Special gas supply cabinet

Abstract

The utility model provides a special gas supply cabinet. The special gas supply cabinet comprises a cabinet body; the at least one positioning device is located in the cabinet body, and the positioning device comprises at least one fixing mechanism which is installed in the cabinet body in the vertical direction; the at least one binding belt is connected with the fixing mechanism, and a binding area is formed between the binding belt and a fixing shell of the fixing mechanism; a positioning groove is formed in a base of the cabinet body, the positioning groove and the binding area are located in the same vertical direction, the size of the positioning groove is larger than the outer diameter of a gas cylinder, the positioning mechanism is located in the positioning groove, and the gas cylinder is located in the binding area and the positioning groove. According to the special gas supply cabinet provided by the utility model, gas cylinders with different sizes can be fixed.

Description

Technical Field

[0001] This utility model relates to the semiconductor field, and in particular to a special gas supply cabinet. Background Technology

[0002] Special gas cabinets (SGCs) are widely used in semiconductor manufacturing, research institutions, and laboratories for storing and managing specialty gases. Based on their functional design, SGCs can be categorized into single-cylinder, dual-cylinder, and triple-cylinder types. Single-cylinder designs are primarily used in research institutions or laboratories, while dual-cylinder and triple-cylinder designs are commonly used in mass production plants to ensure that when one cylinder is depleted, a backup cylinder can automatically switch gas supply in situations where downtime is not permitted during the manufacturing process.

[0003] Currently, the main method for securing gas cylinders in special gas holders is by using chains to prevent them from tipping over. However, because the chain length is not adjustable, it is difficult to accommodate cylinders of different diameters. This results in poor securing performance when using cylinders with larger or smaller diameters, potentially causing the cylinders to wobble or tilt. Furthermore, the chain securing structure cannot provide uniform support, especially during the process of emptying the cylinder; changes in the center of gravity can lead to instability in the securing effect, increasing the risk of tipping. Therefore, improvements are needed. Utility Model Content

[0004] The purpose of this invention is to provide a special gas supply cabinet that can hold gas cylinders of different sizes.

[0005] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution:

[0006] This utility model provides a special gas supply cabinet, comprising:

[0007] Cabinet;

[0008] At least one positioning device is located inside the cabinet, the positioning device comprising:

[0009] At least one fixing mechanism is installed vertically inside the cabinet;

[0010] At least one restraint strap is connected to the fixing mechanism, and a restraint area is formed between the restraint strap and the fixing housing of the fixing mechanism; and

[0011] The positioning mechanism has a positioning groove formed on the base of the cabinet. The positioning groove and the restraint area are in the same vertical direction. The size of the positioning groove is larger than the outer diameter of the gas cylinder. The positioning mechanism is located in the positioning groove, and the gas cylinder is located in the restraint area and the positioning groove.

[0012] In one embodiment of this utility model, the fixing mechanism includes:

[0013] A fixed housing is installed inside the cabinet.

[0014] The winding roller is rotatably disposed within the fixed housing.

[0015] A drive structure, located on the fixed housing, has its output end connected to the winding roller; and

[0016] A limiting structure is located on the fixed housing and connected to the winding roller;

[0017] One end of the binding strap is detachably connected to one side of the fixed housing, and the other end of the binding strap passes through the other side of the fixed housing and is connected to the winding roller.

[0018] In one embodiment of the present invention, the fixing mechanism further includes at least two winding baffles, the winding baffles being fixed to the winding roller, a storage area being formed between the two winding baffles, and the other end of the binding strap being connected to the winding roller located in the storage area.

[0019] In one embodiment of this utility model, the driving structure includes:

[0020] The drive frame is fixed inside the fixed housing;

[0021] The drive shaft is rotatably mounted on the drive frame;

[0022] A rotating handle is provided, with one end of the drive shaft passing through one side of the fixed housing and connected to the rotating handle.

[0023] The driving bevel gear is fixed to the drive shaft; and

[0024] The driven bevel gear is fixed on the winding roller and meshes with the driving bevel gear.

[0025] In one embodiment of this utility model, the limiting structure includes:

[0026] A ratchet, fixed to the winding roller; and

[0027] The pawl has one end rotatably mounted inside the fixed housing, and the other end engages with the ratchet.

[0028] In one embodiment of this utility model, an opening is provided on the fixed housing, and one end of the pawl is connected to a lever, which passes through the opening.

[0029] In one embodiment of this utility model, the spacing between two adjacent fixing mechanisms is the same.

[0030] In one embodiment of this utility model, the positioning mechanism includes at least two positioning elements, the positioning elements including:

[0031] The positioning block is slidably installed in the limiting groove of the base of the cabinet;

[0032] At least one elastic element is connected between the positioning block and the limiting groove.

[0033] In one embodiment of this utility model, a plurality of the positioning elements are arranged at equal angles along a ring inside the base.

[0034] In one embodiment of this utility model, the side of the positioning block is arc-shaped in the direction toward the fixing mechanism.

[0035] As described above, this utility model provides a special gas supply cabinet. The positioning blocks can slide within the positioning grooves, and through the compression and recovery of the elastic elements, they can adapt to gas cylinders of different diameters, ensuring that the bottom of the gas cylinder can be stably positioned without being limited by the cylinder specifications. Multiple positioning blocks of the positioning mechanism are arranged at equal angles along a ring, providing uniform fixing force in multiple directions of the gas cylinder, ensuring the stability and firmness of the gas cylinder in the horizontal direction. The drive structure, through the linkage of the rotating handle and the winding roller, further tightens the restraint straps in the vertical direction of the gas cylinder, forming a double fixation in both the horizontal and vertical directions, ensuring the stability of the gas cylinder in multiple directions.

[0036] Of course, any product implementing this utility model does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0037] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0038] Figure 1 This is a schematic diagram of a special gas supply cabinet in one embodiment of the present invention;

[0039] Figure 2 This is a schematic diagram of the driving structure and fixing mechanism in one embodiment of the present invention;

[0040] Figure 3 This is a schematic diagram of the driving structure in one embodiment of the present invention;

[0041] Figure 4 This is a schematic diagram of the limiting structure in one embodiment of the present invention;

[0042] Figure 5This is a schematic diagram of the positioning mechanism in one embodiment of the present invention.

[0043] In the diagram: 10. Cabinet;

[0044] 20. Fixing mechanism; 21. Fixing housing; 22. Winding roller; 23. Winding baffle;

[0045] 30. Drive structure; 31. Rotary handle; 32. Drive shaft; 33. Driving bevel gear; 34. Driven bevel gear; 35. Drive frame;

[0046] 40. Restraint belt;

[0047] 50. Limiting structure; 51. Ratchet; 52. Pad; 53. Opening;

[0048] 60. Positioning mechanism; 61. Positioning groove; 62. Positioning block; 63. Elastic element; 64. Limiting groove. Detailed Implementation

[0049] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0050] Please see Figure 1 This utility model discloses a special gas supply cabinet, which can be used to place gas cylinders for storing special gases. The special gas supply cabinet may include a cabinet body 10 and positioning devices. The cabinet body 10 may be equipped with a cabinet door (not shown in the figure), and multiple positioning devices may be fixedly installed inside the cabinet body 10. Each positioning device can position the gas cylinder to prevent it from shaking or tilting. The spacing between two adjacent positioning devices can be the same.

[0051] Please see Figure 1 The positioning device may include a fixing mechanism 20, a driving structure 30, a restraint strap 40, a limiting structure 50, and a positioning mechanism 60. The number of fixing mechanisms 20 may be at least one, and each fixing mechanism 20 may correspond to one driving structure 30, one restraint strap 40, and one limiting structure 50.

[0052] Please see Figure 1In some embodiments, multiple fixing mechanisms 20 can be installed vertically within the cabinet 10. The spacing between adjacent fixing mechanisms 20 can be the same. A restraining strap 40 is connected to the fixing mechanism 20, forming a restraining area between the restraining strap 40 and the fixing housing 21 of the fixing mechanism 20. This restraining area can be used to secure the gas cylinder. Specifically, the restraining strap 40 is a strip-shaped structure used to secure the gas cylinder, and can be made of corrosion-resistant, high-strength materials, such as nylon or stainless steel. The main function of the restraining strap 40 is to provide horizontal restraining force to prevent the gas cylinder from swaying or tilting within the cabinet 10. The restraining area is the area formed between the restraining strap 40 and the fixing housing 21 of the fixing mechanism 20. The specific position of the restraining area can be adjusted according to the center of gravity of the gas cylinder. The restraining area is used to secure the gas cylinder. When the gas cylinder is placed inside the special gas cabinet and located within the fixing housing 21, the restraining strap 40 will wrap around the gas cylinder and secure it within the restraining area, ensuring that the gas cylinder will not tip over or sway during use.

[0053] Please see Figure 1 , Figure 2 and Figure 3 In some embodiments, the fixing mechanism 20 may include a fixing housing 21, a winding roller 22, a winding baffle 23, a drive structure 30, a limiting structure 50, and the winding baffle 23. The fixing housing 21 is installed inside the cabinet 10 and is used to install and fix other components. The winding roller 22 may be a rotatable roller used to receive and release the restraint strap 40. The winding roller 22 is rotatably disposed inside the fixing housing 21. By rotating, the winding roller 22 can receive or release the restraint strap 40 to fix gas cylinders of different diameters. One end of the restraint strap 40 is detachably connected to one side of the fixing housing 21 (e.g., by means of a buckle, bolt, or other fastener), and the other end passes through the other side of the fixing housing 21 and is connected to the winding roller 22. By rotating the winding roller 22, the restraint strap 40 can be tightened or loosened to accommodate gas cylinders of different diameters and ensure the stability of the gas cylinders during use. The winding baffle 23 is a plate-like structure fixed to the winding roller 22, used to form a storage area to prevent the binding tape 40 from getting tangled during storage. There are at least two winding baffles 23. The two winding baffles 23 are fixed to the winding roller 22 and located on both sides of the winding roller 22. A storage area is formed between the two winding baffles 23. The other end of the binding tape 40 is connected to the winding roller 22 located in the storage area. As the winding roller 22 rotates, the binding tape 40 can be orderly stored in the storage area, preventing it from getting tangled and knotted.

[0054] Please see Figure 2In some embodiments, the drive structure 30 may include a rotary handle 31, a drive shaft 32, a driving bevel gear 33, a driven bevel gear 34, and a drive frame 35. The drive frame 35 is the main support frame of the drive structure 30 and can be fixed within the fixed housing 21. The drive shaft 32 is a rotatable shaft used to transmit rotational force. The drive shaft 32 is rotatably mounted on the drive frame 35. The rotary handle 31 is a component directly used by the operator to manually apply rotational force. One end of the drive shaft 32 can pass through one side of the fixed housing 21 and connect to the rotary handle 31. The rotary handle 31 can be located outside the fixed housing 21 for easy operator use. By rotating the rotary handle 31, the operator can transmit rotational force to the drive shaft 32. The driving bevel gear 33 is a bevel gear fixed to the drive shaft 32. The driven bevel gear 34 is a bevel gear that meshes with the driving bevel gear 33 and is fixed to the winding roller 22.

[0055] In some embodiments, specifically, the gas cylinder can be placed inside the cabinet 10, positioning it within the restraint area. For example, one end of the restraint strap 40 can be loosened, wrapped around the gas cylinder, and secured to the other side of the fixed housing 21. By rotating the rotary handle 31, the drive shaft 32 rotates accordingly. The driving bevel gear 33 drives the driven bevel gear 34 to rotate, thereby driving the winding roller 22 to rotate. As the winding roller 22 rotates, the restraint strap 40 is gradually tightened and stored in the storage area between the two winding baffles 23. The limiting structure 50 ensures that the winding roller 22 can only rotate in the forward direction, preventing the restraint strap 40 from loosening during the fixing process. When it is necessary to replace the gas cylinder, the limiting structure 50 can be released first, and then the rotary handle 31 can be rotated in the reverse direction, driving the drive shaft 32 to rotate in the reverse direction. The driven bevel gear 34 drives the winding roller 22 to rotate in the reverse direction, releasing the restraint strap 40. At this time, the restraint strap 40 can be removed from the fixed housing 21, facilitating subsequent gas cylinder replacement.

[0056] Please see Figure 2 and Figure 4In some embodiments, the limiting structure 50 can prevent the winding roller 22 from rotating in the reverse direction after tightening the restraint strap 40, thereby ensuring the secure fixation of the gas cylinder. The limiting structure 50 may include a ratchet 51 and a pawl 52. The ratchet 51 may be a wheel with serrated edges for engaging with the pawl 52 to achieve unidirectional rotation. The ratchet 51 may be fixed to the winding roller 22. The serrated edges of the ratchet 51 engage with the pawl 52, allowing the winding roller 22 to rotate in the forward direction (in the direction of tightening the restraint strap 40), but preventing it from rotating in the reverse direction (in the direction of loosening the restraint strap 40). The pawl 52 is a component with a hook-like structure for engaging with the serrations of the ratchet 51 to achieve unidirectional rotation. One end of the pawl 52 is rotatably disposed within the fixed housing 21, for example, by means of a pin or other type of rotating shaft fixed to the inner wall of the fixed housing 21. The hook-shaped part of the pawl 52 engages with the saw teeth of the ratchet 51. When the pawl 52 rotates forward around the winding roller 22, it can smoothly slide over the saw teeth. When the pawl 52 rotates in the reverse direction around the winding roller 22, the hook-shaped part of the pawl 52 will lock the saw teeth and prevent the pawl 52 from rotating in the reverse direction around the winding roller 22.

[0057] Please see Figure 1 In some embodiments, to facilitate the operator's action of disengaging the pawl 52 from the ratchet 51, a hole or slot, i.e., an opening 53, can be provided in the fixed housing 21 for the actuating lever to pass through. The position of the opening 53 may correspond to that of the pawl 52, allowing the actuating lever to pass through. The actuating lever can be an externally operable rod-like component for manual control of the pawl 52. The operator can manually lift or lower the pawl 52 using the actuating lever to disengage or re-engage it with the teeth of the ratchet 51, thereby controlling the rotation direction of the winding roller 22.

[0058] Please see Figure 1 and Figure 5 In some embodiments, the positioning mechanism 60 ensures the stable positioning of the gas cylinder within the cabinet 10, preventing movement or tilting of the gas cylinder during fixing or use. A positioning groove 61 can be provided on the base of the cabinet 10. The positioning groove 61 can be used to accommodate and position the gas cylinder, and it can be aligned vertically with the restraint area. The size of the positioning groove 61 is larger than the outer diameter of the gas cylinder, ensuring that the gas cylinder can be smoothly placed into the positioning groove 61, while leaving sufficient space for adjustment by the positioning mechanism.

[0059] Please see Figure 1 and Figure 5 In some embodiments, the positioning mechanism 60 may include at least two positioning elements, which are arranged at equal angles along the circumferential direction within the base to ensure that the gas cylinder is subjected to uniform fixing force in multiple directions. The positioning elements may include positioning blocks 62 and elastic elements 63.

[0060] Please see Figure 1 and Figure 5 In some embodiments, multiple limiting grooves 64 can be formed on the base of the cabinet 10, with each positioning block 62 corresponding to one limiting groove 64. The positioning block 62 can be slidably installed in the limiting groove 64 of the base of the cabinet 10, and can slide horizontally within the limiting groove 64 to directly contact and fix the gas cylinder. The side of the positioning block 62 is arc-shaped in the direction towards the fixing mechanism 20, so that the gas cylinder can compress the elastic element 63 during placement. When the elastic element 63 is in a compressed state, the positioning block 62 applies a radial fixing force to the gas cylinder, fixing the gas cylinder within the limiting groove 64. The elastic element 63 is an elastic component connecting the positioning block 62 and the limiting groove 64, used to provide the fixing force. One end of the elastic element 63 is fixed to the positioning block 62, and the other end is fixed to the inner wall of the limiting groove 64. The elastic element 63 can be a spring, rubber block, sheet metal, etc., and the specific type is not limited. When the gas cylinder is placed in the limiting groove 64, the gas cylinder will squeeze the positioning block 62, causing the positioning block 62 to slide inward and compress the elastic element 63. The restoring force of the elastic element 63 will push the positioning block 62 toward the gas cylinder, thereby fixing the gas cylinder in the limiting groove 64.

[0061] In some embodiments, the special gas supply cabinet of this application can be applied to a special gas supply system. In this case, the special gas supply cabinet can be located in a storage area, and can be transported, for example, by a gas cylinder handling robot, which can be equipped with at least one robotic arm for operation.

[0062] As can be seen, in the above scheme, the positioning block can slide within the positioning groove. Through the compression and recovery of the elastic element, it adapts to gas cylinders of different diameters, ensuring that the bottom of the gas cylinder can be stably positioned, regardless of the cylinder's specifications. Multiple positioning blocks of the positioning mechanism are arranged at equal angles along a ring, providing uniform fixing force in multiple directions of the gas cylinder, ensuring its stability and firmness in the horizontal direction. The drive structure, through the linkage of the rotating handle and the winding roller, further tightens the restraint strap in the vertical direction, forming a double fixation in both the horizontal and vertical directions, ensuring the gas cylinder's stability in multiple directions.

[0063] The embodiments of this utility model disclosed above are merely illustrative of the present utility model. The embodiments do not exhaustively describe all details, nor do they limit the utility model to the specific implementations described. Obviously, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of this utility model, thereby enabling those skilled in the art to better understand and utilize it. This utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A special gas supply cabinet, characterized in that, include: Cabinet; At least one positioning device is located inside the cabinet, the positioning device comprising: At least one fixing mechanism is installed vertically inside the cabinet; At least one restraint strap is connected to the fixing mechanism, and a restraint area is formed between the restraint strap and the fixing housing of the fixing mechanism; and The positioning mechanism has a positioning groove formed on the base of the cabinet. The positioning groove and the restraint area are in the same vertical direction. The size of the positioning groove is larger than the outer diameter of the gas cylinder. The positioning mechanism is located in the positioning groove, and the gas cylinder is located in the restraint area and the positioning groove.

2. The special gas supply cabinet according to claim 1, characterized in that, The fixing mechanism includes: A fixed housing is installed inside the cabinet. The winding roller is rotatably disposed within the fixed housing. A drive structure, located on the fixed housing, has its output end connected to the winding roller; and A limiting structure is located on the fixed housing and connected to the winding roller; One end of the binding strap is detachably connected to one side of the fixed housing, and the other end of the binding strap passes through the other side of the fixed housing and is connected to the winding roller.

3. The special gas supply cabinet according to claim 2, characterized in that, The fixing mechanism further includes at least two winding baffles, which are fixed to the winding roller. A storage area is formed between the two winding baffles, and the other end of the binding strap is connected to the winding roller located in the storage area.

4. The special gas supply cabinet according to claim 2, characterized in that, The driving structure includes: The drive frame is fixed inside the fixed housing; The drive shaft is rotatably mounted on the drive frame; A rotating handle is provided, with one end of the drive shaft passing through one side of the fixed housing and connected to the rotating handle. The driving bevel gear is fixed to the drive shaft; and The driven bevel gear is fixed on the winding roller and meshes with the driving bevel gear.

5. The special gas supply cabinet according to claim 2, characterized in that, The limiting structure includes: A ratchet, fixed to the winding roller; and The pawl has one end rotatably mounted inside the fixed housing, and the other end engages with the ratchet.

6. The special gas supply cabinet according to claim 5, characterized in that, An opening is provided on the fixed housing, and a lever is connected to one end of the pawl, which passes through the opening.

7. The special gas supply cabinet according to claim 1, characterized in that, The spacing between two adjacent fixing mechanisms is the same.

8. The special gas supply cabinet according to claim 1, characterized in that, The positioning mechanism includes at least two positioning elements, the positioning elements comprising: The positioning block is slidably installed in the limiting groove of the base of the cabinet; At least one elastic element is connected between the positioning block and the limiting groove.

9. The special gas supply cabinet according to claim 8, characterized in that, Multiple positioning elements are arranged at equal angles along a ring inside the base.

10. The special gas supply cabinet according to claim 8, characterized in that, The side of the positioning block is arc-shaped in the direction toward the fixing mechanism.

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