Transmission device and magnetic measurement equipment

Abstract

The utility model relates to the technical field of magnetic measurement, and discloses a transmission device which comprises a detection area, a taking and conveying part and a transferring part. The taking and conveying part comprises a first displacement device and a taking and conveying shaft connected with the first displacement device, and the first displacement device can drive the taking and conveying shaft to stretch into the detection area. The transferring part comprises a mechanical arm used for grabbing the samples, the mechanical arm can transfer the grabbed samples to the taking and conveying shaft, and the taking and conveying shaft can fix the samples transferred by the mechanical arm. After the mechanical arm grabs a sample, the sample is transferred to the taking and conveying shaft, the sample is fixed through the taking and conveying shaft to achieve rotation, finally the taking and conveying shaft is controlled to stretch into a detection area, and the sample fixed to the taking and conveying shaft is conveyed into the detection area in time. The transmission device combining the mechanical arm and the taking and conveying shaft is provided, so that samples can be fed in time to enter a detection area and rotate. The utility model also discloses magnetic measurement equipment.

Description

Technical Field

[0001] This application relates to the field of magnetic measurement technology, and for example to a transmission device and a magnetic measurement equipment. Background Technology

[0002] Currently, magnetic measurement technology plays an important role in physics, materials science, and engineering. Among them, magneto-optical Kerr effect (MOKE) measurement technology, as an effective magnetic characterization method, is widely used to study the magnetic properties of materials. However, existing MOKE equipment has relatively low temporal resolution, making it difficult to capture the dynamic magnetization process of samples on ultrafast timescales, thus limiting the study of transient phenomena in magnetic materials.

[0003] This research presents a pulsed MOKE device employing pulsed excitation, which uses short-duration pulsed magnetic fields or currents to excite the magnetization state of a sample. By using short-duration pulsed excitation, the device can capture the dynamic magnetization process of the sample on an ultrafast timescale, thereby achieving higher temporal resolution and providing strong support for the study of transient phenomena in magnetic materials.

[0004] In the process of implementing the embodiments of this disclosure, at least the following problems were found in the related art:

[0005] Related technologies employ pulse excitation to achieve higher temporal resolution in magnetic measurement equipment. However, in practical applications, to improve measurement efficiency, it is necessary to rotate the sample within the detection area to increase the detection range of the magnetic measurement equipment. Therefore, a matching transmission device needs to be designed to ensure that the sample can be loaded in a timely manner and rotated within the detection area.

[0006] The information disclosed in the background section is only intended to enhance the understanding of the background of this utility model, and therefore may contain information that does not constitute prior art known to those skilled in the art. Utility Model Content

[0007] To provide a basic understanding of some aspects of the disclosed embodiments, a brief summary is given below. This summary is not intended as a general commentary, nor is it intended to identify key / important components or describe the scope of protection of these embodiments, but rather as a prelude to the detailed description that follows.

[0008] This disclosure provides a transmission device and a magnetic measuring device to ensure that the sample can be loaded in a timely manner and rotated in the detection area, thereby increasing the detection range of the magnetic measuring device for the sample.

[0009] In some embodiments, the transmission device includes: a detection area; a pick-and-place unit including a first displacement device and a pick-and-place shaft connected to the first displacement device; wherein the first displacement device can drive the pick-and-place shaft to extend into the detection area; and a transfer unit including a robotic arm for gripping a sample; wherein the robotic arm can transfer the gripped sample to the pick-and-place shaft, and the pick-and-place shaft can fix the sample transferred by the robotic arm.

[0010] Optionally, the transfer unit further includes: a sample box, including a third window and a second displacement device, wherein the third window is disposed at the bottom of the sample box and the second displacement device is disposed below the sample box; wherein the second displacement device is used to lift the sample at a selected position through the third window.

[0011] Optionally, the second displacement device includes: a second base, a second movable element mounted on the second base, and a telescopic assembly connected to the second movable element; wherein the second movable element can drive the telescopic assembly to any position corresponding to the third window, and the telescopic assembly can extend from the third window into the sample box to lift the sample.

[0012] Optionally, the telescopic assembly includes: a telescopic mechanism connected to the second sliding assembly; a sample holder disposed at the top of the telescopic mechanism; and a fourth drive motor connected to the telescopic mechanism for driving the telescopic mechanism to extend and retract, so that the sample holder extends from the third window into the sample box to lift the sample.

[0013] Optionally, the sample box may also include at least two receiving slots, each of which is shaped to fit the shape of the sample.

[0014] Optionally, the transmission device further includes: a detection chamber, including a second window located on the side into which the pick-and-place shaft extends, and communicating with the detection chamber; wherein the detection area is located within the detection chamber, and the area of ​​the second window is larger than the cross-sectional area of ​​the sample.

[0015] Optionally, the robotic arm includes an adsorption head disposed at the end of an end link for adsorbing samples.

[0016] Optionally, the pick-and-place shaft includes: a support section connected to the first displacement device; a rotating section rotatably connected to the support section; and a sample fixing section connected to the rotating section for fixing the sample.

[0017] Optionally, the transmission device further includes a drive unit connected to the pick-and-place shaft for driving the pick-and-place shaft to rotate.

[0018] In some embodiments, the magnetic measuring device includes the aforementioned transmission device.

[0019] The transmission device and magnetic measuring equipment provided in this disclosure can achieve the following technical effects:

[0020] The transmission device includes a detection area, a pick-and-place section, and a transfer section. The pick-and-place section includes a first displacement device and a pick-and-place shaft connected to the first displacement device. The first displacement device can drive the pick-and-place shaft to extend into the detection area. The transfer section includes a robotic arm for gripping samples. The robotic arm can transfer the gripped sample to the pick-and-place shaft, which can fix the sample transferred by the robotic arm. After the robotic arm grips the sample, it transfers it to the pick-and-place shaft, and the sample is fixed by the pick-and-place shaft to achieve rotation. Finally, the pick-and-place shaft is controlled to extend into the detection area, promptly delivering the sample fixed on the pick-and-place shaft into the detection area. By providing a transmission device combining a robotic arm and a pick-and-place shaft, it is possible to ensure that samples are promptly loaded into the detection area and rotated.

[0021] The above general description and the description below are exemplary and illustrative only and are not intended to limit this application. Attached Figure Description

[0022] One or more embodiments are illustrated by way of example with reference to the accompanying drawings. These illustrations and drawings do not constitute a limitation on the embodiments. Elements having the same reference numerals in the drawings are shown as similar elements. The drawings are not to be scaled. And wherein:

[0023] Figure 1 This is a schematic diagram of a transfer unit structure provided in an embodiment of this disclosure;

[0024] Figure 2 This is a schematic diagram of a second displacement device structure provided in an embodiment of this disclosure;

[0025] Figure 3 This is a schematic diagram of a telescopic component structure provided in an embodiment of this disclosure;

[0026] Figure 4 This is a schematic diagram of a pickup and delivery unit structure provided in an embodiment of this disclosure;

[0027] Figure 5 This is a schematic diagram of a partial structure of a pickup and delivery unit provided in an embodiment of this disclosure.

[0028] Figure label:

[0029] 10: Excitation coil; 11: Detection chamber; 12: Sample; 14: First base; 15: Transmission surface; 16: Connecting part;

[0030] 32: Pick-up and delivery shaft; 321: Support section; 322: Rotating section; 323: Sample fixing section; 36: First movable element; 37: First fixing frame; 38: Second fixing frame; 39: Second drive motor;

[0031] 40: Robotic arm; 41: Sample box; 411: Receiving slot; 42: Second base; 43: Third drive motor; 44: Second movable element; 45: Fourth drive motor; 46: Telescopic mechanism; 47: Sample holder; 48: Adsorption head;

[0032] 50: Expansion wall; 52: Connecting flange. Detailed Implementation

[0033] To provide a more detailed understanding of the features and technical content of the embodiments of this disclosure, the implementation of the embodiments of this disclosure will be described in detail below with reference to the accompanying drawings. The accompanying drawings are for illustrative purposes only and are not intended to limit the embodiments of this disclosure. In the following technical description, for ease of explanation, several details are used to provide a full understanding of the disclosed embodiments. However, one or more embodiments may still be implemented without these details. In other cases, well-known structures and devices may be simplified in their depiction to simplify the drawings.

[0034] It should be noted that, unless otherwise specified, the embodiments and features described in the present disclosure can be combined with each other.

[0035] Combination Figures 1 to 5 As shown, this embodiment of the present disclosure provides a transmission device, including a detection area, a pick-up and delivery section, and a transfer section. The pick-up and delivery section includes a first displacement device and a pick-up and delivery shaft 32 connected to the first displacement device, wherein the first displacement device can drive the pick-up and delivery shaft 32 to extend into the detection area. The transfer section includes a robotic arm 40 for gripping a sample 12, wherein the robotic arm 40 can transfer the gripped sample 12 to the pick-up and delivery shaft 32 can fix the sample 12 transferred by the robotic arm 40.

[0036] In the embodiments of this disclosure, sample 12 can be of any type, such as a disk, wafer, silicon wafer, etc. The following will use a disk-shaped sample 12 as an example, such as a disk, to describe the various solutions of the embodiments of this disclosure.

[0037] In this embodiment of the disclosure, the detection area is located within the detection chamber 11 formed inside the excitation coil 10.

[0038] In this embodiment, the sample 12 can be transferred using any type of robotic arm 40, such as an adsorption robotic arm 40 or a clamping robotic arm 40, depending on the type of sample 12 or the testing requirements. For example, the robotic arm 40 includes a base and a main body, with the main body connected to the base, and includes joints and links connected in sequence; wherein each joint provides at least one degree of freedom to the adjacent link.

[0039] The transmission device provided in this embodiment includes a detection area, a pick-up and delivery section, and a transfer section. The pick-up and delivery section includes a first displacement device and a pick-up and delivery shaft 32 connected to the first displacement device. The first displacement device can drive the pick-up and delivery shaft 32 to extend into the detection area. The transfer section includes a robotic arm 40 for gripping a sample 12. The robotic arm 40 can transfer the gripped sample 12 to the pick-up and delivery shaft 32, which can fix the sample 12 transferred by the robotic arm 40. After gripping the sample 12, the robotic arm 40 transfers it to the pick-up and delivery shaft 32, and fixes the sample 12 to achieve rotation. Finally, the pick-up and delivery shaft 32 is controlled to extend into the detection area, promptly delivering the sample 12 fixed on the pick-up and delivery shaft 32 into the detection area. By providing a transmission device combining a robotic arm 40 and a pick-up and delivery shaft 32, it is possible to ensure that the sample 12 is promptly loaded into the detection area and rotates.

[0040] Optionally, the transfer unit also includes a sample box 41. The sample box 41 includes a third window and a second displacement device. The third window is located at the bottom of the sample box 41, and the second displacement device is located below the sample box 41. The second displacement device is used to lift the sample 12 at a selected position through the third window.

[0041] In this embodiment of the disclosure, the sample box 41 can be of any shape, such as a cuboid or a cube, wherein the top surface of the sample box 41 is uncovered and a third window is provided on the bottom surface.

[0042] Thus, the transfer unit is equipped with a sample box 41, which provides storage space for samples 12 and can accommodate multiple samples 12, thereby improving the batch processing capacity of the equipment. The sample box 41 is designed with a third window and a second displacement device. The third window is located at the bottom, which facilitates the second displacement device to lift the sample 12 from below. The second displacement device lifts the sample 12 at the selected position through the third window, making the selection and transfer of the sample 12 more accurate and efficient.

[0043] Optionally, the second displacement device includes a second base 42, a second movable element 44 mounted on the second base 42, and a telescopic assembly connected to the second movable element 44. The second movable element 44 can drive the telescopic assembly to any position corresponding to the third window, and the telescopic assembly can extend from the third window into the sample box 41 to lift the sample 12.

[0044] In this embodiment, the second displacement device is similar to the first displacement device, and can be any device capable of driving the displacement of the pick-and-place shaft 32, such as a contact displacement device or a non-contact displacement device. Contact displacement devices include mechanisms involving a slider and a groove, gear transmission mechanisms, and / or cam mechanisms. Non-contact displacement devices include magnetic drive mechanisms, pneumatic and hydraulic mechanisms, electromagnetic drive mechanisms, and / or thermal expansion drive mechanisms. The second displacement device includes a third drive motor 43, and a second movable element 44 is the moving part of the second displacement device. The third drive motor 43 drives the displacement of the second movable element 44. A telescopic assembly is disposed on the second movable element 44. The second movable element 44 includes a slider in a slider-groove mechanism, and / or a follower in a cam mechanism, and / or a magnetic follower in a magnetic drive mechanism.

[0045] In this way, the second movable element 44 can drive the telescopic assembly to move to any position corresponding to the third window, realizing flexible selection and lifting of the sample 12 at different positions within the sample box 41, thus meeting diverse measurement needs. The telescopic assembly extends into the sample box 41 from the third window to lift the sample 12, making the transfer process of the sample 12 smoother and more efficient, reducing the shaking and offset of the sample 12 during transfer, and protecting the sample 12 and the equipment.

[0046] Optionally, the telescopic assembly includes a telescopic mechanism 46, a sample holder 47, and a fourth drive motor 45. The telescopic mechanism 46 is connected to the second sliding assembly. The sample holder 47 is disposed at the top of the telescopic mechanism 46. The fourth drive motor 45 is connected to the telescopic mechanism 46 and is used to drive the telescopic mechanism 46 to extend and retract, so that the sample holder 47 extends from the third window into the sample box 41 to lift the sample 12.

[0047] In this way, the fourth drive motor 45 drives the telescopic mechanism 46 to extend and retract, so that the sample holder 47 extends from the third window into the sample box 41 to lift the sample 12. This effectively utilizes the space, allowing the sample box 41 to compactly store multiple samples 12, while ensuring that the sample 12 can be accurately lifted to the designated position, which is convenient for the robotic arm 40 to grasp and for subsequent measurement operations.

[0048] Optionally, the sample box 41 also includes at least two receiving slots 411. The shape of each receiving slot 411 is adapted to the shape of the sample 12.

[0049] In this embodiment of the disclosure, a positioning plate may be provided between each receiving slot 411 to separate the space of each receiving slot 411 and the sample 12 within the receiving slot 411. The bottom openings of the multiple receiving slots 411 together form a third window at the bottom of the sample box 41. The sample holder 47 can extend into each receiving slot 411 from the third window to push the sample 12 within each receiving slot 411 out along the receiving slot 411.

[0050] Thus, the sample box 41 is provided with at least two receiving slots 411, which can store multiple samples 12 at one time, adapting to the needs of batch measurement. The shape of each receiving slot 411 is adapted to the shape of the sample 12, ensuring that the sample 12 is stably placed during storage and transportation, avoiding displacement or damage of the sample 12 due to shape mismatch, and improving the accuracy and reliability of measurement.

[0051] Optionally, the transfer device further includes a detection chamber 11. The detection chamber 11 includes a second window located on the side where the pick-and-place shaft 32 extends and communicates with the detection chamber 11. The detection area is located within the detection chamber 11, and the area of ​​the second window is larger than the cross-sectional area of ​​the sample 12.

[0052] In this embodiment of the disclosure, the area of ​​the second window being greater than the cross-sectional area of ​​the sample 12 means that the projection of the cross-section of the sample 12 is located within the projection of the second window in the cross-sectional direction of the sample 12.

[0053] In this way, the transmission device is equipped with a detection chamber 11, providing a relatively independent and stable space for the detection area, effectively isolating external interference and ensuring the stability and accuracy of the measurement process. A second window is provided in the detection chamber 11, located on the side where the pick-and-place shaft 32 extends and communicating with the detection chamber 11. This allows the pick-and-place shaft 32 to move more smoothly and accurately into and out of the detection area, avoiding mutual interference and improving the operating efficiency and reliability of the equipment. Furthermore, the area of ​​the second window is larger than the cross-sectional area of ​​the sample 12, ensuring that the sample 12 will not collide with the window edge during transmission and measurement, protecting both the sample 12 and the equipment. It also provides sufficient space for the illumination of the detection light, which is beneficial for improving the measurement accuracy and applicability of the magnetic measurement equipment.

[0054] Optionally, the robotic arm 40 includes an adsorption head 48. The adsorption head 48 is disposed at the end of the end link for adsorbing the sample 12.

[0055] In this embodiment, the adsorption head 48 can be a vacuum suction cup or a magnetic adsorption head 48, used to adsorb the sample 12.

[0056] In this way, by using the adsorption head 48 to grasp the sample 12, it is possible to avoid contamination or damage to the surface of the sample 12, thus protecting the integrity of the sample 12 and the measurement accuracy.

[0057] Optionally, the pick-and-place shaft 32 includes a support section 321, a rotating section 322, and a sample fixing section 323. The support section 321 is connected to the first displacement device. The rotating section 322 is rotatably connected to the support section 321. The sample fixing section 323 is connected to the rotating section 322 and is used to fix the sample 12.

[0058] In this embodiment of the present disclosure, an expansion wall 50 may be provided on the sample fixing section 323. The sample fixing section 323 can fix the sample 12 through the inner wall of the fixing hole of the sample 12. Specifically, the sample 12 can be fixed by expanding and tightening the inner wall of the fixing hole, or by clamping the inner wall of the fixing hole through a clamping structure, etc.

[0059] In this embodiment, the support section 321 includes a support portion for connection to the first displacement device and a connecting portion 16 for connection to the rotating section 322 and / or the sample fixing section 323. The support portion and the connecting portion 16 are connected via a connecting flange 52. The connecting portion 16 is rotatably connected to the rotating section 322. The support section 321 is fixedly connected to the first displacement device, so that the first displacement device can drive the pick-and-place shaft 32 to move via the support section 321. The rotating section 322 is rotatably connected to the support section 321, and the rotating section 322 can rotate relative to the support section 321. One end of the sample fixing section 323 is fixedly connected to the rotating section 322, so that the sample fixing section 323 can drive the rotating section 322 to rotate, thereby allowing the sample 12 to rotate relative to the support section 321.

[0060] In this way, the support section 321 is connected to the first displacement device, providing stable mechanical support and precise displacement control for the movement of the entire pick-up and delivery shaft 32, ensuring that the pick-up and delivery shaft 32 can smoothly extend into and exit the detection area. The rotating section 322 is rotatably connected to the support section 321, and the sample fixing section 323 is connected to the rotating section 322, giving the sample 12 on the sample fixing section 323 the ability to rotate within the detection area, thereby adjusting the orientation of the sample 12 and increasing the detection range of the magnetic measuring device. The segmented structure optimizes the functional layout of the pick-up and delivery shaft 32, facilitates the independent manufacturing, assembly, and maintenance of each part, and improves the performance and service life of the entire transmission device.

[0061] Optionally, the first displacement device includes a first base 14 and a first movable component. The first movable component includes a first movable element 36 disposed on the first base 14, a second drive motor 39 for driving the displacement of the first movable element 36, and at least one fixing bracket disposed on the first movable element 36 for mounting the pick-and-place shaft 32.

[0062] In this embodiment, the first displacement device can be any device capable of driving the pick-and-place shaft 32 to displacement, such as a contact displacement device or a non-contact displacement device. Contact displacement devices include mechanisms involving a slider and a groove, gear transmission mechanisms, and / or cam mechanisms. Non-contact displacement devices include magnetic drive mechanisms, pneumatic and hydraulic mechanisms, electromagnetic drive mechanisms, and / or thermal expansion drive mechanisms. The first movable element 36 is the moving part of the first displacement device. A fixed frame is mounted on the first movable element 36. The first movable element 36 includes a slider in a slider-groove mechanism, and / or a follower in a cam mechanism, and / or a magnetic follower in a magnetic drive mechanism.

[0063] In this embodiment, the fixing frame can be any structure capable of fixing the pick-and-place shaft 32 to the first movable element 36. For example, an H-shaped support structure, or a concave support structure, etc. The fixing frame can be one or more, specifically one, two, or three. For example, a fixing frame can be provided at one end of the first movable element 36, and a fixing frame at the opposite end, or fixing frames can be provided at both ends, etc.

[0064] In this embodiment, the first movable element 36 can be a first slider. A first groove is provided on the first base 14, and the first slider is slidably connected to the first groove. The second drive motor 39 is used to drive the first slider to slide on the first groove.

[0065] Thus, the first displacement device includes a first base 14, providing a stable support foundation for the entire device and ensuring the smoothness of the pick-and-place shaft 32 during movement. The first movable component includes a first movable element 36 disposed on the first base 14 and a second drive motor 39 for driving its displacement. The second drive motor 39 drives the first movable component to move the pick-and-place shaft 32, enabling the sample 12 to be accurately delivered into the detection area. At least one fixing bracket is provided on the first movable element 36 to mount the pick-and-place shaft 32, ensuring that the pick-and-place shaft 32 remains stable during movement, avoiding shaking and deviation, and improving the reliability of the measurement.

[0066] Optionally, the fixing frame includes a first fixing frame 37 and a second fixing frame 38. The first fixing frame 37 is disposed at a first end of the first movable element 36. The second fixing frame 38 is disposed at a second end of the first movable element 36 opposite to the first end.

[0067] Thus, the fixing frame consists of a first fixing frame 37 and a second fixing frame 38, which are respectively set at the first end and the second end of the first movable element 36. The symmetrical distribution design can more evenly distribute the weight and force of the pick-and-place shaft 32, effectively improving the stability and balance of the pick-and-place shaft 32 during axial movement and rotation.

[0068] Optionally, the transmission device further includes a drive unit. The drive unit is connected to the transmission surface 15 at the end of the pick-and-place shaft 32 and is used to drive the pick-and-place shaft 32 to rotate.

[0069] In this way, by setting up a drive unit and connecting it to the pick-and-place shaft 32, the pick-and-place shaft 32 is rotated, allowing the sample 12 fixed on the pick-and-place shaft 32 to rotate within the detection area. This expands the irradiation range of the detection light on the sample 12 and improves the detection capability and measurement efficiency of the magnetic measuring device for different areas of the sample 12.

[0070] The foregoing description and accompanying drawings fully illustrate embodiments of the present disclosure to enable those skilled in the art to practice them. Other embodiments may include structural and other changes. The embodiments represent only possible variations. Individual components and functions are optional unless explicitly required, and the order of operation may vary. Parts and features of some embodiments may be included or substituted for parts and features of other embodiments. Embodiments of the present disclosure are not limited to the structures described above and shown in the accompanying drawings, and various modifications and changes may be made without departing from its scope. The scope of the present disclosure is limited only by the appended claims.

Claims

1. A transmission device, characterized in that, include: Detection area; The picking and feeding unit includes a first displacement device and a picking and feeding shaft connected to the first displacement device; wherein the first displacement device can drive the picking and feeding shaft to extend into the detection area. The transfer unit includes a robotic arm for gripping samples; wherein the robotic arm can transfer the gripped samples to a pick-and-place shaft, and the pick-and-place shaft can fix the samples transferred by the robotic arm.

2. The apparatus according to claim 1, characterized in that, The forwarding department also includes: The sample box includes a third window and a second displacement device. The third window is located at the bottom of the sample box, and the second displacement device is located below the sample box. The second displacement device is used to lift the sample at a selected position through the third window.

3. The apparatus according to claim 2, characterized in that, The second displacement device includes: A second base, a second movable element mounted on the second base, and a telescopic assembly connected to the second movable element; The second movable element can drive the telescopic assembly to any position corresponding to the third window, and the telescopic assembly can extend into the sample box from the third window to lift the sample.

4. The apparatus according to claim 2, characterized in that, The telescopic components include: The telescopic mechanism is connected to the second sliding component; The sample holder is located at the top of the telescopic mechanism; The fourth drive motor is connected to the telescopic mechanism and is used to drive the telescopic mechanism to extend and retract, so that the sample holder extends from the third window into the sample box to lift the sample.

5. The apparatus according to claim 2, characterized in that, The sample box also includes: There are at least two receiving slots, each with a shape adapted to the shape of the sample.

6. The apparatus according to any one of claims 1 to 5, characterized in that, Also includes: The detection chamber includes a second window located on the side where the pick-and-place shaft extends and is connected to the detection chamber; wherein the detection area is located within the detection chamber, and the area of ​​the second window is larger than the cross-sectional area of ​​the sample.

7. The apparatus according to any one of claims 1 to 5, characterized in that, The robotic arm includes: The adsorption head, located at the end of the end link, is used to adsorb samples.

8. The apparatus according to any one of claims 1 to 5, characterized in that, The pick-and-place axis includes: The support section is connected to the first displacement device; The rotating section is rotatably connected to the support section. The sample fixing section, connected to the rotating section, is used to fix the sample.

9. The apparatus according to any one of claims 1 to 5, characterized in that, Also includes: The drive unit, connected to the pick-and-place shaft, is used to drive the pick-and-place shaft to rotate.

10. A magnetic measuring device, characterized in that, Includes the transmission device as described in any one of claims 1 to 9.

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