic utilizes the acceleration generated by the rapid deformation of PZT piezoelectric ceramic, that is, inertial impact force, so that the kinetic friction cannot realize the acceleration of the moving object, thereby keeping at the original position. Then the PZT piezoelectric ceramic is controlled to return at a small speed, so as to realize the movement of the object by the static friction to realize micro-displacement, and therefore it is also called inertial stick-slip drive. The existing stick-slip drive has the problems of complex structure, large size, poor structural stability, and low precision of repeated positioning.

[0004] Based on the above, the problem to be solved at present is to provide a piezoelectric actuator which is simple and compact in structure, good in stability, and high in precision. INVENTION CONTENTS

[0005] The utility model aims at providing a piezoelectric actuator, which aims at solving the problems of complex structure, large size, poor structural stability, and low precision of repeated positioning of the existing stick-slip drive.

[0006] The utility model is realized in this way, a piezoelectric actuator, comprising:

[0007] The base comprises a first flexible hinge mechanism and a door-shaped support, the door-shaped support comprises two columns and a second flexible hinge mechanism corresponding to the first flexible hinge mechanism;

[0008] The clamping plate is sleeved on the outer side of the door-shaped support and above the first flexible hinge mechanism, and the clamping plate is provided with opposite sliding grooves and protrusions;

[0009] The guide ceramic is connected with the first flexible hinge mechanism and the second flexible hinge mechanism at both ends, respectively, and is arranged between the sliding grooves and the protrusions, and the guide ceramic and the sliding grooves and the protrusions contact with each other through friction surfaces;

[0010] The clamping plate and the base are connected with each other in a manner that the clamping plate moves relative to the base with inertia; and the second flexible hinge mechanism is used to prevent the clamping plate from moving away from the base.

[0011] Further, the bottom of the base is provided with a groove, the second flexible hinge mechanism is arranged in the groove, the door-shaped support is arranged above the groove, and a piezoelectric ceramic is further arranged in the groove and connected with the second flexible hinge mechanism and the bottom of the base at two ends respectively.

[0012] Further, two stoppers are arranged at left and right sides of the piezoelectric ceramic in the groove, and the stoppers are connected with the base and used to seal the piezoelectric ceramic.

[0013] Further, a moving plate is connected with the clamping plate, the moving plate is arranged on the base, and the moving plate is close to or away from the base under the pushing of the clamping plate.

[0014] Further, the clamping plate comprises a first clamping plate and a second clamping plate connected with the first clamping plate, the first clamping plate and the second clamping plate are oppositely arranged outside the door-shaped support, and the sliding groove and the protrusion are arranged at the middle portions of the first clamping plate and the second clamping plate respectively.

[0015] Further, the friction surface, at which the protrusion contacts with the guide ceramic, is a plane, and the sliding groove is a V-shaped groove.

[0016] Further, the sliding groove and the protrusion extend to below the first flexible hinge mechanism, and the cross section of the first flexible hinge mechanism covers part or all of the cross sections of the sliding groove and the protrusion, so as to prevent the clamping plate from moving away from the base.

[0017] Further, the first flexible hinge mechanism comprises a fixed end and flexible hinges symmetrically arranged at two sides of the fixed end.

[0018] Further, the second flexible hinge mechanism comprises a fixed end and flexible hinges symmetrically arranged at two sides of the fixed end.

[0019] The piezoelectric actuator has the following beneficial effects.

[0020] The structure of the door-shaped support limits the movement of the clamping plate between the first flexible hinge mechanism and the second flexible hinge mechanism. The second flexible hinge mechanism effectively prevents the clamping plate from moving away from one end of the guide ceramic, and ensures the stability of the operation. Meanwhile, the door-shaped support also protects the guide ceramic and effectively prevents the guide ceramic from being bent laterally.

[0021] The utility model discloses utilize stick -slip drive principle and combine the structure design of splint, guide ceramic and base, make the utility model realize high precision, high resolution's precision positioning. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 The utility model provides the three -dimensional structure schematic diagram of piezoelectric actuator;

[0023] Figure 2 The utility model provides the explosion map of piezoelectric actuator;

[0024] Figure 3 The utility model provides the front view of piezoelectric actuator;

[0025] Figure 4 The utility model provides Figure 3 The A-A direction cut -surface figure of piezoelectric actuator of the utility model;

[0026] Figure 5 The utility model provides Figure 3 The B-B direction cut -surface figure of piezoelectric actuator of the utility model;

[0027] Figure 6 The utility model provides the partial explosion map of piezoelectric actuator;

[0028] Figure 7 The utility model provides the front view of base;

[0029] Figure 8 The utility model provides the plan view of splint;

[0030] Figure: 1-base;11-first flexible hinge mechanism;12-door type support;121-stand;122-second flexible hinge mechanism;13-groove;2-splint;21-first splint;211-slotted guide;22-second splint;221-bump;3-guide ceramic;4-piezoelectric ceramic;5-stop block;6-moving plate;7-bolt. DETAILED DESCRIPTION

[0031] In order to make the utility model's purpose, technical scheme and advantage more clearly clear, following combining with the drawing and example, this utility model carries out further detailed explanation. It should be understood that the specific example described here is only used to explain the utility model, and is not used to limit the utility model.

[0032] The implementation of the utility model is described in detail below in conjunction with specific examples.

[0033] The same or similar reference numerals in the drawings of the embodiments correspond to the same or similar components; in the description of the utility model, it is understood that if the orientations or positional relationships indicated by the terms "upper", "lower", "left", "right" and the like are based on the orientations or positional relationships shown in the drawings, they are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore the terms describing the positional relationships in the drawings are only used for exemplary illustration, and cannot be understood as a limitation on the utility model, for those skilled in the art, the specific meanings of the above terms can be understood according to the specific circumstances.

[0034] Referring to Figures 1-8 The preferred embodiment provided by the utility model is shown in the drawings.

[0035] The piezoelectric actuator comprises a base 1, a clamping plate 2 and a guide ceramic 3, referring to Figures 1-2 The base 1 comprises a first flexible hinge mechanism 11 and a door-shaped support 12. The door-shaped support 12 comprises two columns 121 and the first flexible hinge mechanism 11. The two ends of the first flexible hinge mechanism 11 are connected with the two columns 121 respectively. The first flexible hinge mechanism 11 is correspondingly arranged with a second flexible hinge mechanism 122. Preferably, the first flexible hinge mechanism 11 comprises a fixed end and flexible hinges symmetrically arranged on both sides of the fixed end. The second flexible hinge mechanism 122 comprises a fixed end and flexible hinges symmetrically arranged on both sides of the fixed end. The fixed ends of the first flexible hinge mechanism 11 and the second flexible hinge mechanism 122 are used for connecting the guide ceramic 3.

[0036] The clamping plate 2 is sleeved on the outer sides of the two columns 121 of the door-shaped support 12 and is arranged above the first flexible hinge mechanism 11, referring to Figures 3-5 The side, away from the second flexible hinge mechanism 122, of the first flexible hinge mechanism 11 is mounted with a piezoelectric ceramic 4, the piezoelectric ceramic 4 pushes the first flexible hinge mechanism 11 to move towards or away from the second flexible hinge mechanism 122, thereby pushing the clamping plate 2 to move synchronously. The second flexible hinge mechanism 122 can block the clamping plate 2 from moving away from the base 1.

[0037] The middle part of the clamping plate 2 is oppositely provided with a sliding groove 211 and a protrusion 221, referring to Figure 8The sliding groove 211 and the protrusion 221 extend towards the middle of the door-shaped support 12 and below the first flexible hinge mechanism 11. Preferably, the cross section of the first flexible hinge mechanism 11 covers part or all of the cross section of the sliding groove 211 and the protrusion 221, so that the first flexible hinge mechanism 11 can effectively prevent the clamping plate 2 from being separated from the base 1 during movement. The structure of the door-shaped support 12 limits the movement of the clamping plate 2 between the first flexible hinge mechanism 11 and the second flexible hinge mechanism 122. The second flexible hinge mechanism 122 effectively prevents the clamping plate 2 from being separated from the guide ceramic 3 at one end, ensuring the stability of the operation. At the same time, the door-shaped support 12 also plays a protective role for the guide ceramic 3, effectively preventing the guide ceramic 3 from bending sideways.

[0038] Preferably, the clamping plate 2 includes a first clamping plate 21 and a second clamping plate 22 connected to the first clamping plate 21. The first clamping plate 21 and the second clamping plate 22 are oppositely arranged and can be connected by bolts 7. The first clamping plate 21 and the second clamping plate 22 are sleeved on the outside of the door-shaped support 12. The sliding groove 211 and the protrusion 221 are respectively arranged in the middle of the first clamping plate 21 and the second clamping plate 22.

[0039] The clamping plate 2 is connected with a moving plate 6. The clamping plate 2 and the moving plate 6 can be fixedly connected by bolts 7. The moving plate 6 is arranged on the base 1. The moving plate 6 moves towards or away from the base 1 under the push of the clamping plate 2, and the moving plate 6 realizes linear motion. The clamping plate 2 and the base 1 are connected with each other in a manner that the clamping plate 2 moves inertially relative to the base 1. The second flexible hinge mechanism 122 can block the clamping plate 2 from being separated from the base 1.

[0040] The two ends of the guide ceramic 3 are respectively connected with the first flexible hinge mechanism 11 and the second flexible hinge mechanism 122. The guide ceramic 3 is arranged between the sliding groove 211 and the protrusion 221. The guide ceramic 3 and the sliding groove 211 and the protrusion 221 are in contact with each other through friction surfaces. Preferably, the friction surface of the protrusion 221 in contact with the guide ceramic 3 is a plane, and the sliding groove 211 is a V-shaped groove.

[0041] The bottom of the base 1 is provided with a groove 13, referring to Figure 7 The second flexible hinge mechanism 122 is arranged in the groove 13. The door-shaped support 12 is arranged above the groove 13. The groove 13 is also provided with a piezoelectric ceramic 4, referring to Figure 6 The two ends of the piezoelectric ceramic 4 are respectively connected with the side of the first flexible hinge mechanism 11 away from the second flexible hinge mechanism 122 and the bottom of the base 1. Two stoppers 5 are arranged in the groove 13 and on the left and right sides of the piezoelectric ceramic 4. The stoppers 5 and the base 1 can be connected by bolts 7, which facilitates the installation of the piezoelectric ceramic 4 in the groove 13 and the sealing of the piezoelectric ceramic 4 in the groove 13 by the stoppers 5 after installation.

[0042] Without limiting the present application, any modification, equivalent replacement and improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A piezoelectric actuator, characterized by, The utility model relates to a base (1) including first flexible hinge mechanism (11) and door type support (12), door type support (12) including two stand (121) and with first flexible hinge mechanism (11) corresponding arrangement second flexible hinge mechanism (122), Clamp plate (2) is set to the outside of door type support (12) and is located first flexible hinge mechanism (11) above, clamp plate (2) is equipped with opposite sliding slot (211) and lug (221), Guide ceramic (3) both ends are connected with first flexible hinge mechanism (11), second flexible hinge mechanism (122) respectively, guide ceramic (3) is located between sliding slot (211) and lug (221), guide ceramic (3) with sliding slot (211), lug (221) are contacted through friction surface each other, Clamp plate (2) with base (1) with the way that clamp plate (2) relative to base (1) carries out inertial motion each other is connected, and second flexible hinge mechanism (122) is used for blocking clamp plate (2) when moving and is separated from base (1). The bottom of the base (1) is provided with a groove (13), the second flexible hinge mechanism (122) is arranged in the groove (13), the door type support (12) is arranged above the groove (13), and the groove (13) is further provided with a piezoelectric ceramic (4), the two ends of the piezoelectric ceramic (4) are connected with the second flexible hinge mechanism (122) and the bottom of the base (1) respectively.

2. The piezoelectric actuator of claim 1, wherein, Two stop blocks (5) are arranged on the left and right sides of the piezoelectric ceramic (4) in the groove (13), the stop blocks (5) are connected with the base (1), and are used for sealing the piezoelectric ceramic (4).

3. A piezoelectric actuator according to claim 2, wherein The moving plate (6) is connected to the clamp plate (2), the moving plate (6) is arranged on the base (1), and the moving plate (6) is pushed by the clamp plate (2) to move close to or away from the base (1).

4. The piezoelectric actuator of claim 1, wherein, The clamp plate (2) includes a first clamp plate (21) and a second clamp plate (22) connected with the first clamp plate (21), the first clamp plate (21) and the second clamp plate (22) are arranged on the outside of the door type support (12) in a sleeved manner, and the sliding slot (211) and the lug (221) are arranged at the middle portions of the first clamp plate (21) and the second clamp plate (22) respectively.

5. The piezoelectric actuator of claim 1, wherein, The friction surface, where the lug (221) contacts the guide ceramic (3), is a plane, and the sliding slot (211) is a V-shaped groove.

6. The piezoelectric actuator of claim 1, wherein, The sliding slot (211) and the lug (221) extend below the first flexible hinge mechanism (11), and the cross section of the first flexible hinge mechanism (11) covers part or all of the cross sections of the sliding slot (211) and the lug (221), so as to block the clamp plate (2) from being separated from the base (1).

7. The piezoelectric actuator of claim 1, wherein, The first flexible hinge mechanism (11) includes a fixed end and flexible hinges symmetrically arranged on both sides of the fixed end.

8. The piezoelectric actuator of claim 1, wherein, The second flexible hinge mechanism (122) includes a fixed end and flexible hinges symmetrically arranged on both sides of the fixed end.

9. The piezoelectric actuator of claim 1, wherein, ​

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